| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 06/14/2006 | DE102004059911A1 Verfahren zum Bilden eines Grabens in einer Mikrostruktur A method of forming a trench in a microstructure |
| 06/14/2006 | CN1788330A Barrier layers for microelectromechanical systems |
| 06/14/2006 | CN1787168A Method for mfg. silicon film on silicon base substrate with deep slot pattern |
| 06/14/2006 | CN1785794A Method of predetermining micro structure mechanical property |
| 06/14/2006 | CN1259709C Method for integral manufacturing integrated circuit device and micro electro-mechanical component |
| 06/13/2006 | US7061063 Microstructure and its fabrication method |
| 06/13/2006 | US7060590 Layer transfer method |
| 06/13/2006 | US7060522 Membrane structures for micro-devices, micro-devices including same and methods for making same |
| 06/13/2006 | US7060419 Photopolymers; exposure to light; three-dimensional pattern |
| 06/13/2006 | US7060227 Microfluidic devices with raised walls |
| 06/13/2006 | US7059321 Device and method for creating aerosols for drug delivery |
| 06/13/2006 | US7059319 Device and method for creating aerosols for drug delivery |
| 06/08/2006 | WO2006044066A3 Apparatus and process for monitoring migratory cell proliferation |
| 06/08/2006 | WO2005124827A3 Improved method and apparatus for the etching of microstructures |
| 06/08/2006 | US20060121735 Method for producing insulation structures |
| 06/08/2006 | DE19941363B4 Verfahren zur Herstellung eines Mikroaktorbauteils A method for producing a Mikroaktorbauteils |
| 06/08/2006 | DE102004058880A1 Integrierter Mikrosensor und Verfahren zur Herstellung Integrated micro sensor and process for producing |
| 06/08/2006 | DE102004058209A1 Verfahren und Vorrichtung zur Erzeugung von Strukturen aus Funktionsmaterialien Method and apparatus for producing structures from functional materials |
| 06/08/2006 | DE102004058103A1 Einrichtung zur Spalteinstellung Means for gap adjustment |
| 06/08/2006 | DE102004058064A1 Biochemisches Halbleiterchiplabor mit angekoppeltem Adressier- und Steuerchip und Verfahren zur Herstellung desselben Of the same biochemical semiconductor chip with a coupled laboratory addressing and control chip and method for producing |
| 06/07/2006 | EP1663852A1 Method for the production of etched holes and/or etched trenches, and membrane sensor unit |
| 06/07/2006 | EP1663850A1 Process for fabricating a micro-electro-mechanical system with movable components |
| 06/07/2006 | EP1663517A1 Method for reducing leaching in metal-coated mems |
| 06/07/2006 | EP1356511A4 Use of protective caps as masks at a wafer scale |
| 06/07/2006 | EP1283909A4 High density protein arrays for screening of protein activity |
| 06/06/2006 | US7057783 Light deflector, method of manufacturing light deflector and torsion oscillating member |
| 06/06/2006 | US7057262 High reflector tunable stress coating, such as for a MEMS mirror |
| 06/06/2006 | US7056649 Process for producing a tool insert for injection molding a part with two-stage microstructures |
| 06/06/2006 | US7055797 Micro-actuator, fabrication method thereof, and micro-actuating valve |
| 06/01/2006 | WO2006057102A1 Structure and process for producing structure |
| 06/01/2006 | WO2006056967A1 Mechanical microfluidic device, method for producing an intermediate stack and this microfluidic device, and a micropump |
| 06/01/2006 | WO2005015596B1 Method for the localized growth of nanothreads or nanotubes |
| 06/01/2006 | US20060115920 Semiconductor device having MEMS |
| 06/01/2006 | US20060113649 Light transmissive cover, device provided with same and methods for manufacturing them |
| 06/01/2006 | DE102004058214A1 Method for producing a micro fluid duct structure using polymer ceramic with a reactive filler which expands to compensate volume loss in the ceramic during sintering |
| 06/01/2006 | DE102004056028A1 Three dimensional structured substrate producing device, has vacuum-coating equipment for coating substrate in vacuum chamber, and laser provided for processing substrate in vacuum chamber |
| 05/31/2006 | EP1662235A2 Acceleration sensor |
| 05/31/2006 | CN1778663A Method and apparatus for preventing metal/silicon spiking in MEMS devices |
| 05/31/2006 | CN1258199C Deep etching plane magnet coil and making method |
| 05/31/2006 | CN1257833C Integrated circuit component element and manufacturing method of micro electromechanical system |
| 05/30/2006 | US7053730 Fabricating methods for air-gap type FBARs and duplexers including securing a resonating part substrate to a cavity forming substrate |
| 05/30/2006 | US7052821 Sacrificial compositions, methods of use thereof, and methods of decomposition thereof |
| 05/30/2006 | US7052653 Microsize driving device and method for preparation thereof |
| 05/30/2006 | US7052623 Method for processing silicon using etching processes |
| 05/30/2006 | US7052545 High throughput screening of crystallization of materials |
| 05/30/2006 | US7052464 Alignment method for fabrication of integrated ultrasonic transducer array |
| 05/30/2006 | US7051418 Supporting frames; flushing apertures; flat , self-supporting microstructures; etching; heating using electrical resistant grids |
| 05/25/2006 | US20060110895 Method of fabricating silicon-based MEMS devices |
| 05/25/2006 | US20060110893 Glass-type planar substrate, use thereof, and method for the production thereof |
