| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 03/28/2006 | US7017593 Pipe washing method and pipe washing apparatus |
| 03/27/2006 | CA2520950A1 System and method for display device with end-of-life phenomena |
| 03/27/2006 | CA2520623A1 Methods of fabricating interferometric modulators by selectively removing a material |
| 03/27/2006 | CA2519656A1 Method and system for packaging mems devices with incorporated getter |
| 03/27/2006 | CA2519593A1 Device and method for display memory using manipulation of mechanical response |
| 03/27/2006 | CA2519484A1 Method and system for providing mems device package with secondary seal |
| 03/27/2006 | CA2518901A1 System and method for protecting microelectromechanical systems array using back-plate with non-flat portion |
| 03/27/2006 | CA2518805A1 Method and system for packaging a display |
| 03/27/2006 | CA2518370A1 Apparatus and methods for arranging devices into an interconnected array |
| 03/27/2006 | CA2518337A1 Device and method for manipulation of thermal response in a modulator |
| 03/27/2006 | CA2517413A1 System and method for display device with activated desiccant |
| 03/27/2006 | CA2516576A1 Method and system for sealing a substrate |
| 03/27/2006 | CA2515622A1 Method and system for xenon fluoride etching with enhanced efficiency |
| 03/27/2006 | CA2514350A1 Portable etch chamber |
| 03/27/2006 | CA2514348A1 Method and device for packaging a substrate |
| 03/27/2006 | CA2513030A1 Method and system for packaging a mems device |
| 03/27/2006 | CA2513026A1 Electrical characterization of interferometric modulators |
| 03/23/2006 | US20060063292 Method for producing a packaged integrated circuit |
| 03/23/2006 | US20060060564 Micromachined structures made by combined wet and dry etching |
| 03/23/2006 | DE102004042987A1 Push-Pull betriebene Pumpe für ein mikrofluidisches System Push-Pull operated pump for a microfluidic system |
| 03/23/2006 | DE102004037128A1 Micromechanical assembly part structuring method, involves removing material of micromechanical assembly part e.g. semiconductor substrate, by laser treatment that produces diaphragm in assembly part |
| 03/23/2006 | DE102004036803A1 Verfahren zum Ätzen einer Schicht auf einem Substrat A method for etching a layer on a substrate |
| 03/23/2006 | DE102004036433A1 Mikromechanisches Bauteil und Verfahren zur Herstellung eines solchen Bauteils Micromechanical element and process for producing such a component |
| 03/22/2006 | EP1637498A1 MOS transistor with deformable gate |
| 03/22/2006 | EP1636131A1 Optical microelectromechanical structure |
| 03/22/2006 | EP1635947A2 Fluidic mems device |
| 03/22/2006 | EP1522095B1 Method for producing a component having submerged connecting areas |
| 03/22/2006 | EP1414738B1 Micro-machined ultrasonic transducer (mut) substrate that limits the lateral propagation of acoustic energy |
| 03/22/2006 | EP1334060B1 Micromechanical component and corresponding production method |
| 03/22/2006 | CN1749153A Method for producing MEMS sensor suspension beam structure |
| 03/21/2006 | US7016095 Method for fabricating an interference display unit |
| 03/21/2006 | US7015030 Microfluidic devices and uses thereof in biochemical processes |
| 03/16/2006 | WO2006029194A2 Fibrillar microstructure and methods for making it |
| 03/16/2006 | WO2005101497A3 Method and apparats for lubricating microelectromechanical devices in packages |
| 03/16/2006 | US20060057761 Method for fabricating microstructure and microstructure |
| 03/16/2006 | US20060057031 For use in microarraying systems, dip pen nanolithography systems, fluidic circuits, and microfluidic systems |
| 03/16/2006 | US20060055090 Method for manufacturing of polymer micro needle array with liga process |
| 03/16/2006 | US20060054984 MOS transistor with a deformable gate |
| 03/16/2006 | US20060054973 Method of making cavities in a semiconductor wafer |
| 03/16/2006 | US20060054972 Component and method for producing the same |
| 03/16/2006 | US20060054228 Microfabricated elastomeric valve and pump systems |
| 03/16/2006 | DE112004000659T5 Ultraphobe Oberfläche für Hochdruckflüssigkeiten Ultraphobic surface for high pressure fluids |
| 03/16/2006 | DE102005036264A1 Mikrovorrichtung mit einer Mikrosystemstruktur und Verfahren zur Herstellung derselben Micro device having a micro-structure system and method for producing same |
| 03/16/2006 | DE102004044222A1 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren Micro-mechanical device and manufacturing method thereof |
| 03/16/2006 | DE102004037902A1 Verfahren zur Abscheidung einer Anti-Haftungsschicht A method of depositing an anti-adhesive layer |
| 03/16/2006 | DE102004037348A1 Fluid-Transport-Vorrichtung, Sensor-Anordnung, Fluid-Misch-Vorrichtung und Verfahren zum Herstellen einer Fluid-Transport-Vorrichtung Fluid transport device, the sensor arrangement, fluid-mixing device and method of manufacturing a fluid transport device |
| 03/16/2006 | CA2579603A1 A flexible nano-imprint stamp |
| 03/15/2006 | EP1634328A2 Microelectromechanical systems, and methods for encapsulating and fabricating same |
| 03/15/2006 | EP1634125A2 Lithographic method for producing microcomponents |
| 03/15/2006 | EP1633673A2 Microelectromechanical systems having trench isolated contacts, and methods for fabricating same |
| 03/15/2006 | CN1747891A Method of manufacturing an electronic device and electronic device |
| 03/14/2006 | US7012726 MEMS devices with unreleased thin film components |
