| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 05/17/2005 | US6893966 Method of patterning the surface of an article using positive microcontact printing |
| 05/17/2005 | US6893574 Miniaturized device to protect the mechanical and electrical components of the Micro-Electromechanical System |
| 05/12/2005 | WO2005042401A1 Method and device for secure, insulated and electrically conductive assembling of treated semiconductor wafers |
| 05/12/2005 | US20050102721 Apparatus and method for making a low capacitance artificial nanopore |
| 05/12/2005 | US20050101047 Process of making an all-silicon microphone |
| 05/12/2005 | US20050099252 RF-MEMS switch and its fabrication method |
| 05/12/2005 | US20050098840 Micromechanical structural element having a diaphragm and method for producing such a structural element |
| 05/12/2005 | US20050098749 Method for protecting the diaphragm and extending the life of sic and/or si mems microvalves |
| 05/12/2005 | CA2543736A1 Method and device for secure, insulated and electrically conductive assembling of treated semiconductor wafers |
| 05/11/2005 | EP1529753A2 Fabrication of ultrathin form factor mems microphones and microspeakers |
| 05/11/2005 | EP1529013A2 Etch stop control for mems device formation |
| 05/11/2005 | CN1614760A Bonding method and apparatus |
| 05/11/2005 | CN1614458A Diffractive thin-film piezoelectric micromirror and method of producing the same |
| 05/11/2005 | CN1200793C Method for machining work by laser beam |
| 05/10/2005 | US6891650 Micromirror unit fabrication method and micromirror unit made by the same |
| 05/10/2005 | US6891151 Probe with hollow waveguide and method for producing the same |
| 05/06/2005 | WO2005040037A1 Large area fabrication method based on the local oxidation of silicon and/or different materials on micro- and nano-scale |
| 05/05/2005 | US20050095833 Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems |
| 05/05/2005 | US20050095814 Ultrathin form factor MEMS microphones and microspeakers |
| 05/05/2005 | US20050095742 Method of fabricating MEMS devices on a silicon wafer |
| 05/04/2005 | EP1528038A1 Diffractive thin-film piezoelectric micromirror and method of producing the same |
| 05/04/2005 | EP1528037A1 Micromachine and production method therefor |
| 05/04/2005 | EP1527214A2 Method for producing metal or ceramic microcomponents |
| 05/04/2005 | EP1527012A2 Method for producing at least one small opening in a layer on a substrate and components produced according to said method |
| 05/04/2005 | EP1527011A2 Layer system with a silicon layer and a passivation layer, method for production of a passivation layer on a silicon layer and use thereof |
| 05/03/2005 | US6887714 Microvolume immunoabsorbant assays with amplified electrochemical detection |
| 05/03/2005 | US6887396 Micromirror unit and method of making the same |
| 05/03/2005 | US6887395 Method of forming sub-micron-size structures over a substrate |
| 05/03/2005 | US6887391 Fabrication and controlled release of structures using etch-stop trenches |
| 05/03/2005 | US6887342 Field-assisted fusion bonding |
| 05/03/2005 | US6887337 Apparatus for etching semiconductor samples and a source for providing a gas by sublimation thereto |
| 04/28/2005 | WO2004025726A3 Method for selectively covering a micro machined surface |
| 04/28/2005 | US20050090034 Method and apparatus for fabrication of passivated microfluidic structures in semiconductor substrates |
| 04/28/2005 | US20050088491 Substrate and method of forming substrate for fluid ejection device |
| 04/28/2005 | US20050087843 Method for dicing semiconductor chips and corresponding semiconductor chip system |
| 04/28/2005 | US20050087756 Light transmissive cover, device provided with same and methods for manufacturing them |
| 04/27/2005 | EP1526109A2 Apparatus and method for making a low capacitance artificial nanopore |
| 04/27/2005 | CN1610644A Fabrication of a reflective spatial light modulator |
| 04/27/2005 | CN1198756C Microstructure and method for production thereof |
| 04/26/2005 | US6885786 Combined wet and dry etching process for micromachining of crystalline materials |
| 04/26/2005 | US6885083 Drop generator die processing |
| 04/26/2005 | US6884732 Method of fabricating a device having a desired non-planar surface or profile and device produced thereby |
| 04/26/2005 | US6884729 Global planarization method |
| 04/26/2005 | US6884650 Side-bonding method of flip-chip semiconductor device, MEMS device package and package method using the same |
| 04/26/2005 | US6884636 Method of fabrication of an infrared radiation detector and infrared detector device |
| 04/26/2005 | US6883215 Piezoelectric/electrostrictive device and method of manufacturing same |
| 04/26/2005 | CA2368129C Micromachined electrostatic actuator with air gap |
| 04/21/2005 | WO2005036596A2 Method and apparatus of etch process control in fabrications of microstructures |
| 04/21/2005 | WO2005035144A1 Method for reducing leaching in metal-coated mems |
| 04/21/2005 | US20050085000 Manufacturing methods of MEMS device |
| 04/21/2005 | US20050084998 Methods and systems for providing MEMS devices with a top cap and upper sense plate |
