Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
06/2005
06/16/2005WO2005053775A1 In vivo diagnostic and therapy micro-device
06/16/2005WO2004071153A3 Method of forming sub-micron-size structures over a substrate
06/16/2005US20050130074 Method for the manufacture of micro structures
06/16/2005US20050127029 Drop generator die processing
06/16/2005US20050126905 Mechanical or electromechanical systems, real time feedback control operating on a time scale commensurate with the formation of nanoscale solid state features
06/16/2005DE102004028538A1 Verfahren zur Reduzierung der adhäsiven Eigenschaften von MEMS und antihaftbeschichtete Vorrichtung Method for reducing the adhesive properties of MEMS and non-stick coated apparatus
06/15/2005EP1541234A1 Hybrid microfluidic chip and method of manufacture
06/15/2005EP1540716A2 Replication and transfer of microstructures and nanostructures
06/15/2005EP1540677A2 Resonant sensor and sensing system
06/15/2005EP1540419A1 Method for producing a pattern formation mold
06/15/2005EP1539638A2 Decal transfer microfabrication
06/15/2005CN1206707C Chip protector
06/15/2005CN1206702C Method for forming structure of fine sizes
06/15/2005CN1206156C Bandpass filter of packaged microelectronic machinery system with integrated circuit and its manufacturing method
06/14/2005US6907150 Etching process for micromachining crystalline materials and devices fabricated thereby
06/14/2005US6906847 Spatial light modulators with light blocking/absorbing areas
06/14/2005US6906845 Micro-mechanical device having anti-stiction layer and method of manufacturing the device
06/14/2005US6905616 Method of releasing devices from a substrate
06/14/2005US6905615 Method of manufacturing a micromechanical component
06/14/2005US6905555 Methods for transferring supercritical fluids in microelectronic and other industrial processes
06/09/2005WO2005012160A3 Method for separating a useful layer and component obtained by said method
06/09/2005US20050122191 Optical tunable filter and method of manufacturing the same
06/09/2005US20050121411 Medical devices and EFAB methods and apparatus for producing them
06/09/2005US20050120902 Edge transfer lithography
06/09/2005DE10352001A1 Mikromechanisches Bauelement mit einer Membran und Verfahren zur Herstellung eines solchen Bauelements Micromechanical component with a membrane and method for producing such a component
06/09/2005DE10351034A1 Process for forming a wedge shaped work piece in optical device production uses etching with a monotonic function along the etched face
06/08/2005EP1538747A1 Micromechanical electrostatic resonator
06/08/2005EP1538476A1 Micro mirror
06/08/2005EP1537394A1 Soi component comprising margins for separation
06/08/2005CN1625046A Micromechanical electrostatic resonator
06/08/2005CN1624500A Optical tunable filter and method of manufacturing the same
06/08/2005CN1623887A Thin film minibridge structure and its mfg. method
06/08/2005CN1205112C Improved thermal bend actuator
06/07/2005US6902947 Integrated method for release and passivation of MEMS structures
06/02/2005WO2005049479A2 Surface comprising an arrangement of a plurality of column-shaped elevations, and uses thereof
06/02/2005US20050118742 Method for reducing the adhesive properties of MEMS and anti-adhesion-coated device
06/02/2005US20050118673 Applying an enzyme for the selective removal of sub-unit parts of the polymer to at least one predetermined area of said polymeric substrate via a pipette with a nano-sized orifice
06/02/2005US20050117235 Micro mirror and method for fabricating the same
06/02/2005DE10312202B4 Verfahren zum Herstellen einer Ätzmaske auf einer Mikrostruktur, insbesondere einer Halbleiterstruktur mit Grabenkondensatoren, und entsprechende Verwendung der Ätzmaske A method of manufacturing an etching mask on a microstructure, in particular a semiconductor structure with grave capacitors and corresponding use of the etching mask
06/02/2005DE102004052461A1 Ätzverfahren Etching
06/02/2005DE102004006156A1 Embossing process for preparation of a microcapacity ultrasonic transducer by provision of a substrate having electrical conductivity useful in applications involving the piezoelectric effect
06/02/2005CA2486510A1 A process for creating a 3-dimensional configuration on a substrate
06/01/2005EP1535878A1 Integrated chemical microreactor with large area channels and manufacturing process thereof
06/01/2005EP1535315A1 Glass-type planar substrate, use thereof, and method for the production thereof
06/01/2005EP1535297A1 Diaphragm activated micro-electromechanical switch
06/01/2005CN1623122A Method for fabricating a structure for a microelectromechanical system (MEMS) device
06/01/2005CN1621337A Method for preparing chip of MEMS electrically controlled dynamic gain equalizer
05/2005
05/31/2005US6900925 Optical deflector and method of producing same
05/31/2005US6900133 Method of etching variable depth features in a crystalline substrate
05/31/2005US6900072 Method for making a micromechanical device by using a sacrificial substrate
05/31/2005US6899137 Microfabricated elastomeric valve and pump systems
05/26/2005WO2005008745A3 Selective etching of silicon carbide films
