Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
11/2007
11/15/2007WO2007130294A2 Superhydrophobic surfaces and fabrication process
11/15/2007WO2007128705A1 Process for collective manufacturing of small volume high precision membranes and cavities
11/15/2007US20070261750 Sintered glass and glass-ceramic structures and methods for producing
11/15/2007US20070261480 Atomic force microscope tip arrays and methods of manufacturing same
11/15/2007DE102007013410A1 Verfahren zum Ausbilden von Diamant-Mikrokanal-Strukturen und daraus resultierende Vorrichtungen A method for forming diamond micro-channel structures and resultant devices
11/15/2007DE102006020131A1 Nano- und mikrostrukturierter Biosensor und Verfahren zu seiner Herstellung Nano- and microstructured biosensor and method for its manufacture
11/15/2007DE102006019656A1 Monolithic fluid-ejection unit production method, involves providing substrate with two surfaces opposite to each other and forming heating element, signal transmission circuit and galvanic-germ-layer on one surface of substrate
11/14/2007EP1854104A1 Method for production of a thin-layer structure
11/14/2007EP1425764B1 Bistable magnetic actuator
11/14/2007EP1095401B1 Method for anisotropic plasma etching of semiconductors
11/14/2007CN101071790A Semiconductor substrate, and semiconductor device and method of manufacturing the semiconductor device
11/14/2007CN101071200A Electrical characterization of interferometric modulators
11/14/2007CN101071199A Electrical characterization of interferometric modulators
11/14/2007CN101071061A Electrical characterization of interferometric modulators
11/14/2007CN100348323C Microfluidic apparatus with integrated porous-substrates/sensor for real-time biochemical molecule detection
11/13/2007US7294503 Microfabricated crossflow devices and methods
11/13/2007US7293559 Device and method for creating aerosols for drug delivery
11/08/2007WO2007126919A2 Non-planar surface structures and process for microelectromechanical systems
11/08/2007WO2007126844A2 Non-planar surface structures and process for microelectromechanical systems
11/08/2007US20070256774 Method of manufacturing microstructure and manufacturing system for the same
11/08/2007DE10330456B9 Vorrichtung zum Erstellen einer Oberflächenstruktur auf einem Wafer Apparatus for creating a surface structure on a wafer
11/07/2007CN101066749A Cantilever structure and its making process and application
11/07/2007CN100347829C Etching device for high precision silicon senser chip
11/07/2007CN100347608C Method for forming a micro-pattern on a substrate by using capillary force
11/06/2007US7291921 Structure of a micro electro mechanical system and the manufacturing method thereof
11/06/2007US7291254 Forming and adhering a layer of material to a substrate, wherein the substrate may include one or more previously formed layers;repeating the forming and adhering operation of a plurality of times to build up a three-dimensional structure from a plurality of adhered layers
11/01/2007WO2007123820A2 Non-planar surface structures and process for microelectromechanical systems
11/01/2007WO2007121992A1 Housing with an electric circuit
11/01/2007WO2006115592A8 Anti-stiction technique for electromechanical systems and electromechanical device employing same
11/01/2007US20070254110 Fabrication of metallic microstructures via exposure of photosensitive composition
10/2007
10/31/2007DE19758847B4 Semiconductor sensor for detecting physical parameter with mobile section of support structure - has substrate, with displaceable spaced-apart structure of monocrystalline semiconductor material
10/31/2007DE19625605B4 Herstellungsverfahren eines Halbleitersensors für eine physikalische Grösse Manufacturing method of a semiconductor sensor for a physical quantity
10/31/2007DE10238587B4 Verfahren zur Herstellung einer Verbundvorrichtung A process for manufacturing a composite device
10/31/2007CN101063747A Process control monitors for interferometric modulators
10/31/2007CN101062761A Method for producing nano-beam with right-angled triangle cross-section by wet method corrosion technique
10/30/2007US7289262 Optical attenuator element, and variable optical equalizer and optical amplifier that use this optical attenuator element
10/25/2007WO2007120885A2 Mems devices and processes for packaging such devices
10/25/2007WO2007119206A2 A method for manufacturing an electronic assembly; an electronic assembly, a cover and a substrate
10/25/2007WO2007118755A1 Micromechanical component with wafer through-plating and corresponding production method
10/25/2007US20070247761 Micro-actuator for hard-disk drive, and manufacturing process thereof
10/25/2007US20070247714 Security Device
10/25/2007US20070247693 Method and system for packaging a mems device
10/25/2007DE10241344B4 Waferebenengehäuse mit Siliziumdichtung Wafer-level housing with silicon seal
10/25/2007DE102006030323A1 Verfahren zur Oberflächenbehandlung einer metallischen Substratoberfläche A process for surface treatment of a metallic substrate surface
10/25/2007DE102006018027A1 Mikromechanisches Bauelement mit Waferdurchkontaktierung sowie entsprechendes Herstellungsverfahren Micromechanical component with through-wafer via and corresponding production method
10/25/2007DE10135569B4 Mikromechanisches Bauteil Micromechanical element
10/24/2007EP1847509A2 Mechanical isolation for MEMS devices
10/24/2007EP1846321A1 Method of fabricating a silicon-on-insulator structure
10/24/2007EP1846319A1 Micromechanical component and corresponding production method
10/24/2007CN101061058A Imprinting of supported and free-standing 3-D micro-or nano-structures
