| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 08/16/2007 | DE102006004218B3 Elektromechanische Speicher-Einrichtung und Verfahren zum Herstellen einer elektromechanischen Speicher-Einrichtung Electromechanical memory device and method for manufacturing an electromechanical memory device |
| 08/15/2007 | CN1331729C Etching process |
| 08/15/2007 | CN1331728C Reactor and production thereof, reformer, and power supply system |
| 08/15/2007 | CN1331727C Micromachine production method |
| 08/15/2007 | CN101018734A A method for making MEMS switch, and MEM device and its making method |
| 08/14/2007 | US7256467 Materials and methods for forming hybrid organic-inorganic anti-stiction materials for micro-electromechanical systems |
| 08/14/2007 | US7256435 Multilevel imprint lithography |
| 08/14/2007 | US7256106 Method of dividing a substrate into a plurality of individual chip parts |
| 08/14/2007 | US7255799 Method for selectively covering a micro machined surface |
| 08/14/2007 | US7255768 Anodic bonding structure, fabricating method thereof, and method of manufacturing optical scanner using the same |
| 08/09/2007 | WO2007062268A3 Method and structure for magnetically-directed, self-assembly of three-dimensional structures |
| 08/09/2007 | US20070181920 Manufacturing method for a semiconductor substrate comprising at least a buried cavity and devices formed with this method |
| 08/09/2007 | US20070181430 Contact substrate with conformation masking pattern on substrate; multilayer; three-dimensional structure; cyclic process; electroplating; etching; electropolishing |
| 08/09/2007 | DE10241423B4 Verfahren zur Herstellung und Aufbringung eines Streustrahlenrasters oder Kollimators auf einen Röntgen- oder Gammadetektor Process for the preparation and application of an anti-scatter grid or collimator on a X-ray or gamma detector |
| 08/09/2007 | DE102006004922A1 Miniaturisiertes Federelement und Verfahren zu dessen Herstellung Miniaturized spring element and process for its preparation |
| 08/09/2007 | DE102006004644A1 Layer fabricating tool for e.g. aircraft, has roller and die web arranged so that web arrives between roller and surface in rolling movement, during movement of roller, so that negative of microstructure on web faces substrate surface |
| 08/09/2007 | DE102006003718A1 Fertigungsprozess für integrierte mikroelektro-mechanische Bauelemente Manufacturing process for integrated micro-electro-mechanical components |
| 08/09/2007 | CA2577381A1 3d structures based on 2d substrates |
| 08/08/2007 | EP1814817A1 Sacrificial substrate for etching |
| 08/08/2007 | EP1461286B1 Differential stress reduction in thin films |
| 08/08/2007 | EP1417151B9 Method for the fabrication of suspended porous silicon microstructures and application in gas sensors |
| 08/08/2007 | CN1330557C Method of packaging MEMS device in vacuum state and MEMS device vacuum-packaged using the same |
| 08/08/2007 | CN101013197A Device on a transparent substrate and method for alignment forming and micro mechanical-electric device |
| 08/02/2007 | WO2007087249A2 Wafer level packaging to lidded chips |
| 08/02/2007 | WO2007087247A2 Wafer level chip packaging |
| 08/02/2007 | WO2007085044A1 Stamping methods and devices |
| 08/02/2007 | US20070178703 Method for release of surface micromachined structures in an epitaxial reactor |
| 08/02/2007 | US20070177287 Method of manufacturing a mirror and a mirror device |
| 08/02/2007 | US20070175862 Anisotropic etching agent composition used for manufacturing of micro-structures of silicon and etching method |
| 08/02/2007 | DE102006004287A1 Micro mechanical structure used in microphones has rings of flexible electrode segments |
| 08/02/2007 | CA2639982A1 Stamping methods and devices |
| 08/01/2007 | EP1628908A4 Formation of silicon nanostructures |
| 08/01/2007 | EP1173893A4 Polycrystalline silicon germanium films for forming micro-electromechanical systems |
| 08/01/2007 | CN1329285C Method for producing a product having a structured surface |
| 08/01/2007 | CN1329284C Fabrication of a reflective spatial light modulator |
| 07/31/2007 | US7250336 Method for fabricating a shadow mask in a trench of a microelectronic or micromechanical structure |
| 07/31/2007 | US7250315 Method for fabricating a structure for a microelectromechanical system (MEMS) device |
| 07/31/2007 | US7250128 Method of forming a via in a microfabricated elastomer structure |
| 07/31/2007 | US7250101 Electrochemically fabricated structures having dielectric or active bases and methods of and apparatus for producing such structures |
| 07/26/2007 | WO2007084317A2 Silicon-rich silicon nitrides as etch stops in mems manufacture |
| 07/26/2007 | WO2007083769A1 Contact device and process for producing the same |
| 07/26/2007 | WO2007082745A1 Selective etching for semiconductor devices |
| 07/26/2007 | WO2007038178A3 Improved nanocoils, systems and methods for fabricating nanocoils |
| 07/26/2007 | US20070169686 Systems and methods for mixing reactants |
| 07/26/2007 | DE19906067B4 Halbleitersensor für physikalische Größen und Verfahren zu dessen Herstellung A semiconductor sensor of physical quantities and methods for its preparation |
| 07/26/2007 | DE10330456B4 Vorrichtung zum Erstellen einer Oberflächenstruktur auf einem Wafer Apparatus for creating a surface structure on a wafer |
| 07/26/2007 | DE10036437B4 Mikromechanischer Beschleunigungssensor, Verfahren zu dessen Herstellung und Verfahren zu dessen Betrieb A micromechanical acceleration sensor, processes for its preparation and process for its operation |
