| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 04/10/2007 | US7203394 Micro mirror arrays and microstructures with solderable connection sites |
| 04/10/2007 | US7202553 Wafer bonding using reactive foils for massively parallel micro-electromechanical systems packaging |
| 04/10/2007 | US7202101 Multi-metal layer MEMS structure and process for making the same |
| 04/10/2007 | US7201954 Method for forming barrier structures on a substrate and the resulting article |
| 04/10/2007 | US7201937 Methods for forming composite coatings on MEMS devices |
| 04/10/2007 | US7201786 Dust bin and filter for robotic vacuum cleaner |
| 04/05/2007 | WO2007038396A1 Method of flip chip mounting pressure sensor dies to substrates and pressure sensors formed thereby |
| 04/05/2007 | WO2007036504A1 Method for producing a sensor arrangement comprising a monolithically integrated circuit |
| 04/05/2007 | WO2007036422A1 Device with stress-compensated membrane |
| 04/05/2007 | WO2007018875A8 Improved chamber for a microelectromechanical device |
| 04/05/2007 | WO2006130995A3 Fluorescent photopolymerizable resins and uses thereof |
| 04/05/2007 | WO2006128958A3 Method for manufacturing micromechanical components |
| 04/05/2007 | WO2006098876A3 Microstructures, microdevices and related methods |
| 04/05/2007 | DE4418163B4 Verfahren zur Herstellung von mikromechanischen Strukturen Process for the preparation of micro-mechanical structures |
| 04/05/2007 | DE19540174B4 Halbleitersensor für eine physikalische Größe und Verfahren zu dessen Herstellung A semiconductor sensor for a physical quantity, and process for its preparation |
| 04/05/2007 | DE10035344B4 Verfahren zur Herstellung einer Schattenmaske A method of manufacturing a shadow mask |
| 04/04/2007 | EP1770056A2 Method for manufacturing a micro-electro-mechanical structure |
| 04/04/2007 | EP1663517A4 Method for reducing leaching in metal-coated mems |
| 04/04/2007 | EP1364394B1 Method for producing structures on the nanometric scale |
| 04/04/2007 | CN1942023A Method for producing microphone unit, thermal-oxidative layer and low-stress structural layer |
| 04/04/2007 | CN1941283A Semiconductor device fabrication method |
| 04/04/2007 | CN1309040C A method for integrating CMOS circuit and bulk silicon MEMS uniwafer |
| 04/04/2007 | CN1309019C Method of fabricating micro-electromechanical switches on CMOS compatible substrates |
| 04/04/2007 | CN1308221C MEMS array, manufacturing method thereof, and MEMS device manufacturing method based on the same |
| 04/03/2007 | US7198982 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 04/03/2007 | US7198961 Method for modifying existing micro-and nano-structures using a near-field scanning optical microscope |
| 04/03/2007 | US7198747 Fabrication of ceramic microstructures |
| 04/03/2007 | US7198727 Etching process for micromachining materials and devices fabricated thereby |
| 04/03/2007 | US7197815 Method of manufacturing the electromagnetic actuator |
| 03/29/2007 | US20070072330 Wafer bonding compatible with bulk micro-machining |
| 03/29/2007 | DE19926601B4 Apertur in einem Halbleitermaterial sowie Herstellung der Apertur und Verwendung Aperture in a semiconductor material and forming the aperture and using |
| 03/29/2007 | DE102005046058A1 Monolithic integrated circuit production method, involves making process variation of one partial structure with another unchanging partial structure, for adjustment of structural characteristics of sensor structure |
| 03/29/2007 | DE102005046057A1 Process to manufacture e.g. a 'silicon/semiconductor on insulator' by transfer of donor substrate to mono-crystalline structure on an acceptor substrate |
| 03/29/2007 | DE102005046008A1 Halbleitersensorbauteil mit Sensorchip und Verfahren zur Herstellung desselben Of the same semiconductor sensor device comprising the sensor chip and method for producing |
| 03/28/2007 | EP1767989A1 Method of forming graft pattern, graft pattern material, method of lithography, method of forming conductive pattern, conductive pattern, process for producing color filter, color filter and process for producing microlens |
| 03/28/2007 | EP1766663A1 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 03/28/2007 | CN1935627A Micro structure and its manufacturing method |
| 03/27/2007 | US7196449 Two-axis device and manufacturing method therefor |
| 03/27/2007 | US7196410 Wafer packaging and singulation method |
| 03/27/2007 | US7195862 Process for producing a tool insert for injection molding a microstructured part |
| 03/27/2007 | US7195670 High throughput screening of crystallization of materials |
| 03/22/2007 | US20070065595 Micro-structure formed of thin films |
| 03/22/2007 | US20070062283 A method for fabricating a tuning fork gyroscope |
| 03/22/2007 | DE19817311B4 Herstellungsverfahren für mikromechanisches Bauelement A method for producing a micro mechanical component |
| 03/22/2007 | DE102006041995A1 Sensor mit Optikteil zur Erfassung einer physikalischen Größe, Verfahren zu dessen Herstellung Sensor with optical member for detecting a physical quantity, process for its preparation |
| 03/22/2007 | DE102005042648A1 Method for production of communicating hollow spaces, involves providing silicon substrate in which first mask and second mask are brought whereby two differently porous layers in silicon substrate are produced by electrochemical corroding |
| 03/21/2007 | EP1764343A2 Method for etching a structured cavity with a single mask |
