| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 07/20/2005 | CN1643385A Device used for multiple experimental tests on solid materials and a flow control system |
| 07/20/2005 | CN1641840A Chip protection device |
| 07/20/2005 | CN1641839A Chip protection device |
| 07/20/2005 | CN1211706C Device for transferring a pattern on an object |
| 07/19/2005 | CA2344737C Encapsulated mems band-pass filter for integrated circuits and method of fabrication thereof |
| 07/14/2005 | WO2005063612A1 Fine metal structure, process for producing the same, fine metal mold and device |
| 07/14/2005 | US20050154567 Three-dimensional microstructures |
| 07/14/2005 | US20050153475 Microelectromechanical thin-film device |
| 07/14/2005 | US20050153247 microelectromechanical structures (MEMS) comprising three levels in a substrate, created by patterning and development of photoresist, then crosslinking, patterning and developing a second layer of photoresists, and etching to result in a three level structure, used as waveguides or transistors |
| 07/14/2005 | US20050151442 Micromechanical electrostatic resonator |
| 07/14/2005 | US20050151285 Method for manufacturing micromechanical structures |
| 07/14/2005 | US20050150404 Hardened nano-imprinting stamp |
| 07/13/2005 | EP1553049A2 Method for manufacturing moulded micromechanical structures |
| 07/13/2005 | EP1552721A2 Micromachined ultrasonic transducers and method of fabrication |
| 07/13/2005 | EP1551906A2 Polymers, methods of use thereof, and methods of decomposition thereof |
| 07/13/2005 | EP1315993A4 Micromirror elements, package for the micromirror elements, and protection system therefor |
| 07/13/2005 | CN1639863A Thermally enhanced microcircuit package and method of forming same |
| 07/13/2005 | CN1636912A Manufacturing method of structural body, droplet discharging head and droplet discharging device |
| 07/13/2005 | CN1210627C Alignment apparatus of array optical probe scanning integrated circuit photoetching system |
| 07/12/2005 | US6917459 MEMS device and method of forming MEMS device |
| 07/12/2005 | US6916511 Method of hardening a nano-imprinting stamp |
| 07/07/2005 | WO2005062364A1 Contoured insulator layer of silicon-on-onsulator wafers and process of manufacture |
| 07/07/2005 | WO2005062356A1 Device and method of manufacturing the same |
| 07/07/2005 | WO2005061378A2 Equipment and process for creating a custom sloped etch in a substrate |
| 07/07/2005 | WO2005061377A1 Method for manufacturing a nanostructure |
| 07/07/2005 | WO2005061376A1 Method for containing a device and a corresponding device |
| 07/07/2005 | WO2005061372A1 Method of producing a structure comprising at least one via |
| 07/07/2005 | WO2005060634A2 Method and system for forming a film of material using plasmon assisted chemical reactions |
| 07/07/2005 | WO2005060621A2 Method and/or apparatus for puncturing a surface for extraction, in situ analysis, and/or substance delivery using microneedles |
| 07/07/2005 | WO2004042797A3 Sacrificial compositions, methods of use thereof, and methods of decomposition thereof |
| 07/07/2005 | US20050148158 Method of dividing a substrate into a plurality of individual chip parts |
| 07/07/2005 | US20050148132 Alignment method for fabrication of integrated ultrasonic transducer array |
| 07/07/2005 | US20050147992 Methods and apparatus for analyzing polynucleotide sequences |
| 07/07/2005 | US20050146247 Curved micromachined ultrasonic transducer arrays and related methods of manufacture |
| 07/07/2005 | US20050146240 Micromachined ultrasonic transducer cells having compliant support structure |
| 07/07/2005 | US20050145962 Fabrication of MEMS devices with spin-on glass |
| 07/07/2005 | US20050145961 MEMS passivation with transition metals |
| 07/07/2005 | US20050145279 Integrated microvalve and method for manufacturing a microvalve |
| 07/07/2005 | DE10297731T5 Umkehrprägetechnik Reverse embossing technology |
| 07/07/2005 | CA2549475A1 Electromagnetic control of chemical catalysis |
| 07/07/2005 | CA2545700A1 Method and system for forming a film of material using plasmon assisted chemical reactions |
| 07/06/2005 | EP1549768A1 Microfluidic protein crystallography |
| 07/06/2005 | EP1549475A1 Imprint lithography processes and systems |
| 07/06/2005 | EP1254249A4 Deposited thin films and their use in detection, attachment, and bio-medical applications |
| 07/06/2005 | CN1636169A Method and system for self-replicating manufacturing stations |
| 07/06/2005 | CN1634759A Boundary elementary cell automation method for stimulating film two-dimensional deposition process |
| 07/05/2005 | US6914871 Hinge is resistant against pivoting of a mirror body for effective prevention thereof from being damaged |
| 07/05/2005 | US6914245 Infrared light detection array and method of producing the same |
| 07/05/2005 | US6913941 SOI polysilicon trench refill perimeter oxide anchor scheme |
| 07/05/2005 | US6913701 Method for fabricating integrated LC/ESI device using SMILE, latent masking, and delayed LOCOS techniques |
| 06/30/2005 | WO2005023703A3 Method for producing at least one cavity in a material |
| 06/30/2005 | WO2004087563A3 Barrier layers for microelectromechanical systems |
| 06/30/2005 | US20050142812 Manufacturing method of structural body, droplet discharging head and droplet discharging device |
| 06/30/2005 | US20050142687 Method for manufacturing a semicondutor component, as well as a semicondutor component, in particular a diaphragm sensor |
