| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 01/09/2007 | US7160790 Controlled cleaving process |
| 01/09/2007 | US7160750 Method of producing a semiconductor sensor component |
| 01/09/2007 | US7160585 Magnetic field and an electronic cyclotron resonance zone facilitating ionization and/or dissociation of the injected gas; screening operation |
| 01/09/2007 | US7160500 An array of rods in the order of micron are mass-produced through injection molding and characteristics of the micro-device are improved by forming the rods with suitable geometry; micro-sensor, -actuator, or -transducer |
| 01/04/2007 | WO2007000363A1 Method for producing a micromechanical component and the thus obtained micromechanical component |
| 01/04/2007 | US20070004096 Method for containing a device and a corresponding device |
| 01/04/2007 | US20070003839 $M(c)method for producing inclined flank patterns by photolithography |
| 01/04/2007 | US20070001250 Micromachine and method of fabricating the same |
| 01/04/2007 | US20070001247 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 01/04/2007 | DE102005040883B3 Pitch periods partitioning method for e.g. semiconductor memory, involves applying complementary layer to fill free spaces, forming even surface on upper side of spacers and complementary layer, and removing spacers or complementary layer |
| 01/04/2007 | DE102005029803A1 Verfahren zur Herstellung eines mikromechanischen Bauelements sowie mikromechanisches Bauelement A process for producing a micromechanical component as well as a micro mechanical component |
| 01/04/2007 | DE102005029802A1 Micromechanical sensor fabricating method, involves providing connecting bars between two diaphragm layers by structuring reactive layer and covering structures in reactive layer, and forming cavern under one diaphragm layer |
| 01/03/2007 | EP1417151B1 Method for the fabrication of suspended porous silicon microstructures and application in gas sensors |
| 01/03/2007 | CN1889266A High-temperature resisting one-chip integrated micro-sensor structure and system integrating method |
| 01/03/2007 | CN1292978C MEMS encapsulated structure and method of making same |
| 01/03/2007 | CN1292977C Deep submicron three-dimensional rolling mould and its mfg. method |
| 01/02/2007 | US7157016 Etching process for micromachining crystalline materials and devices fabricated thereby |
| 01/02/2007 | US7157015 Method of manufacturing a substrate with concave portions, a substrate with concave portions, a substrate with concave portions for microlenses, a microlens substrate, a transmission screen and a rear projector |
| 01/02/2007 | US7156916 Monolithic integrated crystal-structure-processed mechanical, and combined mechanical and electrical devices, and methods and systems for making |
| 01/02/2007 | US7155911 Thermal bend actuator with corrugate profile |
| 01/02/2007 | CA2424520C Microneedle array module and method of fabricating the same |
| 12/28/2006 | WO2006137860A2 Reduction of a feature dimension in a nano-scale device |
| 12/28/2006 | WO2006137318A1 Method for fabricating micromachine component of resin |
| 12/28/2006 | US20060292748 Package having bond-sealed underbump |
| 12/28/2006 | US20060289764 Infrared radiation detector |
| 12/28/2006 | DE102005045331A1 Entfernen von dünnen strukturierten Polymerschichten durch atmosphärisches Plasma Removing thin patterned polymer layers by atmospheric plasma |
| 12/27/2006 | EP1397211B1 Method of manufacturing a microfluidic structure, in particular a biochip, and structure obtained by said method |
| 12/27/2006 | EP1358489B1 Production process for accelerometer protected by caps applied at the wafer scale |
| 12/27/2006 | CN1884040A Method for making and releasing sacrificial layer by using salient point based on silicon substrate |
| 12/27/2006 | CN1884039A Method for making single-layer bimaterial micro-cantilever beam heat-shield focal plane array |
| 12/26/2006 | US7154654 Transmissive spatial light modulator and method of manufacturing the same |
| 12/26/2006 | US7153718 Micromechanical component as well as a method for producing a micromechanical component |
| 12/26/2006 | US7153716 Method of manufacturing a micro-electrical-mechanical system |
| 12/26/2006 | US7153443 Microelectromechanical structure and a method for making the same |
| 12/26/2006 | US7153440 Surfactant-enhanced protection of micromechanical components from galvanic degradation |
| 12/21/2006 | WO2006135794A2 Method of making a micromould and a micromoulded article |
| 12/21/2006 | WO2006134744A1 Electronic component manufacturing method |
| 12/21/2006 | US20060283917 Method of soldering or brazing articles having surfaces that are difficult to bond |
| 12/21/2006 | DE102005048408A1 Dünnfilm-Halbleiterkörper A thin film semiconductor body |
| 12/21/2006 | DE102005026528A1 Halbleiterbauteil mit Medienkanal und Verfahren zur Herstellung desselben Of the same semiconductor device with media channel and methods for preparing |
| 12/21/2006 | DE102005026203A1 Kondensator mit veränderbarer Kapazität, Verfahren zum Herstellen des Kondensators und Verwendung des Kondensators Variable capacity capacitor, and method of manufacturing the capacitor using the capacitor |
| 12/20/2006 | EP1734001A2 Method of packaging mems |
| 12/20/2006 | EP1734000A2 Method of making a soi silicon structure |
| 12/20/2006 | EP1294636B1 Method of fabricating devices incorporating microelectromechanical systems using at least one uv curable tape |
| 12/20/2006 | CN1880211A Electromagnet excitated high order mode silicon micromechanical cantilever driving structure, its production method and uses |
