B81C 1 - Manufacture or treatment of devices or systems in or on a substrate

Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
11/2006
11/23/2006	US20060261423 Method of fabricating printheads having multiple nozzle assemblies
11/23/2006	DE20122618U1 Projection system with array of rectangular micro-mirror elements for providing images at angles depending on mirror tilt angle in light ray steering system
11/23/2006	DE102005051604A1 Verfahren zum Herstellen eines Ultraschallwandlers A method of manufacturing an ultrasonic transducer
11/23/2006	DE102005023059A1 Verfahren zum Herstellen eines mikromechanischen Strukturelementes und Halbleiteranordnung Method for producing a micromechanical structural element and semiconductor device
11/22/2006	EP1724006A2 Micro fluidic device
11/22/2006	CN1866007A Ultra trace detection sensor with integrated piezoresistance SiO2 cantilever, making method and application thereof
11/22/2006	CN1864976A Microneedle preparation method based on multiplayer processing technology
11/21/2006	US7139110 Micro-structure gap control technology and structure formed therefrom
11/21/2006	US7138693 Barrier layers for microelectromechanical systems
11/21/2006	US7138293 Wafer level packaging technique for microdevices
11/16/2006	WO2006120221A1 Microfluidic device with integrated micropump, in particular biochemical microreactor, and manufacturing method thereof
11/16/2006	US20060258039 Integrated getter area for wafer level encapsulated microelectromechanical systems
11/16/2006	US20060258037 Method for producing a component having a semiconductor substrate and component
11/16/2006	US20060257070 Optical interference display cell and method of making the same
11/16/2006	US20060256420 Film stack for manufacturing micro-electromechanical systems (MEMS) devices
11/16/2006	US20060255901 Production of microelectromechanical systems (mems) using the high-temperature silicon fusion bonding of wafers
11/16/2006	DE102005020176A1 Mikromechanischer Drucksensor sowie ein entsprechendes Herstellungsverfahren A micromechanical pressure sensor and a corresponding manufacturing method
11/15/2006	EP1722595A1 Electret condenser
11/15/2006	EP1722434A1 Fuel cell array formed in a single layer of monocrystalline silicon and fabrication process
11/15/2006	EP1721865A2 Piezoresistive sensing structure
11/15/2006	EP1721120A2 Method and system to measure characteristics of a film disposed on a substrate
11/15/2006	EP1720956A1 Etched dielectric film in microfluidic devices
11/15/2006	EP1720795A1 Slotted forming methods and fluid ejecting device
11/15/2006	EP1360713A4 Light emitting semiconductor package
11/15/2006	EP1254451A4 Magnetic pole fabrication process and device
11/15/2006	CN1863729A Method for patterning a substrate surface
11/15/2006	CN1862784A Semiconductor device including isolation trench and method for fabricating the same
11/15/2006	CN1284719C Methods for utilizing scanning probe microscope tips and its products or producing method thereof
11/14/2006	US7135070 Monolithic stacked/layered crystal-structure-processed mechanical, and combined mechanical and electrical, devices and methods and systems for making
11/14/2006	US7134179 Process of forming a capacitative audio transducer
11/09/2006	US20060249873 Methods for forming openings in a substrate and apparatuses with these openings and methods for creating assemblies with openings
11/09/2006	US20060249841 Small scale wires with microelectromechanical devices
11/09/2006	DE10249193B4 Verfahren zur Reparatur einer Phasenschiebemaske und mit Hilfe dieses Verfahrens reparierte Phasenschiebemaske A method of repairing a phase shifting mask and using this method repaired phase shift mask
11/09/2006	DE102005020282A1 Mikromechanischer Drucksensor für ein Touchpad sowie ein entsprechendes Herstellungsverfahren Micromechanical pressure sensor for a touch pad, as well as a corresponding production method
11/08/2006	EP1720201A1 Semiconductor device
11/08/2006	EP1719154A2 Method and apparatus for making a mens scanner
11/08/2006	EP1719012A2 Mems scanning system with improved performance
11/08/2006	EP1719011A2 Method and apparatus for scanning a beam of light
11/08/2006	EP1719010A2 High performance mems scanner
11/08/2006	EP1429992B1 Flexible structure with integrated sensor/actuator
11/08/2006	EP1264215B1 Device for transferring a pattern to an object
11/08/2006	CN1860590A Method of room temperature covalent bonding
11/08/2006	CN1857990A Method for making complicate three dimension microstructure or micro device at low cost
11/08/2006	CN1283547C Micro-machined ultrasonic transducer (MUT) that limits the lateral propagation of acoustic energy and method thereof
11/07/2006	US7132054 Method to fabricate hollow microneedle arrays
11/02/2006	WO2006115592A1 Anti-stiction technique for electromechanical systems and electromechanical device employing same
11/02/2006	US20060246729 Method for treating a structure to obtain an internal space and structure having an internal space
11/02/2006	US20060243380 Microsystem component and method for gluing microcomponents to a substrate
11/02/2006	EP1717196A1 Technique for manufacturing silicon structures
11/02/2006	EP1716451A2 Dynamically modifiable polymer coatings and devices
11/02/2006	EP1716072A2 Integrated getter area for wafer level encapsulated microelectromechanical systems
11/02/2006	EP1715961A2 Spin-on protective coatings for wet-etch processing of microelectronic substrates
11/02/2006	EP1551906A4 Polymers, methods of use thereof, and methods of decomposition thereof
