| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 03/05/2015 | WO2015031473A1 Rf mems electrodes with limited grain growth |
| 03/05/2015 | WO2015030806A1 Substrate etch |
| 03/05/2015 | WO2015030803A1 Substrate etch |
| 03/05/2015 | WO2015030802A1 Substrate etch |
| 03/05/2015 | WO2015030657A1 Thin capping for mems devices |
| 03/05/2015 | US20150061455 Vibration device and method of manufacturing vibration device |
| 03/05/2015 | US20150061047 Capacitive pressure sensors and fabrication methods thereof |
| 03/05/2015 | US20150061046 Wafer level method of sealing different pressure levels for mems sensors |
| 03/05/2015 | US20150061045 MEMS Device |
| 03/05/2015 | US20150061044 Sequential wafer bonding |
| 03/05/2015 | US20150060956 Integrated mems pressure sensor with mechanical electrical isolation |
| 03/05/2015 | US20150060955 Integrated mems microphone with mechanical electrical isolation |
| 03/05/2015 | US20150060954 CMOS-MEMS Integrated Flow for Making a Pressure Sensitive Transducer |
| 03/05/2015 | US20150059485 Micromechanical sensor system and corresponding manufacturing method |
| 03/05/2015 | US20150059449 New Lithographic Method |
| 03/05/2015 | DE102014216742A1 MEMS-Vorrichtung MEMS device |
| 03/05/2015 | DE102014112597A1 Vibrationsvorrichtung und Verfahren zur Herstellung einer Vibrationsvorrichtung Vibration device and method for manufacturing a vibrating device |
| 03/05/2015 | DE102014112495A1 Sensoranordnung Sensor array |
| 03/05/2015 | DE102013217768A1 Verfahren zur Herstellung eines Substrats, Substrat, Metall-Oxid-Halbleiter-Feldeffekttransistor mit einem Substrat, mikroelektromechanisches System mit einem Substrat, und Kraftfahrzeug A method for producing a substrate, substrate, MOSFET with a substrate, micro-electro-mechanical system with a substrate, and motor vehicle |
| 03/05/2015 | DE102013217726A1 Mikromechanisches Bauteil für eine kapazitive Sensorvorrichtung und Herstellungsverfahren für ein mikromechanisches Bauteil für eine kapazitive Sensorvorrichtung Micromechanical element for a capacitive sensor device and manufacturing method for a micromechanical component for a capacitive sensor device |
| 03/05/2015 | DE102013217349A1 Mikromechanische Sensoranordnung und entsprechendes Herstellungsverfahren Micro-mechanical sensor device and manufacturing method thereof |
| 03/05/2015 | DE102013217318A1 Herstellungsverfahren für eine mikromechanische Sensoranordnung mit Rückseitentrench und entsprechende mikromechanische Sensoranordnung Manufacturing method for a micromechanical sensor arrangement with back trench and corresponding micromechanical sensor arrangement |
| 03/03/2015 | US8969979 MEMS devices |
| 03/03/2015 | US8969978 TMAP sensor systems and methods for manufacturing those |
| 03/03/2015 | US8969203 Etching technique for creation of thermally-isolated microstructures |
| 03/03/2015 | US8969176 Laminated transferable interconnect for microelectronic package |
| 03/03/2015 | US8968673 Method for functionalising fluid lines contained in a micromechanical device, micromechanical device including functionalised lines, and method for manufacturing same |
| 02/26/2015 | WO2015026368A1 Mems devices utilizing a thick metal layer of an interconnect metal film stack |
| 02/26/2015 | WO2015025822A1 High-density microchamber array and manufacturing method for same |
| 02/26/2015 | WO2015025691A1 Method for manufacturing optical interferometer |
| 02/26/2015 | US20150056733 Manufacturing method of mirco-electro-mechanical system device and mirco-electro-mechanical system device made thereby |
| 02/26/2015 | US20150056725 Method for producing a sensor |
| 02/26/2015 | US20150055205 Mems display incorporating extended height actuators |