| 12/20/2006 | CN1291249C Stress tuned blazed grating light valve |
| 12/19/2006 | US7151277 Selective etching of silicon carbide films |
| 12/19/2006 | US7151250 Probe with hollow waveguide and method for producing the same |
| 12/19/2006 | US7150195 Sealed capacitive sensor for physical measurements |
| 12/14/2006 | WO2006132119A1 Method and device for nano-imprinting |
| 12/14/2006 | WO2006130995A2 Fluorescent photopolymerizable resins and uses thereof |
| 12/14/2006 | US20060281212 Stacked structure and production method thereof |
| 12/14/2006 | DE102005016751B3 Verfahren zur Herstellung gehäuster elektronischer Bauelemente Process for the preparation of packaged electronic components |
| 12/13/2006 | EP1731965A2 Imprint stamp comprising cyclic olefin copolymer |
| 12/13/2006 | EP1730072A2 Methods of forming alpha and beta tantalum films with controlled and new microstructures |
| 12/13/2006 | CN1879206A Contoured insulator layer of silicon-on-insulator wafers and process of manufacture |
| 12/13/2006 | CN1876378A Liquid drop discharge head and manufacture method thereof, micro device, ink-jet head, ink cartridge, and ink-jet printing device |
| 12/13/2006 | CN1875895A A flexible retina chip and preparation method thereof |
| 12/13/2006 | CN1289927C Optical tunable filter and method of manufacturing the same |
| 12/13/2006 | CN1289298C Liquid drop ejection head and its manufacturing method, micro device, ink ejection head, ink cartridge, and ink jet recorder |
| 12/12/2006 | US7149022 Optical scanner with curved mirror and method of manufacturing the same |
| 12/12/2006 | US7148077 Micromechanical structural element having a diaphragm and method for producing such a structural element |
| 12/07/2006 | WO2006128958A2 Method for manufacturing micromechanical components |
| 12/07/2006 | WO2006128953A2 Thinning op a si wafer for mems-sensors applications |
| 12/07/2006 | WO2006022864A3 Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates |
| 12/07/2006 | US20060276044 Forming a resin mold, interposing a photosensitive polymer forming layers, exposing the layered structure with an electron beam, ultraviolet radiation or visible radiaton, removing an exposed photosensitive polymer, and filling the vacant portion with a metal |
| 12/07/2006 | US20060273692 Bimorph switch, bimorph switch manufacturing method, electronic circuitry and electronic circuitry manufacturing method |
| 12/07/2006 | US20060273445 Three-dimensional structure composed of silicon fine wires, method for producing the same, and device including the same |
| 12/07/2006 | DE19734113B4 Verfahren zur Herstellung von mikromechanischen Bauelementen A process for preparing micromechanical components |
| 12/07/2006 | DE102005021099A1 GaN-Schichten GaN layers |
| 12/07/2006 | CA2610693A1 Thinning of a si wafer for mems-sensors applications |
| 12/06/2006 | EP1727766A1 Stacked structure and method of manufacturing the same |
| 12/06/2006 | CN1874957A MEMS devices with unreleased thin film components |
| 12/06/2006 | CN1874956A Fixed, insulated and electric connection of treated semiconductor wafers |
| 12/06/2006 | CN1872657A Microstructure and manufacturing method of the same |
| 12/06/2006 | CN1288724C Method for forming a cavity structure on SOI substrate |
| 12/06/2006 | CN1288069C Method for integral micromachining multilayer composite structure |
| 12/05/2006 | US7145712 Micro mirror unit and method of making the same |
| 12/05/2006 | US7145219 Vertical integrated circuits |
| 12/05/2006 | US7145214 Substrate for stressed systems and method of making same |
| 12/05/2006 | US7144750 Method of fabricating silicon-based MEMS devices |
| 12/05/2006 | US7144616 Microfabricated elastomeric valve and pump systems |
| 11/30/2006 | WO2006127776A1 Metal electrodes for elimination of spurious charge effects in accelerometers and other mems devices |
| 11/30/2006 | WO2006127243A1 Method and apparatus for reducing surface defects in microstamps |
| 11/30/2006 | WO2006126487A1 Microchip and method of producing microchip |
| 11/30/2006 | US20060266730 Microelectromechanical structure and a method for making the same |
| 11/30/2006 | DE102005023699A1 Mikromechanisches Bauelement mit einer Membran und Verfahren zur Herstellung eines solchen Bauelements Micromechanical component with a membrane and method for producing such a component |
| 11/30/2006 | CA2599081A1 Method and apparatus for reducing surface defects in microstamps |
| 11/29/2006 | EP1725496A1 Method of manufacturing semiconductor device |
| 11/29/2006 | EP1513688B1 Mold tool method of manufacturing a mold tool and storage medium formed by use of the mold tool |
| 11/29/2006 | CN1871176A Process for fabricating micromachine |
| 11/29/2006 | CN1868862A Gravity liquid state etching method capable of controlling structure size |
| 11/29/2006 | CN1286711C Method for constructing non-close packing colloid balls ordered arrangement using soft-graving technology |
| 11/29/2006 | CN1286710C Encapsulated machinery system band-pass filter for integrated circuits and method of fabrication thereof |
| 11/28/2006 | US7142087 Micromechanical latching switch |
| 11/28/2006 | US7141504 Method and apparatus for anisotropic etching |
| 11/27/2006 | CA2546194A1 Micro-contact-printing engine |
| 11/23/2006 | WO2006122829A1 Method for producing a micromechanical structural element and semiconductor arrangement |
| 11/23/2006 | WO2006074352A3 Mems passivation with transition metals |
| 11/23/2006 | US20060263718 Sacrificial compositions and methods of fabricating a structure using sacrificial compositions |