| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 10/05/2006 | WO2006085917A3 A method of fabricating a nano-wire |
| 10/05/2006 | US20060219654 Silicon substrate comprising positive etching profiles with a defined slope angle, and production method |
| 10/05/2006 | DE102005015454A1 Semiconductor sensor component comprises a cavity container and components arranged in a cavity of container, which exhibit a sensor chip with a sensor range, where cavity container exhibits opening and sensor range is turned to opening |
| 10/05/2006 | DE102005013323A1 Kontaktierungsvorrichtung zum Kontaktieren einer integrierten Schaltung, insbesondere eines Chips oder eines Wafers, mit einer Testervorrichtung, entsprechendes Testverfahren und entsprechendes Herstellungsverfahren A contacting device for contacting an integrated circuit, in particular a chip or a wafer having a tester apparatus corresponding test method and corresponding production method |
| 10/05/2006 | CA2602103A1 Micromechanical component and method for fabricating a micromechanical component |
| 10/04/2006 | EP1707531A1 Process for manufacturing of buried microchannels and micro-decive with such microchannels |
| 10/04/2006 | EP1576420B8 Nano-imprint lithography method involving substrate pressing |
| 10/04/2006 | CN1840464A Method for manufacturing electric tunable optical filter chip of micro-electrical-mechanical system |
| 10/03/2006 | US7116462 Electrostatic drive type MEMS device and manufacturing method thereof, optical MEMS device, light modulation device, GLV device, and laser display |
| 10/03/2006 | US7115863 Probe for scanning probe lithography and making method thereof |
| 10/03/2006 | US7115480 Micromechanical strained semiconductor by wafer bonding |
| 10/03/2006 | US7115437 Micromachined device having electrically isolated components and a method for making the same |
| 10/03/2006 | US7115436 Integrated getter area for wafer level encapsulated microelectromechanical systems |
| 10/03/2006 | US7114361 Microscale compression molding of metals with surface engineered LIGA inserts |
| 09/28/2006 | WO2006101762A1 Method of manufacturing vibrating micromechanical structures |
| 09/28/2006 | US20060216904 Method of room temperature covalent bonding |
| 09/28/2006 | US20060216849 Substrate for stressed systems and method of making same |
| 09/28/2006 | US20060216847 Process for fabricating micromachine |
| 09/28/2006 | US20060214761 Micro-electromechanical actuator |
| 09/28/2006 | US20060214745 Air-gap type FBAR, and duplexer using the FBAR |
| 09/28/2006 | US20060214330 Use of novel micro- and nano-imprinting techniques for making supported three-dimensional micro- and nano-structures for pixel segregation in OLED-based displays; using polymers of lower glass transition temperatures and eliminates heating required to assemble thermoplastic polymers |
| 09/28/2006 | DE102005016243B3 Micromechanical component e.g. micro electro mechanical system structure, for use as e.g. micro sensor, has one metal layer of multi-layer structure extending at side over pile and electrically conductive membrane integrated in structure |
| 09/28/2006 | DE102005013916A1 Mikrofluidvorrichtung zur Separation von Emulsionen und Verfahren zur Herstellung einer Mikrofluidvorrichtung A microfluidic device for the separation of emulsions and methods of making a microfluidic device |
| 09/28/2006 | DE102005013300A1 Polymer structure on a substrate, to accommodate a piezo electric resonator, is formed by an adhesive bonding layer and a polymer layer reduced to an island at the required substrate surface zone |
| 09/28/2006 | DE102005012739A1 Verfahren zur Herstellung räumlicher Feinstrukturen A process for producing spatial fine structures |
| 09/27/2006 | EP1703925A1 In vivo diagnostic and therapy micro-device |
| 09/27/2006 | CN1839467A Semiconductor device |
| 09/27/2006 | CN1838332A Method and system for putting magnetic nanometer on object and its formed device |
| 09/27/2006 | CN1837828A Bonding technology for silicon micro acceleration transducer |