| 02/26/2015 | US20150054101 Micromechanical component and method for manufacturing a micromechanical component |
| 02/26/2015 | US20150054100 Micro-electro-mechanical system (mems) and related actuator bumps, methods of manufacture and design structures |
| 02/26/2015 | US20150054097 Method for Manufacturing a MEMS Device and MEMS Device |
| 02/26/2015 | US20150054095 Capacitive micro-machined ultrasonic transducer and method of singulating the same |
| 02/26/2015 | US20150053003 Method and apparatus for fabricating electrostatic capacitance-type acceleration sensor and electrostatic capacitance-type acceleration sensor |
| 02/26/2015 | US20150053002 Micromechanical sensor and method for manufacturing a micromechanical sensor |
| 02/26/2015 | DE102014216777A1 Verfahren zum herstellen einer mems-vorrichtung und mems-vorrichtung A method of manufacturing a MEMS device and the MEMS device |
| 02/26/2015 | DE102013216935A1 Drehratensensor mit voreingestelltem Quadratur-Offset Rotation rate sensor with preset quadrature offset |
| 02/26/2015 | DE102013216915A1 Mikromechanischer Sensor und Verfahren zur Herstellung eines mikromechanischen Sensors Micromechanical sensor and method for manufacturing a micromechanical sensor |
| 02/26/2015 | DE102013216907A1 Mikromechanischer Sensor Micromechanical sensor |
| 02/26/2015 | DE102013216901A1 Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component and process for producing a micromechanical component |
| 02/26/2015 | DE102013216898A1 Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component and process for producing a micromechanical component |
| 02/25/2015 | EP2840589A1 Improved separation method between an active area of a substrate and the rear surface thereof or a portion of the rear surface thereof |
| 02/25/2015 | EP2840060A1 Capacitive transducer and method for manufacturing the same |
| 02/25/2015 | EP2840059A1 Manufacturing process for a micro-mechanical component and component manufactured with this process |
| 02/24/2015 | US8966411 Standardized topographical arrangements for template regions that orient self-assembly |
| 02/24/2015 | US8962487 Method for making microchannels on a substrate, and substrate including such microchannels |
| 02/24/2015 | US8962389 Microelectronic packages including patterned die attach material and methods for the fabrication thereof |
| 02/24/2015 | US8962368 CMOS compatible MEMS microphone and method for manufacturing the same |
| 02/24/2015 | US8962367 MEMS device with release aperture |
| 02/24/2015 | US8962069 Process for making a structure with hermetically closed cavity under controlled atmosphere |
| 02/24/2015 | US8961855 High aspect ratio adhesive structure and a method of forming the same |
| 02/24/2015 | US8961853 Silicon pen nanolithography |
| 02/24/2015 | US8961802 Method of forming fine pattern, and developer |
| 02/24/2015 | US8961799 Nano-structured surface |
| 02/19/2015 | WO2015023510A1 Stacked via structures and methods of fabrication |
| 02/19/2015 | US20150048714 Electroactive polymer structures printed with varying compositions of ions |
| 02/19/2015 | US20150048046 Method for forming pattern, and polysiloxane composition |
| 02/19/2015 | DE102013107947A1 Verfahren zur Herstellung einer medizinischen Vorrichtung, Verfahren zum Modifizieren der Oberfläche einer medizinischen Vorrichtung, medizinische Vorrichtung und Schichtverbund mit einem Substrat A method for manufacturing a medical device, method for modifying the surface of a medical device, medical device, and multilayer composite to a substrate |
| 02/18/2015 | EP2836456A1 Method for producing trench-like depressions in the surface of a wafer |
| 02/18/2015 | EP2836455A1 Membrane arrangement for a micro-electromechanical measuring transducer and method for producing a membrane arrangement |
