Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
11/2005
11/15/2005US6964882 Fabricating complex micro-electromechanical systems using a flip bonding technique
11/15/2005US6964804 Micromachined structures made by combined wet and dry etching
11/15/2005US6964793 Photolithography process for creating high resolution patterns, using a template, applying a polymerizable composition, electrochemical polymerization, etching to form a pattern
11/10/2005WO2005106931A1 Pattern transfer method
11/10/2005WO2005105661A1 Techniques for providing a structure with through-holes that may be used in a sub-assembly for micro-components
11/10/2005WO2005061378A3 Equipment and process for creating a custom sloped etch in a substrate
11/10/2005US20050250239 Method of manufacturing thermal type flow sensing elements
11/10/2005US20050250237 Microstructured component and a method for producing a microstructured component
11/10/2005US20050250229 Method of magnetic field assisted self-assembly
11/10/2005US20050249966 Method of manufacture for microelectromechanical devices
11/10/2005US20050248421 Method for producing a coplanar waveguide system on a substrate, and a component for the transmission of electromagnetic waves fabricated in accordance with such a method
11/10/2005US20050247998 Three-dimensional structural body composed of silicon fine wire, its manufacturing method, and device using same
11/10/2005US20050247117 Probe with hollow waveguide and method for producing the same
11/09/2005EP1592993A1 Bi-stable micro-actuator and optical switch
11/09/2005EP1592642A2 Methods and structure for improving wafer bow control
11/09/2005EP1278821A4 Biological identification system with integrated sensor chip
11/09/2005EP1244495B1 Method of forming vertical, hollow needles within a semiconductor substrate
11/09/2005CN1694842A Thermoelastic actuator design.
11/09/2005CN1693183A Method for mfg. single sheet pneumatic gel mini valve
11/09/2005CN1226650C Microelectromechanical optical switch and method of manufacture thereof
11/08/2005US6962831 Method of making a thick microstructural oxide layer
11/08/2005US6962772 Performing photolithography on photoresist by using gray-tone mask to form patterned layer; high-selectivity etching by using inductively coupled plasma etching; demolding
11/03/2005WO2005102912A1 Method for preparing fine structure
11/03/2005US20050245069 Substrate flattening method
11/03/2005US20050245011 Micromachine and method of manufacturing the micromachine
11/03/2005US20050244622 Method for processing by laser, apparatus for processing by laser, and three-dimensional structure
11/03/2005US20050244308 Chemical reaction cartridge, method of producing chemical reaction cartridge, and mechanism for driving chemical reaction cartridge
11/03/2005US20050241135 Techniques for providing a structure with through-holes that may be used in a sub-assembly for micro components
11/03/2005DE102004017944A1 Micromechanical component for use in e.g. thermal acceleration sensor, has cavern formed in substrate, and membrane removed from component through cavern, where cavern is closed at rear side of substrate through foil
11/02/2005EP1591253A2 Micromachining methods and systems
11/02/2005EP1591223A2 A manufacturing method of a microchemical chip made of a resin and a microchemical chip made of a resin by the method
11/02/2005EP1590307A2 Methods for transferring supercritical fluids in microelectronic and other industrial processes
11/02/2005CN1692070A Method of forming sub-micron-size structures over a substrate
11/02/2005CN1691970A Microneedles and microneedle fabrication
11/02/2005CN1690120A Resin compositions with high vibration damping ability
11/02/2005CN1225401C Production method of millimetric wave voltage-controlled phase shifter for microelectronic machine
11/02/2005CN1225400C Surface-micromachined absolute pressure sensor and a method for manufacturing thereof
11/01/2005US6960536 Method for producing integrated microsystems
11/01/2005US6960305 Methods for forming and releasing microelectromechanical structures
10/2005
10/27/2005WO2005101497A2 Method and apparats for lubricating microelectromechanical devices in packages
10/27/2005WO2005100237A1 Isolated planar mesogyroscope
10/27/2005WO2005100236A1 Method of packaging mems device in vacuum state and mems device vacuum-packaged using the same
10/27/2005US20050239272 Process for producing a multilayer arrangement having a metal layer
10/27/2005US20050238282 Three-demensional structure element and method of manufacturing the element, optical switch, and micro device
10/27/2005US20050236935 Microswitch and method for manufacturing the same
10/27/2005US20050236739 Step and flash imprint lithography
10/27/2005US20050236682 Method of manufacturing MEMS device
10/27/2005US20050236681 Metrology structure and methods
