B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems

More topics under "B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems" (20,335)
B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
B81C 3 - Assembling of devices or systems from individually processed components (2,210)
B81C 99 - Subject matter not provided for in other groups of this subclass (3,599)

Patents for B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems (84)
11/2014
11/11/2014	US8883092 Recirculating fluidic network and methods for using the same
04/2013
04/11/2013	US20130089874 Recirculating fluidic network and methods for using the same
05/2012
05/01/2012	US8168139 Recirculating fluidic network and methods for using the same
03/2012
03/15/2012	US20120064647 Method of fabricating microelectromechanical systems devices
12/2011
12/06/2011	US8070969 Method of fabricating microelectromechanical systems devices
02/2011
02/15/2011	US7887233 Thermal bend actuator material selection
11/2010
11/09/2010	US7827907 Device and a method for producing a diffractive microstructure
01/2010
01/28/2010	US20100020843 Thermal Bend Actuator Material Selection
10/2009
10/27/2009	US7607826 Thermoelastic device with preselected resistivity, inertness and deposition characteristics
08/2009
08/27/2009	US20090212658 Micro--electromechanical actuator with spacer separated layers
06/2009
06/09/2009	US7545251 Micro-electromechanical actuator
05/2009
05/28/2009	US20090134534 Device and A method for producing a diffractive microstructure
04/2009
04/21/2009	US7520850 Feedback control and ventricular assist devices
03/2009
03/05/2009	US20090061562 Method of fabricating microelectromechanical systems devices
01/2009
01/14/2009	EP1776528A4 Embossing device with a deflection compensated roller
01/07/2009	CN100449684C Barrier layers for microelectromechanical systems
12/2008
12/16/2008	US7465405 Method of fabricating printheads having multiple nozzle assemblies
10/2008
10/16/2008	US20080251956 Embossing Device with a Deflection Compensated Roller
08/2008
08/06/2008	CN100408336C Thermoelastic expanding element
05/2008
05/29/2008	US20080122129 Embossing Device And A Method For Adjusting The Embossing Device
01/2008
01/09/2008	CN101103204A Embossing device with a deflection compensated roller
10/2007
10/18/2007	US20070243413 Thermoelastic Device With Preselected Resistivity, Inertness And Deposition Characteristics
09/2007
09/18/2007	US7270475 Thermoelastic device comprising an expansive element formed from a preselected material
08/2007
08/01/2007	CN1329285C Method for producing a product having a structured surface
06/2007
06/20/2007	EP1796894A1 An embossing device and a method for adjusting the embossing device
04/2007
04/25/2007	EP1776528A1 Embossing device with a deflection compensated roller
04/12/2007	US20070082228 Thermoelastic device comprising an expansive element formed from a preselected material
12/2006
12/26/2006	US7153443 Microelectromechanical structure and a method for making the same
12/20/2006	EP1294636B1 Method of fabricating devices incorporating microelectromechanical systems using at least one uv curable tape
11/2006
11/30/2006	US20060266730 Microelectromechanical structure and a method for making the same
11/23/2006	US20060261423 Method of fabricating printheads having multiple nozzle assemblies
11/21/2006	US7138693 Barrier layers for microelectromechanical systems
11/01/2006	CN1856726A Micro lens array with reduced intervals between the neighboring micro lens
09/2006
09/28/2006	US20060214761 Micro-electromechanical actuator
08/2006
08/22/2006	US7095309 oxidation resistance; titanium silicide, carbide
08/15/2006	US7090471 Integrated electrostatic peristaltic pump method and apparatus
06/2006
06/20/2006	US7063993 Method of fabricating devices incorporating microelectromechanical systems using at least one UV curable tape
06/14/2006	CN1788330A Barrier layers for microelectromechanical systems
04/2006
04/27/2006	US20060086309 Recirculating fluidic network and methods for using the same
04/13/2006	WO2005051838A3 Feedback control of ventricular assist devices
03/2006
03/09/2006	US20060051584 Process for producing a product having a structured surface
02/2006
02/21/2006	US7002726 Micromirror having reduced space between hinge and mirror plate of the micromirror
02/16/2006	WO2006016006A1 An embossing device and a method for adjusting the embossing device
02/16/2006	WO2006016005A1 Embossing device with a deflection compensated roller
02/16/2006	WO2006016004A1 A device and a method for producing a diffractive microstructure
01/2006
01/10/2006	US6985277 Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
12/2005
12/06/2005	US6972891 Micromirror having reduced space between hinge and mirror plate of the micromirror
11/2005
11/29/2005	US6970281 Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
11/15/2005	US6965468 Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
11/09/2005	CN1694842A Thermoelastic actuator design.
