| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 05/23/2007 | EP1290711A4 Method for forming barrier structures on a substrate and the resulting article |
| 05/23/2007 | CN1966394A Touch sensor and its manufacture method |
| 05/23/2007 | CN1966393A Multi-scale cantilever structures having fine holes of nano size and the preparation method thereof |
| 05/23/2007 | CN1966392A Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof |
| 05/23/2007 | CN1317727C Diaphragm activated micro electromechanical switch |
| 05/22/2007 | US7221495 Thin film precursor stack for MEMS manufacturing |
| 05/22/2007 | US7221033 Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems |
| 05/22/2007 | US7220614 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor |
| 05/18/2007 | WO2007055924A2 Wafer level packaging process |
| 05/18/2007 | WO2007054643A1 Method of forming supports bearing features, such as lithography masks |
| 05/18/2007 | WO2007022267A3 Micro-molded integral non-line-of sight articles and method |
| 05/17/2007 | US20070111353 Hybrid microfluidic chip and method for manufacturing same |
| 05/17/2007 | US20070108548 Optical scanner and method of fabricating the same |
| 05/16/2007 | CN1962409A Manufacturing method of microstructure and microelectromechanical system |
| 05/16/2007 | CN1316586C Method for forming a layered semiconductor technology structure and corresponding layered semiconductor technology structure |
| 05/16/2007 | CN1315719C Spacer assembly of partial photo-etching process used for silicon micro machining |
| 05/15/2007 | US7217592 Method of magnetic field assisted self-assembly |
| 05/15/2007 | US7216671 Microfabricated elastomeric valve and pump systems |
| 05/10/2007 | WO2007052039A1 Non-volatile memory device |
| 05/10/2007 | WO2007024614A3 Selection of wavelenghts for end point in a time division multiplexed process |
| 05/10/2007 | US20070105339 Method of fabricating multi layer MEMS and microfluidic devices |
| 05/10/2007 | US20070102831 Device and method of manufacturing the same |
| 05/10/2007 | DE10161492C5 Verfahren zur Herstellung und Magazinierung von Mikrobauteilen, Magazin und Montageverfahren für Mikrobauteile Process for the preparation and magazining microcomponents, magazine and installation procedures for micro-components |
| 05/09/2007 | EP1781566A1 Method for depositing a nonstick coating |
| 05/09/2007 | EP1362005B1 Method for forming electrically conductive contact structures |
| 05/09/2007 | EP1203748B1 Microdevice and its production method |
| 05/09/2007 | EP1041036B1 Method of manufacturing of a micromachine |
| 05/09/2007 | CN1958436A Method for preparing Nano silicon line |
| 05/09/2007 | CN1315152C Floating entry protective apparatus and method for preventing circuit from short-circuiting |
| 05/09/2007 | CN1314693C Fluorochemical treatment for silicon articles |
| 05/09/2007 | CN1314577C Electrochemical deep etching method and apparatus thereof |
| 05/09/2007 | CN1314576C Miniature plate electrostatic driver and mfg. method thereof |
| 05/08/2007 | US7215630 Micro mirror unit, optical disc drive using same, and method for producing micro mirror unit |
| 05/08/2007 | US7215061 Micromechanical electrostatic resonator |
| 05/08/2007 | US7214625 Method for manufacturing movable portion of semiconductor device |
| 05/08/2007 | US7214559 Method for fabricating vertical offset structure |
| 05/08/2007 | US7214327 Anisotropic dry etching of Cu-containing layers |
| 05/08/2007 | US7213769 Smart card |
| 05/08/2007 | US7213339 Method of manufacturing a microscale nozzle |
| 05/03/2007 | WO2007048805A1 Method for etching a sacrificial layer for a micro-machined structure |
| 05/03/2007 | US20070099337 Positive Tone Bi-Layer Imprint Lithography Method |
| 05/03/2007 | US20070099059 Electrokinetic micro power cell using pile-up disk type microfluidic-chip with multi-channel |
| 05/03/2007 | DE10362083B4 Verfahren zur Herstellung von Membranen mit durchgängigen Poren A process for the production of membranes with through pores |
| 05/03/2007 | DE102005052039A1 Micropump manufacturing method for use in e.g. medical technology, involves providing inner structures of micropump on substrate, where substrate and glasses are anodically bonded to each other in region of inner structures |
| 05/02/2007 | EP1780173A1 Nanometric mechanical oscillator, method of fabricating the same, and measurement apparatus using the same |
| 05/02/2007 | EP1778582A1 Micromechanical component with a number of chambers and production method |
| 05/02/2007 | EP1691662A4 Structures and devices for parenteral drug delivery and diagnostic sampling |
| 05/02/2007 | EP1437325B1 Micro-actuator, micro-actuator device, optical switch and optical switch array |
| 05/02/2007 | EP1203749B1 Nanometer-order mechanical vibrator, production method thereof and measuring device using it |
| 05/02/2007 | EP1086214A4 Microneedle devices and methods of manufacture and use thereof |
| 05/02/2007 | CN1314104C Method for centralized producing device chip with shared substrate |
