| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 01/13/2005 | WO2004051744A3 Mems control chip integration |
| 01/13/2005 | US20050009374 Direct patterning of silicon by photoelectrochemical etching |
| 01/13/2005 | US20050009315 Method for manufacturing micro electro-mechanical systems using solder balls |
| 01/13/2005 | US20050006224 Mechanical or electromechanical systems, real time feedback control operating on a time scale commensurate with the formation of nanoscale solid state features |
| 01/13/2005 | US20050005676 Resonant sensor and sensing system |
| 01/13/2005 | DE10328250A1 Surface processing method e.g. for lenses and semiconductors, requires generating plasma beam at specified pressure and bringing beam into contact with workpiece |
| 01/13/2005 | CA2495788A1 Method of connecting module layers suitable for the production of microstructure components and a microstructure component |
| 01/12/2005 | EP1495501A2 Hermetic encapsulation of organic electro-optical elements |
| 01/12/2005 | EP1495493A2 Method for producing a copy protection for an electronic circuit |
| 01/12/2005 | EP1495491A2 Method for connecting substrates and composite element |
| 01/12/2005 | EP1495482A2 Complex microdevices and appparatus and methods for fabricating such devices |
| 01/12/2005 | EP1495154A1 Method for forming housings for electronic components and electronic components that are hermetically encapsulated thereby |
| 01/12/2005 | EP1495153A1 Method for coating metal surfaces and substrate having a coated metal surface |
| 01/12/2005 | EP1494965A2 Method for producing a product having a structured surface |
| 01/12/2005 | CN1564779A A microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in microelectromechanical system |
| 01/12/2005 | CN1564310A Appts. for silicon anisotropic corrosion |
| 01/12/2005 | CN1564280A Prepn. process for magnetic core solenoidal microinduction element of micro-electromechanical system |
| 01/12/2005 | CN1564276A Mini magnetic core solenoidal microinduction element and its prepn. method |
| 01/12/2005 | CN1184594C Integrated circuit device which is secured against attacks resulting from controlled destruction of additional layer |
| 01/12/2005 | CN1184352C Convex angle compensation method of crystal orientation on silicon by potassium hydroxide solution |
| 01/11/2005 | US6841848 Composite semiconductor wafer and a method for forming the composite semiconductor wafer |
| 01/11/2005 | US6841838 Microelectromechanical tunneling gyroscope and an assembly for making a microelectromechanical tunneling gyroscope therefrom |
| 01/11/2005 | US6841490 Semiconductor substrate, SOI substrate and manufacturing method therefor |
| 01/11/2005 | US6841453 Process for manufacturing integrated devices having connections on a separate wafer, and integrated device thus obtained |
| 01/11/2005 | US6841339 Silicon micro-mold and method for fabrication |
| 01/11/2005 | US6841079 Reaction product of silicon and fluorinated olefin |
| 01/11/2005 | US6839962 Method of producing micromechanical structures |
| 01/06/2005 | WO2005001859A2 Micromechanical apparatus and method of forming a micromechanical device layer |
| 01/06/2005 | WO2005001545A1 Thin film precursor stack for mems manufacturing |
| 01/06/2005 | US20050003667 Method for fabricating optical interference display cell |
| 01/06/2005 | US20050003566 Micromachine production method |
| 01/06/2005 | US20050001282 Etching process for micromachining crystalline materials and devices fabricated thereby |
| 01/06/2005 | US20050001276 Selective etching of silicon carbide films |
| 01/06/2005 | US20050000932 Multi-metal layer MEMS structure and process for making the same |
| 01/06/2005 | US20050000816 Multilater; dielectric and electroconductive layers |
| 01/06/2005 | US20050000512 Device and method for creating aerosols for drug delivery |
| 01/06/2005 | US20050000283 Thermosensitive flow rate detecting element and method for the manufacture thereof |
| 01/05/2005 | EP1493712A2 Method of fabricating silicon-based MEMS devices |
| 01/05/2005 | DE102004004539A1 Waferverbindung unter Verwendung von Reaktivfolien zum massiv parallelen Häusen mikro-elektromechanischer Systeme Wafer bonding using reactive foils for massively parallel housings micro-electro-mechanical systems |
| 01/05/2005 | CN1561539A Method for forming a cavity structure on SOI substrate and cavity structure formed on SOI substrate |
| 01/05/2005 | CN1559882A Fork type micromechanical gyro and its manufacturing method |
| 01/05/2005 | CN1182952C Micro structure and its manufacture method |
| 01/04/2005 | US6838304 MEMS element manufacturing method |
| 01/04/2005 | US6838297 Nanostructure, electron emitting device, carbon nanotube device, and method of producing the same |
| 01/04/2005 | US6838228 System to enable photolithography on severe structure topologies |
| 01/04/2005 | US6837110 Micro-machined ultrasonic transducer (MUT) substrate that limits the lateral propagation of acoustic energy |
| 12/30/2004 | US20040266093 Method for manufacturing optical bench, optical bench, optical module, silicon wafer substrate in which wiring and groove are formed, and wafer |
| 12/30/2004 | US20040266049 Micro device and process for producing it |