10/2005
10/20/2005	US20050231789 Micromirror having reduced space between hinge and mirror plate of the micromirror
10/20/2005	US20050231788 Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
10/19/2005	EP1585900A2 Integrated electrostatic peristaltic pump method and apparatus
09/2005
09/29/2005	US20050213190 Micromirror having reduced space between hinge and mirror plate of the micromirror
09/09/2005	WO2005049481A3 A micromirror array having reduced gap between adjacent micromirrors of the micromirror array
08/2005
08/18/2005	WO2004065290A3 Integrated electrostatic peristaltic pump method and apparatus
07/2005
07/27/2005	CN1646418A Method for producing a product having a structured surface
06/2005
06/30/2005	WO2004087563A3 Barrier layers for microelectromechanical systems
06/09/2005	WO2005051838A2 Feedback control of ventricular assist devices
06/09/2005	US20050122561 Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
06/02/2005	WO2005049481A2 A micromirror array having reduced gap between adjacent micromirrors of the micromirror array
06/01/2005	EP1535066A2 Recirculating fluidic network and methods for using the same
05/2005
05/19/2005	US20050107658 Feedback control of ventricular assist devices
04/2005
04/28/2005	US20050088718 Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
03/2005
03/17/2005	US20050058856 For use as the expansive element in a thermoelastic design, micro-electomechanical system
03/10/2005	US20050054135 Barrier layers for microelectromechanical systems
02/2005
02/03/2005	WO2004000721A3 Recirculating fluidic network and methods for using the same
02/01/2005	US6849471 Barrier layers for microelectromechanical systems
01/2005
01/12/2005	EP1494965A2 Method for producing a product having a structured surface
12/2004
12/16/2004	US20040253123 Integrated electrostatic peristaltic pump method and apparatus
11/2004
11/10/2004	EP1294636A4 Method of fabricating devices incorporating microelectromechanical systems using at least one uv curable tape
10/2004
10/14/2004	WO2004087563A2 Barrier layers for microelectromechanical systems
09/2004
09/30/2004	US20040191937 Barrier layers for microelectromechanical systems
09/21/2004	US6793974 Selecting a material for use as the expansive element
09/16/2004	US20040180377 Microfluidic apparatus comprising elastomeric layer and biopolymer membranes for use in high throughput proteomics
08/2004
08/05/2004	WO2004065290A2 Integrated electrostatic peristaltic pump method and apparatus
03/2004
03/25/2004	US20040059449 Selecting a material for use as the expansive element
02/2004
02/12/2004	WO2003086958A3 Method for producing a product having a structured surface
12/2003
12/31/2003	WO2004000721A2 Recirculating fluidic network and methods for using the same
10/2003
10/23/2003	WO2003086958A2 Method for producing a product having a structured surface
10/23/2003	CA2480854A1 Method for producing a product having a structured surface
07/2003
07/30/2003	EP1330411A1 Thermoelastic actuator design
03/2003
03/26/2003	EP1294636A1 Method of fabricating devices incorporating microelectromechanical systems using at least one uv curable tape
04/2002
04/25/2002	WO2002032806A1 Thermoelastic actuator design