| 07/25/2007 | EP1810948A1 Process to create an array of stress fields on a substrate for nucleation and growth of nanostructures |
| 07/25/2007 | EP1810947A2 Semiconductor device and its process of fabrication |
| 07/25/2007 | EP1634125B1 Lithographic method for producing microcomponents |
| 07/25/2007 | CN1328758C Manufacturing method of multifunction integrated sensor chip |
| 07/25/2007 | CN101004478A Micro-optic device manufacturing method |
| 07/25/2007 | CN101004413A Method for manufacturing diamond coated basal plate possible to be fabricated as biochip |
| 07/25/2007 | CN101003355A Direct write nano etching method |
| 07/24/2007 | US7247248 Method of forming atomic force microscope tips |
| 07/24/2007 | US7247247 Selective etching method |
| 07/19/2007 | WO2007081346A1 Method for singulating a released microelectromechanical system wafer |
| 07/19/2007 | WO2007080206A1 Method for obtaining microfluidic polymer structures |
| 07/19/2007 | WO2007055924A3 Wafer level packaging process |
| 07/19/2007 | US20070166520 Glass material for use at high frequencies |
| 07/19/2007 | DE102006002106A1 Micromechanical sensor, has diaphragm and counter unit, where hollow space is arranged between diaphragm and unit, where unit has perforation openings that comprise inhomogeneous surface distribution |
| 07/19/2007 | DE102006001493A1 MEMS-Sensor und Verfahren zur Herstellung MEMS sensor and methods for preparing |
| 07/18/2007 | EP1808406A2 Isolation Scheme for Reducing Film Stress in a MEMS Device |
| 07/18/2007 | EP1808405A2 Integrated package for MEMS die and IC chip |
| 07/18/2007 | EP1807341A1 Fluid container composed of two plates |
| 07/18/2007 | EP1535297A4 Diaphragm activated micro-electromechanical switch |
| 07/18/2007 | CN1327297C Lithographic apparatus and device manufacturing method |
| 07/18/2007 | CN101000968A Stack silicon-base miniature fuel celles and manufacturing method |
| 07/18/2007 | CN100998901A Porous silicon painless injection mironeedle array and its preparation method |
| 07/17/2007 | US7244402 Microfluidic protein crystallography |
| 07/17/2007 | US7243551 Micromechanical component having a sealed cavity and at least two dielectric layers and corresponding method for its manufacture |
| 07/12/2007 | WO2007078989A2 Process of forming a microphone using support member |
| 07/12/2007 | WO2007077962A1 Fluid mixing apparatus, integrated fluid mixing apparatus, fluid mixing system and process for producing a fluid mixing apparatus |
| 07/12/2007 | WO2007018571A3 Chemical sensor |
| 07/12/2007 | WO2006063098A8 Lift-off patterning processes employing energetically-stimulated local removal of solid-condensed-gas layers |
| 07/11/2007 | EP1805356A2 Surface and composition enhancements to high aspect ratio c-mems |
| 07/11/2007 | EP1115649B1 Micromechanical component with sealed membrane openings |
| 07/11/2007 | CN1996555A A making method for the radiant energy conversion chip |
| 07/11/2007 | CN1994861A All-optical micromachine non-frigorific infrared thermal imaging chip structure and its production method |
| 07/11/2007 | CN1994860A Silicon micromachine cantilever beam sensor driving structure, production method and uses under torsion mode |
| 07/11/2007 | CN1326200C Micro electro-mechanical system method |
| 07/11/2007 | CN1325367C Method for producing MEMS sensor suspension beam structure |
| 07/10/2007 | US7242273 RF-MEMS switch and its fabrication method |
| 07/10/2007 | US7241638 Micromechanical device and method of manufacture thereof |
| 07/10/2007 | US7241420 For use in microarraying systems, dip pen nanolithography systems, fluidic circuits, and microfluidic systems |
| 07/05/2007 | DE19830476B4 Halbleitervorrichtung insbesondere Sensor Semiconductor device, in particular sensor |
| 07/05/2007 | DE102005062554A1 Micro-mechanical component used in the semiconductor industry comprises a cap having a membrane for closing an access opening |
| 07/04/2007 | EP1803684A2 Vacuum packaged single crystal silicon resonator |
| 07/04/2007 | EP1803683A1 Method of producing ordered nanostructures |
| 07/04/2007 | CN1324238C Micromachined fluidic device and method for making same |
| 07/04/2007 | CN1323842C Method of manufacturing actuator device, and liquid jet device |
| 07/03/2007 | US7239487 Micro-electro-mechanical actuator for positioning a device such as a read/write head in a disk drive |
| 07/03/2007 | US7238594 Controlled nanowire growth in permanent, integrated nano-templates and methods of fabricating sensor and transducer structures |
| 07/03/2007 | US7238246 Thermally weld bodies made of plastic without or with use of an adhesive, where the welding temperature is above the glass transition temperature of the plastic |
| 06/28/2007 | WO2007073356A2 Improved singulation system and method |
| 06/28/2007 | WO2007072099A2 Method of forming a sealed channel of a microfluidic reactor and a microfluidic reactor comprising such channel |
| 06/28/2007 | WO2007071500A1 Method for producing a membrane on a semiconductor substrate and micromechanical component with such a membrane |
| 06/28/2007 | US20070148653 Fine metal structure, process for producing the same, fine metal mold and device |
| 06/28/2007 | DE102006058325A1 Halbleiterdynamiksensor und Verfahren zur Herstellung desselben A semiconductor dynamic sensor and method for manufacturing the same |
| 06/28/2007 | DE102005061411A1 Mikromechanischer Thermopile-Sensor und Verfahren zu seiner Herstellung Micromechanical thermopile sensor and method for its preparation |