| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 02/22/2007 | US20070040488 Electric part |
| 02/22/2007 | US20070039920 Method of fabricating nanochannels and nanochannels thus fabricated |
| 02/22/2007 | DE112005000625T5 System und Verfahren zum Direktverbinden von Substraten System and method for direct bonding of substrates |
| 02/22/2007 | DE10338967B4 Verfahren zum Kleben von Mikrobauteilen auf ein Substrat Method for bonding of micro components on a substrate |
| 02/22/2007 | DE102005038754A1 Component e.g. micromechanical sensor, has structured layer made of non-organic material, applied on substrate or on covering layer above substrate whereby structured layer has surface texture with micro-scaled or nano-scaled roughness |
| 02/22/2007 | DE10154601B4 Ein Mikrobauelement mit einem integrierten hervorstehenden Elektrospray-Emitter und ein Verfahren zum Herstellen des Mikrobauelements A micro device having an integrated protruding electrospray emitter and a method for manufacturing the micro device |
| 02/21/2007 | CN1918448A Method and system to measure characteristics of a film disposed on a substrate |
| 02/21/2007 | CN1915797A Single chip integration method of CMOS circuit and MEMS tiny electrodei |
| 02/21/2007 | CN1915796A Light reading out, not refrigerant infrared imaging array device, and fabricating metod |
| 02/20/2007 | US7180647 Optical scanner and method of fabricating the same |
| 02/20/2007 | US7180163 Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 02/20/2007 | US7180144 Corner compensation method for fabricating MEMS and structure thereof |
| 02/20/2007 | US7179396 Positive tone bi-layer imprint lithography method |
| 02/20/2007 | US7178378 Resonant sensor and sensing system |
| 02/15/2007 | WO2007018875A1 Improved chamber for a microelectromechanical device |
| 02/15/2007 | WO2007018575A2 Ion generation by the temporal control of gaseous dielectric breakdown |
| 02/15/2007 | WO2007018571A2 Chemical sensor |
| 02/15/2007 | WO2007017819A1 Method for manufacturing a microelectronic package comprising a silicon mems microphone |
| 02/15/2007 | DE112005000355T5 Struktur und Herstellungsverfahren für dieselbe Structure and manufacturing method for the same |
| 02/15/2007 | DE102006018675A1 Dünnschichtstruktur und Herstellungsverfahren derselben Thin film structure and production method thereof |
| 02/15/2007 | DE102005055293A1 Verfahren zur Herstellung von Halbleiterchips und Dünnfilm-Halbleiterchip A process for producing semiconductor chips and the thin film semiconductor chip |
| 02/14/2007 | EP1752415A2 Manufacturing method of a suspended MEMS structure |
| 02/14/2007 | CN1914115A Integrated getter area for wafer level encapsulated microelectromechanical systems |
| 02/14/2007 | CN1911781A Manufacturing method used for improving performance of non-refrigerating infrared focal plane array device |
| 02/14/2007 | CN1911780A Method of protecting chip front face pattern and method of implementing two-side technology |
| 02/14/2007 | CN1911779A 半导体器件及其制造方法 Semiconductor device and manufacturing method thereof |
| 02/13/2007 | US7176111 Method for depositing polycrystalline SiGe suitable for micromachining and devices obtained thereof |
| 02/13/2007 | US7176106 Wafer bonding using reactive foils for massively parallel micro-electromechanical systems packaging |
| 02/13/2007 | US7175772 Small scale actuators and methods for their formation and use |
| 02/08/2007 | WO2007015050A1 A method of processing substrates |
| 02/08/2007 | US20070031989 Separating semiconductor wafers having exposed micromechanical structures into individual chips |
| 02/08/2007 | US20070031761 Polymers, methods of use thereof, and methods of decomposition thereof |
| 02/08/2007 | US20070029686 Photoresists; photomasks |
| 02/08/2007 | US20070029643 Methods for nanoscale structures from optical lithography and subsequent lateral growth |
