| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 08/30/2006 | EP1414632A4 Injection molding a flash free microfluidic structure |
| 08/30/2006 | EP1317399B1 Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods |
| 08/30/2006 | CN1826285A Stacked structure and production method thereof |
| 08/30/2006 | CN1824460A Method for determining the position of a milling tool and a machining head designed for carrying out the method |
| 08/30/2006 | CN1272235C Gas sensor and fabrication method thereof |
| 08/30/2006 | CN1272234C Method for forming microelectronic spring structures on a substrate |
| 08/29/2006 | US7099066 Micromirror unit and method of making the same |
| 08/24/2006 | WO2006088214A1 Mictoactuator using bundled actin filaments |
| 08/24/2006 | WO2006087744A1 A method of fabricating tridimensional micro- and nanostructures as well as optical element assembly having a tridimensional convex structure obtained by the method |
| 08/24/2006 | WO2006017009A3 Surface lubrication microstructures |
| 08/24/2006 | US20060189160 Method for producing a pattern formation mold |
| 08/24/2006 | US20060186498 Microminiature moving device and method of making the same |
| 08/24/2006 | DE102006006820A1 IC-Chip-Beschichtungsmaterial und dasselbe verwendende Vakuumfluoreszendisplayvorrichtung IC chip coating material used and the same Vakuumfluoreszendisplayvorrichtung |
| 08/23/2006 | EP1693339A1 MEMS device and manufacturing method of MEMS device |
| 08/23/2006 | EP1693338A1 Method of fabrication of a microstructure in titanium. |
| 08/23/2006 | EP1691662A2 Structures and devices for parenteral drug delivery and diagnostic sampling |
| 08/23/2006 | CN1821052A Low temperature airtightness packaging method for wafer level micro machinery device and photoelectric device |
| 08/23/2006 | CN1821051A Microchannel structure and its manufacturing method, light source device, and projector |
| 08/23/2006 | CN1821050A Mems device and manufacturing method of mems device |
| 08/22/2006 | US7095309 oxidation resistance; titanium silicide, carbide |
| 08/22/2006 | US7094711 Micro pipe manufacturing method |
| 08/22/2006 | US7094696 Method for TMAH etching of CMOS integrated circuits |
| 08/22/2006 | CA2364498C Ic-compatible parylene mems technology and its application in integrated sensors |
| 08/17/2006 | WO2006085917A2 A method of fabricating a nano-wire |
| 08/17/2006 | US20060183309 Method for manufacturing a patterned structure |
| 08/17/2006 | US20060183262 Thin film encapsulation of MEMS devices |
| 08/17/2006 | US20060183259 Method of forming a wear-resistant dielectric layer |
| 08/17/2006 | US20060182404 High reflector tunable stress coating, such as for a MEMS mirror |
| 08/17/2006 | US20060182403 High reflector tunable stress coating, such as for a MEMS mirror |
| 08/17/2006 | DE10328730B4 Verfahren zum Herstellen eines Microarrays und Vorrichtung zum Versehen eines Trägers für ein Microarray mit Beschichtungsstoffen A method of manufacturing a microarray and apparatus for providing a support for a microarray with coating materials |
| 08/17/2006 | DE102005004795A1 Reactive material wet-chemical removal method for e.g. bulk acoustic wave filter, involves bringing material in contact with wet-chemical treatment unit through access opening in structure for removing material from structure |
| 08/16/2006 | EP0734282B1 Miniaturized planar columns for use in a liquid phase separation apparatus |
| 08/16/2006 | CN1819291A Production of micromechanical infrared detector array based on double material effect |
| 08/16/2006 | CN1817784A Structure and production of air-sealed packing micromechanical system device with convex point connection |
| 08/16/2006 | CN1817783A Production of microneedles |
| 08/16/2006 | CN1817782A Backside coating for mems wafer and its making process |
| 08/16/2006 | CN1817781A Centrifugal separating victim layer process |
| 08/16/2006 | CN1270351C Dynamic cellular automaton method for simulation of photoresist three dimensional etching process |
| 08/15/2006 | US7091109 Semiconductor device and method for producing the same by dicing |
| 08/15/2006 | US7090781 Micro-actuator and method making the same |
| 08/10/2006 | WO2006082155A1 Micromechanical component and corresponding production method |
| 08/10/2006 | WO2006081674A1 Micro heat engine and method of manufacturing |
| 08/10/2006 | WO2005060621A3 Method and/or apparatus for puncturing a surface for extraction, in situ analysis, and/or substance delivery using microneedles |
| 08/10/2006 | US20060177963 Process for producing copy protection for an electronic circuit |
| 08/10/2006 | US20060175203 Electroplating pcb components |
| 08/10/2006 | DE10343256B4 Anordnung zur Herstellung einer elektrischen Verbindung zwischen einem BGA-Package und einer Signalquelle, sowie Verfahren zum Herstellen einer solchen Verbindung An arrangement for producing an electrical connection between a BGA package and a signal source, and to processes for producing such a compound |
| 08/10/2006 | DE102005004878A1 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren Micro-mechanical device and manufacturing method thereof |
| 08/10/2006 | DE102005004877A1 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren Micro-mechanical device and manufacturing method thereof |
| 08/10/2006 | DE102004055040B4 Verfahren zum Schneiden eines Laminats mit einem Laser und Laminat A method of cutting a laminate with a laser and laminate |
| 08/10/2006 | CA2595473A1 Micro heat engine and method of manufacturing |
