| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 02/23/2005 | EP1508198A1 Method of producing a microsystem structure with lateral gaps and corresponding microsystem structure |
| 02/23/2005 | CN1586003A Methods and apparatus for cleaning and/or treating a substrate using CO2 |
| 02/23/2005 | CN1583543A Method for integral micromachining multilayer composite structure |
| 02/23/2005 | CN1583542A Microcooling observing and controlling system and machining method thereof |
| 02/23/2005 | CN1190322C Construtional body with through hole and its mfg. method and liquid discharge head |
| 02/22/2005 | US6859579 Optical switcher used for broadcast station |
| 02/22/2005 | US6858888 Stress control of semiconductor microstructures for thin film growth |
| 02/22/2005 | US6858541 Etch stop control for MEMS device formation |
| 02/22/2005 | US6858466 System and a method for fluid filling wafer level packages |
| 02/22/2005 | US6858457 Method of manufacturing acceleration sensor |
| 02/22/2005 | US6858455 Gated fabrication of nanostructure field emission cathode material within a device |
| 02/17/2005 | WO2005015596A2 Method for the localized growth of nanothreads or nanotubes |
| 02/17/2005 | WO2004033364A8 Methods for forming coatings on mems devices |
| 02/17/2005 | US20050037531 Method for manufacturing micro-structural unit |
| 02/17/2005 | US20050037135 Coating of a first silane onto a substrate surface followed by a second treatment with or without a second silane and elevated temperatures |
| 02/17/2005 | US20050036090 Method for manufacturing electrooptical device and apparatus for manufacturing the same, electrooptical device and electronic appliances |
| 02/17/2005 | US20050035419 Micro-structure gap control technology and structure formed therefrom |
| 02/17/2005 | DE10334243A1 Mikromechanisches Verfahren zum Herstellen eines flexiblen Schichtelements und Bauelement mit flexiblem Schichtelement mit verringerter Neigung zum Ankleben Micromechanical method for producing a flexible film element and device having a flexible sheet member having a reduced tendency to stick |
| 02/17/2005 | DE10329325A1 Structuring treatment of surface with edge, on which protection layer is deposited and then removed by etching together with edge |
| 02/16/2005 | EP1506578A2 Glass material for use at high frequencies |
| 02/10/2005 | WO2005012161A1 Method of producing three-dimensional structure and fine three-dimensional structure |
| 02/10/2005 | WO2005012160A2 Method for separating a useful layer and component obtained by said method |
| 02/10/2005 | WO2005012159A1 Method of manufacturing nanochannels and nanochannels thus fabricated |
| 02/10/2005 | WO2004099066A8 Wafer bonding compatible with bulk micro-machining |
| 02/10/2005 | WO2004041918A3 Microstructures and methods of fabrication thereof |
| 02/10/2005 | WO2004014785A3 Method for producing at least one small opening in a layer on a substrate and components produced according to said method |
| 02/10/2005 | US20050032379 Method for registering a deposited material with channel plate channels |
| 02/10/2005 | US20050032378 Method for nanomachining high aspect ratio structures |
| 02/10/2005 | US20050032296 Micromechanical strained semiconductor by wafer bonding |
| 02/10/2005 | US20050029223 Microneedle structure and production method therefor |
| 02/10/2005 | DE10333995A1 Etching semiconductor material used in the production of a micromechanical acceleration sensor comprises etching defined structures having an etching profile in which the process parameters can be changed during etching |
| 02/10/2005 | DE10333189A1 Integrated microsystem manufacturing method e.g. for resonator, acceleration sensor or rotation rate sensor, has substrate provided with first function layer and structured mechanical function layer in succession |
| 02/10/2005 | CA2526114A1 Method of fabricating nanochannels and nanochannels thus fabricated |
| 02/09/2005 | EP1228244A4 Methods and apparatuses for analyzing polynucleotide sequences |
| 02/09/2005 | CN1578911A 微型传感器 Miniature Sensor |
| 02/09/2005 | CN1578753A Method for manufacturing metal microstructure |
| 02/09/2005 | CN1576841A Transcribing method for biomolecule shape, method for producing chip substrate and method for producing biochip |
| 02/09/2005 | CN1576230A Structure formed utilizing micro-structure gap-controlling technology and forming method thereof |
| 02/09/2005 | CN1576229A Fluidic mems device |
| 02/08/2005 | US6853067 Microelectromechanical systems using thermocompression bonding |
| 02/03/2005 | WO2005010973A1 Method for the self-adjusted reduction in size of structures |
| 02/03/2005 | WO2004071943A3 Electronic device and its manufacturing method device |
| 02/03/2005 | US20050026313 Method and apparatus for manufacturing a device having a moveable structure |
| 02/03/2005 | US20050023929 Micro-actuator and method making the same |
| 02/03/2005 | DE102004009027A1 Wärmeempfindliches Flussratendetekorelement und Verfahren zu dessen Herstellung A heat-sensitive Flussratendetekorelement and process for its preparation |
