| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 10/03/2007 | CN101048338A Fluid container composed of two plates |
| 10/03/2007 | CN101047149A Manufacturing method for non-refrigeration infrared focal plane array based on silicon substrate without sacrifice layer |
| 10/03/2007 | CN101046465A Process of machining dumbbell ball for magnetomotive oxygen measuring instrument |
| 10/03/2007 | CN100341119C Silicon microbridge corrosion unit for ferroelectric film infrared detector |
| 10/02/2007 | US7276789 Microelectromechanical systems using thermocompression bonding |
| 09/27/2007 | WO2007107736A2 Method for fabricating a mems microphone |
| 09/27/2007 | US20070221505 Electrochemical deposition of one or more materials according to desired cross-sectional configurations so as to build up three dimensional structures from a plurality of at least partially adhered layers of deposited material; simplification |
| 09/27/2007 | DE10233637B4 Systeme und Verfahren zum Bilden von Datenspeichervorrichtungen Systems and methods for forming data storage means |
| 09/27/2007 | DE102006014317A1 Verfahren zum Herstellen eines Bauteils mit einem Hohlraum und Vorrichtung mit einem zur Führung eines Fluids geeigneten Hohlraum A method for manufacturing a component with a cavity and with a suitable device for guiding a fluid cavity |
| 09/27/2007 | DE102006012857A1 Verfahren zur Herstellung einer Halbleiterstruktur und entsprechende Halbleiterstruktur A process for producing a semiconductor structure and corresponding semiconductor structure |
| 09/26/2007 | EP1837305A2 Protection capsule for MEMS devices |
| 09/26/2007 | EP1837304A2 Micromachine including a mechanical structure connected to an electrical circuit and method for manufacturing the same |
| 09/26/2007 | EP1532663A4 Three dimensional thin film devices and methods of fabrication |
| 09/26/2007 | EP1345841B1 Valve integrally associated with microfluidic liquid transport assembly |
| 09/26/2007 | CN101041413A Micromachine and method for manufacturing the same |
| 09/26/2007 | CN100339947C Elementary cell automation machine coupling method for thin film boundary and deposition rate calculation |
| 09/25/2007 | US7274096 Light transmissive cover, device provided with same and methods for manufacturing them |
| 09/25/2007 | US7273764 Sensor with at least one micromechanical structure, and method for producing it |
| 09/20/2007 | WO2007106271A1 Methods for producing mems with protective coatings using multi-component sacrificial layers |
| 09/20/2007 | WO2007029133A3 A method of manufacturing a microsystem, such a microsystem, a stack of foils comprising such a microsystem, an electronic device comprising such a microsystem and use of the electronic device |
| 09/20/2007 | WO2007029132A3 A method of manufacturing a microsystem, such a microsystem, a stack of foils comprising such a microsystem, an electronic device comprising such a microsystem and use of the electronic device |
| 09/20/2007 | US20070215965 Micro-Mechanical Structure and Method for Manufacturing the Same |
| 09/20/2007 | DE10318105B4 Verfahren zur Herstellung von Mikrostrukturen A process for the fabrication of microstructures |
| 09/20/2007 | DE102006011753A1 Halbleitersensorbauteil mit Sensorgehäuse und Sensorchip und Verfahren zur Herstellung desselben Of the same semiconductor sensor device with the sensor housing and the sensor chip and method for producing |
| 09/20/2007 | DE102006011545A1 Micromechanical combination unit for use in mobile telephone position-dependent display control, has inertia type and diaphragm type sensor devices formed on front side of substrate, where diaphragm type sensor device has diaphragm |
| 09/19/2007 | CN101037186A MEMS automatic leading interlinking equipment based on zoom microscope location |
| 09/19/2007 | CN101037185A Method for making nano-groove on quartz glass |
| 09/19/2007 | CN101037032A 3d structure based on 2d substrate |
| 09/19/2007 | CN100338739C Manufacturing method of structural body, droplet discharging head and droplet discharging device |
| 09/19/2007 | CN100337905C Manufacturing system for microstructure |
| 09/18/2007 | US7270868 Micromechanical component |
| 09/18/2007 | US7270759 Structure with through hole, production method thereof, and liquid discharge head |
