| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 02/22/2006 | CN1736851A Metal micro member batch processing method |
| 02/22/2006 | CN1736850A Mobile microstructure cosupported by silicon and silicon dioxide, and its production method |
| 02/22/2006 | CN1242913C Gyroscope and fabrication method thereof |
| 02/21/2006 | US7002730 Mirror device, optical switch, thin film elastic structure, and thin elastic structure producing method |
| 02/21/2006 | US7001828 Method and apparatus for manufacturing a device having a moveable structure |
| 02/21/2006 | US7001793 Method of protecting microfabricated devices with protective caps |
| 02/16/2006 | WO2006017009A2 Surface lubrication microstructures |
| 02/16/2006 | WO2005078509A3 Mems scanning system with improved performance |
| 02/16/2006 | WO2005060634A3 Method and system for forming a film of material using plasmon assisted chemical reactions |
| 02/16/2006 | US20060035386 Channeled fractionation apparatus for separating, capturing and detecting proteins |
| 02/16/2006 | US20060035164 Replication and transfer of microstructures and nanostructures |
| 02/16/2006 | DE102005031379A1 Verfahren zur Herstellung eines Halbleitersensors zur Erfassung einer physikalischen Größe A process for producing a semiconductor sensor for detecting a physical quantity |
| 02/16/2006 | DE102005029425A1 Bilden einer Mehrzahl von Dünnfilmbauelementen Forming a plurality of thin-film components |
| 02/16/2006 | DE102004062972A1 Complementary metal oxide semiconductor image sensor, for converting optic image to electric signal, has microlens with second insulating layer covering projected portion of first insulating layer having uneven surface to form dome shape |
| 02/16/2006 | DE102004037304A1 Mikrostrukturierter Sensor und Verfahren zu seiner Herstellung Microstructured sensor and method for its preparation |
| 02/15/2006 | EP1626438A2 Anisotropic etching agent composition used for manufacturing of micro-structures of silicon and etching method |
| 02/15/2006 | CN1733593A Method for preparing sulfonic silane - rare earth nanometer composite film on single-crystal silicon slice surface |
| 02/15/2006 | CN1242285C Micro mirror unit and method of making the same |
| 02/14/2006 | US6999236 Optical-interference type reflective panel and method for making the same |
| 02/14/2006 | US6998286 Thin film-structure and a method for producing the same |
| 02/14/2006 | US6998059 Method for manufacturing a silicon sensor and a silicon sensor |
| 02/14/2006 | US6997040 Gas sensor and fabrication method thereof |
| 02/09/2006 | WO2005078772A8 Method and apparatus for making a mems scanner |
| 02/09/2006 | US20060030120 Method of performing double-sided processes upon a wafer |
| 02/09/2006 | US20060030074 Method for connecting substrate and composite element |
| 02/09/2006 | US20060027949 Device of microstructure imprint for pattern transfer and method of the same |
| 02/09/2006 | US20060027885 MEMS device with non-standard profile |
| 02/09/2006 | US20060027532 Method for selectively removing material from the surface of a substrate, masking material for a wafer, and wafer with masking material |
| 02/09/2006 | US20060027523 Micromachined fluidic device and method for making same |
| 02/09/2006 | US20060027522 Method of producing a MEMS device |
| 02/09/2006 | DE102004035267B3 Formkörper, Verfahren zu seiner Herstellung und seine Verwendung Molded articles, process for its preparation and its use |
| 02/08/2006 | EP1622826A1 Micromechanical component and method for its production |
| 02/08/2006 | CN1732123A Method of forming semiconductor devices through epitaxy |
| 02/08/2006 | CN1732045A Microfluidic system utilizing thin-film layers to route fluid |
| 02/08/2006 | CN1731595A Micro-ultrasonic device making technics facing facing orientation and distance-measuring application |
| 02/08/2006 | CN1731564A Method for etching hole with different aspect ratio |
| 02/08/2006 | CN1730378A Integration manufacturing method of cantilever beam type dot needle-point based on silicon oxide film |
| 02/08/2006 | CN1730377A Process for preparing sulfhydyl silane - rare earth self lubricating composite film on monocrystalline silicon slice surface |
| 02/07/2006 | US6995890 Interference display unit |
| 02/07/2006 | US6995440 MEMS switch having hexsil beam and method of integrating MEMS switch with a chip |
| 02/07/2006 | US6995336 Method for forming nanoscale features |
| 02/07/2006 | US6995040 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 02/07/2006 | US6995034 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 02/07/2006 | US6995028 Method of manufacturing thermal type flow sensing elements |
| 02/02/2006 | WO2006012614A2 Fabrication methods and multifunctional substrate materials for chemical and biological analysis in microfluidic systems |
| 02/02/2006 | DE102005031408A1 Sensor für eine physikalische Grösse, sowie Verfahren zu dessen Herstellung Sensor for a physical quantity, and methods for its preparation |
| 02/02/2006 | DE102004033424A1 Verfahren zur Modifikation einer Mikrostruktur eines Gegenstandes A process for the modification of a microstructure of an object |
| 02/01/2006 | EP1620356A1 Method for producing a micromachined layered device |
| 02/01/2006 | EP1620222A1 Method of connecting module layers suitable for the production of microstructure components and a microstructure component |
| 02/01/2006 | EP1336097A4 Microfluidic device based sample injection system for analytical devices |
| 02/01/2006 | CN1729086A Micro-mechanical thermo structure and method for manufacturing such micro-mechanical structure |
| 01/31/2006 | US6992367 Process for forming a buried cavity in a semiconductor material wafer and a buried cavity |