| 02/08/2007 | DE102006018214A1 Verringerung von Oxiden in einem fluidbasierten Schalter Reduction of oxides in a fluid-based switch |
| 02/07/2007 | EP1749794A2 Electronic parts packaging structure and method of manufacturing the same |
| 02/06/2007 | US7173748 Micro-mirror and a method for fabricating the same |
| 02/06/2007 | US7172919 Method for fabricating a tuning fork gyroscope |
| 02/06/2007 | US7172795 having characteristics similar to those using photolithographic technologies, with a considerable reduction in costs and complexity; a photopolymer to which are added nanoparticles orientable in space by means of magnetic and/or electrical fields |
| 02/06/2007 | US7172707 Sputtered spring films with low stress anisotropy |
| 02/06/2007 | US7171975 Fabrication of ultra-shallow channels for microfluidic devices and systems |
| 02/01/2007 | WO2006128953A3 Thinning op a si wafer for mems-sensors applications |
| 02/01/2007 | DE102005035058A1 Micromechanical device for e.g. air mass sensor, has reinforcement layer arranged in membrane to provide reinforcement in area of membrane edge, where membrane is made from dielectric layer, and layer is made from metal e.g. aluminum |
| 01/31/2007 | CN1903701A Multi oxometallate and amination calixarene self assembled organic-inorganic composite film |
| 01/31/2007 | CN1297690C Appts. for silicon anisotropic corrosion |
| 01/31/2007 | CN1297470C Structure formed utilizing micro-structure gap-controlling technology and forming method thereof |
| 01/30/2007 | US7170216 Bimorph switch, bimorph switch manufacturing method, electronic circuitry and electronic circuitry manufacturing method |
| 01/30/2007 | US7170141 Method for monolithically integrating silicon carbide microelectromechanical devices with electronic circuitry |
| 01/30/2007 | US7169989 Applying an enzyme for the selective removal of sub-unit parts of the polymer to at least one predetermined area of said polymeric substrate via a pipette with a nano-sized orifice |
| 01/30/2007 | US7169314 Microfabricated elastomeric valve and pump systems |
| 01/25/2007 | US20070019406 Optical device having micro lens array |
| 01/25/2007 | US20070018262 Micromachine and production method thereof |
| 01/25/2007 | DE10230675B4 Verfahren zur Herstellung von Phasenschiebermasken A process for producing phase shift masks |
| 01/25/2007 | DE102005032635A1 Mikromechanische Vorrichtung mit zwei Sensorstrukturen, Verfahren zur Herstellung einer mikromechanischen Vorrichtung Micromechanical device with two sensor structures, method for making a micromechanical device |
| 01/25/2007 | DE102005032454A1 Detaching transfer film from semiconductor substrate and for its transfer by dry chemical etching, preferably by gas phase etching using specified doping |
| 01/25/2007 | DE102005032452A1 Communicating hollow spaces e.g. pumping chambers, manufacturing method for e.g. micromechanical pump, involves covering one of hollow spaces by applying glass wafer on semiconductor wafer |
| 01/24/2007 | EP1746622A1 Method for forming carbonaceous material protrusion and carbonaceous material protrusion |
| 01/24/2007 | EP1594800B1 Method of manufacturing an electronic device and electronic device |
| 01/24/2007 | EP1099244B1 Method for anisotropic etching |
| 01/24/2007 | CN1900669A Method for producing heat shear stress sensor device based on new sacrifice layer process |
| 01/24/2007 | CN1900668A Method for producing heat shear stress sensor device based on vacuum adhesive process |
| 01/24/2007 | CN1899952A Method for producing pressure sensor silicon resonant film |
| 01/24/2007 | CN1899950A Sensing contact probe |
| 01/24/2007 | CN1296271C Manufacturing method of micro-electromechanical optical display unit |
| 01/24/2007 | CN1296270C Etching method |
| 01/23/2007 | US7166488 Metal MEMS devices and methods of making same |
| 01/23/2007 | US7165957 Device for transferring a pattern to an object |