10/27/2005US20050236358 Micromachining methods and systems
10/26/2005EP1283957B1 Micromachined fluidic device and method for making same
10/26/2005CN1689227A Micro-electromechanical varactor with enhanced tuning range
10/26/2005CN1688504A Method for selectively covering a micro machined surface
10/26/2005CN1686781A Method for making epoxy resin microstructure device
10/26/2005CA2503918A1 Micromachining methods and systems
10/25/2005US6958255 Micromachined ultrasonic transducers and method of fabrication
10/25/2005US6958124 SPM sensor and process for producing it
10/20/2005WO2005097669A1 Method for modifying existing micro- and nano-structures using a near-field scanning optical microscope
10/20/2005WO2005097668A1 System and method for direct-bonding of substrates
10/20/2005US20050233551 Method for depositing silicon by pulsed cathodic vacuum arc
10/20/2005US20050233503 Method for the production of structured layers on substrates
10/20/2005US20050233492 Method of fabricating silicon-based mems devices
10/20/2005US20050233078 Method and system for forming a film of material using plasmon assisted chemical reactions
10/20/2005US20050233064 Method of manufacturing microstructure and manufacturing system for the same
10/20/2005US20050231794 Micromechanical device and method of manufacture thereof
10/20/2005US20050231793 Deflection mirror, a deflection mirror manufacturing method, an optical writing apparatus, and an image formation apparatus
10/20/2005US20050231310 Electromagnetic actuator, manufacturing method and optical scanner using the electromagnetic actuator
10/20/2005US20050230876 Manufacturing method of a microchemical chip made of a resin and a microchemical chip made of a resin by the method
10/20/2005US20050230839 Fabrication of silicon micro-mechanical structures
10/20/2005US20050230708 Sensor with at least one micromechanical structure, and method for producing it
10/20/2005US20050230046 Apparatus for etching semiconductor samples and a source for providing a gas by sublimation thereto
10/20/2005US20050229839 High throughput screening of crystallization of materials
10/20/2005US20050229837 Method of altering the properties of a thin film and substrate implementing said method
10/19/2005EP1587119A2 Liquid metal switch and method of manufacture therefor
10/19/2005EP1585702A2 Method for producing insulation structures
10/19/2005CN1685507A Method for producing a component comprising a conductor structure that is suitable for use at high frequencies
10/19/2005CN1684902A Decal transfer microfabrication
10/19/2005CN1683234A Method of packaging MEMS device in vacuum state and MEMS device vacuum-packaged using the same
10/18/2005US6956283 Encapsulants for protecting MEMS devices during post-packaging release etch
10/18/2005US6956268 MEMS and method of manufacturing MEMS
10/18/2005US6955976 Method for dicing wafer stacks to provide access to interior structures
10/18/2005US6955975 Method for joining a silicon plate to a second plate
10/18/2005US6955950 Method for generating a protective cover for a device
10/13/2005WO2005095263A2 Methods of forming alpha and beta tantalum films with controlled and new microstructures
10/13/2005WO2005069057A9 Optical components and production therof
10/13/2005US20050227508 Microengineered electrical connectors
10/13/2005US20050227408 Method for forming housings for electronic components and electronic components that are hermetically encapsulated thereby
10/13/2005US20050227401 Method of packaging MEMS device in vacuum state and MEMS device vacuum-packaged using the same
10/13/2005US20050227400 Encapsulation wafer process
10/13/2005US20050226742 Microfabricated elastomeric valve and pump systems
10/13/2005US20050225921 Micro-switching device and method of manufacturing micro-switching device
10/13/2005US20050224456 Anisotropic dry etching of cu-containing layers
10/13/2005US20050224453 Method for selectively covering a micro machined surface
10/13/2005US20050224452 For microstructuring electronic components, which yields high resolutions ( <== 200 nm) at a good aspect ratio while being significantly less expensive than photolithographic methods, semiconductors
10/13/2005US20050224449 Corner compensation method for fabricating MEMS and structure thereof
10/13/2005US20050224155 System and method for direct-bonding of substrates
10/13/2005CA2567032A1 Methods of forming alpha and beta tantalum films with controlled and new microstructures
10/13/2005CA2504080A1 A manufacturing method of a microchemical chip made of a resin and a microchemical chip made of a resin by the method
10/12/2005CN1681733A Micromachine and method of manufacturing the micromachine
10/12/2005CN1680187A Method of manufacturing microstructure and manufacturing system for the same
10/11/2005US6953982 Flexible skin incorporating MEMS technology
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