| 01/31/2006 | US6991953 Microelectronic mechanical system and methods |
| 01/26/2006 | US20060019027 Method for forming microelectronic spring structures on a substrate |
| 01/26/2006 | DE112004000353T5 Kapazitiver Beschleunigungssensor Capacitive Accelerometer |
| 01/26/2006 | DE10359688B4 Reduzieren von Oxiden auf einem Schaltfluid in einem fluid-basierten Schalter Reducing oxides on a switching fluid in a fluid-based switch |
| 01/25/2006 | EP1618602A2 A method of forming stepped structures employing imprint lithography |
| 01/25/2006 | EP1618600A1 Micro-machined device structures having on and off-axis orientations |
| 01/25/2006 | EP1618599A2 Method of making a nanogap for variable capacitive elements and device having a nanogap |
| 01/25/2006 | EP1144973B1 Method of producing calibration structures in semiconductor substrates |
| 01/25/2006 | CN1725439A Manufacturing method of multifunction integrated sensor chip |
| 01/25/2006 | CN1238721C Sample analyzing method |
| 01/24/2006 | US6988317 Valve integrally associated with microfluidic liquid transport assembly |
| 01/24/2006 | CA2248576C Method of forming articles and patterning surfaces via capillary micromolding |
| 01/19/2006 | US20060014392 Method for producing a semiconductor component and a semiconductor component produced according to the method |
| 01/19/2006 | US20060014358 Method for microfabricating structures using silicon-on-insulator material |
| 01/19/2006 | US20060014312 Method for stripping sacrificial layer in MEMS assembly |
| 01/19/2006 | US20060012849 Method of producing a movable lens structure for a light shaping unit |
| 01/19/2006 | US20060012005 Method for producing a component comprising a conductor structure that is suitable for use at high frequencies |
| 01/19/2006 | US20060011480 Separation apparatus, method of fabricating the same, and analytical system |
| 01/19/2006 | US20060011478 Integration of biochemical protocols in a continuous flow microfluidic device |
| 01/19/2006 | DE102004055040A1 Verfahren zum Schneiden eines Laminats mit einem Laser und Laminat A method of cutting a laminate with a laser and laminate |
| 01/18/2006 | EP1616223A2 Imprint lithography process and sensor |
| 01/18/2006 | CN1721319A Spacer fabrication process for manufacturing reflective stealth mirrors and other mems devices |
| 01/17/2006 | US6987051 Method of making cavities in a semiconductor wafer |
| 01/12/2006 | US20060007515 Surface lubrication in microstructures |
| 01/12/2006 | DE112004000219T5 Gemischtphase-Kompressions-Tantaldünnfilme und Verfahren zum Herstellen derselben Mixed phase compression tantalum thin films and methods of making the same |
| 01/12/2006 | DE102004054745A1 Verfahren zur Herstellung eines eine Mikrostruktur aufweisenden Elements A process for producing a microstructure bearing element |
| 01/12/2006 | DE102004011145B4 Microphone e.g. semiconductor-condenser microphone, for use in mobile phone, has membrane structure with boundary region, which is not movable due to pressure, on which carrier is attached, where region and opposing structure have recesses |
| 01/11/2006 | EP1614654A2 Electronic device having a plurality of conductive beams |
| 01/11/2006 | EP1614145A2 Silicon substrate comprising positive etching profiles with a defined slope angle, and production method |
| 01/11/2006 | CN1720193A Micromachine and method of producing the same |
| 01/11/2006 | CN1719240A Micro cantilever resonant type zinc phthalocynate film gas sensor and its preparation method |
| 01/11/2006 | CN1236359C Method in connection with the production of template and the template thus produced |
| 01/05/2006 | WO2004105084A3 Method of room temperature covalent bonding |
| 01/05/2006 | US20060003560 Method for fabricating a shadow mask in a trench of a microelectronic or micromechanical structure |
| 01/05/2006 | US20060001114 Apparatus and method of wafer level package |
| 01/05/2006 | DE102004029084A1 Force sensor, has closure diaphragm for locking recess to form cavity that is filled with transmitting medium which transforms influencing force on closure diaphragm to deform sensor diaphragm |
| 01/04/2006 | EP1461286A4 Differential stress reduction in thin films |
| 01/04/2006 | CN1717437A Sacrificial compositions, methods of use thereof, and methods of decomposition thereof |
| 01/04/2006 | CN1716640A Method for producing variable capacitor of micro electromechanical system |
| 01/04/2006 | CN1715178A Method for producing micro oxygen pump based on hydrogen peroxide solution decomposition |
| 01/03/2006 | US6982419 Probe with hollow waveguide and method for producing the same |
| 01/03/2006 | US6982185 Single crystal, dual wafer, tunneling sensor or switch with silicon on insulator substrate and a method of making same |
| 01/03/2006 | US6982184 Method of fabricating MEMS devices on a silicon wafer |
| 12/29/2005 | WO2005124869A1 Micro-mechanical structure and method for manufacturing the same |
| 12/29/2005 | US20050287820 Mold for nano imprinting |
| 12/29/2005 | US20050285216 Etching process for micromachining materials and devices fabricated thereby |
| 12/29/2005 | DE102004029516B3 Herstellungsverfahren für eine Schattenmaske in einem Graben einer mikroelektronischen oder mikromechanischen Struktur sowie Verwendung derselben Manufacturing method of a shadow mask in a trench of a microelectronic or micromechanical structure and using the same |
| 12/29/2005 | DE102004028476A1 Producing openings in semiconducting wafers and layers with plasma etching and electrostatic wafer holder involves applying metal coating to rear of wafer before etching to prevent etching of wafer holder |