| 09/18/2007 | US7270475 Thermoelastic device comprising an expansive element formed from a preselected material |
| 09/13/2007 | WO2007103224A2 Structure and method of making lidded chips |
| 09/13/2007 | WO2007101352A1 Method of selective removal of organophosphonic acid molecules from their self-assembled monolayer on si substrates |
| 09/13/2007 | WO2007072099A3 Method of forming a sealed channel of a microfluidic reactor and a microfluidic reactor comprising such channel |
| 09/13/2007 | US20070212805 Thin-film microelectromechanical device fabrication process |
| 09/13/2007 | US20070210431 Support with integrated deposit of gas absorbing material for manufacturing microelectronic microoptoelectronic or micromechanical devices |
| 09/13/2007 | US20070209572 High throughput screening of crystallization materials |
| 09/12/2007 | CN101036086A A flexible nano-imprint stamp |
| 09/12/2007 | CN101035930A Fused-salt bath, precipitate obtained by using the fused-salt bath, method for producing metal product and metal product |
| 09/12/2007 | CN101034667A Device fabrication by ink-jet printing materials into bank structures, and embossing tool |
| 09/12/2007 | CN101033057A Microstructure, semiconductor device, and manufacturing method of the microstructure |
| 09/11/2007 | US7268486 Hermetic encapsulation of organic, electro-optical elements |
| 09/11/2007 | US7268081 Wafer-level transfer of membranes with gas-phase etching and wet etching methods |
| 09/11/2007 | US7267938 Patterning of surfaces utilizing microfluidic stamps including three-dimensionally arrayed channel networks |
| 09/11/2007 | US7267755 Multilater; dielectric and electroconductive layers |
| 09/11/2007 | CA2362387C Method for production of three-dimensionally arranged conducting and connecting structures for volumetric and energy flows |
| 09/07/2007 | WO2007100457A2 Electrical conditioning of mems device and insulating layer thereof |
| 09/07/2007 | WO2007099210A1 Method for electrochemically structuring a conductuve or semiconductor material, and device for implementing it |
| 09/06/2007 | US20070207619 Method of manufacturing self-ordered nanochannel-array and method of manufacturing nanodot using the nanochannel-array |
| 09/06/2007 | DE10308860B4 Verfahren zum Vereinzeln von Halbleiterscheiben mit frei liegenden mikromechanischen Strukturen zu Chips A method for singulating semiconductor wafers with exposed micromechanical structures into chips |
| 09/06/2007 | DE102006008584A1 Fertigungsprozess für integrierte Piezo-Bauelemente Manufacturing process for integrated piezo-elements |
| 09/06/2007 | DE102006008315A1 Miniaturized transport system for adjusted forward motion of material, comprises flick hair epithelium anchored with multiple substrates, where flick hairs from shape retention polymer are switched at selected distance by stimuli exposure |
| 09/06/2007 | DE102006004209B3 Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component and process for producing a micromechanical component |
| 09/05/2007 | EP1829088A1 Lift-off patterning processes employing energetically-stimulated local removal of solid-condensed-gas layers |
| 09/05/2007 | EP1828049A1 Device and use thereof |
| 09/05/2007 | EP1828047A1 Injection-molded package for mems inertial sensor |
| 09/05/2007 | EP1827717A2 Methods and compositions for forming aperiodic patterned copolymer films |
| 09/05/2007 | EP1226090B1 Gas sensor and fabrication method thereof |
| 09/05/2007 | CN101030548A Micro-mechanical wafer chip test detecting card and its production |
| 09/05/2007 | CN101030033A Production of MEMS suspending structure by laminated photoetching glue victim layer |
| 09/05/2007 | CN101029949A Optical element and method of manufacturing optical element |
| 09/05/2007 | CN100335905C Microstructure with movable mass |
| 09/04/2007 | US7265429 System and method of fabricating micro cavities |
| 08/30/2007 | WO2007096636A1 Mems device |
| 08/30/2007 | WO2007096082A1 Patterning method and device with a patterned surface |
| 08/30/2007 | WO2005122285A3 Methods and devices for fabricating and assembling printable semiconductor elements |