10/24/2007CN101060165A Organic el device including microstructures between a transparent substrate and an electrode
10/24/2007CN101058402A Method of manufacturing single-sheet integrated micro-electron machinery system
10/24/2007CN100345251C Method for mfg. silicon film on silicon base substrate with deep slot pattern
10/24/2007CN100344532C Carbon nanotube array growing device
10/23/2007US7286278 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
10/23/2007US7285897 Curved micromachined ultrasonic transducer arrays and related methods of manufacture
10/23/2007US7285834 Process for producing microelectromechanical components and a housed microelectromechanical component
10/23/2007US7285437 Method of separating MEMS devices from a composite structure
10/23/2007US7284976 Moulding assembly for forming at least one protective cap
10/18/2007WO2007116345A2 Inter-layer connection for foil mems technology
10/18/2007US20070243654 Microelectromechanical device with integrated conductive shield
10/18/2007US20070243413 Thermoelastic Device With Preselected Resistivity, Inertness And Deposition Characteristics
10/18/2007DE102006017482A1 Mikrofluidischer Aktor, Aktorverfahren und Verfahren zum Herstellen eines Mikroaktors A microfluidic actuator, Aktorverfahren and method of manufacturing a micro actuator
10/18/2007DE102006016260A1 Mikromechanische Gehäusung mit mindestens zwei Kavitäten mit unterschiedlichem Innendruck und/oder unterschiedlicher Gaszusammensetzung sowie Verfahren zu deren Herstellung Micromechanical Gehäusung with at least two cavities having different internal pressures and / or different gas composition, as well as processes for their preparation
10/18/2007DE102006001493B4 MEMS-Sensor und Verfahren zur Herstellung MEMS sensor and methods for preparing
10/18/2007DE10056716B4 Mikrostrukturbauelement Microstructure component
10/17/2007EP1843972A2 Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers
10/17/2007EP1558954B1 Method of producing a movable lens structure for a light shaping unit
10/17/2007EP1532637B1 Method of forming atomic force microscope tips
10/17/2007CN101056072A Staggered vertical comb drive fabrication method
10/17/2007CN101054158A Self-separation manufacturing method for silicon micro-channel structure
10/17/2007CN101054157A Electronic apparatus element and manufacturing method thereof, and resonator and manufacturing method thereof
10/17/2007CN100343949C Micro-switching element fabrication method and micro-switching element
10/16/2007US7282446 Method of manufacturing self-ordered nanochannel-array and method of manufacturing nanodot using the nanochannel-array
10/16/2007US7282383 Micromachine production method
10/12/2007CA2584571A1 Staggered vertical comb drive fabrication method
10/11/2007WO2007114191A1 Membrane structure element and method for manufacturing same
10/11/2007WO2007114065A1 Oscillating element, oscillation element manufacturing method, optical scanning device, image forming device and image display device
10/11/2007WO2007113300A1 Protection of cavities opening onto a face of a microstructured element
10/11/2007WO2007078989A3 Process of forming a microphone using support member
10/11/2007WO2007062268A8 Method and structure for magnetically-directed, self-assembly of three-dimensional structures
10/11/2007WO2007057814A3 Electronic device comprising a mems element
10/11/2007DE102006016812A1 Bauelement mit einem Halbleitersubstrat und Verfahren zu dessen Herstellung Component having a semiconductor substrate and process for its preparation
10/11/2007DE102006016811A1 Verfahren zur Herstellung eines mikromechanischen Bauelements A process for producing a micromechanical component
10/10/2007EP1842227A2 Diamond medical devices
10/10/2007EP1842224A1 Methods and apparatus having wafer level chip scale package for sensing elements
10/10/2007EP1842222A1 Improved method and apparatus for monitoring a microstructure etching process
10/10/2007CN101051114A Piano mems with hidden hinge
10/10/2007CN101051033A Method for preparing micro disc electrode or micro disc array electrode
10/10/2007CN101049903A Method for producing micro suspension structure
10/10/2007CN100341714C Complex microstructure film
10/10/2007CN100341712C Mold tool method of manufacturing a mold tool and storage medium formed by use of the mold tool
10/06/2007CA2584145A1 Piano mems with hidden hinge
10/04/2007WO2007084317A3 Silicon-rich silicon nitrides as etch stops in mems manufacture
10/04/2007DE102006015492A1 Micromechanical element e.g. thermo-generator, has thermobranches provided with epitaxial polysilicon materials, where one thermobranch has electrical isolation material opposite to other thermobranch in direction of main extending level
10/04/2007DE102006015386A1 Nanostrukturierte oder mikrostrukturierte Vorrichtung, Filter, Verwendung einer Vorrichtung und Verfahren zur Herstellung einer Vorrichtung oder eines Filters Nanostructured or microstructured device, filters, using a device and method for manufacturing a device or a filter
10/04/2007DE102006007800B3 Strukturierungsverfahren und Bauteil mit einer strukturierten Oberfläche Patterning method and device with a structured surface
10/04/2007DE10140322B4 Mikrostrukturierter dreidimensionaler Sensor oder Aktor, sowie Verfahren zu seiner Herstellung Microstructured three-dimensional sensor or actuator, as well as methods for its preparation
10/03/2007EP1840940A1 Apparatus and process for coating micro or nanostructured substrates
10/03/2007EP1840081A2 Method for forming a hermetically sealed cavity
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