| 09/27/2006 | CN1837034A Carbon nanotube array growing device |
| 09/27/2006 | CN1837027A Method for making macroporous silicon micro-channel with high aspect ratio |
| 09/27/2006 | CN1837026A Microelectromechanical system having a flexible beam |
| 09/27/2006 | CN1276869C Method of utilizing pre-etched glass base material to reduce post-release time |
| 09/26/2006 | US7111513 Physical quantity sensor having protrusion and method for manufacturing the same |
| 09/21/2006 | WO2006098876A2 Microstructures, microdevices and related methods |
| 09/21/2006 | WO2006026993A9 A flexible nano-imprint stamp |
| 09/21/2006 | WO2005074358A3 Microreplication of transitory-image relief pattern based optically variable devices |
| 09/21/2006 | US20060211162 Crystal-structure-processed devices, methods and systems for making |
| 09/21/2006 | US20060210595 Device containing cytophilic islands that adhere cells separated by cytophobic regions |
| 09/21/2006 | US20060208765 High frequency integrated circuit (hfic) microsystems assembly and method for fabricating the same |
| 09/21/2006 | US20060208611 Micro movable device and method of making the same using wet etching |
| 09/21/2006 | US20060208343 Micromechanical strained semiconductor by wafer bonding |
| 09/21/2006 | US20060207972 Method for realizing microchannels in an integrated structure |
| 09/21/2006 | DE19639946B4 Mikromechanisches Bauelement Micromechanical component |
| 09/21/2006 | DE102005040293B3 Sound sensor has magnetoresistive sensor whereby sensor material of magnetoresistive sensor is an electrically anisotropic conductor, whereby the electric field and the magnetic field is applied to sensor material |
| 09/20/2006 | CN1836371A Mems type oscillator, process for fabricating the same, filter, and communication unit |
| 09/20/2006 | CN1835188A Micro movable device and method of making the same using wet etching |
| 09/20/2006 | CN1833999A Method of mfg micron/nanometer combined structural element |
| 09/20/2006 | CN1276449C 开关 Switch |
| 09/19/2006 | US7109123 Silicon etching method |
| 09/19/2006 | US7109121 Stress control of semiconductor microstructures for thin film growth |
| 09/19/2006 | US7109092 Method of room temperature covalent bonding |
| 09/19/2006 | US7108819 Process for fabricating high aspect ratio embossing tool and microstructures |
| 09/14/2006 | WO2006096138A1 Integrated mask |
| 09/14/2006 | US20060205106 Integrated micro electro-mechanical system and manufacturing method thereof |
| 09/14/2006 | US20060202385 Microneedles and microneedle fabrication |
| 09/14/2006 | DE20122617U1 Projection system with array of rectangular micro-mirror elements for providing images at angles depending on mirror tilt angle in light ray steering system |
| 09/14/2006 | DE20122616U1 Projection system with array of rectangular micro-mirror elements for providing images at angles depending on mirror tilt angle in light ray steering system |
| 09/14/2006 | DE20122615U1 Projection system with array of rectangular micro-mirror elements for providing images at angles depending on mirror tilt angle in light ray steering system |
| 09/14/2006 | DE20122614U1 Projection system with array of rectangular micro-mirror elements for providing images at angles depending on mirror tilt angle in light ray steering system |
| 09/14/2006 | DE102005010080A1 Verfahren zum Herstellen einer Dünnschicht-Struktur A method for manufacturing a thin-film structure |
| 09/14/2006 | DE102005009422A1 Micromechanical component, has diaphragm with oxidized pores layer, which is attached at n-doped ring-shaped frame area, and consisting of macro porous silicon with middle pore diameter in certain range |
| 09/13/2006 | EP1700822A2 Anhydrous HF release process for MEMS devices |
| 09/13/2006 | EP1700680A1 Easy release fluoropolymer molds for micro- and nano-pattern replication |
| 09/13/2006 | EP1485758A4 A method for fabricating a structure for a microelectromechanical systems (mems) device |