| 03/14/2006 | US7012291 Monolithic three-dimensional structures |
| 03/14/2006 | US7010976 Acceleration sensor and manufacturing method thereof |
| 03/09/2006 | WO2004036623A3 Nanoscopic tunnel and method of making same |
| 03/09/2006 | US20060051935 Method of separating MEMS devices from a composite structure |
| 03/09/2006 | US20060051584 Process for producing a product having a structured surface |
| 03/09/2006 | US20060049895 Micromachine and method of producing the same |
| 03/09/2006 | US20060048885 Method for reproduction of a compnent with a micro-joint and component produced by said method |
| 03/09/2006 | DE20321146U1 Gluing microcomponents to substrate for assembling electronic or mechanical microsystems involves initial fusing of precise pattern of hot-melt adhesive |
| 03/09/2006 | DE102004043357A1 Mikromechanisches Sensorelement The micromechanical sensor element |
| 03/09/2006 | DE102004043356A1 Sensorelement mit getrenchter Kaverne Sensor element with getrenchter cavern |
| 03/09/2006 | DE102004043120A1 Mikromechanisches Bauelement mit Hohlraum und Herstellungsverfahren für ein solches Bauelement Micromechanical component with cavity and manufacturing method for such a device |
| 03/09/2006 | DE102004042111A1 Mehrschichtiger Körper mit unterschiedlich mikrostrukturierten Bereichen mit elektrisch leitfähiger Beschichtung Multi-layered body with different microstructured areas with an electrically conductive coating |
| 03/09/2006 | DE102004041812A1 Reaktor zum Erzeugen von Oberflächenreaktionen und dessen Verwendung A reactor for generation of surface reactions and the use thereof |
| 03/08/2006 | EP1631981A2 Method of room temperature covalent bonding |
| 03/07/2006 | US7009747 Micro-mirror and a method for fabricating the same |
| 03/07/2006 | US7009745 Coating for optical MEMS devices |
| 03/07/2006 | US7009270 Substrate for stressed systems and method of making same |
| 03/07/2006 | US7008817 Method for manufacturing micro electro-mechanical systems using solder balls |
| 03/07/2006 | US7007709 Microfluidic device and manufacture thereof |
| 03/02/2006 | WO2006022957A1 Method of producing a mems device |
| 03/02/2006 | WO2006022956A1 Mems device with non-standard profile |
| 03/02/2006 | WO2006022864A2 Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates |
| 03/02/2006 | US20060046329 Method for manufacturing a silicon sensor and a silicon sensor |
| 03/02/2006 | DE102005041609A1 Verfahren zum Herstellen von elektrischen Bauteilen A method for manufacturing of electrical components |
| 03/02/2006 | DE10055374B4 Verteilerplatte für Flüssigkeiten und Gase Distribution plate for liquids and gases |
| 03/01/2006 | EP1630127A1 Method for realising a hosting structure of nanometric elements |
| 03/01/2006 | EP1629526A1 Substrate for stressed systems and method for crystal growth on such a substrate |
| 03/01/2006 | EP1628908A1 Formation of silicon nanostructures |
| 03/01/2006 | EP1252028A4 Temporary bridge for micro machined structures |
| 03/01/2006 | CN1740088A 镜面制程 Mirror Process |
| 03/01/2006 | CN1740087A Method for forming individual semi-conductor devices |
| 03/01/2006 | CN1244016C Exposure controlling light mask and production method thereof |
| 02/28/2006 | US7005732 Methods and systems for providing MEMS devices with a top cap and upper sense plate |
| 02/28/2006 | US7005078 Micromachined fluidic device and method for making same |
| 02/28/2006 | US7004015 Method and system for locally sealing a vacuum microcavity, methods and systems for monitoring and controlling pressure and method and system for trimming resonant frequency of a microstructure therein |
| 02/23/2006 | US20060040505 Method for manufacturing a micro-electromechanical device and micro-electromechanical device obtained therewith |
| 02/23/2006 | US20060040058 Multilayer nano imprint lithography |
| 02/23/2006 | US20060038269 Method and apparatus for lubricating microelectromechanical devices in packages |
| 02/23/2006 | US20060038182 Stretchable semiconductor elements and stretchable electrical circuits |
| 02/23/2006 | DE10393588T5 Optimales Ausbreitungssystem, Vorrichtung und Verfahren für flüssigkeitsgekühlten, mikroskalierten Wärmetausch Optimal propagation system, apparatus and method for liquid-cooled micro-scaled heat exchange |
| 02/23/2006 | DE102004062973A1 Complementary metal oxide semiconductor image sensor has planarization layer including microlenses of concave pattern formed corresponding to respective photodiodes, on color filter layers |
| 02/23/2006 | DE102004062954A1 Complementary metal oxide semiconductor image sensor comprises micro lens with refractive index distribution formed on planarization layer, that focuses light on photodiode, based on ion injection profile |
| 02/23/2006 | DE102004049865A1 Vorrichtung und Verfahren zum Drucken, insbesondere zum Drucken von Mikrostrukturen Apparatus and method for printing, particularly for printing microstructures |
| 02/22/2006 | EP1628333A1 Method of producing film-thinning circuit board having penetrated structure and protecting adhesive tape |
| 02/22/2006 | EP1627675A1 Component separating device, method of producing the device, and method of separating component by using the device |
| 02/22/2006 | EP1626926A2 Method for producing a packaged integrated circuit |
| 02/22/2006 | CN1738710A Method for manufacturing of polymer micro needle array with LIGA process |
| 02/22/2006 | CN1736852A Silicon microchannel production method |