| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 08/17/2005 | CN1654311A Method for constructing non-close packing colloid balls ordered arrangement using soft-graving technology |
| 08/16/2005 | US6931171 Micromirror actuator and manufacturing method thereof |
| 08/16/2005 | US6930387 Dicing tape and die ejection method |
| 08/16/2005 | US6930367 anti-stiction channel, etched into film encapsulation structure, to provide access to at least a portion of mechanical structure disposed in chamber; and an anti-stiction plug, disposed over or in the anti-stiction channel, to re-seal chamber |
| 08/16/2005 | US6930366 Method for forming a cavity structure on SOI substrate and cavity structure formed on SOI substrate |
| 08/16/2005 | US6930364 Microelectronic mechanical system and methods |
| 08/16/2005 | US6930051 Method to fabricate multi-level silicon-based microstructures via use of an etching delay layer |
| 08/16/2005 | US6929784 Chlorotrifuorine gas generator system |
| 08/16/2005 | US6929721 Ion beam modification of residual stress gradients in thin film polycrystalline silicon membranes |
| 08/16/2005 | US6929030 Microfabricated elastomeric valve and pump systems |
| 08/16/2005 | US6928746 Drying resist with a solvent bath and supercritical CO2 |
| 08/11/2005 | WO2005072089A2 Controlled nanowire in permanent integrated nano-templates and method of fabricating sensor and transducer structures |
| 08/11/2005 | WO2005049479A3 Surface comprising an arrangement of a plurality of column-shaped elevations, and uses thereof |
| 08/11/2005 | WO2005005046A3 Fluidic mems device |
| 08/11/2005 | US20050176228 Controlled nanowire growth in permanent, integrated nano-templates and methods of fabricating sensor and transducer structures |
| 08/11/2005 | US20050176166 Wafer packaging and singulation method |
| 08/11/2005 | US20050175846 Electron beam evaporation deposition of glass; hermetic sealing; simple; accurately structured on substrates having varied dimensions |
| 08/11/2005 | US20050173770 Method and apparatus for making a MEMS scanner |
| 08/11/2005 | US20050173711 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 08/11/2005 | US20050172848 Device and method for transferring a pattern to a substrate |
| 08/11/2005 | US20050172717 Micromechanical device with thinned cantilever structure and related methods |
| 08/11/2005 | DE10345398B3 Hard mask for anisotropic etching has through openings with greater cross-section in first mask region than in second, transition region arranged between first and second mask regions with continuously reducing opening cross-section |
| 08/11/2005 | DE102004003413A1 Verfahren zum Verpacken von Halbleiterchips und entsprechende Halbleiterchipanordnung A method of packaging a semiconductor chip and corresponding semiconductor chip assembly |
| 08/10/2005 | EP1561724A1 Micromechanical device with thinned cantilever structure and related methods |
| 08/10/2005 | EP1561723A1 Micro fluid control device and process for producing the same |
| 08/10/2005 | EP1358489A4 Accelerometer protected by caps applied at the wafer scale |
| 08/10/2005 | EP1228401B1 Step and flash imprint lithography |
| 08/10/2005 | CN1653391A Nanoimprint resist |
| 08/10/2005 | CN1652995A Silicon carbide microelectromechanical devices with electronic circuitry |
| 08/10/2005 | CN1651968A Spatial light modulator using an integrated circuit actuator and method of making and using same |
| 08/10/2005 | CN1651333A Multicrystal grid conductive layer constructed integrated micro-mechano electric system device and its preparation method |
| 08/10/2005 | CN1651332A Manufacturing method of micro-mechanoelectric optical display unit |
| 08/09/2005 | US6926871 providing gas supply sources which are connected to a gas reaction chamber, containing a pure molecular halogen gas which is fed directly into the reaction chamber, where the gases react to form a process reactive gas which is collected |
| 08/09/2005 | US6925875 Packaged accelerometer |
| 08/04/2005 | WO2005070817A2 Methods and systems for providing mems devices with a top cap and upper sense plate |
| 08/04/2005 | US20050171480 Method and/or apparatus for puncturing a surface for extraction, in situ analysis, and/or substance delivery using microneedles |
| 08/04/2005 | US20050170657 Method of forming nanostructure |
| 08/04/2005 | US20050170614 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 08/04/2005 | US20050170557 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 08/04/2005 | US20050170547 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 08/04/2005 | US20050170546 Metod for making a micromechanical device by using a sacrificial substrate |
| 08/04/2005 | US20050170540 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 08/04/2005 | US20050168849 Method for fabricating an interference display unit |
| 08/04/2005 | US20050168306 MEMS device with integral packaging |
| 08/04/2005 | US20050167894 Patterned structure reproduction using nonsticking mold |
| 08/04/2005 | US20050167852 Method of manufacturing a structure having a projection |
| 08/04/2005 | US20050167272 includes providing substrates, then forming patterned layers on the substrates, and electroforming to form stamps having predetermined shapes without cutting |
| 08/04/2005 | US20050166980 Microfabricated elastomeric valve and pump systems |
| 08/04/2005 | CA2541201A1 Methods and systems for providing mems devices with a top cap and upper sense plate |
| 08/03/2005 | EP1559987A1 Micromechanical latching switch |
| 08/03/2005 | EP1558954A1 Method of producing a movable lens structure for a light shaping unit |
| 08/03/2005 | EP1558518A2 Method for production of a component with a micro-joint and component produced by said method |