| 06/30/2005 | US20050142686 Method for forming at least one protective cap |
| 06/30/2005 | US20050142684 Method for fabricating a structure for a microelectromechanical system (MEMS) device |
| 06/30/2005 | US20050142242 Moulding assembly for forming at least one protective cap |
| 06/30/2005 | US20050142036 automatic analysis apparatus such as biosensor, chip, high throughput assays, and combinatorial chemistry apparatus having heaters formed membranes and supports |
| 06/30/2005 | US20050139940 Methods for depositing, releasing and packaging microelectromechanical devices on wafer substrates |
| 06/30/2005 | US20050139939 Wafer protection device |
| 06/30/2005 | US20050139871 Micro-electromechanical systems |
| 06/30/2005 | US20050139577 Microelectromechanical system comb actuator and manufacturing method thereof |
| 06/30/2005 | DE10392431T5 Herstellungsverfahren für Mikrokomponenten Manufacturing process for micro-components |
| 06/30/2005 | DE10355395A1 Manufacturing method of microstructured component, e.g. pressure sensor, rotary plate sensor, or mass flow sensor with underetched structure etc., with at least following process steps |
| 06/30/2005 | DE10350460A1 Verfahren zum Verbinden prozessierter Halbleiterscheiben bei dem neben dem festen isolierenden Zusammenfügen auch eine elektrische Verbindung hergestellt wird und entsprechende Anordnung A method of connecting a processed semiconductor wafers in which not only the fixed insulating assembly and an electrical connection is established and corresponding arrangement |
| 06/29/2005 | EP1548939A2 Duplexer and method of fabrication |
| 06/29/2005 | EP1547969A2 Integrated released beam layer structure fabricated in trenches and manufacturing method thereof |
| 06/29/2005 | EP1547968A2 Process for producing a movable structure and etchant for silicon oxide film |
| 06/29/2005 | EP1547132A1 Surface processing method |
| 06/29/2005 | EP1546030A2 Method for forming a microstructure from a monocrystalline substrate |
| 06/29/2005 | EP1546029A1 Method for the production of a micromechanical device, particularly a micromechanical oscillating mirror device |
| 06/29/2005 | EP1546028A2 Method for selectively covering a micro machined surface |
| 06/29/2005 | CN1633523A Method for forming a micro-pattern on a substrate by using capillary force |
| 06/29/2005 | CN1632926A Silicon microbridge corrosion unit for ferroelectric film infrared detector |
| 06/29/2005 | CN1631764A Electrochemical deep etching method and apparatus thereof |
| 06/28/2005 | US6912081 Making arrays of tiltable micromirrors, e.g., small mirrors, which can reflect light by making a flip-chip arrangement by etching into a first substrate to form mesas which act as the spacers inbetween which a second substrate is bonded moveable |
| 06/28/2005 | US6911611 Method for registering a deposited material with channel plate channels |
| 06/28/2005 | US6911345 Methods and apparatus for analyzing polynucleotide sequences |
| 06/23/2005 | WO2005044721A8 Mems devices with unreleased thin film components |
| 06/23/2005 | US20050136359 Multilayer MEMS device and method of making same |
| 06/23/2005 | US20050134401 Duplexer fabricated with monolithic FBAR and isolation part and a method thereof |
| 06/23/2005 | US20050133880 Electrical through-plating of semiconductor chips |
| 06/23/2005 | US20050133479 Equipment and process for creating a custom sloped etch in a substrate |
| 06/23/2005 | US20050132798 Method for gyroscope using SMS wafer and gyroscope fabricated by the same |
| 06/23/2005 | US20050132680 Dust bin and filter for robotic vacuum cleaner |
| 06/23/2005 | DE10353697A1 Oberfläche mit einer Anordnung einer Vielzahl säulenförmiger Erhebungen und deren Anwendungen Surface with an arrangement of a plurality of columnar projections and their applications |
| 06/23/2005 | DE10353060A1 Micro components manufacturing method, involves manufacturing three-dimensional master raw components of various shapes, and chemically, physically or mechanically separating master components and metal layer from micro component |
| 06/23/2005 | DE10240056B4 Hochtemperaturstabiler Metallemitter sowie Verfahren zur Herstellung High Temperature Stable metal emitter and methods of making |
| 06/22/2005 | EP1544165A2 Method for gyroscope using SMS wafer and gyroscope fabricated by the same |
| 06/22/2005 | EP1544164A2 Hermetic wafer-level packaging for MEMS devices with low-temperature metallurgy |
| 06/22/2005 | EP1544162A1 Micromachine and method of manufacturing the micromachine |
| 06/22/2005 | EP1544161A1 Three-dimensional structure element and method of manufacturing the element, optical switch, and micro device |
| 06/22/2005 | EP1543541A2 Notch-free etching of high aspect soi structures using alternating deposition and etching and pulsed plasma |
| 06/22/2005 | EP1542802A1 Microfluidic apparatus with integrated porous-substrates/sensor for real-time(bio)chemical molecule detection |
| 06/22/2005 | CN1630049A System and a method for fluid filling wafer level packages |
| 06/22/2005 | CN1207744C Bistable electromagnetic microdriver and mfg. method thereof |
| 06/22/2005 | CN1207737C Floating structure radio-frequency microinductor and its production process |
| 06/21/2005 | US6908861 Method for imprint lithography using an electric field |
| 06/16/2005 | WO2005054118A1 Fine product manufacturing method |
| 06/16/2005 | WO2005053847A1 Hybrid microfluidic chip and method for manufacturing same |