11/02/2006	EP1165432B1 Thermal bend actuator and paddle structure for ink jet nozzle
11/01/2006	CN1856440A Process for fabricating a micro-electro-mechanical system with movable components
11/01/2006	CN1855379A Method of fabricating semiconductor device
11/01/2006	CN1282597C Cantilever with step-type structure and its manufacturing method
10/2006
10/31/2006	US7130099 Micromirror unit with torsion connector having nonconstant width
10/31/2006	US7129179 Method for topographical patterning of a device
10/31/2006	US7129176 Optical device having micro lens array and method for manufacturing the same
10/31/2006	US7128876 Apparatus for use in the detection and separation of preferential particles in sample
10/31/2006	US7128783 Thin-film crystal-structure-processed mechanical devices, and methods and systems for making
10/26/2006	WO2006112387A1 Micromachine structure system and method for manufacturing same
10/26/2006	US20060237405 Method for forming nanoscale features
10/26/2006	DE102005018731A1 Verfahren zur Herstellung freitragender Schichten aus Titan und Nickel Process for producing self-supporting layers of titanium and nickel
10/26/2006	DE102005015584A1 Mikromechanisches Bauteil sowie Verfahren zur Herstellung eines mikromechanischen Bauteils Micromechanical element and process for producing a micromechanical component
10/25/2006	EP1713533A2 Method and/or apparatus for puncturing a surface for extraction, in situ analysis, and/or substance delivery using microneedles
10/25/2006	EP1194693B1 Microfabricated elastomeric valve and pump systems
10/25/2006	CN1851950A Micromechanical thermalelectric-stack infrared detector compatible with co-complementive metal oxide semiconductor technology and preparing method
10/25/2006	CN1282398C Method for making photoelectric device and apparatus thereof, photoelectric apparatus, electronic instrument
10/24/2006	US7125451 Crystal-structure-processed mechanical devices and methods and systems for making
10/24/2006	US7124994 Silicon micro-mold
10/19/2006	DE102005017632A1 Method of controlling local etching or deposition in modification of surfaces with pulsed determination of a removal or deposition profile ion streams useful in the high accuracy forming of optical component surfaces involving
10/19/2006	DE10052419B4 Verfahren zur Herstellung mikromechanischer Bauelemente A process for preparing micromechanical components
10/18/2006	EP1712514A2 Method for forming anti-stiction bumps on a micro-electro mechanical structure
10/18/2006	EP1711961A2 Method and apparatus for maintaining parallelism of layers and/or achieving desired thicknesses of layers during the electrochemical fabrication of structures
10/18/2006	EP1711347A2 Microreplication of transitory-image relief pattern based optically variable devices
10/18/2006	CN1849747A Mems type resonator, process for fabricating the same and communication unit
10/18/2006	CN1849547A Thin film precursor stack for mems manufacturing
10/18/2006	CN1848472A Semiconductor device using MEMS technology
10/18/2006	CN1280178C Method for preparing chip of MEMS electrically controlled dynamic gain equalizer
10/17/2006	US7122790 Mass analysis by photon desorption comprising at least one layer for contacting an analyte, and a substrate on which said layer is deposited. Upon irradiation said analyte desorbs and ionizes for analysis by mass spectrometry.
10/17/2006	US7122395 Method of forming semiconductor devices through epitaxy
10/12/2006	WO2006107960A2 Method and apparatus for producing a mems device
10/12/2006	US20060228066 Optical microelectromechantical structure
10/12/2006	US20060226553 Selective isotropic etch for titanium-based materials
10/12/2006	DE102005016122A1 Flow meter manufacture involves forming conductive strip for connecting with exposed contacts of electronic component and sensor chip after coating electronic component and sensor chip with molding compound
10/12/2006	DE102005015730A1 Micro-mechanical sensor for use in e.g. pressure sensor, has closure layer locally bounded on diaphragm and closing openings that are designed in diaphragm, where diaphragm surrounding area is locally bounded
10/12/2006	DE102005002814B3 Halbleitersensorbauteil mit geschützten Zuleitungen und Verfahren zur Herstellung desselben Of the same semiconductor sensor component with leads protected and methods for preparing
10/12/2006	DE10160458B4 Maske mit programmierten Defekten und Verfahren zu deren Herstellung Mask programmed with defects and process for their preparation
10/11/2006	EP1710624A2 Methods of fabricating nano-scale and micro-scale mold for nano-imprint, and mold usage on nano-imprinting equipment
10/11/2006	EP1606223B1 Method for producing individual microlenses or a microlens array
10/11/2006	EP0734281B1 Miniaturized planar columns in novel support media for liquid phase analysis
10/11/2006	CN1278923C Once formed atomic force microscope probe and cantilever beam by mask and no-mask technology
10/11/2006	CN1278922C Fork type micromechanical gyro and its manufacturing method
10/11/2006	CN1278920C Torque mirror driver of micro electromechanical system, producing method and use
10/10/2006	US7118991 Encapsulation wafer process
10/10/2006	US7118935 Bump style MEMS switch
10/10/2006	US7118933 Method for manufacturing optical bench, optical bench, optical module, silicon wafer substrate in which wiring and groove are formed, and wafer
10/10/2006	US7118657 Pulsed ion beam control of solid state features

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