| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 03/31/2005 | US20050069246 Micro-optic device and method of manufacturing same |
| 03/31/2005 | US20050068608 Selective isotropic etch for titanium-based materials |
| 03/31/2005 | US20050067695 Micro-sensor |
| 03/31/2005 | US20050067292 Electrodeposition; integrated circuits |
| 03/31/2005 | US20050066882 Method for forming ultra-high strength elastic diamond like carbon structure |
| 03/30/2005 | EP1518822A2 Complex microdevices and apparatus and methods for fabricating such devices |
| 03/30/2005 | EP1518275A2 Method for producing a component comprising a conductor structure that is suitable for use at high frequencies and corresponding component |
| 03/30/2005 | EP1517798A1 Complex microstructure film |
| 03/30/2005 | CN1602439A Aperture edge in a digital micromirror housing |
| 03/30/2005 | CN1601708A Etching device for high precision silicon senser chip |
| 03/29/2005 | US6872902 MEMS device with integral packaging |
| 03/29/2005 | US6872439 Adhesive microstructure and method of forming same |
| 03/29/2005 | CA2272326C Miniature valve for filling the reservoir of an apparatus for the transdermal administration of medicine |
| 03/29/2005 | CA2113019C Integrated partial sawing process |
| 03/24/2005 | WO2005026042A1 Fibrillar microstructure and process for the production thereof |
| 03/24/2005 | WO2005026041A1 Method for the production of etched holes and/or etched trenches, and membrane sensor unit |
| 03/24/2005 | US20050064644 Process for producing microelectromechanical components and a housed microelectromechanical component |
| 03/23/2005 | EP1516167A1 Sensor and method for producing a sensor |
| 03/23/2005 | EP1515909A1 Component and method for producing the same |
| 03/23/2005 | EP1410433B1 Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 03/23/2005 | CN1599806A Support for microelectronic, microoptoelectronic or micromechanical devices |
| 03/23/2005 | CN1599659A Method of producing resin molded product |
| 03/23/2005 | CN1598060A Process for compensation of potassium hydroxide solution corrosion (100) silicon earth (110) crystal direction convex angle |
| 03/23/2005 | CN1193926C 静电激励器 Electrostatic actuator |
| 03/22/2005 | US6870654 Structure of a structure release and a method for manufacturing the same |
| 03/22/2005 | CA2304655C Thermal arched beam microelectromechanical structure |
| 03/17/2005 | WO2005024100A2 Fibrillar apparatus and methods for making it |
| 03/17/2005 | WO2005023703A2 Method for producing at least one cavity in a material |
| 03/17/2005 | WO2004109781B1 Substrate for stressed systems and method for crystal growth on such a substrate |
| 03/17/2005 | US20050059254 Methods and apparatus of etch process control in fabrications of microstructures |
| 03/17/2005 | US20050059218 Thin films and production methods thereof |
| 03/17/2005 | US20050058856 For use as the expansive element in a thermoelastic design, micro-electomechanical system |
| 03/17/2005 | US20050057792 Method of forming a micromechanical structure |
| 03/17/2005 | US20050056096 Acceleration sensor and manufacturing method thereof |
| 03/17/2005 | US20050056074 Microscale compression molding of metals with surface engineered LIGA inserts |
| 03/17/2005 | DE19715194B4 Verfahren zum Herstellen von Halbleitervorrichtungen unter Verwendung von Trockenätzen A method of manufacturing semiconductor devices using dry etching |
| 03/16/2005 | EP1514122A2 Method of manufacturing of a monolithic silicon acceleration sensor |
| 03/16/2005 | EP1513764A1 Fabrication of a reflective spatial light modulator |
| 03/16/2005 | EP1513763A2 Fluorochemical treatment for silicon articles |
| 03/16/2005 | EP1513762A2 Three-dimentional components prepared by thick film technology and method of producing thereof |
| 03/16/2005 | EP1513688A1 Mold tool method of manufacturing a mold tool and storage medium formed by use of the mold tool |
| 03/16/2005 | EP1198695B1 Method for producing a torsion spring |
| 03/16/2005 | EP1108203B1 Micromechanical component protected against environmental influences |
| 03/16/2005 | CN1595633A A method for integrating CMOS circuit and bulk silicon MEMS uniwafer |
| 03/16/2005 | CN1595617A Etching process for micromachining crystalline materials and devices fabricated thereby |
| 03/16/2005 | CN1594066A Preparation method of silicon-based micro mechanical photomodulator chip |
| 03/16/2005 | CN1594065A Partial photo-etching process used for silicon micro machining |
| 03/16/2005 | CN1193407C Anti-adsorption method for drying crystal wafer using centrifugal force and apparatus thereof |
| 03/15/2005 | US6867061 Method for producing surface micromechanical structures, and sensor |
| 03/15/2005 | US6866791 Method of forming patterned nickel and doped nickel films via microcontact printing and uses thereof |
| 03/15/2005 | US6866255 Sputtered spring films with low stress anisotropy |
| 03/10/2005 | WO2005021669A1 Microsystem component and method for gluing microcomponents to a substrate |
| 03/10/2005 | US20050054153 Method for manufacturing movable portion of semiconductor device |
| 03/10/2005 | US20050054135 Barrier layers for microelectromechanical systems |
