| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 07/26/2006 | CN1266516C Variable optical attenuator |
| 07/25/2006 | US7081657 MEMS and method of manufacturing MEMS |
| 07/25/2006 | US7080596 Micro-casted silicon carbide nano-imprinting stamp |
| 07/20/2006 | WO2006076354A2 Diamond medical devices |
| 07/20/2006 | WO2006075081A1 Micromechanical component with active elements and method for producing a component of this type |
| 07/20/2006 | US20060160258 Process for producing microelectromechanical components and a housed microelectromechanical component |
| 07/20/2006 | DE102005001449B3 Verfahren zum Erzeugen eines vorgegebenen Innendrucks in einem Hohlraum eines Halbleiterbauelements A method of creating a predefined internal pressure within a cavity of a semiconductor device |
| 07/20/2006 | DE102005001116A1 Mikrosystemtechnisches Bauelement Microsystems Technical component |
| 07/20/2006 | DE102005000891A1 Structured wafer for development and manufacturing of micro-fluid structures has one of first surfaces which is not hydrophobic and which adjoins one of second surface which is not hydrophobic |
| 07/19/2006 | EP1423714B1 Microstructure with movable mass |
| 07/19/2006 | EP1192505B1 Methods for patterning polymer films, and use of the methods |
| 07/19/2006 | CN1805120A Method of forming separable interface and producing micro-electromechanical film with the method |
| 07/19/2006 | CN1805061A Method of producing photon scanning tunneling microscope probe with optical fiber and Indium-Tin-oxide |
| 07/19/2006 | CN1803453A Electrostatic actuator, droplet discharging head, droplet discharging apparatus, electrostatic device |
| 07/18/2006 | US7079299 Staggered torsional electrostatic combdrive and method of forming same |
| 07/18/2006 | US7078337 Selective isotropic etch for titanium-based materials |
| 07/18/2006 | US7078293 Method for fabricating optical interference display cell |
| 07/18/2006 | US7077992 Step and repeat imprint lithography processes |
| 07/18/2006 | US7077007 Deep reactive ion etching process and microelectromechanical devices formed thereby |
| 07/18/2006 | US7076871 Method of manufacturing a carbon nanotube device |
| 07/13/2006 | WO2006074352A2 Mems passivation with transition metals |
| 07/13/2006 | WO2006072170A1 Micro-electromechanical relay and related methods |
| 07/13/2006 | WO2005072089A3 Controlled nanowire in permanent integrated nano-templates and method of fabricating sensor and transducer structures |
| 07/13/2006 | US20060154448 Soi component comprising margins for separation |
| 07/13/2006 | US20060153741 Micro fluidic control device and process for producing the same |
| 07/13/2006 | US20060151435 Surface processing method |
| 07/13/2006 | DE10350460B4 Verfahren zur Herstellung von mikromechanische und/ oder mikroelektronische Strukturen aufweisenden Halbleiterbauelementen, die durch das feste Verbinden von mindestens zwei Halbleiterscheiben entstehen, und entsprechende Anordnung A process for preparing micromechanical and / or microelectronic structures having semiconductor devices caused by the solid connecting at least two semiconductor wafers, and corresponding arrangement |
| 07/13/2006 | DE102004062992A1 Switchable, high-frequency, micro-electromechanical system component, combines signal line and switching component in common plane on substrate |
| 07/13/2006 | DE102004062573A1 Dreidimensionale nano- und mikrostrukturierte Träger Three-dimensional nano- and micro-structured carrier |
| 07/13/2006 | DE102004061796A1 Mikromechanisches kapazitives Sensorelement The micromechanical capacitive sensor element |
| 07/13/2006 | CA2530252A1 Photo-sensitive mems structure |
| 07/12/2006 | EP1678074A1 Method and device for secure, insulated and electrically conductive assembling of treated semiconductor wafers |
| 07/12/2006 | CN1802265A Positive tone bi-layer imprint lithography method and compositions therefor |
| 07/12/2006 | CN1802235A Method of soldering or brazing articles having surfaces that are difficult to bond |
| 07/12/2006 | CN1801485A Device comprising multi-layered thin film having excellent adhesive strength and method for fabricating the same |
| 07/12/2006 | CN1799987A Non-refrigeration infrared detector heat insulation substrate preparation method |
| 07/12/2006 | CN1799986A Three-layer production process for high aspect ratio, deep submicro nanometer metal structure |
| 07/12/2006 | CN1263674C Production device and production method for silicon-based structure |
| 07/11/2006 | US7075161 Apparatus and method for making a low capacitance artificial nanopore |
| 07/11/2006 | US7075104 Microchannel plates and biochip arrays, and methods of making same |
| 07/11/2006 | US7075081 Method of fabrication of an infrared radiation detector and infrared detector device |
| 07/11/2006 | US7074637 Forming channel in encapsulating layer; supplying antistriction fluid; sealing, plugging closures; prevention vibration, deflection |
| 07/11/2006 | US7074635 MEMS structure and method for fabricating the same |
| 07/11/2006 | CA2421934C Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods |
| 07/06/2006 | US20060144816 Method for separating a useful layer and component obtained by said method |