| 12/30/2004 | US20040265992 Multicompartment biochip for monitoring constituents of blood |
| 12/30/2004 | US20040265182 micro electro-mechanical system (MEMS) ; includes a polymer layer comprising a containment portion that in combination with the substrate encloses a fluidic channel, the containment portion includes a deep cross-linked polymer region |
| 12/30/2004 | US20040263944 Thin film precursor stack for MEMS manufacturing |
| 12/30/2004 | US20040263938 Optical scanner with curved mirror and method of manufacturing the same |
| 12/30/2004 | US20040262257 Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void |
| 12/30/2004 | DE10323559A1 Mikromechanische Vorrichtung, Drucksensor und Verfahren Micromechanical device, pressure sensor and method |
| 12/29/2004 | WO2004113990A1 Form variable mirror element, method for producing form variable mirror element, form variable mirror unit and optical pick-up |
| 12/29/2004 | WO2004086460A3 Method and systems for single- or multi-period edge definition lithography |
| 12/29/2004 | WO2004071153A8 Method of forming sub-micron-size structures over a substrate |
| 12/29/2004 | EP1491950A1 Micro device and process for producing it |
| 12/29/2004 | EP1490699A1 Microelectromechanical sensors having reduced signal bias errors and methods of manufacturing the same |
| 12/29/2004 | EP1490293A2 Micro-electromechanical systems |
| 12/28/2004 | US6835594 Metal wiring method for an undercut |
| 12/28/2004 | US6835588 Micro inertia sensor and method of manufacturing the same |
| 12/28/2004 | US6835587 Single crystal, tunneling and capacitive, three-axes sensor using eutectic bonding and a method of making same |
| 12/23/2004 | WO2004112119A1 Method and apparatus for etching silicon and etched silicon body |
| 12/23/2004 | WO2004050546A3 System for sensorless control in a permanent magnet machine |
| 12/23/2004 | WO2004026759A3 Method for producing insulation structures |
| 12/23/2004 | US20040259357 Surface treatment method, semiconductor device, method of fabricating semiconductor device, and treatment apparatus |
| 12/23/2004 | US20040259330 Semiconductor device and method for producing the same by dicing |
| 12/23/2004 | US20040258885 Etched dielectric film in microfluidic devices |
| 12/23/2004 | US20040257171 Air-gap type FBAR, duplexer using the FBAR, and fabricating methods thereof |
| 12/23/2004 | US20040256689 Apparatus and method of forming a device layer |
| 12/23/2004 | US20040256686 Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained |
| 12/23/2004 | US20040255675 Accelerometer with folded beams |
| 12/23/2004 | US20040255670 Packaged accelerometer |
| 12/23/2004 | DE10323350A1 Lithographisches Verfahren zur Herstellung von Mikrobauteilen Lithographic method for producing microcomponents |
| 12/23/2004 | DE10321590A1 Function layer microstructuring method, using photochemical etching of outer lacquer layer to reveal chrome protection layer which is etched before microstructuring of underlying function layer |
| 12/22/2004 | EP1488448A2 Field-assisted fusion bonding |
| 12/22/2004 | EP1487738A2 Silicon carbide microelectromechanical devices with electronic circuitry |
| 12/22/2004 | EP1343973A4 Apparatus and methods for conducting assays and high throughput screening |
| 12/22/2004 | EP1196788B1 Merged-mask micro-machining process |
| 12/22/2004 | CN1556771A A method and apparatus for fabricating encapsulated micro-channels in a substrate |
| 12/21/2004 | US6833570 Structure comprising an insulated part in a solid substrate and method for producing same |
| 12/21/2004 | US6833288 Dicing method for micro electro mechnical system chip |
| 12/21/2004 | US6833080 Optical switch with mobile components and method for making same |
| 12/21/2004 | US6832523 Micromechanical component and manufacturing method |
| 12/16/2004 | WO2004109781A1 Substrate for stressed systems and method for crystal growth on such a substrate |
| 12/16/2004 | WO2004108588A1 Optical microelectromechanical structure |
| 12/16/2004 | WO2004013039A3 Low temperature plasma si or sige for mems applications |
| 12/16/2004 | US20040253817 Structure manufacturing method |
| 12/16/2004 | US20040253794 MEMS and method of manufacturing MEMS |
| 12/16/2004 | US20040253765 Wafer bonding using reactive foils for massively parallel micro-electromechanical systems packaging |
| 12/16/2004 | US20040253760 Method to fabricate a highly perforated silicon diaphragm with controlable thickness and low stress |
| 12/16/2004 | US20040251793 Micromachine and method of fabricating the same |
| 12/16/2004 | US20040251539 Thermoelectric cooler array |
| 12/16/2004 | US20040251524 Wafer bonding using reactive foils for massively parallel micro-electromechanical systems packaging |
| 12/16/2004 | US20040251439 Micro-actuator, fabrication method thereof, and micro-actuating valve |
| 12/16/2004 | CA2529935A1 Optical microelectromechanical structure |
| 12/15/2004 | EP1486999A2 Seesaw MEMS switch for radio frequency and its manufacturing method |
| 12/15/2004 | EP1486682A2 Micro-actuator, fabrication method thereof and micro-actuating valve |
| 12/15/2004 | EP1486582A1 Low friction Micromechanical device |