| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 12/28/2005 | EP1609177A2 Methods for nanoscale structures from optical lithography and subsequent lateral growth |
| 12/28/2005 | EP1609176A2 Method and systems for single- or multi-period edge definition lithography |
| 12/28/2005 | EP1608590A1 A method for manufacturing a membrane in a (111) surface of a (100) silicium wafer |
| 12/28/2005 | CN1233874C Laser electrochemical micromanufacturing apparatus |
| 12/27/2005 | US6980855 Microneedles for minimally invasive drug delivery |
| 12/27/2005 | US6979893 Packaged microelectromechanical device with lubricant |
| 12/27/2005 | US6979407 Process for producing an SPM sensor |
| 12/27/2005 | US6978613 Thermal bend actuator |
| 12/22/2005 | WO2005122285A2 Methods and devices for fabricating and assembling printable semiconductor elements |
| 12/22/2005 | WO2005122194A1 Microfabricated system for magnetic field generation and focusing |
| 12/22/2005 | WO2005082774A3 Method for making a planar cantilever mems switch |
| 12/22/2005 | WO2005081702A3 Integrated getter area for wafer level encapsulated microelectromechanical systems |
| 12/22/2005 | US20050282224 Method for carrying out a biochemical protocol in continuous flow in a microreactor |
| 12/22/2005 | US20050280879 Method and apparatus for scanning a beam of light |
| 12/22/2005 | US20050280331 Two-axis device and manufacturing method therefor |
| 12/22/2005 | US20050280106 MEMS structure and method for fabricating the same |
| 12/22/2005 | DE10257097B4 Verfahren zur Herstellung von mikroelektromechanischen Systemen (Microelectromechanical Systems: MEMS) mittels Silizium-Hochtemperatur-Fusionsbonden A process for the manufacture of micro electromechanical systems (Micro Electro Mechanical Systems: MEMS) using high temperature silicon fusion bonding |
| 12/22/2005 | DE102004027501A1 Mikromechanisches Bauelement mit mehreren Kavernen und Herstellungsverfahren Micromechanical component having a plurality of cavities and methods of manufacture |
| 12/22/2005 | DE102004021872B3 Chipkarte, Verfahren zum Herstellen einer Chipkarte und elektrisch leitfähiges Kontaktierungselement Chip card, method for producing a chip card and electrically conductive contact |
| 12/22/2005 | DE10130428B4 Verfahren zum flächenartigen Verbinden von Körpern A method for planar-like connecting bodies |
| 12/21/2005 | CN1711209A Micro fluid device and process for producing the same |
| 12/21/2005 | CN1711149A Method of connecting module layers suitable for the production of microstructure components and a microstructure component |
| 12/21/2005 | CN1709788A Method for preparing nano carbon tube micro structure |
| 12/20/2005 | US6977774 Polarizer |
| 12/20/2005 | US6977145 Method for carrying out a biochemical protocol in continuous flow in a microreactor |
| 12/15/2005 | WO2005119309A1 Method of producing reflection mirror and reflection mirror |
| 12/15/2005 | WO2005118463A1 Micromechanical component with a number of chambers and production method |
| 12/15/2005 | WO2005036596A3 Method and apparatus of etch process control in fabrications of microstructures |
| 12/15/2005 | WO2005019351A3 Methods for forming composite coatings on mems devices |
| 12/15/2005 | WO2003031136A3 Methods for patterning using liquid embossing |
| 12/15/2005 | US20050277217 Method for manufacturing micro-structural unit |
| 12/15/2005 | US20050275497 Microfabricated system for magnetic field generation and focusing |
| 12/15/2005 | US20050275072 Package having bond-sealed underbump |
| 12/15/2005 | DE19709137B4 Verfahren zur Herstellung und Magazinierung mindestens eines metallischen Mikrobauteils A process for producing and magazining at least one metallic microcomponent |
| 12/15/2005 | DE19539178B4 Halbleiterbeschleunigungssensor und Verfahren zu seiner Herstellung A semiconductor acceleration sensor and method for its preparation |
| 12/15/2005 | DE102005019195A1 Chemische Reaktionspatrone, Verfahren zum Herstellen einer chemischen Reaktionspatrone und Mechanismus zum Betätigen einer chemischen Reaktionspatrone Chemical reaction cartridge, method for producing a chemical reaction cartridge and actuating mechanism of a chemical reaction cartridge |
| 12/14/2005 | EP1603829A1 Mems devices on a nanometer scale |
| 12/14/2005 | EP1444543A4 Digital optical switch apparatus and process for manufacturing same |
| 12/14/2005 | CN1708450A Method for manufacturing a micro-electromechanical device and micro-electromechanical device obtained therewith |
| 12/13/2005 | US6975010 MEMS structure having a blocked-sacrificial layer support/anchor and a fabrication method of the same |
| 12/13/2005 | US6975009 Dual-wafer tunneling gyroscope and an assembly for making same |
| 12/13/2005 | US6974549 Method for forming fine grooves and stamper and structure with fine grooves |
| 12/08/2005 | WO2005116763A1 Method of forming graft pattern, graft pattern material, method of lithography, method of forming conductive pattern, conductive pattern, process for producing color filter, color filter and process for producing microlens |
| 12/08/2005 | US20050272179 Three-dimensional lithographic fabrication technique |
| 12/08/2005 | US20050272079 Thermal microvalves |
| 12/08/2005 | US20050269731 Method of fabricating element having microstructure |
| 12/08/2005 | US20050269286 Method of fabricating a nano-wire |
| 12/08/2005 | US20050269023 Method of cutting laminate with laser and laminate |
| 12/08/2005 | DE102005022574A1 Halbleiterspeicherbauelement mit Isolationsgrabenstruktur und zugehöriges Herstellungsverfahren The semiconductor memory device with grave isolation structure and associated production method |