| 02/02/2005 | EP1503197A2 Intake port of a sensor |
| 02/02/2005 | EP1502293A2 Method for the production of structured layers on substrates |
| 02/02/2005 | EP1502282A2 Micro electro-mechanical system method |
| 02/02/2005 | EP1501757A2 Method of altering the properties of a thin film and substrate implementing said method |
| 02/02/2005 | CN1575506A Method of fabricating micro-electromechanical switches on cmos compatible substrates |
| 02/02/2005 | CN1575101A Method for manufacturing optical bench, optical bench, optical module, silicon wafer substrate and wafer |
| 02/02/2005 | CN1572719A MEMS device and method of forming MEMS device |
| 02/02/2005 | CN1572717A Micro-actuator, fabrication method thereof and micro-actuating valve |
| 02/02/2005 | CN1572716A Micromachine and method of fabricating the same |
| 02/02/2005 | CN1572715A Micromachine production method |
| 02/01/2005 | US6850354 Monolithic MEMS device for optical switches |
| 02/01/2005 | US6849558 Replication and transfer of microstructures and nanostructures |
| 02/01/2005 | US6849471 Barrier layers for microelectromechanical systems |
| 02/01/2005 | US6849390 Stamper-forming electrode material, stamper-forming thin film, and method of manufacturing optical disk |
| 02/01/2005 | US6848462 Adhesiveless microfluidic device fabrication |
| 02/01/2005 | US6848175 Method of forming an out-of-plane structure |
| 01/27/2005 | WO2005008745A2 Selective etching of silicon carbide films |
| 01/27/2005 | WO2004026760A3 Device and method |
| 01/27/2005 | US20050017313 System and method of fabricating micro cavities |
| 01/27/2005 | US20050016949 Method for producing cavities having optically transparent wall |
| 01/27/2005 | US20050016526 Device and method for creating aerosols for drug delivery |
| 01/27/2005 | US20050016288 Micromechanical apparatus, pressure sensor, and method |
| 01/26/2005 | CN1569609A Method for producing microstructure using tellite |
| 01/25/2005 | US6846746 Method of smoothing a trench sidewall after a deep trench silicon etch process |
| 01/25/2005 | US6846724 Method for fabricating a microelectromechanical system (MEMS) device using a pre-patterned bridge |
| 01/25/2005 | US6846692 Method of fabricating devices incorporating microelectromechanical systems using UV curable tapes |
| 01/25/2005 | US6846426 Formation of a bridge in a micro-device |
| 01/25/2005 | US6845668 Gyroscope |
| 01/20/2005 | WO2005005046A2 Fluidic mems device |
| 01/20/2005 | WO2004070776A3 Methods for transferring supercritical fluids in microelectronic and other industrial processes |
| 01/20/2005 | WO2003100859A3 Method for producing a component comprising a conductor structure that is suitable for use at high frequencies and corresponding component |
| 01/20/2005 | US20050014374 Gap tuning for surface micromachined structures in an epitaxial reactor |
| 01/20/2005 | US20050014306 Micromachined electromechanical device |
| 01/20/2005 | US20050014175 Methods and apparatuses for analyzing polynucleotide sequences |
| 01/20/2005 | US20050013533 Micro mirror arrays and microstructures with solderable connection sites |
| 01/20/2005 | US20050012975 Al2O3 atomic layer deposition to enhance the deposition of hydrophobic or hydrophilic coatings on micro-electromechcanical devices |
| 01/20/2005 | US20050012562 Seesaw-type MEMS switch for radio frequency and method for manufacturing the same |
| 01/20/2005 | US20050012197 Fluidic MEMS device |
| 01/20/2005 | US20050012040 Method of fabrication of an infrared radiation detector and infrared detector device |
| 01/20/2005 | DE10133014B4 Verfahren zur Erzeugung von dreidimensionalen, mikrostrukturierten Komponenten A process for production of three-dimensional micro-structured components |
| 01/19/2005 | EP1498764A2 Micro mirror arrays and microstructures with solderable connection sites |
| 01/19/2005 | EP1498385A2 Fluidic MEMS device |
| 01/19/2005 | EP1497695A2 Nanoimprint resist |
| 01/19/2005 | EP1497102A1 Device and method for transferring a pattern to a substrate |
| 01/19/2005 | CN1568436A Stress tuned blazed grating light valve |
| 01/19/2005 | CN1568284A Micromachine and production method thereof |
| 01/19/2005 | CN1567021A Micromirror array for projection tv |
| 01/19/2005 | CN1567020A Projection display and packaged micromirror array for the projection display |
| 01/19/2005 | CN1567019A Projection TV with improved micromirror array |
| 01/19/2005 | CN1567018A Micromirror with micromirror element arrays |
| 01/18/2005 | US6844623 Temporary coatings for protection of microelectronic devices during packaging |
| 01/13/2005 | WO2005004210A2 Imprint lithography process and sensor |
| 01/13/2005 | WO2005002773A1 Method of connecting module layers suitable for the production of microstructure components and a microstructure component |
| 01/13/2005 | WO2004076339A3 Method for manufacturing microstructures having multiple microelements with through-holes |
| 01/13/2005 | WO2004056547A3 Micro-mechanical thermo structure and method for manufacturing such micro-mechanical structure |