| 05/25/2006 | US20060110854 Methods and systems for providing MEMS devices with a top cap and upper sense plate |
| 05/25/2006 | US20060110843 Method of manufacturing an external force detection sensor |
| 05/25/2006 | US20060108576 Layer system comprising a silicon layer and a passivation layer, method for production a passivation layer on a silicon layer and the use of said system and method |
| 05/24/2006 | EP1659094A1 Method of producing three-dimensional structure and fine three-dimensional structure |
| 05/24/2006 | EP1659093A2 Method of manufacturing a microstructure |
| 05/24/2006 | EP1659092A1 Method for fabricating an electrode in a packaging substrate |
| 05/24/2006 | EP1658344A1 Microsystem component and method for gluing microcomponents to a substrate |
| 05/24/2006 | DE10331714B4 Verfahren zur Strukturierung der Oberfläche eines Substrats Method for structuring the surface of a substrate |
| 05/24/2006 | CN1776526A Warm-up flash two-purpose nano impression device |
| 05/23/2006 | US7049915 Bistable magnetic actuator |
| 05/23/2006 | US7049904 Seesaw-type MEMS switch and method for manufacturing the same |
| 05/23/2006 | US7049165 Method of manufacturing an external force detection sensor |
| 05/23/2006 | US7049164 Microelectronic mechanical system and methods |
| 05/23/2006 | US7049051 Process for forming and acoustically connecting structures on a substrate |
| 05/18/2006 | US20060102173 Device and method for creating aerosols for drug delivery |
| 05/18/2006 | US20060101912 Micromechanical device with thinned cantilever structure and related methods |
| 05/17/2006 | EP1657553A2 Method of manufacturing an external force detection sensor |
| 05/17/2006 | EP1356513A4 Molding of protective caps |
| 05/17/2006 | CN1774388A Stack structure and method of manufacturing the same |
| 05/17/2006 | CN1773725A MOS transistor with deformable gate |
| 05/17/2006 | CN1772594A Portable Xef2 etch chamber and using method thereof |
| 05/17/2006 | CN1256270C Method for producing cantilever beam type micro electromechanical system |
| 05/16/2006 | US7045878 Selectively bonded thin film layer and substrate layer for processing of useful devices |
| 05/16/2006 | US7045874 Micromechanical strained semiconductor by wafer bonding |
| 05/16/2006 | US7045869 Semiconductor wafer comprising micro-machined components |
| 05/16/2006 | US7045459 Thin film encapsulation of MEMS devices |
| 05/16/2006 | US7045382 Method for producing micromechanic sensors and sensors produced by said method |
| 05/11/2006 | WO2006049731A1 Method of singulating electronic devices |
| 05/11/2006 | WO2005095263A3 Methods of forming alpha and beta tantalum films with controlled and new microstructures |
| 05/11/2006 | US20060099811 Method for structuring of silicon substrates for microsystem technological device elements and associated silicon substrate |
| 05/11/2006 | US20060099116 For providing a fluid sample directly from the microfluidic device to an analytical device such as mass spectrometer; deliver nanoliter scale samples with a uniform low sample flow rate for direct analysis |
| 05/11/2006 | US20060098311 Micro-mirror and a method for fabricating the same |
| 05/11/2006 | US20060096947 Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void |
| 05/11/2006 | US20060096944 Method for the production of a micromechanical device, particularly a micromechanical oscillating mirror device |
| 05/11/2006 | US20060096078 Device for the actively-controlled and localised deposition of at least one biological solution |
| 05/11/2006 | DE19820816B4 Bondpadstruktur und entsprechendes Herstellungsverfahren Bondpadstruktur and manufacturing method thereof |
| 05/11/2006 | DE10229231B9 Verfahren zum Herstellen eines Strahlung emittierenden und/oder empfangenden Halbleiterchips mit einer Strahlungsein- und/oder -auskoppel-Mikrostruktur A method of manufacturing a radiation-emitting and / or receiving semiconductor chip having a radiation entrance and / or microstructure -auskoppel |
| 05/11/2006 | DE10100438B4 Verfahren zur Herstellung eines Sensorelements und Sensorelement A process for producing a sensor element and sensor element |
| 05/11/2006 | DE10060433B4 Verfahren zur Herstellung eines Fluidbauelements, Fluidbauelement und Analysevorrichtung A method for producing a fluid device, the fluid device and analysis device |
| 05/10/2006 | EP1655610A2 Method of manufacturing an external force detection sensor |
| 05/10/2006 | EP1655269A1 Method of fabricating mold for glass press |
| 05/10/2006 | EP1654191A1 Method of manufacturing nanochannels and nanochannels thus fabricated |
| 05/10/2006 | CN1771191A Method for fabricating microstructure and microstructure |
| 05/10/2006 | CN1769993A Methods of fabricating interferometric modulators by selectively removing a material |
| 05/10/2006 | CN1769992A Methods of fabricating interferometric modulators by selectively removing a material |
| 05/10/2006 | CN1255842C Method for forming barrier structures on substrate and its resulting article |
| 05/09/2006 | US7042105 Methods for dicing wafer stacks to provide access to interior structures |
| 05/09/2006 | US7041436 Method for the manufacture of micro structures |
| 05/09/2006 | US7041433 Flat coil and lithographic method for producing microcomponents |
| 05/09/2006 | US7041225 Micromechanical component and method for producing the same |
| 05/09/2006 | US7041224 Method for vapor phase etching of silicon |