| 02/17/2015 | US8958574 Strain and pressure sensing device, microphone, method for manufacturing strain and pressure sensing device, and method for manufacturing microphone |
| 02/17/2015 | US8956958 Method for the production of a substrate comprising embedded layers of getter material |
| 02/17/2015 | US8956904 Apparatus and method of wafer bonding using compatible alloy |
| 02/17/2015 | US8956903 Planar cavity MEMS and related structures, methods of manufacture and design structures |
| 02/17/2015 | US8956884 Process for reconditioning semiconductor surface to facilitate bonding |
| 02/17/2015 | US8956577 Microfluidic device comprising a biodegradable material and method of making such a microfluidic device |
| 02/17/2015 | US8956545 Hollow microneedle having variable appearance and method for manufacturing the same |
| 02/17/2015 | US8956544 Method for manufacturing a micromechanical structure, and micromechanical structure |
| 02/12/2015 | WO2015018590A1 Method of designing lithography features by self-assembly of block copolymer |
| 02/12/2015 | WO2015018571A1 Method for producing a microelectromechanical transducer |
| 02/12/2015 | US20150044808 Method of fabricating integrated semiconductor device and structure thereof |
| 02/12/2015 | US20150044807 Ultrasonic Sensor Microarray and Method of Manufacturing Same |
| 02/12/2015 | US20150041929 Packaged Microphone with Multiple Mounting Orientations |
| 02/12/2015 | US20150041928 Wafer encapsulated microelectromechanical structure |
| 02/12/2015 | US20150041927 Mems device with differential vertical sense electrodes |
| 02/12/2015 | US20150041315 Microchip structure and treatments for electrochemical detection |
| 02/12/2015 | US20150040368 Method for producing structured optical components |
| 02/12/2015 | DE102013108464A1 Verfahren zur Herstellung eines mikroelektromechanischen Wandlers A process for producing a micro-electromechanical transducer |
| 02/11/2015 | EP2834840A1 Micro device transfer head with silicon electrode |
| 02/11/2015 | EP2833932A1 Super-hydrophilic structures |
| 02/11/2015 | CN104340956A 可植入多通道柔性微管电极及其制备方法 Flexible multi-channel implantable electrodes and a preparation method of microtubule |
| 02/11/2015 | CN104340955A 微型皮拉尼计的制备方法及其与体硅器件集成加工的方法 Preparation of micro Pirani gauge and bulk silicon device integration and processing methods |
| 02/11/2015 | CN104340954A 各种形貌mems封帽的加工方法 Mems caps of various morphologies processing methods |
| 02/11/2015 | CN104340953A Mems器件及其形成方法 Mems device and method for forming |
| 02/11/2015 | CN104340952A Mems圆片级真空封装方法及结构 Mems wafer level vacuum packaging method and structure |
| 02/11/2015 | CN104340951A 一种运动传感器的制备方法 Method for preparing a motion sensor |
| 02/11/2015 | CN104340950A 具有微纳结构的薄膜制备方法及采用该薄膜的摩擦发电机 A film preparation methods and the use of micro and nano structure of the film friction generator |
| 02/11/2015 | CN104340949A 用于制造封装器件的工艺和由此得到的封装器件 Thus obtained is used to process and package device manufacturing packaged device |
| 02/11/2015 | CN103207021B 高性能mems热电堆红外探测器结构及其制备方法 Mems performance thermopile infrared detector structure and preparation method |
| 02/11/2015 | CN102874743B 一种嵌入式微纳通道的制备方法 Preparation of an embedded micro nanochannel |
| 02/11/2015 | CN102838081B 飞秒激光无掩膜法制备磁敏感微结构单元的方法 Preparation of magnetic maskless method of femtosecond laser-sensitive micro-structural units |
| 02/11/2015 | CN102502479B 复合集成传感器结构及其制造方法 Composite integrated sensor structure and manufacturing method |
| 02/10/2015 | US8952502 Semiconductor patterning |
| 02/10/2015 | US8952467 Electronic device and its manufacturing method |
| 02/10/2015 | US8951833 Defect free deep trench method for semiconductor chip |
| 02/10/2015 | US8951821 Method for producing oscillator |