| 03/10/2005 | US20050054134 Method for manufacturing a microsystem |
| 03/10/2005 | US20050052092 Micromechanical component and method for producing same |
| 03/10/2005 | US20050051930 Protection film comprising mixture of polyvinyl alcohol and water having a viscosity of >/= .2 Pa.s at 25 degrees c applied to the composite prior to drying in a high pressure chamber using a liquefied or supercritical fluid |
| 03/10/2005 | US20050050971 Overcoating wafer with silicon-germanium material; then buffer layer; then silicon-boron layer |
| 03/09/2005 | EP1511618A1 An improved adhesive microstructure and method of forming same |
| 03/08/2005 | US6864640 Plasma processing method and apparatus thereof |
| 03/08/2005 | US6863832 Method for producing a torsion spring |
| 03/08/2005 | US6862934 Tuning fork gyroscope |
| 03/03/2005 | WO2005019351A2 Methods for forming composite coatings on mems devices |
| 03/03/2005 | WO2005019094A1 Stacked structure and production method thereof |
| 03/03/2005 | WO2005001859A3 Micromechanical apparatus and method of forming a micromechanical device layer |
| 03/03/2005 | WO2004086460B1 Method and systems for single- or multi-period edge definition lithography |
| 03/03/2005 | WO2004020703A3 Method for producing metal or ceramic microcomponents |
| 03/03/2005 | US20050048757 Method for generating a protective cover for a device |
| 03/03/2005 | US20050048688 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 03/03/2005 | US20050046980 Micro mirror unit and method of making the same |
| 03/03/2005 | US20050046921 Spatial light modulator using an integrated circuit actuator and method of making and using same |
| 03/03/2005 | US20050046758 Method of transcribing biomolecular patterns, method of manufacturing chip boards, and method of manufacturing biochips |
| 03/03/2005 | DE102004031424A1 Mikrochemischer Chip und Verfahren zu dessen Herstellung Microchemical chip and process for its preparation |
| 03/03/2005 | DE10054964B4 Beschleunigungssensor mit einem Beschleunigungsdetektorchip in dem Durchgangsloch eines Signalverarbeitungschips auf einem Montageträger Acceleration sensor having an acceleration detector chip in the through hole of a signal processing chips on a mounting bracket |
| 03/02/2005 | EP1510864A2 Merged-mask micro-machining process |
| 03/02/2005 | EP1510848A1 Spatial light modulator using an integrated circuit actuator and method of making and using same |
| 03/02/2005 | EP1510806A1 Three-dimensional structural body composed of silicon fine wire, its manufacturing method, and device using same |
| 03/02/2005 | EP1510500A2 Die carrier for a MEMS with a fluid chamber |
| 03/02/2005 | EP1509946A1 Integrated driver process flow |
| 03/02/2005 | EP1509324A1 Device for the actively-controlled and localised deposition of at least one biological solution |
| 03/02/2005 | CN1587024A Once formed atomic force microscope probe and cantilever beam by mask and no-mask technology |
| 03/02/2005 | CN1587022A Torque mirror driver of micro electromechanical system, producing method and use |
| 03/02/2005 | CN1191642C Micro-driver and its manufacturing method |
| 03/02/2005 | CN1191609C Method for patterning device layer in producing process for apparatus |
| 03/02/2005 | CN1191175C Thermal transfer element. product composed of it and their producing method |
| 03/02/2005 | CN1191147C Method for forming a hollow cavity on metal plate |
| 03/01/2005 | US6861365 Method and system for forming a semiconductor device |
| 03/01/2005 | US6861363 Method of making multilevel MEMS structures |
| 03/01/2005 | US6861277 Method of forming MEMS device |
| 03/01/2005 | US6861205 Complex three-dimensional microstructures wherein an external stimulus is applied to a first layer of a photosensitive material, thereby creating voids in the first layer, and any material present in those voids is removed. A sacrificial |
| 03/01/2005 | US6860939 Semiconductor crystal-structure-processed mechanical devices, and methods and systems for making |
| 02/24/2005 | WO2005017972A2 Method for microfabricating structures using silicon-on-insulator material |
| 02/24/2005 | WO2005017623A2 $m(c)method for producing inclined flank patterns by photolithography |
| 02/24/2005 | WO2004093162A3 Silicon substrate comprising positive etching profiles with a defined slope angle, and production method |
| 02/24/2005 | US20050042792 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 02/24/2005 | US20050042791 Micromachined device having electrically isolated components and a method for making the same |
| 02/24/2005 | US20050042389 Micromechanical device fabrication |
| 02/24/2005 | US20050042117 Optical interference display panel and manufacturing method thereof |
| 02/24/2005 | DE10332725A1 Verfahren zur selbstjustierenden Verkleinerung von Strukturen Process for the reduction of self-aligned structures |
| 02/24/2005 | DE10022266B4 Verfahren zum Herstellen und Verschließen eines Hohlraums für Mikrobauelemente oder Mikrosysteme und entsprechendes Mikrobauelement A method of manufacturing and closing a cavity for micro devices or systems and corresponding micro microdevice |