| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 06/28/2007 | DE102005061148A1 Mikromechanische Struktur mit einem Substrat und einem Thermoelement, Temperatur und/oder Strahlungssensor und Verfahren zur Herstellung einer mikromechanischen Struktur Micro-mechanical structure comprising a substrate and a thermocouple, temperature and / or radiation sensor and method for manufacturing a micromechanical structure |
| 06/28/2007 | DE102005060855A1 Mikromechanischer kapazitiver Druckwandler und Herstellungsverfahren The micromechanical capacitive pressure transducer and manufacturing method |
| 06/28/2007 | DE102005059905A1 Mikromechanisches Bauelement und Herstellungsverfahren Micromechanical component and manufacturing processes |
| 06/28/2007 | DE102005001602B4 Verfahren zur Herstellung einer größeren Fluidkammer, insbesondere eines Fluidinjektors Process for the preparation of a larger fluid chamber, in particular a fluid injector |
| 06/27/2007 | EP1801067A2 Method for forming silicon germanium layers at low temperatures for controlling stress gradient |
| 06/27/2007 | EP1800824A1 Apparatus and method of manufacturing a bio-activator |
| 06/27/2007 | EP1800334A2 Method of removing polymer coating from an etched trench |
| 06/27/2007 | EP0943155B1 Method for anisotropic etching of silicon |
| 06/27/2007 | CN1988122A Method for marking silicon sheet edge |
| 06/27/2007 | CN1987646A Concave/convex pattern forming method and information recording medium manufacturing method |
| 06/27/2007 | CN1987486A Integrated optic grating interference micro mechanical acceleration sensor and its producing method |
| 06/27/2007 | CN1986386A Multiple stage mems release for isolation of similar materials |
| 06/27/2007 | CN1986011A Miniature needle array for medicine transmission and its making process |
| 06/27/2007 | CN1323424C Chip protection device |
| 06/27/2007 | CN1323423C Chip protection device |
| 06/27/2007 | CN1323025C Super hydrophobic surface possessing dual microtexture and preparing method |
| 06/26/2007 | US7236279 Digital optical switch apparatus and process for manufacturing same |
| 06/26/2007 | US7235166 Multi-cell masks and methods and apparatus for using such masks to form three-dimensional structures |
| 06/26/2007 | CA2286326C Article, method, and apparatus for electrochemical fabrication |
| 06/21/2007 | WO2007027663A3 Method and apparatus for evaporative cooling within microfluidic systems |
| 06/21/2007 | WO2005089348A3 Packaging for micro electro-mechanical systems and methods of fabricating thereof |
| 06/21/2007 | US20070142202 Fabrication of ceramic microstructures |
| 06/21/2007 | US20070141321 Fluid control device and method of manufacturing the same |
| 06/21/2007 | US20070137989 Optical components and production therof |
| 06/21/2007 | DE102006001386A1 Verfahren zum Herstellen einer Membran auf einem Halbleitersubstrat und mikromechanisches Bauelement mit einer solchen Membran A method of manufacturing a diaphragm on a semiconductor substrate and micromechanical component with such a membrane |
| 06/21/2007 | DE102005060876A1 Sensor and production process has connected carrier and sensor substrates with metal-free sensor region arranged over a recess in the carrier substrate |
| 06/21/2007 | DE102005060870A1 Verfahren zum Verschließen einer Öffnung A method for closing an opening |
| 06/21/2007 | DE102005042648B4 Verfahren zur Herstellung von kommunizierenden Hohlräumen Process for the preparation of communicating cavities |
| 06/20/2007 | EP1798799A1 Fuel cell planarly integrated on a monocrystalline silicon chip and process of fabrication |
| 06/20/2007 | EP1797479A1 Device obtained by nanoprinting comprising metallic patterns and method for nanoprinting of metallic patterns |
| 06/20/2007 | EP1254249B1 Deposited thin films and their use in detection, attachment, and bio-medical applications |
