| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 04/03/1990 | US4914742 Thin film orthogonal microsensor for air flow and method |
| 10/05/1989 | WO1989009477A1 Micromechanical device |
| 10/05/1989 | DE3809597A1 Mikromechanisches stellelement Micromechanical adjusting element |
| 10/03/1989 | US4870745 Methods of making silicon-based sensors |
| 09/06/1989 | EP0331208A2 Process for producing a metallic body having a multiplanar microstructure |
| 08/16/1989 | EP0328161A2 Process for producing a metallic body having a multiplanar microstructure |
| 07/13/1989 | WO1989005459A3 Device for measuring acceleration |
| 06/29/1989 | WO1989005968A1 Silicon-based sensors and method of making same |
| 06/15/1989 | WO1989005459A2 Device for measuring acceleration |
| 06/14/1989 | EP0319871A1 Thin film orthogonal microsensor for air flow and method for its fabrication |
| 10/25/1988 | CA1243535A1 Method for producing separating nozzle elements for the separation of fluid mixtures |
| 01/20/1988 | EP0253066A2 Process for obtaining multilevel micropatterns by X-ray lithography |
| 06/10/1987 | EP0224630A1 Process for producing a metallic body having a multiplanar microstructure |
| 04/28/1987 | US4661212 Method for producing a plurality of plate shaped microstructured metal bodies |
| 09/30/1986 | US4614119 Resonant hollow beam and method |
| 09/09/1986 | CA1211071A1 Method for producing separating nozzle elements |
| 07/15/1986 | US4600934 Method of undercut anisotropic etching of semiconductor material |
| 01/15/1986 | EP0167624A1 Method of undercut anisotropic etching of semiconductor material |
| 09/17/1985 | US4541977 Method for producing separating nozzle elements |
| 07/18/1985 | WO1985003165A1 Method of undercut anisotropic etching of semiconductor material |
| 06/05/1985 | EP0143223A1 Electroforming of separation nozzles |
| 06/04/1985 | US4521236 Method for preparation of porous glass film |
| 01/15/1985 | US4493753 Method for producing separating nozzle elements for the separation of fluid mixtures |
| 01/25/1984 | EP0098919A2 Method of manufacturing separating nozzles for gaseous or vaporous mixtures, which consist of separators with stop plates |
| 09/28/1983 | EP0089480A1 Method of manufacturing separating nozzle elements |
| 02/03/1976 | US3936329 Integral honeycomb-like support of very thin single crystal slices |