| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 04/03/2008 | WO2008040008A1 Micromixer using integrated three-dimensional porous structure |
| 04/03/2008 | WO2007135682A3 Apparatus for generating pressure and methods of manufacture thereof |
| 04/03/2008 | US20080080068 Microlens, method of manufacturing microlens, and photomask used for manufacturing method |
| 04/03/2008 | DE102006046224A1 Electro-mechanical component i.e. piezoelectric resistive micro electromechanical system pressure sensor, for detecting measuring data in e.g. compressor, has piezo-resistive channel applied on surface of diaphragm layer |
| 04/03/2008 | DE102005010080B4 Verfahren zum Herstellen einer Dünnschicht-Struktur A method for manufacturing a thin-film structure |
| 04/02/2008 | EP1905734A1 Method of manufacture of an electromechanical component on a planar substrate |
| 04/02/2008 | EP1905066A1 Structures formed in diamond |
| 04/02/2008 | EP1904398A2 A method of manufacturing a mems element |
| 04/02/2008 | CN101154770A Method for flexible interlinkage with built-in type device |
| 04/02/2008 | CN101154581A Apparatus for manufacturing semiconductor device, wet etching process device and wet etching process method |
| 04/02/2008 | CN101154505A Structure of rotating micro-mechanical variable capacitor against influence of ambient vibration |
| 04/02/2008 | CN101153919A Microlens, method of manufacturing microlens, and photomask used for manufacturing method |
| 04/02/2008 | CN101152955A Method of making microstructure device, and microstructure device made by the same |
| 04/02/2008 | CN100378451C Microelectronic detector on chip, its manufacturing and application method |
| 04/02/2008 | CN100377787C Microfluidic system utilizing thin-film layers to route fluid |
| 04/01/2008 | US7352266 Head electrode region for a reliable metal-to-metal contact micro-relay MEMS switch |
| 04/01/2008 | US7351321 Electroplating metal onto substrate in pattern corresponding to complement of conformable mask; forming multilayer, three-dimensional structure |
| 03/27/2008 | WO2008009823A3 Microfluidic device for crystallization and chrystallographic analysis of molecules |
| 03/27/2008 | US20080074564 Method for forming finely-structured parts, finely-structured parts formed thereby, and product using such finely-structured part |
| 03/27/2008 | US20080073766 System for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 03/27/2008 | US20080072895 Device and method for creating aerosols for drug delivery |
| 03/27/2008 | DE102006042366A1 Micromechanical method for the production of through plated by semiconductor substrate, involves application of metallic material on surface of upper side of p or n-doped semiconductor substrate |
| 03/26/2008 | EP1903120A2 Nickel based alloy comprising cobalt and rhenium disulfide and method of applying it as a coating |
| 03/26/2008 | EP1258034B1 A METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE OF SiC |
| 03/26/2008 | CN101150055A Making method for large-area 3C-SiC thin film of MEMS part |
| 03/26/2008 | CN101150008A Polymer substrate double plane electromagnetic coil production method |
| 03/26/2008 | CN101148243A Method for making three-dimension electric casting micro structure |
| 03/26/2008 | CN100377333C Semiconductor structure with one or more through-holes |
| 03/25/2008 | US7348258 Method and device for controlled cleaving process |
| 03/25/2008 | US7348183 Apparatus for use in the detection of microorganisms, chemical compounds and the measurement of membrane transport |
| 03/20/2008 | WO2007120885A3 Mems devices and processes for packaging such devices |
| 03/20/2008 | US20080067655 Device Comprising an Encapsulated Microsystem and Production Method Thereof |
| 03/20/2008 | DE102006040115A1 Verfahren und Anordnung zur hermetisch dichten vertikalen elektrischen Durchkontaktierung von Deckscheiben der Mikrosystemtechnik Method and apparatus for hermetically sealed vertical electric throughplating shields of microsystem technology |