| 06/20/2007 | CN1984839A Methods of forming alpha and beta tantalum films with controlled and new microstructures |
| 06/20/2007 | CN1983559A Method of patterning substrate |
| 06/20/2007 | CN1983447A Method for processing a MEMS/CMOS cantilever based memory storage device |
| 06/20/2007 | CN1982203A Anti-reflection nano-metric structure based on porous alumina and method for production thereof |
| 06/20/2007 | CN1982202A Method for producing nano-stamped template by laminated sided-wall technology |
| 06/20/2007 | CN1322608C Process for preparing carbon electrode array with high surface area and high gap filling capacity |
| 06/19/2007 | US7233218 Air-gap type FBAR, and duplexer using the FBAR |
| 06/19/2007 | US7233000 Low power silicon thermal sensors and microfluidic devices based on the use of porous sealed air cavity technology or microchannel technology |
| 06/19/2007 | US7232686 Method of nanopatterning by forming cracks in a coated polymer substrate |
| 06/14/2007 | DE19957326B4 Verfahren zur Herstellung von Kontaktstrukturen A method for producing contact structures |
| 06/14/2007 | DE112005001713T5 Ätzen mit elektrostatisch angezogenen Ionen Etching with electrostatically attracted ions |
| 06/14/2007 | DE102004058214B4 Mikrofluidikmodul mit mikrofluidischer Kanalstruktur und Verfahren zu dessen Erzeugung Mikrofluidikmodul with microfluidic channel structure and process for its production |
| 06/13/2007 | EP1795497A1 Apparatus and method for transferring a pattern with intermediate stamp |
| 06/13/2007 | EP1795496A2 Semiconductor device for detecting pressure variations |
| 06/13/2007 | EP1502282A4 Micro electro-mechanical system method |
| 06/13/2007 | CN1979772A Method for making release sacrifice layer adopting basing on projection point of silicon lining |
| 06/13/2007 | CN1978600A Method for preparing composite lubricating film with nano thickness |
| 06/13/2007 | CN1978309A Method for manufacturing micro structure |
| 06/13/2007 | CN1321054C Preparation method of silicon-based micro mechanical photomodulator chip |
| 06/12/2007 | US7230315 Integrated chemical microreactor with large area channels and manufacturing process thereof |
| 06/12/2007 | US7230306 Microelectromechanical thin-film device |
| 06/12/2007 | US7229542 Flowing molding materials to surfaces, then solidifying and separating to form three-dimensional structures |
| 06/07/2007 | US20070128831 Process for fabricating a micro-electro-mechanical system with movable components |
| 06/07/2007 | US20070126147 Method of producing a nanomaterial, and a nanomaterial |
| 06/06/2007 | EP1793418A1 Etching method and system |
| 06/06/2007 | EP1792870A2 Double-sided etching method using embedded alignment mark |
| 06/06/2007 | DE102005056204A1 Micromechanical device, has functional layer exhibiting metallization layer on its surface, where metallization layer is applied selectively on surface of functional layer by galvanic separation process |
| 06/06/2007 | CN1975982A Method for making double-side technology |
| 06/06/2007 | CN1975956A Piezoelectric RF MEMS device and method of fabricating the same |
| 06/06/2007 | CN1974373A Micro structure, its manufacture method and micro electromechanical system |
| 06/06/2007 | CN1974372A Monolithic integrated sensor chip for measing three parameters of pressure difference, absolute pressure and temperature and its making process |
| 06/05/2007 | US7226862 Method for producing a fluid device, fluid device and analysis apparatus |
| 06/05/2007 | US7225524 Method for fabricating a gyroscope |
| 06/05/2007 | CA2261425C Method and apparatus for three-dimensional micro-fabrication and processing on flexible filamentary substrates |
| 05/31/2007 | WO2007062268A2 Method and structure for magnetically-directed, self-assembly of three-dimensional structures |
| 05/31/2007 | WO2007060416A1 A micro-electromechanical device and method of making the same |
| 05/31/2007 | WO2007060415A1 A micro-electromechanical system memory device and method of making the same |