| 07/06/2006 | DE102004062923A1 Vorrichtung zur Förderung von Fluiden, Verfahren zur Herstellung derselben und Pipette mit einer solchen Vorrichtung Apparatus for conveying fluids, and methods for making same pipette with such a device |
| 07/06/2006 | DE102004061336A1 Micromechanical sensor element, especially for measuring fluid properties, has a surface structure that is to be placed in the fluid to be measured that includes a drainage structure for the deflection of dirt and impurities |
| 07/05/2006 | EP1675803A2 Methods and systems for providing mems devices with a top cap and upper sense plate |
| 07/05/2006 | EP1585702B1 Method for producing insulation structures |
| 07/05/2006 | EP1257878B1 A mold for nano imprinting |
| 07/05/2006 | CN1799003A Imprint lithography process and sensor |
| 07/05/2006 | CN1263093C Boundary elementary cell automation method for stimulating film two-dimensional deposition process |
| 07/05/2006 | CN1262864C Optical modulator, display device and its manufacturing method |
| 07/05/2006 | CN1262470C Manufacturing method of flexible micro-electromechanical system changer |
| 07/05/2006 | CN1262469C Dry-process deep-etching silicon micro mechanical working method an glass substrate |
| 07/04/2006 | US7071521 Process for producing microelectromechanical components and a housed microelectromechanical component |
| 07/04/2006 | US7071025 Separating wafers coated with plastic films |
| 06/29/2006 | WO2006068907A1 Injection-molded package for mems inertial sensor |
| 06/29/2006 | WO2006068619A1 Device and use thereof |
| 06/29/2006 | US20060141786 Method of manufacturing an electronic device and electronic device |
| 06/29/2006 | US20060141760 Method for producing an electrical component |
| 06/29/2006 | US20060141747 Controlled cleaving process |
| 06/29/2006 | DE19754462B4 Halbleitervorrichtungen Semiconductor devices |
| 06/29/2006 | CA2592097A1 Device and use thereof |
| 06/28/2006 | CN1795538A Substrate for stressed systems and method for growing crystal on the substrate |
| 06/28/2006 | CN1792764A Disc grade packing tech. for micro mechanical acceleration counter |
| 06/27/2006 | US7067355 Package having bond-sealed underbump |
| 06/27/2006 | US7067344 Method of manufacturing an external force detection sensor |
| 06/27/2006 | US7067306 Device containing cytophilic islands that adhere cells separated by cytophobic regions |
| 06/27/2006 | US7067239 Micro electrical mechanical systems |
| 06/27/2006 | US7067104 Obtaining biologically- derived microtemplate having an original chemical composition and an original dimensional feature; subjecting to a chemical reaction, so as to partially or completely convert into shaped microcrocomponent |
| 06/27/2006 | US7065867 Low temperature hermetic sealing method having passivation layer |
| 06/27/2006 | US7065857 Method of manufacturing electronic device |
| 06/22/2006 | US20060131429 Smart card |
| 06/22/2006 | US20060131262 Fabrication of a reflective spatial light modulator |
| 06/22/2006 | US20060130527 Method of fabricating mold for glass press |
| 06/22/2006 | DE102005059773A1 Mikrostruktur-Herstellungsverfahren Microstructure-manufacturing method |
| 06/21/2006 | EP1671925A1 Micromachining process for forming microstructures having arbitrarily sloped and/or profiled sidewalls or substructures |
| 06/21/2006 | EP1671924A2 Micromechanical device and method of manufacturing a micromechanical device |
| 06/21/2006 | EP1671923A2 Micromechanical device and method of manufacturing a micromechanical device |
| 06/21/2006 | EP1406831B1 Micromechanical cap structure and a corresponding production method |
| 06/21/2006 | EP1016135A4 Fusion-bond electrical feed-through |
| 06/21/2006 | CN1791967A A method of forming stepped structures employing imprint lithography |
| 06/21/2006 | CN1791964A Monolithic three-dimensional structures |
| 06/21/2006 | CN1791558A Method of fabricating mold for glass press |
| 06/21/2006 | CN1789108A Secondary template duplicating process method based on dimethyl silicone polymer mini component |
| 06/21/2006 | CN1260796C Side welding method for flip-chip semiconductor device |
| 06/21/2006 | CN1260749C Prepn. process for magnetic core solenoidal microinduction element of micro-electromechanical system |
| 06/21/2006 | CN1260616C Method for producing microstructure |
| 06/21/2006 | CN1260589C Functional device, mfg. method thereof and drive circuit |
| 06/20/2006 | US7063993 Method of fabricating devices incorporating microelectromechanical systems using at least one UV curable tape |
| 06/20/2006 | US7063798 Method for realizing microchannels in an integrated structure |
| 06/20/2006 | US7063796 Micromechanical component and method for producing the same |
| 06/15/2006 | WO2006063098A1 Lift-off patterning processes employing energetically-stimulated local removal of solid-condensed-gas layers |
| 06/15/2006 | WO2006061073A1 Integrated microsensor and method for production |
| 06/15/2006 | WO2006047326B1 Sacrificial substrate for etching |
| 06/15/2006 | US20060128064 Wafer packaging and singulation method |
| 06/15/2006 | US20060125348 Micromachined ultrasonic transducer cells having compliant support structure |
| 06/15/2006 | US20060125031 Microelectromechanical device having a common ground plane layer and a set of contact teeth and method for making aspects thereof |
| 06/15/2006 | US20060123628 Method of manufacturing a carbon nanotube device |