| 12/08/2005 | DE102004052634A1 Verfahren zur Herstellung von Wärme-Flussmesselementen A process for producing heat-flow-measuring elements |
| 12/07/2005 | EP1602626A2 Method and system for manufacturing laminated microstructures |
| 12/07/2005 | EP1602624A1 Mems element and method of producing the same, and diffraction type mems element |
| 12/07/2005 | EP1602124A2 Micromachined assembly with a multi-layer cap defining cavity |
| 12/07/2005 | EP1601821A1 Electroplating pcb components |
| 12/07/2005 | CN1705138A Method of manufacturing a micro-electrical-mechanical system |
| 12/07/2005 | CN1230702C Optical switch |
| 12/07/2005 | CN1230376C Manufacture of membrane |
| 12/06/2005 | US6971266 Thermosensitive flow rate detecting element and method for the manufacture thereof |
| 12/01/2005 | WO2005113422A1 Imprinting of supported and free-standing 3-d micro-or nano-structures |
| 12/01/2005 | US20050266599 Method of manufacturing a micro-electrical-mechanical system |
| 12/01/2005 | US20050266598 Method for fabricating vertical offset structure |
| 12/01/2005 | US20050262676 Tactile sensor and method of manufacturing the same |
| 12/01/2005 | DE102004024285A1 Microstructure component for automotive and medical measuring and sensing has membrane supported by pore wall layers in macropores |
| 12/01/2005 | DE102004022177A1 Verfahren zur Herstellung eines Koplanarleitungssystem auf einem Substrat und nach einem derartigen Verfahren hergestelltes Bauelement zur Übertragung von elektromagnetischen Wellen A method for producing a Koplanarleitungssystem on a substrate and produced by such a process component for transmitting electromagnetic waves |
| 11/30/2005 | EP1599736A1 Capacitive acceleration sensor |
| 11/30/2005 | EP1599412A1 Separating semiconductor wafers having exposed micromechanical structures into individual chips |
| 11/30/2005 | EP1599410A2 Method for manufacturing microstructures having multiple microelements with through-holes |
| 11/29/2005 | US6970060 Micro relay of which movable contact remains separated from ground contact in non-operating state |
| 11/29/2005 | US6969639 Wafer level hermetic sealing method |
| 11/29/2005 | US6969635 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 11/29/2005 | US6969629 Method for manufacturing micro-structural unit |
| 11/29/2005 | US6969628 Microstructure and method for the production thereof |
| 11/29/2005 | US6969470 Method for fabricating ESI device using smile and delayed LOCOS techniques |
| 11/29/2005 | US6969425 Methods for reducing the curvature in boron-doped silicon micromachined structures |
| 11/24/2005 | WO2005110915A1 Reduction of etching charge damage in manufacture of microelectromechanical devices |
| 11/24/2005 | WO2005079304A3 Method and system to measure characteristics of a film disposed on a substrate |
| 11/24/2005 | WO2004091838A3 Method of soldering or brazing articles having surfaces that are difficult to bond |
| 11/24/2005 | US20050260793 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 11/24/2005 | US20050260792 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 11/24/2005 | US20050260783 Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems |
| 11/24/2005 | US20050260782 Conductive etch stop for etching a sacrificial layer |
| 11/24/2005 | US20050258571 Use of novel micro- and nano-imprinting techniques for making supported three-dimensional micro- and nano-structures for pixel segregation in OLED-based displays; enables assembly of polymers without a glass transition temperature and eliminates heating required to assemble thermoplastic polymers |
| 11/24/2005 | US20050258570 Imprinting of supported and free-standing 3-D micro- or nano-structures |
| 11/24/2005 | US20050257709 Systems and methods for three-dimensional lithography and nano-indentation |
| 11/23/2005 | EP1598857A1 Production method for antenna and production device for antenna |
| 11/23/2005 | EP1597193A1 Method for the production of a component comprising a semiconductor carrier and component |
| 11/23/2005 | CN1700423A Micromachining methods and systems |
| 11/23/2005 | CN1228237C Method for mfg. microoptical electromechanical device |
| 11/17/2005 | WO2005108963A1 Microfluidic cell sorter system |
| 11/17/2005 | US20050255669 Semiconductor device including isolation trench and method for fabricating the same |
| 11/17/2005 | US20050255645 Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems |
| 11/17/2005 | US20050255237 Additive and subtractive correction using direct write nanolithography; fine control over lateral dimensions and height; printing an ink from polymer-coated tip to substrate to form structure on substrate, wherein tip is scanned by position system which provides scanning feedback; biotechnology |
| 11/17/2005 | DE102004020173A1 Mikrostrukturiertes Bauelement und ein Verfahren zum Herstellen eines mikrostrukturierten Bauelements Microstructured component and a method for producing a microstructured component |
| 11/17/2005 | DE102004004262B3 Verfahren zur Herstellung von Mikroröhrchen aus Polymermaterialien A process for the production of microtubes from polymeric materials |
| 11/16/2005 | EP1594800A2 Method of manufacturing an electronic device and electronic device |
| 11/16/2005 | EP1594683A2 Method for manufacturing of polymer micro needle array with liga process |
| 11/16/2005 | EP1428245A4 Monolithic three-dimensional structures |
| 11/16/2005 | EP1360143B1 Method for producing surface micromechanical structures, and sensor |
| 11/16/2005 | CN1227153C Silicon-aluminum-silicon structure micromechanical processing method of full dry method |
| 11/15/2005 | US6964894 Apparatus and method of forming a device layer |