| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 09/09/2005 | WO2005083765A1 Semiconductor device |
| 09/09/2005 | WO2005083764A1 Production method for semiconductor device and semiconductor device |
| 09/09/2005 | WO2005082774A2 Method for making a planar cantilever mems switch |
| 09/09/2005 | WO2005081702A2 Integrated getter area for wafer level encapsulated microelectromechanical systems |
| 09/09/2005 | WO2005017972A3 Method for microfabricating structures using silicon-on-insulator material |
| 09/09/2005 | CA2556492A1 Implant having mems flow module with movable, flow-controlling baffle |
| 09/08/2005 | US20050196885 Slotted substrates and methods of forming |
| 09/08/2005 | US20050195466 Micro mirror unit, optical disc drive using same, and method for producing micro mirror unit |
| 09/08/2005 | US20050195056 Bimorph switch, bimorph switch manufacturing method, electronic circuitry and electronic circuitry manufacturing method |
| 09/08/2005 | US20050194840 Microminiature moving device and method of making the same |
| 09/08/2005 | US20050194662 Semiconductor component and micromechanical structure |
| 09/08/2005 | US20050193827 Micromechanical component and corresponding method for its manufacture |
| 09/07/2005 | EP1571472A1 Optical switch and production method thereof |
| 09/07/2005 | EP1569865A2 Production of microelectromechanical systems (MEMS) using the high-temperature silicon fusion bonding of wafers |
| 09/07/2005 | CN1666138A A device having a light-absorbing mask and a method for fabricating same |
| 09/07/2005 | CN1664523A Method for making nano-scaled micro temperature sensor |
| 09/07/2005 | CN1663906A Preparation method of micro member for MEMS |
| 09/07/2005 | CN1218365C Absolute-dry-method deep-etching micro-mechanical processing method based on silicon-silicon linkage |
| 09/07/2005 | CN1218218C Manufacture of ture 3D microelectronic mechanical system based on composite imprinting photoetched material |
| 09/06/2005 | US6940139 Micromechanical device and method of manufacture thereof |
| 09/06/2005 | US6939809 Method for release of surface micromachined structures in an epitaxial reactor |
| 09/06/2005 | US6939574 Microelectromechanical system; sacrificial material is dissolved with a release solution that also acts as an electrolyte, forming a galvanic cell with the doped structural film and metal; nonionic detergent added |
| 09/06/2005 | US6939474 Method for forming microelectronic spring structures on a substrate |
| 09/06/2005 | US6938485 Capacitive acceleration sensor |
| 09/01/2005 | WO2005079304A2 Method and system to measure characteristics of a film disposed on a substrate |
| 09/01/2005 | US20050191791 Methods for dicing wafer stacks to provide access to interior structures |
| 09/01/2005 | US20050191790 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 09/01/2005 | US20050191789 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 09/01/2005 | US20050191419 Fabrication of nanostructures |
| 09/01/2005 | US20050190023 Micro-switching element fabrication method and micro-switching element |
| 09/01/2005 | DE102004015444A1 Micromechanical semiconductor component produced by forming a partially oxidised porous layer in a semiconductor substrate |
| 09/01/2005 | DE102004002908A1 Halbleiterbauelement sowie mikromechanische Struktur Semiconductor device and micro-mechanical structure |
| 09/01/2005 | CA2498374A1 Optical device and production method thereof |
| 08/31/2005 | EP1568657A2 Method of manufacturing nanostructure arrays |
| 08/31/2005 | EP1568655A1 Micromachine and method of producing the same |
| 08/31/2005 | EP1567580A2 Sacrificial compositions, methods of use thereof, and methods of decomposition thereof |
| 08/31/2005 | EP1567459A1 Borosilicate glass compositions and uses thereof |
| 08/31/2005 | EP1364396A4 Microprotrusion array and methods of making a microprotrusion |
| 08/31/2005 | CN1662386A Complex microstructure film |
| 08/31/2005 | CN1662383A Mold tool method of manufacturing a mold tool and storage medium formed by use of the mold tool |
| 08/31/2005 | CN1661769A Micro-switching element fabrication method and micro-switching element |
| 08/31/2005 | CN1660692A Method for preparing film made from compound Nano carbon fiber |
| 08/31/2005 | CN1660691A Fluid actuating apparatus and method for manufacturing a fluid actuating apparatus, and electrostatically-actuated fluid discharge apparatus and process for producing an electrostatically-actuated flu |
| 08/31/2005 | CN1660690A Thermal bend actuator with corrugate profile |
| 08/30/2005 | US6936902 Sensor with at least one micromechanical structure and method for production thereof |
| 08/30/2005 | US6936494 Processes for hermetically packaging wafer level microscopic structures |
| 08/30/2005 | US6936181 Methods for patterning using liquid embossing |
| 08/30/2005 | US6935608 Method for protecting the diaphragm and extending the life of SiC and/or Si MEMS microvalves |
| 08/30/2005 | CA2330207C Microneedle devices and methods of manufacture and use thereof |
| 08/25/2005 | WO2005078772A2 Method and apparatus for making a mems scanner |
| 08/25/2005 | WO2005078509A2 Mems scanning system with improved performance |
| 08/25/2005 | WO2005078508A2 Method and apparatus for scanning a beam of light |
| 08/25/2005 | WO2005078506A2 High performance mems scanner |
| 08/25/2005 | WO2005077817A1 Wafer packaging and singulation method |