| 05/31/2007 | WO2005045885A3 Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems |
| 05/31/2007 | US20070123013 Controlled process and resulting device |
| 05/31/2007 | US20070122995 Controlled process and resulting device |
| 05/31/2007 | US20070121188 Micro mirror and method for fabricating the same |
| 05/31/2007 | DE102005056780A1 Mixture for coating process, useful e.g. as active and passive corrosion protective coating, comprises a liquid, separating- or lubricating agent and sliding surface supporting substance e.g. antimicrobial active substance and fungicide |
| 05/31/2007 | DE102005056759A1 Micromechanical structure for use as e.g. microphone, has counter units forming respective sides of structure, where counter units have respective electrodes, and closed diaphragm is arranged between counter units |
| 05/31/2007 | DE102005046156B3 Vorrichtung mit Funktionselement und Verfahren zum Herstellen der Vorrichtung Device having a functional element and method for manufacturing the device |
| 05/30/2007 | EP1790704A1 micro system component and method for bonding micro components to a substrate |
| 05/30/2007 | EP1789848A1 A flexible nano-imprint stamp |
| 05/30/2007 | EP1330274A4 Microneedle structure and production method therefor |
| 05/30/2007 | CN1970434A Method for manufacturing piezoresistance type microcantilever beam sensor on SOI silicon sheet |
| 05/30/2007 | CN1970433A Method for manufacturing suspending structure |
| 05/30/2007 | CN1970432A Microelectromechanicl system vibration jet actuator and its preparation method |
| 05/30/2007 | CN1970431A Mciromechanical two-dimensional obliquity sensor silicon chip and production method |
| 05/29/2007 | US7224245 Duplexer fabricated with monolithic FBAR and isolation part and a method thereof |
| 05/29/2007 | US7223624 Micromechanical device with thinned cantilever structure and related methods |
| 05/29/2007 | CA2380075C Microfabricated devices and method of manufacturing the same using polymer gel |
| 05/24/2007 | WO2007058604A1 Master electrode and method of forming the master electrode |
| 05/24/2007 | WO2007057500A1 Method of producing a diffraction grating element |
| 05/24/2007 | WO2004102634A3 Metal mems devices and methods of making same |
| 05/24/2007 | US20070117246 Metal mems devices and methods of making same |
| 05/24/2007 | US20070117234 Sputtered Spring Films With Low Stress Anisotropy |
| 05/24/2007 | US20070114623 Method for manufacturing a microelectromechanical component, and a microelectromechanical component |
| 05/24/2007 | DE10393364B4 Lochmikrosonde unter Nutzung einer MEMS-Technik und ein Verfahren zur Herstellung derselben Hollow microprobe using an MEMS technique and a method of manufacturing the same |
| 05/24/2007 | DE102006052693A1 Verfahren zur Fertigung eines Halbleitersensors A method for manufacturing a semiconductor sensor |
| 05/24/2007 | DE102005055478A1 Micromechanical structure e.g. microphone, has counter unit provided between diaphragm and substrate, where cavity is formed between diaphragm and unit, and another cavity is formed between unit and substrate |
| 05/24/2007 | DE102005055473A1 Mikromechanische Vorrichtung und Verfahren zur Herstellung einer mikromechanischen Vorrichtung Micromechanical device and method of manufacturing a micromechanical device |
| 05/24/2007 | DE102005055083A1 Thermoelektrischer Sensor und Verfahren zur Herstellung Thermoelectric sensor and methods for preparing |
| 05/24/2007 | DE102005046008B4 Halbleitersensorbauteil mit Sensorchip und Verfahren zur Herstellung desselben Of the same semiconductor sensor device comprising the sensor chip and method for producing |
| 05/23/2007 | EP1788361A2 Integrated opto-electronic thin-film sensor for linear displacement sensor |
| 05/23/2007 | EP1787948A2 Method for flip-chip packaging MEMS |
| 05/23/2007 | EP1787785A2 Extrusion/dispensing systems and methods |