| 08/30/2007 | US20070199822 Methods of and Apparatus for Molding Structures Using Sacrificial Metal Patterns |
| 08/30/2007 | DE112005002435T5 Salzschmelzebad, Abscheidung erhalten unter Verwendung des Salzschmelzebades, Herstellungsverfahren für ein Metallprodukt und Metallprodukt Molten salt bath, deposition obtained using the molten salt bath, manufacturing method of a metal product, and the metal product |
| 08/30/2007 | DE102007007178A1 Kapazitive mikrobearbeitete Ultraschalltransducer und Verfahren zur Herstellung derselben Capacitive micromachined ultrasonic transducers and method of producing same |
| 08/29/2007 | CN101026053A Downward type MEMS switch and method for fabricating the same |
| 08/29/2007 | CN101024482A Method for constituting 3-D structure |
| 08/29/2007 | CN101024481A Micro electro mechanical system, semiconductor device, and manufacturing method thereof |
| 08/29/2007 | CN101024480A Method for forming microelectronic spring structures on a substrate |
| 08/29/2007 | CN100333992C Method of manufacturing microstructure and manufacturing system for the same |
| 08/28/2007 | US7262078 Method of forming a wear-resistant dielectric layer |
| 08/28/2007 | US7262068 Microneedle array module and method of fabricating the same |
| 08/28/2007 | US7261831 Positive tone bi-layer imprint lithography method |
| 08/28/2007 | US7261825 Method for the production of a micromechanical device, particularly a micromechanical oscillating mirror device |
| 08/28/2007 | US7261824 Method of fabrication of a microfluidic device |
| 08/28/2007 | CA2558517A1 Micro-pattern forming apparatus, micro-pattern structure, and method of manufacturing the same |
| 08/28/2007 | CA2376283C Method of manufacturing an intracutaneous microneedle array |
| 08/23/2007 | WO2007094254A1 Microchannel chip and method for manufacturing such chip |
| 08/23/2007 | US20070196945 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor |
| 08/23/2007 | DE102006007729A1 Micro-electro-mechanical system substrate manufacturing method, involves depositing semiconductor function layer over surface of semiconductor substrate to form membrane region over cavern and connection forming region beside cavern |
| 08/23/2007 | DE102005063127B3 Mikro- und Nanospitzen sowie Verfahren zu deren Herstellung Micro- and nano-tips as well as processes for their preparation |
| 08/23/2007 | CA2641443A1 Microchannel chip and method for manufacturing such chip |
| 08/22/2007 | EP1820773A2 Site-selectively modified micro-and nanostructures and the methods of their fabrication |
| 08/22/2007 | EP1715961A4 Spin-on protective coatings for wet-etch processing of microelectronic substrates |
| 08/22/2007 | CN101023508A Improved method and apparatus for the etching of microstructures |
| 08/21/2007 | US7259436 Micromechanical component and corresponding production method |
| 08/21/2007 | US7259080 Glass-type planar substrate, use thereof, and method for the production thereof |
| 08/16/2007 | WO2007090971A1 Method for low-temperature sealing of a cavity under vacuum or under controlled atmosphere |
| 08/16/2007 | WO2007073356A3 Improved singulation system and method |
| 08/16/2007 | US20070189555 Electret condenser |
| 08/16/2007 | DE10307568B4 Verfahren zum Herstellen einer Membran mit Membranlöchern und nach diesem Verfahren hergestellte Mikro-/Nanomembran A method for producing a membrane with membrane and holes produced by this process micro / nano-membrane |
| 08/16/2007 | DE10222958B4 Verfahren zur Herstellung eines organischen elektro-optischen Elements und organisches elektro-optisches Element A method of manufacturing an organic electro-optical element and an organic electro-optical element |
| 08/16/2007 | DE102006006890A1 Verfahren zur Herstellung einer Prüfstruktur zur Prüfung der Durchbiegung einer Membran eines mikromechanischen Bauelements und entsprechende Prüfstruktur A method for producing a test structure for testing the deflection of a membrane of a micromechanical component and corresponding test structure |
| 08/16/2007 | DE102006005419A1 Semiconductor component for electronic device, includes walls with photolithographically patterned polymer, and cavity covering having polymer layer, where molecular chains of the polymers are crosslinked to form stable cavity housing |