| 03/20/2008 | DE102004022178B4 Verfahren zur Herstellung einer Leiterbahn auf einem Substrat und Bauelement mit einer derart hergestellten Leiterbahn A method of fabricating a wiring on a substrate and the component to a conductor track manufactured in such a way |
| 03/19/2008 | EP1899260A1 Method for producing a micromechanical component and the thus obtained micromechanical component |
| 03/19/2008 | EP1675803B1 Methods and systems for providing mems devices with a top cap and upper sense plate |
| 03/19/2008 | EP1276426A4 Systems and methods for the transport of fluids through a biological barrier and production techniques for such systems |
| 03/19/2008 | CN101143701A Method for manufacturing radio-frequency micro-machinery series contact type switch |
| 03/19/2008 | CN101143700A Method for processing micro-machinery hot flow type sensor |
| 03/19/2008 | CN101143699A Universal film material graphics method |
| 03/19/2008 | CN100375914C Micro-optic device |
| 03/18/2008 | US7345002 Replication and transfer of microstructures and nanostructures |
| 03/13/2008 | WO2008028452A1 Plasma etching method for producing positive etching profiles in silicon substrates |
| 03/13/2008 | DE102006045900A1 Sensor module manufacturing method, arranging sensor with sensing area on support and sensing area represents support and matrial is applied to sensor and support is removed from sensing area |
| 03/12/2008 | CN101141120A Microelectronic mechanical variable bandpass filter and process for producing the same |
| 03/12/2008 | CN101141023A Microcomputer electric stacking type millimeter wave antenna |
| 03/12/2008 | CN101140185A Non-refrigerate infrared focal plane array seeker and preparation method thereof |
| 03/12/2008 | CN101138663A Preparation method of biological microelectrode array based on flexible substrate |
| 03/12/2008 | CN100375236C Method of forming separable interface and producing micro-electromechanical film with the method |
| 03/11/2008 | US7341966 Glass comprises alumina, silica, boria, and alkali and/or alkaline earth metal oxide; resists devitrification upon sintering without inhibitor oxide; microfluidics |
| 03/11/2008 | US7341884 Thin-film microelectromechanical device fabrication process |
| 03/11/2008 | US7341765 Forming a protective layer of glassy alloy over a silicon-comprising surface; layer can have a nanocrystalline microstructure; electronics |
| 03/06/2008 | WO2007130294A3 Superhydrophobic surfaces and fabrication process |
| 03/06/2008 | US20080057731 Method for forming finely-structured parts, finely-structured parts formed thereby, and product using such finely-structured part |
| 03/06/2008 | US20080057675 Method and Device for Controlled Cleaving Process |
| 03/06/2008 | US20080055699 Structure of a micro electro mechanical system and the manufacturing method thereof |
| 03/06/2008 | US20080053431 Device and method for creating aerosols for drug delivery |
| 03/06/2008 | DE102006041396A1 Mikrosieb zur Filterung von Partikeln in Mikrofluidik-Anwendungen und dessen Herstellung Microsieve filtration of particles in microfluidic applications and its production |
| 03/06/2008 | DE102006040345A1 Micro-mechanical component for use as e.g. microphone, has hollow space formed between diaphragm area and carrier substrate, and diaphragm structure with inversion that extends into complementary recess in carrier substrate |
| 03/06/2008 | DE102006040343A1 Verfahren zur Herstellung von Bauteilen zur Steuerung eines Fluidflusses sowie Bauteile, hergestellt nach diesem Verfahren A process for the production of components for controlling a fluid flow as well as components manufactured according to this method |
| 03/05/2008 | EP1895372A2 Microcontainer for hermetically encapsulating reactive materials |
| 03/05/2008 | EP1894903A1 Anodic bonding apparatus |