| 04/21/2005 | US20050081631 Tuning fork gyroscope |
| 04/21/2005 | US20050081363 Apparatus and method for nanoscale and microscale mechanical machining and processing |
| 04/20/2005 | EP1524545A2 MEMS device and method of forming MEMS device |
| 04/20/2005 | CN1607464A Method for fabricating high density nano structure using atomic photoetching technique |
| 04/19/2005 | US6882461 Micro electro mechanical system display cell and method for fabricating thereof |
| 04/19/2005 | US6881649 Method of making device chips collectively from common material substrate |
| 04/14/2005 | WO2004100214A3 Metal sacrificial layer |
| 04/14/2005 | WO2004086461A3 Methods for nanoscale structures from optical lithography and subsequent lateral growth |
| 04/14/2005 | US20050079684 Method of manufacturing an accelerometer |
| 04/14/2005 | US20050079664 Method of fabricating multi layer devices on buried oxide layer substrates |
| 04/14/2005 | US20050078348 Structure of a micro electro mechanical system and the manufacturing method thereof |
| 04/14/2005 | US20050077633 Anodic bonding structure, fabricating method thereof, and method of manufacturing optical scanner using the same |
| 04/14/2005 | US20050076719 Capacitive sensor |
| 04/13/2005 | EP1522521A1 Capacitive sensor |
| 04/13/2005 | EP1522095A2 Method for producing a component having submerged connecting areas |
| 04/13/2005 | CN1606797A Resistless lithography method for producing fine structures |
| 04/13/2005 | CN1605940A Dynamic cellular automaton method for simulation of photoresist three dimensional etching process |
| 04/13/2005 | CN1605871A Comb capacitance type Z axis accelerometer and preparation method thereof |
| 04/13/2005 | CN1605560A Capacitive sensor |
| 04/13/2005 | CN1197108C Electronic devices including micromechanical switches |
| 04/13/2005 | CN1196798C High density protein arrays for screening of protein activity |
| 04/12/2005 | US6879016 Microcomponent having intra-layer electrical isolation with mechanical robustness |
| 04/12/2005 | US6878638 Multi-level integrated circuit for wide-gap substrate bonding |
| 04/12/2005 | US6878634 Structure having recesses and projections, method of manufacturing structure, and functional device |
| 04/12/2005 | US6878567 Method and apparatus for fabrication of passivated microfluidic structures in semiconductor substrates |
| 04/12/2005 | US6878566 Method of reinforcing a mechanical microstructure |
| 04/07/2005 | WO2004015362A3 Method for producing a structure comprising a narrow cutting edge or tip and cantilever beam provided with a structure of this type |
| 04/07/2005 | WO2003102966A8 Method of forming atomic force microscope tips |
| 04/07/2005 | WO2003100859A9 Method for producing a component comprising a conductor structure that is suitable for use at high frequencies and corresponding component |
| 04/07/2005 | US20050074919 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 04/07/2005 | US20050072926 "Low power silicon thermal sensors and microfluidic devices based on the use of porous sealed air cavity technology or microchannel technology" |
| 04/07/2005 | DE10342155A1 Verfahren zur Herstellung von Ätzlöchern und/oder Ätzgräben sowie Membransensoreinheit A process for the production of etching holes and / or etching trenches as well as membrane sensor unit |
| 04/07/2005 | DE10338967A1 Mikrosystembauelement und Verfahren zum Kleben von Mikrobauteilen auf ein Substrat Microsystem device and method for bonding of micro components on a substrate |
| 04/07/2005 | DE10337830A1 Producing a multiple layer arrangement with a metal layer comprises applying a metal layer on one surface of a first wafer, applying an intermediate layer on the metal layer, and further processing |
| 04/07/2005 | DE102004043233A1 Verfahren zum Herstellen eines beweglichen Abschnitts einer Halbleitervorrichtung A method of manufacturing a movable portion of a semiconductor device |
| 04/07/2005 | CA2530607A1 Device for detecting biological and chemical particles |
| 04/06/2005 | CN1604302A Method for controlling super deep isolation trench opening shape and product |
| 04/06/2005 | CN1603225A Mems device and method of forming mems device |
| 04/06/2005 | CN1196174C Method for making ceramic base plate form flat surface by using porous material |
| 04/05/2005 | US6876048 Micromechanical component as well as a method for producing a micromechanical component |
| 04/05/2005 | US6875936 Micromachine switch and its production method |
| 04/05/2005 | US6875671 Method of fabricating vertical integrated circuits |
| 04/05/2005 | CA2369063C Diffractive optical element |
| 04/05/2005 | CA2294819C Thermal microvalves |
| 03/31/2005 | WO2005028359A1 Process for fabricating a micro-electro-mechanical system with movable components |
| 03/31/2005 | WO2005004210A3 Imprint lithography process and sensor |
| 03/31/2005 | US20050070802 Chemical sensor |
| 03/31/2005 | US20050070071 Method and device for controlled cleaving process |
| 03/31/2005 | US20050069687 Apparatus and method for making a tensile diaphragm with a compressive region |