| 03/21/2007 | CN1934671A Method for forming carbonaceous material protrusion and carbonaceous material protrusion |
| 03/21/2007 | CN1306065C Controllable type etching equipment of microbe |
| 03/21/2007 | CN1305752C Micro mechanical structure device of case packing and its mfg method |
| 03/21/2007 | CN1305751C Micromachine and method of fabricating the same |
| 03/20/2007 | US7193256 Manufacturing method for a semiconductor substrate comprising at least a buried cavity and devices formed with this method |
| 03/20/2007 | US7192882 Component for electromagnetic waves and a method for manufacturing the same |
| 03/20/2007 | US7192879 Method for manufacturing micro-structural unit |
| 03/20/2007 | US7192510 Fluid control device and method of manufacturing the same |
| 03/15/2007 | WO2007029133A2 A method of manufacturing a microsystem, such a microsystem, a stack of foils comprising such a microsystem, an electronic device comprising such a microsystem and use of the electronic device |
| 03/15/2007 | WO2007029132A2 A method of manufacturing a microsystem, such a microsystem, a stack of foils comprising such a microsystem, an electronic device comprising such a microsystem and use of the electronic device |
| 03/15/2007 | WO2007028984A1 Apparatus and method for sonoporation |
| 03/15/2007 | US20070059497 Reversal imprint technique |
| 03/15/2007 | US20070059494 Microfabricated elastomeric valve and pump systems |
| 03/15/2007 | DE10327500B4 Verfahren zur Herstellung von Elektrodenstrukturen sowie Elektrodenstruktur und deren Verwendung A process for the production of electrode structures and electrode structure and the use thereof |
| 03/15/2007 | DE102006040235A1 Verfahren zur Herstellung einer optischen Vorrichtung, sowie hiermit hergestellte optische Vorrichtung A process for producing an optical device and optical device produced therewith |
| 03/15/2007 | DE102006031579A1 Verfahren zur Herstellung eines optischen Bauelements und eines optischen Bauelementmoduls A process for producing an optical component and an optical component module |
| 03/15/2007 | DE102005042664A1 Mikromechanisches Sensorelement und Verfahren zu dessen Herstellung The micromechanical sensor element and method for its production |
| 03/15/2007 | DE102005042656A1 Micromechanical micro pump for dosing medicine, has substrates connected with each other by anodic bonds, where one substrate is made up of silicone and includes unstructured side and connected with other substrate at unstructured side |
| 03/14/2007 | EP1761457A1 Imprinting of supported and free-standing 3-d micro-or nano-structures |
| 03/14/2007 | EP1601821A4 Electroplating pcb components |
| 03/14/2007 | CN1929066A 开关 Switch |
| 03/14/2007 | CN1304273C Gear and method of making the same |
| 03/13/2007 | US7190507 Deflection mirror, a deflection mirror manufacturing method, an optical writing apparatus, and an image formation apparatus |
| 03/08/2007 | US20070053051 Micro-mechanical thermo structure and method for manufacturing such micro-mechanical structure |
| 03/08/2007 | US20070050969 Method for producing micromachined layered device |
| 03/07/2007 | EP1760042A2 Method of manufacturing connecting and/or bonding means of a device. |
| 03/07/2007 | EP1760040A2 Micromechanical device with an anodically bonded cap and method for its manufacture |
| 03/07/2007 | EP1760039A2 Electrical contact for a mems device and method of making |
| 03/07/2007 | EP1760038A2 Method for Manufacturing a Mass-Spring System |
| 03/07/2007 | EP1760037A1 Method for manufacturing micromechanical structures. |
| 03/07/2007 | EP1759422A2 Methods and devices for fabricating and assembling printable semiconductor elements |
| 03/07/2007 | EP1758814A2 Packaging for micro electro-mechanical systems and methods of fabricating thereof |
| 03/07/2007 | EP1652009B1 Method for producing patterns with inclined sidewalls by photolithography |
| 03/07/2007 | EP1436237B1 Bonding method and product |
| 03/07/2007 | CN1926918A Electret condenser |
| 03/07/2007 | CN1926263A Structure and process for producing structure |
| 03/07/2007 | CN1926056A Slotted forming methods and fluid ejecting device |
| 03/07/2007 | CN1303666C Method for controlling super deep isolation trench opening shape and product |
| 03/06/2007 | US7185994 Micro mirror and method for fabricating the same |
| 03/06/2007 | US7185542 Complex microdevices and apparatus and methods for fabricating such devices |
| 03/01/2007 | WO2007024666A2 Creating novel structures using deep trenching of oriented silicon substrates |
| 03/01/2007 | DE10013261B4 Mikromechanisch hergestellter optischer Strahlteiler Micromechanically produced optical beam splitter |
| 02/28/2007 | EP1532658A4 Conductive etch stop for etching a sacrificial layer |
| 02/28/2007 | EP1175600B1 Integrated optoelectronic thin-film sensor |
| 02/28/2007 | CN1919719A Prefabricated method for thin film microcrack and special apparatus for the same |
| 02/28/2007 | CN1301897C Method for making minisize flow passage by lead frame technology |
| 02/27/2007 | US7183637 Microelectronic mechanical system and methods |
| 02/27/2007 | US7182875 Microstructures and methods of fabrication thereof |
| 02/22/2007 | WO2007022479A1 Methods for forming layers within a mems device to achieve a tapered edge |
| 02/22/2007 | WO2006135794A3 Method of making a micromould and a micromoulded article |
| 02/22/2007 | WO2006107960A3 Method and apparatus for producing a mems device |
| 02/22/2007 | US20070042565 Fluidic MEMS device |
| 02/22/2007 | US20070041080 Micro mirror unit and method of making the same |