| 08/25/2005 | US20050186758 Controlled cleaving process |
| 08/25/2005 | US20050186703 Method for packaging semiconductor chips and corresponding semiconductor chip system |
| 08/25/2005 | US20050186629 Nanopore device and methods of fabricating and using the same |
| 08/25/2005 | US20050186405 Microcontact printing method using imprinted nanostructure and nanostructure thereof |
| 08/25/2005 | US20050185240 Light deflector, method of manufacturing light deflector and torsion oscillating member |
| 08/25/2005 | US20050185169 Method and system to measure characteristics of a film disposed on a substrate |
| 08/25/2005 | US20050184836 Microelectromechanical device having a common ground plane layer and a set of contact teeth and method for making the same |
| 08/25/2005 | US20050183950 Fluid actuating apparatus and method for manufacturing a fluid actuating apparatus, and electrostatically-actuated fluid discharge apparatus and process for producing an electrostatically-actuated fluid discharge apparatus |
| 08/25/2005 | US20050183938 Head electrode region for a reliable metal-to-metal contact micro-relay MEMS switch |
| 08/25/2005 | US20050183609 Micromechanical latching switch |
| 08/25/2005 | DE10392981T5 Bimorpher Schalter, Herstellungsverfahren für einen bimorphen Schalter, elektronische Schaltung und Herstellungsverfahren für eine elektronische Schaltung Bimorph switch manufacturing method of a bimorph switches, electronic circuit, and manufacturing method for an electronic circuit |
| 08/25/2005 | DE10337830B4 Verfahren zum Herstellen einer Mehrschicht-Anordnung mit einer Metallschicht in einer Molekular-Elektronik-Anordnung A method of manufacturing a multi-layer arrangement with a metal layer in a molecular electronics arrangement |
| 08/25/2005 | DE10251658B4 Verfahren zum Verbinden von zur Herstellung von Mikrostrukturbauteilen geeigneten, mikrostrukturierten Bauteillagen sowie Mikrostrukturbauteil A method of joining for the production of microstructured components suitable micro-structured component layers, as well as micro-structural component |
| 08/25/2005 | DE102004033475A1 Corrosion protection for micromechanical sensor elements, e.g. for a pressure sensor, comprises a passivating agent that at least partially covers electrical components and a material layer applied to the top of the passivator |
| 08/24/2005 | CN1659720A Hermetic encapsulation of organic electro-optical elements |
| 08/24/2005 | CN1659691A Replication and transfer of microstructures and nanostructures |
| 08/24/2005 | CN1659684A Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 08/24/2005 | CN1657401A 差动压力传感器 Differential Pressure Sensor |
| 08/24/2005 | CN1216386C Mini-magnetic core solenoidal microinduction element and its prepn. method |
| 08/24/2005 | CN1215968C Micro-structure and method for protecting structures material in manufacturing period |
| 08/23/2005 | US6934063 MEMS mirror |
| 08/23/2005 | US6933237 Substrate etch method and device |
| 08/23/2005 | US6933164 Method of fabrication of a micro-channel based integrated sensor for chemical and biological materials |
| 08/23/2005 | US6933004 Control of stress in metal films by controlling the temperature during film deposition |
| 08/23/2005 | US6932933 Ultraviolet method of embedding structures in photocerams |
| 08/23/2005 | US6931935 Surface-micromachined absolute pressure sensor and a method for manufacturing thereof |
| 08/18/2005 | WO2003095712A3 Method of and apparatus for forming three-dimensional structures integral with semiconductor based circuitry |
| 08/18/2005 | WO2003095711A3 Electrochemically fabricated structures having dielectric or active bases |
| 08/18/2005 | WO2003095708A3 Methods of and apparatus for molding structures |
| 08/18/2005 | US20050181629 Fibrillar microstructure and processes for the production thereof |
| 08/18/2005 | US20050181532 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 08/18/2005 | US20050181392 Integrated chemical microreactor with large area channels and manufacturing process thereof |
| 08/18/2005 | US20050181170 Adhesive microstructure and method of forming same |
| 08/18/2005 | US20050180686 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 08/18/2005 | US20050179985 Optical deflector and method of producing same |
| 08/18/2005 | US20050179982 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 08/18/2005 | US20050179976 High performance MEMS scanner |
| 08/18/2005 | US20050179099 Integrated getter area for wafer level encapsulated microelectromechanical systems |
| 08/18/2005 | US20050178118 Thermal bend actuator with corrugate profile |
| 08/18/2005 | DE102004004150A1 Connecting semiconductor chips to a metal substrate, comprises directing an energy beam through the chip onto a boundary surface between the chip and the substrate to melt the substrate surface |
| 08/18/2005 | DE102004003340A1 Flat substrate comprises a surface with structured elements that form a macro-structure, and a micro-structure which forms a second structure element |
| 08/17/2005 | EP1562742A2 Microstructures and methods of fabrication thereof |
| 08/17/2005 | EP0950258B1 Method and device for treating a semiconductor surface |
| 08/17/2005 | CN1656643A Micro electro-mechanical system method |
| 08/17/2005 | CN1656612A Glass material for use at high frequencies |
| 08/17/2005 | CN1654956A High density protein arrays for screening of protein activity |