| 01/23/2007 | US7165566 Method of forming a microstructure using maskless lithography |
| 01/18/2007 | WO2007009037A1 Structures formed in diamond |
| 01/18/2007 | US20070015335 Production method for antenna and production device for antenna |
| 01/18/2007 | US20070013266 Method of fabricating a polymer-based capacitive ultrasonic transducer |
| 01/18/2007 | US20070012108 Method for manufacturing a micromechanical motion sensor, and a micromechanical motion sensor |
| 01/18/2007 | DE112005000276T5 Waferhäusungs- und Singulierungsverfahren Waferhäusungs- and Singulierungsverfahren |
| 01/18/2007 | DE102006031047A1 Halbleitersensor und Herstellungsverfahren dafür A semiconductor sensor and production method thereof |
| 01/18/2007 | DE102005033005A1 Optoelektronischer Chip The optoelectronic chip |
| 01/18/2007 | DE102004009027B4 Wärmeempfindliches Flussratendetektorelement und Verfahren zu dessen Herstellung A heat-sensitive flow rate detection element and process for its preparation |
| 01/17/2007 | CN1898150A Method for containing a device and a corresponding device |
| 01/17/2007 | CN1896784A Integrated assembly and substrate structure and its production for polymer ultraviolet/visible-light collimator |
| 01/17/2007 | CN1295138C Thin film mini-bridge structure and its mfg. method |
| 01/16/2007 | US7163873 Substrate for stressed systems and method of making same |
| 01/16/2007 | US7163826 Method of fabricating multi layer devices on buried oxide layer substrates |
| 01/16/2007 | CA2274071C Affinity based self-assembly systems and devices for photonic and electronic applications |
| 01/11/2007 | WO2006076354A3 Diamond medical devices |
| 01/11/2007 | DE4315012B4 Verfahren zur Herstellung von Sensoren und Sensor A process for the production of sensors and sensor |
| 01/11/2007 | DE19537285B4 Verfahren zur Herstellung eines Halbleiterelements mit einer flexiblen Anordnung, Halbleiterelement, Feldeffektsensor mit beweglichem Gate, Verfahren zur Verwendung eines Transistors mit beweglichem Gate als Sensor, sowie kapazitiver Sensor A process for producing a semiconductor element with a flexible arrangement, the semiconductor element, field effect sensor with a movable gate, method of using a transistor as a sensor with a movable gate, and a capacitive sensor |
| 01/11/2007 | DE102005027676A1 Verfahren zur Herstellung von anisotropen Wellenleiterstrukturen zur Übertragung von Lichtwellen A process for preparing anisotropic waveguide structures for the transmission of light waves |
| 01/11/2007 | DE102004006156B4 Verfahren zum Herstellen eines mikrokapazitiven Ultraschall-Wandlers A method for producing a mikrokapazitiven ultrasonic transducer |
| 01/10/2007 | EP1741670A1 Device incorporating a field of dots used in biotechnology applications |
| 01/10/2007 | EP1741669A2 Hidden hinge mems device |
| 01/10/2007 | EP1740256A1 Microneedles and microneedle fabrication |
| 01/10/2007 | EP1658344B1 Microsystem component and method for gluing microcomponents to a substrate |
| 01/10/2007 | EP1418977B1 Microneedles for minimally invasive drug delivery |
| 01/10/2007 | EP1301432B1 Method of fabricating devices incorporating microelectromechanical systems using uv curable tapes |
| 01/10/2007 | CN1894802A Structuring method, and field effect transistors |
| 01/10/2007 | CN1893142A Minute structure, micromachine, organic transistor, electric appliance, and manufacturing method thereof |
| 01/10/2007 | CN1893137A 半导体器件及其制造方法 Semiconductor device and manufacturing method thereof |
| 01/10/2007 | CN1891617A Method for protecting etched structure in induction coupling plasma etching |
| 01/10/2007 | CN1294296C Method and electrode for defining and replicating structures in conducting materials |
| 01/10/2007 | CN1294074C Producing method and mechanical property testing method for metal film microbridge |
| 01/09/2007 | US7161233 Integrated micro electromechanical system encapsulation component and fabrication process of the component |