| 03/05/2008 | EP1893526A2 Thinning |
| 03/05/2008 | EP1535297B1 Diaphragm activated micro-electromechanical switch |
| 03/05/2008 | EP1514123B1 Monolithic silicon acceleration sensor |
| 03/05/2008 | CN101135704A Microelectron mechanical microwave signal phase detector and method for preparing the same |
| 03/05/2008 | CN101134556A Deflection amplitude device for micro-drive structure and method for manufacturing same |
| 03/05/2008 | CN100373651C Method for manufacturing magnetosensitive device with giant magnetic impedance effect based on microelectrochenical system |
| 03/04/2008 | US7339244 Small scale wires with microelectromechanical devices |
| 03/04/2008 | US7338839 Method for producing an electrical component |
| 03/04/2008 | US7338753 Forming a resin mold, interposing a photosensitive polymer forming layers, exposing the layered structure with an electron beam, ultraviolet radiation or visible radiaton, removing an exposed photosensitive polymer, and filling the vacant portion with a metal |
| 03/04/2008 | US7338613 System and process for automated microcontact printing |
| 03/04/2008 | US7338611 Slotted substrates and methods of forming |
| 03/04/2008 | US7337540 Method of manufacturing a structure body bonding with a glass substrate and semiconductor substrate |
| 02/28/2008 | WO2008024989A1 Microelectromechanical systems encapsulation process with anti-stiction coating |
| 02/28/2008 | WO2008024528A2 Method of forming a micromachined device using an assisted release |
| 02/27/2008 | EP1890958A1 MICROMECHANICAL COMPONENT WITH ACTIVE ELEMENTS AND METHOD FOR PRODUCING A COMPONENT OF THIS TYPEMICROMECHANICAL COMPONENT WITH ACTIVE ELEMENTS AND METHOD FOR PRODUCING A COMPONENT OF THIS TYPEv |
| 02/27/2008 | EP1294635B1 Improved thermal bend actuator |
| 02/27/2008 | CN201028934Y Semiconductor-refrigerating carbon dioxide supercritical drying mechanism |
| 02/27/2008 | CN101133461A Method for production of a thin-layer structure |
| 02/27/2008 | CN101131407A Microelectron-mechanical reconfigurable broad band microwave power detector and method of manufacturing the same |
| 02/27/2008 | CN101131400A Micro-electronmechanical manufacturing method for alloy probe |
| 02/27/2008 | CN101131354A Micro-cantilever beam sensor with triangular structure and manufacturing method thereof |
| 02/27/2008 | CN101130426A Micro-electromechanical systems device and manufacturing method thereof |
| 02/27/2008 | CN100371763C Projection display and packaged micromirror array for the projection display |
| 02/26/2008 | US7335996 Method of room temperature covalent bonding |
| 02/26/2008 | US7335971 Method for protecting encapsulated sensor structures using stack packaging |
| 02/26/2008 | US7335535 Method and apparatus for lubricating microelectromechanical devices in packages |
| 02/26/2008 | US7335527 Method for microfabricating structures using silicon-on-insulator material |
| 02/21/2008 | WO2008020397A2 Phase-separated composite for microfluidic applications |
| 02/21/2008 | WO2007147643A3 Nano-microphone or pressure sensor |
| 02/21/2008 | WO2007147241A3 Mems-based nanopositioners and mano manipulators |
| 02/21/2008 | US20080044647 Method for Forming Carbonaceous Material Protrusion and Carbonaceous Material Protrusion |
| 02/21/2008 | US20080041817 Structure of a micro electro mechanical system and the manufacturing method thereof |
| 02/20/2008 | EP1890379A1 Process for producing micromachine, and micromachine |
| 02/20/2008 | EP1890181A1 Digital optical switch apparatus and process for manufacturing same |
| 02/20/2008 | EP1888454A2 Method of making a mold and molded article |
| 02/20/2008 | CN101127514A A plane capacitance resonator and its making method |
| 02/20/2008 | CN101126900A Photolithography method based on metal local effect |
| 02/20/2008 | CN101126899A Sub-wavelength continuous surface micro-structure preparation method based on dry method etching loading effect |