| 05/02/2007 | CN1314086C Chip with static friction resistant character, micro-electromechanical assembly and method for manufacturing same |
| 05/02/2007 | CN1314076C Method of forming sub-micron-size structures over a substrate |
| 05/02/2007 | CN1313357C Integration manufacturing method of cantilever beam type dot needle-point based on silicon oxide film |
| 05/01/2007 | US7212081 Micromachine and method of producing the same |
| 04/27/2007 | CA2565752A1 Mems sensor systems and methods |
| 04/26/2007 | WO2007046841A2 Ceramic components, coated structures and methods for making same |
| 04/26/2007 | US20070091415 Micromirror unit and method of making the same |
| 04/26/2007 | DE102005050782A1 Micro-nozzle plate manufacturing method for medical application, involves carrying mask from semiconductor substrate and etching semiconductor substrate from side to another side, where micro-nozzle is excavated from thermal oxides |
| 04/26/2007 | DE102005041505B3 Verfahren und Vorrichtung zum Abformen von Strukturen Method and apparatus for molding of structures |
| 04/25/2007 | EP1777194A2 Method for forming microelectronic spring structures on a substrate |
| 04/25/2007 | EP1776314A1 Mems device with non-standard profile |
| 04/25/2007 | EP1776313A1 Method of producing a mems device |
| 04/25/2007 | EP1776312A1 Device comprising an encapsulated microsystem and production method thereof |
| 04/25/2007 | EP1776229A2 Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates |
| 04/25/2007 | EP1601611B1 System and method for buried electrical feedthroughs in a glass-silicon mems process |
| 04/25/2007 | EP1485949A4 Novel planarization method for multi-layer lithography processing |
| 04/25/2007 | CN1953323A Device including piezoelectric thin film and method for producing the same |
| 04/24/2007 | US7208809 Semiconductor device having MEMS |
| 04/24/2007 | US7208806 Micromachined electromechanical device |
| 04/19/2007 | WO2007043963A1 Fabrication of inlet and outlet connections for microfluidic chips |
| 04/19/2007 | WO2007043383A1 Fine structure body and method for manufacturing same |
| 04/19/2007 | WO2007041748A1 Method of fabricating suspended beam in a mems process |
| 04/19/2007 | WO2007017757A3 Chip scale package for a micro component |
| 04/19/2007 | WO2007017757A2 Chip scale package for a micro component |
| 04/19/2007 | WO2006137860A3 Reduction of a feature dimension in a nano-scale device |
| 04/19/2007 | US20070087464 Method for producing etched holes and/or etched trenches as well as a diaphragm sensor unit |
| 04/19/2007 | DE102005049111A1 Verfahren zur Herstellung von mikromechanischen Bauteilen in integrierten Schaltungen und Anordnung eines Halbleiters auf einem Substrat A process for preparing micromechanical components in integrated circuits and arrangement of a semiconductor on a substrate |
| 04/19/2007 | DE10147954B4 CARL für Bioelektronik: Substratanbindung über leitfähige Schicht CARL bioelectronics: substrate connection via conductive layer |
| 04/18/2007 | EP1775992A1 Thermostable electret condenser microphone |
| 04/18/2007 | EP1775258A1 Nanometric mechanical oscillator, method of fabricating the same, and measurement apparatus using the same |
| 04/18/2007 | EP1774572A2 Method for etching a layer on a substrate |
| 04/18/2007 | EP1774547A1 Microfabricated system for magnetic field generation and focusing |
| 04/18/2007 | CN1950291A Reduction of etching charge damage in manufacture of microelectromechanical devices |
| 04/18/2007 | CN1949477A Body silicon MEMS and CMOS circuit integrating method capable of removing residual silicon |
| 04/18/2007 | CN1949457A Method for making cavity and method for reducing size of microcomputer electric elements |
| 04/18/2007 | CN1310825C Thermal bend actuator with corrugate profile |
| 04/17/2007 | US7205173 Method of fabricating micro-electromechanical systems |
| 04/17/2007 | US7204971 Shaped microcomponents via reactive conversion of biologically-derived microtemplates |
| 04/12/2007 | WO2007040190A1 Semiconductor chip cutting method and semiconductor chip |
| 04/12/2007 | WO2007004119A3 A method of manufacturing a mems element |
| 04/12/2007 | US20070082228 Thermoelastic device comprising an expansive element formed from a preselected material |
| 04/12/2007 | DE10335492B4 Verfahren zum selektiven Verbinden von mikrostrukturierten Teilen A method for selectively connecting microstructured parts |
| 04/11/2007 | EP1772426A2 Surface preparation for selective silicon fusion bonding |
| 04/11/2007 | EP1641709B1 Method for separating a mobile device layer and component obtained by said method |
| 04/11/2007 | CN1947225A Pattern transfer method |
| 04/11/2007 | CN1946629A Method of manufacturing semiconductor device |
| 04/11/2007 | CN1946628A Synthesis of platinum and palladium quantum well size nano-particles |
| 04/11/2007 | CN1944236A Semiconductor device, method for manufacturing the same and method for inspecting the same |
| 04/11/2007 | CN1944235A Electromagnetic-magnetoelectric type micro mechanical resonant beam structure |