| 08/09/2006 | EP1687237A1 Method to test the hermeticity of a sealed cavity micromechanical device and the device to be so tested |
| 08/09/2006 | EP1576420B1 Nano-imprint lithography method involving substrate pressing |
| 08/09/2006 | CN2804054Y Improved equipment of sacrifice layer solid state sublimation and release |
| 08/09/2006 | CN1268942C Substrate and its mfg. method, microlens, substrate, transmitting panel and rear projector |
| 08/09/2006 | CN1268538C Micromachine and production method thereof |
| 08/09/2006 | CN1268537C Micro-actuator, micro-actuator device, optical switch and optical switch array |
| 08/09/2006 | CN1268491C Method for making microstructure body, method for making liquid spray nozzle and liquid spray nozzle |
| 08/08/2006 | US7087444 Method for integration of microelectronic components with microfluidic devices |
| 08/08/2006 | US7087181 Method for fabricating micro-structures with various surface properties in multi-layer body by plasma etching |
| 08/08/2006 | US7087134 System and method for direct-bonding of substrates |
| 08/08/2006 | CA2533974A1 Micro-optical device and method of making same |
| 08/03/2006 | WO2006080226A1 Process for producing micromachine, and micromachine |
| 08/03/2006 | WO2006079870A1 Method of fabricating a silicon-on-insulator structure |
| 08/03/2006 | WO2006029194A3 Fibrillar microstructure and methods for making it |
| 08/03/2006 | US20060171628 Mems element and method of producing the same, and diffraction type mems element |
| 08/02/2006 | EP1379463B1 Method for producing a semiconductor component and a semiconductor component produced according to this method |
| 08/02/2006 | EP1345842B1 Method for producing a semiconductor component having a movable mass in particular, and semiconductor component produced according to this method |
| 08/02/2006 | EP1279071A4 Multi depth substrate fabrication processes |
| 08/02/2006 | EP1238312B1 Use of polyimide for adhesive layers, lithographic method for producing microcomponents and method for producing composite material |
| 08/02/2006 | EP1238311B1 Flat coil and lithographic method for producing microcomponents |
| 08/02/2006 | EP1208002A4 Deposited thin film void-column network materials |
| 08/02/2006 | CN1812021A Method for producing amorphous FeCuNbCrSiB film solenoid micro-inductance device |
| 08/02/2006 | CN1812020A Method for producing solenoid micro-inductance device based on amorphous FeCuNbCrSiB magnetic film |
| 08/02/2006 | CN1810629A Gas phase synthesis process of nanometer particle array with one-dimensional diameter and number density gradient |
| 08/02/2006 | CN1810628A Cellular automation method for simulating anisotropic silicon-etching process |
| 08/02/2006 | CN1267582C Process for compensation of potassium hydroxide solution corrosion (100) silicon earth (110) crystal direction convex angle |
| 08/02/2006 | CN1267336C A microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams |
| 08/01/2006 | US7084073 Method of forming a via hole through a glass wafer |
| 08/01/2006 | US7083997 Bonded wafer optical MEMS process |
| 08/01/2006 | US7083737 Method for manufacturing a micro-actuator |
| 07/27/2006 | WO2006077303A1 Method for piercing a crystalline plate by etching, and plate comprising a narrow hole |
| 07/27/2006 | WO2006012614A8 Fabrication methods and multifunctional substrate materials for chemical and biological analysis in microfluidic systems |
| 07/27/2006 | US20060165957 Method for producing at least one small opening in a layer on a substrate and components produced according ot said method |
| 07/27/2006 | US20060163712 System and method for direct-bonding of substrates |
| 07/27/2006 | DE19623072B4 Verfahren zur Herstellung eines Dünnfilmstrukturkörpers A method for producing a thin-film structure body |
| 07/27/2006 | DE10321590B4 Verfahren zur Mikrostrukturierung von Pd-haltigen Funktionsschichten A method for microstructuring by Pd-containing functional layers |
| 07/27/2006 | DE102005002967A1 Verfahren zum Herstellen eines Bauelementes mit einem beweglichen Abschnitt A method for manufacturing a component having a movable portion |
| 07/27/2006 | DE102005002304A1 Micro-electromechanical sensor e.g. acceleration sensor, has sensor unit area-wisely and directly attached on substrate body in attachment area, where thermal expansion coefficient of unit is adjusted at expansion coefficients of body |
| 07/26/2006 | EP1684420A2 Band filter using film bulk acoustic resonator and method of fabricating the same |
| 07/26/2006 | EP1683757A1 Manufacturing method of a MEMS structure using a porous silicon layer |
| 07/26/2006 | EP1683199A2 Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems |
| 07/26/2006 | EP1509324B1 Device for the actively-controlled and localised deposition of at least one biological solution |
| 07/26/2006 | EP1440322B1 Micro-sensor |
| 07/26/2006 | EP1390988B1 Method for producing optically transparent regions in a silicon substrate |
| 07/26/2006 | EP1062684A4 Trench isolation for micromechanical devices |
| 07/26/2006 | CN1809421A Fluidic mems device |
| 07/26/2006 | CN1807225A Production method of monocrystalline silicon sheet surface self-assembly polyelectrolyte-rare earth nanometer film |
| 07/26/2006 | CN1807222A Method for preparing nanometer suspension arm structure using nanometer embossing and reactive ion etching technology |
| 07/26/2006 | CN1807221A Anchor production method in xenon difluoride gas corrosion process |
| 07/26/2006 | CN1266757C CMOS circuit and body silicon micromechanical system integraled method |