05/26/2005WO2004104704A3 Lithographic method for producing microcomponents
05/26/2005US20050112887 Etching process
05/26/2005US20050112882 Microfabricated elastomeric valve and pump systems
05/26/2005US20050112848 Method of fabricating vertical integrated circuits
05/26/2005US20050110180 Process for producing a tool insert for injection molding a microstructured part
05/26/2005US20050110110 Integrated released beam layer structure fabricated in trenches and manufacturing method thereof
05/26/2005US20050110051 Surface processing method for a chip device and a chip device formed by he method
05/25/2005EP1533657A1 Multilayer nano imprint lithography
05/25/2005EP1532671A2 Method for selectively removing material from the surface of a substrate, masking material for a wafer and wafer provided with a masking material
05/25/2005EP1532663A1 Three dimensional thin film devices and methods of fabrication
05/25/2005EP1532658A1 Conductive etch stop for etching a sacrificial layer
05/25/2005EP1532656A2 High-temperature stable metal emitter and method for the production thereof
05/25/2005EP1532637A2 Method of forming atomic force microscope tips
05/25/2005EP1532071A2 Layer system comprising a silicon layer and a passivation layer, method for producing a passivation layer on a silicon layer and the use of said system and method
05/25/2005EP1532070A2 Microelectromechanical device with integrated conductive shield
05/25/2005DE10350036A1 Verfahren zum Vereinzeln von Halbleiterchips und entsprechende Halbleiterchipanordnung A method for separating semiconductor chips and semiconductor chip assembly corresponding
05/25/2005DE10257098B4 Verfahren zum Erzeugen hermetisch dicht geschlossener dielektrisch isolierender Trenngräben A method for generating hermetically closed dielectric insulating isolation trenches
05/25/2005CN1620722A Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices
05/25/2005CN1620402A Low power silicon thermal sersors and microfluidic devices based on the use of porus silicon sealed air cavity technology or microchannel technology
05/25/2005CN1619351A Micro-optic device and method of manufacturing same
05/25/2005CN1619259A Manufacturing method of flexible sensor
05/25/2005CN1618724A Encapsulated mems band-pass filter for integrated circuits and method of fabrication thereof
05/24/2005US6897551 Support for microelectronic, microoptoelectronic or micromechanical devices
05/24/2005US6897140 Fabrication of structures of metal/semiconductor compound by X-ray/EUV projection lithography
05/24/2005US6896821 Fabrication of MEMS devices with spin-on glass
05/24/2005US6895659 Process of manufacturing fluid jetting apparatuses
05/19/2005WO2005046299A1 An apparatus and method for manufacturing integrated circuits, microelectromechanical system (mems) devices and nanofilters
05/19/2005WO2005045885A2 Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems
05/19/2005WO2005044721A1 Mems devices with unreleased thin film components
05/19/2005WO2005044364A1 Microneedles and microneedle fabrication
05/19/2005WO2004068553A3 Method for forming nanoscale features
05/19/2005US20050106892 Etching method
05/19/2005US20050106861 Resistless lithography method for fabricating fine structures
05/19/2005US20050106774 Surface processes in fabrications of microstructures
05/19/2005US20050106772 MEMS device and method of forming MEMS device
05/19/2005US20050105157 Diffractive thin-film piezoelectric micromirror and method of producing the same
05/19/2005US20050103635 Forms the concave having the shape of the micro component to be produced in the base by using the physical external force, fills the metal into the concave and then removes the base; eliminates need for masking, lithography steps; micromachines; reduce installation, production costs
05/19/2005DE20122373U1 Projection system for projecting a colored picture has micro-mirrors in a structure for reflecting light and electrodes to cause deflection in a micro-mirror plate
05/19/2005DE20122372U1 Chip for a system to project colored pictures separates from a wafer with a section of micro-mirrors set out in a two-dimensional structure
05/19/2005DE20122371U1 Projection display device for projecting a colored picture has micro-mirrors in a structure for reflecting light and electrodes to cause deflection in a micro-mirror plate
05/19/2005DE20122370U1 Bundled micro-mirror field for a projection display device projects a colored picture with micro-mirrors in a structure for reflecting light and electrodes to cause deflection in a micro-mirror plate
05/19/2005DE10348541A1 Porous silicon substrate, for chromatography and biomolecule synthesis and filtration, has a primary structure of macro pores and a secondary structure of meso pores in the macro pore side walls
05/18/2005EP1531145A2 Etching method
05/18/2005CN1616341A Etching method
05/18/2005CN1616340A Micromachined electromechanical device
05/17/2005US6894819 Micromirror actuator and method of manufacturing the same
05/17/2005US6894358 Process for producing microelectromechanical components and a housed microelectromechanical component
05/17/2005US6893976 Shadow mask and method of producing the same
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