| 09/13/2006 | EP1153405B1 Electronic devices including micromechanical switches |
| 09/13/2006 | EP1007873B1 Thermal microvalves |
| 09/13/2006 | CN2817066Y Silicon-microbridge corrosion device of ferro-electric thin-film infrared detector |
| 09/13/2006 | CN1832899A Optical microelectromechanical structure |
| 09/13/2006 | CN1830496A '-'-shaped structure three-dimensional micre solid, hollow silicone meedle orknife |
| 09/13/2006 | CN1275066C Miniature movable device |
| 09/13/2006 | CN1274583C Method for producing carbon nano-tube device and carbon nano-tube device |
| 09/13/2006 | CN1274581C Microelectronic mechanism system structure and its producing method |
| 09/12/2006 | US7105447 Etching method |
| 09/12/2006 | US7105281 Forming a resin mold, interposing a photosensitive polymer forming layers, exposing the layered structure with an electron beam, ultraviolet radiation or visible radiaton, removing an exposed photosensitive polymer, and filling the vacant portion with a metal |
| 09/08/2006 | WO2006092474A1 Device comprising an encapsulated microsystem and production method thereof |
| 09/08/2006 | WO2006092114A1 Method for production of a thin-layer structure |
| 09/07/2006 | US20060199298 Creation of hermetically sealed dielectrically isolating trenches |
| 09/07/2006 | US20060198959 Method of producing a three-dimensional structure and fine three-dimensional structure |
| 09/07/2006 | US20060196409 High throughput screening of crystallization materials |
| 09/07/2006 | US20060196253 Resonant sensor and sensing system |
| 09/07/2006 | DE102004008241B4 Enzymgestützte Nanolithografie Enzyme-assisted nanolithography |
| 09/06/2006 | EP1697783A1 Optical components and production therof |
| 09/06/2006 | EP1697255A1 Method for containing a device and a corresponding device |
| 09/06/2006 | EP1381523A4 Freestanding polymer mems structures with anti stiction |
| 09/05/2006 | US7102268 Micromachine and method of fabricating the same |
| 09/05/2006 | US7101797 Substrate processing device and processing method |
| 09/05/2006 | US7101724 Method of fabricating semiconductor devices employing at least one modulation doped quantum well structure and one or more etch stop layers for accurate contact formation |
| 09/05/2006 | US7101502 Methods for forming openings in a substrate and apparatuses with these openings and methods for creating assemblies with openings |
| 09/05/2006 | US7100263 Structure manufacturing method |
| 08/31/2006 | US20060191627 Process for cutting out a block of material and formation of a thin film |
| 08/31/2006 | DE10345755B4 Verfahren zur Herstellung von strukturierten magnetischen Funktionselementen A process for the production of structured magnetic functional elements |
| 08/31/2006 | DE102006007431A1 Durch Halbleitersilizium-Verfahrenstechnik gebildeter Probenträger By semiconductor silicon process technology educated sample carrier |
| 08/31/2006 | DE102005008878A1 Verfahren zur Bestimmung der Position eines Fräswerkzeuges und ein zur Durchführung des Verfahrens bestimmter Bearbeitungskopf A method for determining the position of a milling tool and a specific method for carrying out the machining head |
| 08/31/2006 | DE102005008515A1 Microphone for e.g. signal processing module, has diaphragms, whose acoustic resonances lie in acoustic operating frequency range of microphone, where resonances of diaphragms are shifted against each other and overlap range of microphone |
| 08/31/2006 | DE102005007540A1 Mikromechanischer Membransensor mit Doppelmembran The micromechanical membrane sensor with double membrane |
| 08/30/2006 | EP1696053A1 Nano-array electrode manufacturing method and photoelectric converter using same |
| 08/30/2006 | EP1695937A2 Integrated micro electro-mechanical system and manufacturing method thereof |
| 08/30/2006 | EP1695734A1 Microneedles for minimally invasive drug delivery or for diagnostic sampling |
| 08/30/2006 | EP1694882A2 Method and system for forming a film of material using plasmon assisted chemical reactions |