| 08/03/2005 | EP1280617A4 Deposited thin films and their use in separation and sarcrificial layer applications |
| 08/03/2005 | CN1650383A Diaphragm activated micro electromechanical switch |
| 08/03/2005 | CN1649084A Process for producing a movable structure and etchant for silicon oxide film |
| 08/02/2005 | US6924914 Light deflector, method of manufacturing light deflector, optical device using light deflector, and torsion oscillating member |
| 08/02/2005 | US6924166 Process for sealing devices incorporating microstructures |
| 07/28/2005 | WO2005069057A1 Optical components and production therof |
| 07/28/2005 | US20050164118 Method of joining a workpiece and a microstructure light exposure |
| 07/28/2005 | US20050164016 Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates |
| 07/28/2005 | US20050163997 polymeric fibrils protruding from the surface of a substrate (backings); useful to make fabrics, objects that have adhesive surfaces, and coverings for solid objects such a wall paper |
| 07/28/2005 | US20050163931 Orientation coating method of the top of micro tip |
| 07/28/2005 | US20050162730 Micromirror unit and method of making the same |
| 07/28/2005 | US20050161757 Wafer level hermetic sealing method |
| 07/28/2005 | US20050161432 microelectromechanical devices such as micromirror devices, by oxidizing the deformable element in an oxygen-containing gas other than air while the deformable element is in the deflected state |
| 07/28/2005 | US20050161430 Method of forming atomic force microscope tips |
| 07/28/2005 | DE10359217A1 Elektrische Durchkontaktierung von HL-Chips Electrical through-HL-chips |
| 07/28/2005 | DE102004063740A1 Mikrobearbeitete Ultraschalltransducerzellen mit nachgiebiger Stützstruktur Micromachined Ultraschalltransducerzellen with resilient support structure |
| 07/28/2005 | DE102004063707A1 Gekrümmte mikrobearbeitete Ultraschalltransducerarrays und zugehörige Herstellungsverfahren Curved micromachined ultrasound transducer and associated manufacturing processes |
| 07/28/2005 | DE102004052952A1 Ausrichtungsverfahren zur Herstellung eines integrierten Ultraschalltransducerfeldes Alignment method for manufacturing an integrated Ultraschalltransducerfeldes |
| 07/28/2005 | DE102004008009A1 Integriertes Mikroventil und Verfahren zum Herstellen eines Mikroventils Integrated micro-valve and method of making a microvalve |
| 07/28/2005 | DE102004008008A1 Sensor for determining fluid flow, has fluid channel in functional layers to guide fluid flow, and insulation layer at its walls, where fluid flow is determined based on resistance value of layers in measurement zone |
| 07/27/2005 | EP1557396A2 Method of manufacture of microtubes of polymeric material |
| 07/27/2005 | EP1556949A2 Micro-electromechanical varactor with enhanced tuning range |
| 07/27/2005 | EP1556307A1 Method for manufacturing a micro-electromechanical device and micro-electromechanical device obtained therewith |
| 07/27/2005 | CN1647276A Method for coating metal surfaces and substrate having a coated metal surface as protection for copying process and elements concerned |
| 07/27/2005 | CN1647261A Method for connecting substrates and composite element |
| 07/27/2005 | CN1647258A Method for the production of structured layers on substrates |
| 07/27/2005 | CN1646722A Method for coating metal surfaces and substrate having a coated metal surface |
| 07/27/2005 | CN1646721A Method for forming housings for electronic components and electronic components that are hermetically encapsulated thereby |
| 07/27/2005 | CN1646418A Method for producing a product having a structured surface |
| 07/27/2005 | CN1644483A Etching process |
| 07/27/2005 | CN1212637C Microelectromechanical relay and method for production thereof |
| 07/26/2005 | US6922272 Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices |
| 07/26/2005 | US6920681 Method of preparing an electromagnetic actuator using a substrate |
| 07/21/2005 | WO2004097518A3 A method of forming stepped structures employing imprint lithography |
| 07/21/2005 | US20050159002 Sputtered spring films with low stress anisotropy |
| 07/21/2005 | US20050158914 Process for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 07/21/2005 | US20050158669 three-dimensional silicon substrate having patterns on the surfaces, covered with silicon oxide release layer and electroconductive plating surfaces, used for the fabrication of microstructure metal components |
| 07/21/2005 | US20050156320 Integrated device including connections on a separate wafer |
| 07/21/2005 | US20050156309 Semiconductor sensor |
| 07/21/2005 | US20050156302 System for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 07/21/2005 | DE102004036035A1 Verfahren zur Herstellung eines Halbleiterbauelements sowie ein Halbleiterbauelement, insbesondere ein Membransensor A process for producing a semiconductor device and a semiconductor device, in particular a membrane sensor |
| 07/21/2005 | DE102004036032A1 Fabrication of semiconductor component, e.g. micro-mechanical diaphragm sensor, by forming second region of second doping above first region of first doping, dissolving semiconductor material in first region, and depositing sealing layer |
| 07/20/2005 | EP1554626A1 A device having a light-absorbing mask and a method for fabricating same |
| 07/20/2005 | EP1456870B1 Resistless lithography method for producing fine structures |
| 07/20/2005 | EP1301432A4 Method of fabricating devices incorporating microelectromechanical systems using uv curable tapes |
| 07/20/2005 | EP1281108B1 Method and system for self-replicating manufacturing stations |
| 07/20/2005 | EP0939973B1 Process for manufacturing micromechanical functional elements |
| 07/20/2005 | CN1643659A Surface treatment method, semiconductor device, method of fabricating semiconductor device, and treatment apparatus |