| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 05/22/2008 | US20080116608 Molded waveguides |
| 05/21/2008 | DE102006054695A1 Verfahren zur Regelung nanoskaliger elektronenstrahlinduzierter Abscheidungen Method for controlling nanoscale electron-beam-induced deposition |
| 05/21/2008 | DE102006046979B3 Phase-clear ferroelectric thin layer manufacturing method for e.g. ultrasonic transducer, involves providing ferroelectric main composition of ferroelectric material, and forming sol gel layer with main composition on substrate surface |
| 05/15/2008 | WO2008057055A1 A micromechanical structure and a method of fabricating a micromechanical structure |
| 05/15/2008 | WO2008016516A3 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices |
| 05/15/2008 | WO2008010931A3 Integrated sensor and circuitry and process therefor |
| 05/15/2008 | US20080110857 Method of Electrochemical Fabrication |
| 05/15/2008 | US20080110856 Manufacture of devices having complex structures by selective electroplating of layers that include both structural materials (metals) and support (sacrificial) materials; removal(etching, melting, or electrolytically dissolving) of the support defines a microscopicelement for an electrical device |
| 05/15/2008 | DE19826317B4 Verfahren zum Herstellen eines Halbleitersubstrats, Halbleiterdrucksensor und sein Herstellungsverfahren A method of manufacturing a semiconductor substrate, a semiconductor pressure sensor and its manufacturing method |
| 05/15/2008 | DE102007051823A1 Sensor für eine physikalische Grösse und Verfahren zur Fertigung des Sensors A physical quantity sensor and method for manufacturing the sensor |
| 05/15/2008 | DE102006052192A1 Porous substrate useful in electronic component for generating periodic pulsation under constant direct current voltage, has impermeable openings and permeable pores that are locked at a side of the substrate with non-porous cover layer |
| 05/14/2008 | EP1920849A2 Micro extrusion apparatus, method for forming an extrudate and method for manufacturing an extrusion die |
| 05/14/2008 | EP1919820A1 Method and apparatus for reducing surface defects in microstamps |
| 05/14/2008 | CN101180794A Method of manufacturing vibrating micromechanical structures |
| 05/14/2008 | CN101177234A Electronic device and method for manufacturing thereof |
| 05/14/2008 | CN100388474C Thermally enhanced microcircuit package and method of forming same |
| 05/14/2008 | CN100387991C Transcribing method for biomolecule shape, method for producing chip substrate and method for producing biochip |
| 05/14/2008 | CN100387749C Method for forming housings for electronic components and electronic components that are hermetically encapsulated thereby |
| 05/14/2008 | CN100387509C Manufacturing method used for improving performance of non-refrigerating infrared focal plane array device |
| 05/13/2008 | US7372616 Complex microdevices and apparatus and methods for fabricating such devices |
| 05/13/2008 | US7372191 Microswitch and method for manufacturing the same |
| 05/13/2008 | US7371660 Controlled cleaving process |
| 05/08/2008 | WO2008054520A2 Electrode and interconnect materials for mems interferometric modulators |
| 05/08/2008 | WO2008053008A2 Method for manufacturing a micromachined device |
| 05/08/2008 | WO2008052762A2 Semiconductor arrangement and method for fabricating a semiconductor arrangement |
| 05/08/2008 | WO2008052363A1 Electrical microvalve and method of manufacturing thereof |
| 05/08/2008 | WO2008052358A1 Microfluidic device having an array of spots |
| 05/08/2008 | WO2008052306A1 Three-dimensional microstructures and methods for making same |
| 05/08/2008 | DE10243683B4 Kolbenspritzeinheit mit Vorplastifizierzylinder für eine Mikrospritzgießmaschine Plunger injection unit with Vorplastifizierzylinder for micro injection |
| 05/08/2008 | DE102007050873A1 Micro fluidic structure producing method, involves implementing reactive ion etching on masked hard layer, removing structured photo resist layer, and etching micro fluidic structure in hard masked titanium substrate |
| 05/08/2008 | DE102006055147A1 Schallwandlerstruktur und Verfahren zur Herstellung einer Schallwandlerstruktur Transducer structure and method of making a transducer structure |
| 05/08/2008 | DE102006051597A1 Halbleiteranordnung und Verfahren zur Herstellung einer Halbleiteranordnung A semiconductor device and method of manufacturing a semiconductor device |
| 05/08/2008 | DE102005010926B4 Deckel für optoelektronische Wafermaßstabsgehäuse und Verfahren zu dessen Herstellung Lid for optoelectronic wafer-scale housing and method for its production |
| 05/08/2008 | CA2703801A1 Electrical microvalve and method of manufacturing thereof |
| 05/08/2008 | CA2666378A1 Microfluidic device having an array of spots |
| 05/08/2008 | CA2610658A1 Apparatus and process for stacking pieces of material |
| 05/07/2008 | EP1918745A1 Process for manufacturing a slot waveguide |
| 05/07/2008 | EP1918026A2 Method for forming for forming a plurality of closely spaced high-aspect extruded gridlines, apparatus therefore and a method for manufacturing a photovoltaic device |
| 05/07/2008 | EP1917675A2 Selection of wavelenghts for end point in a time division multiplexed process |
| 05/07/2008 | CN101174802A Actuator and method for manufacturing the same |
| 05/07/2008 | CN101174024A Micro devices having anti-stiction materials |
| 05/07/2008 | CN101173958A Bidirectional micro-inertia sensor and production method thereof |
| 05/07/2008 | CN101172572A Method for producing flow passage capable of balancing gas pressure |
| 05/07/2008 | CN101172185A Process for producing implantation type two-sided flexible tiny array electrode |
| 05/07/2008 | CN101172184A Three-dimensional flexible nervus and preparation method |
| 05/06/2008 | US7368313 Method of making a differential pressure sensor |
| 05/06/2008 | US7368228 applying a layer of photoresist onto the lower layer to form a multilayer microelectromechanical systems (MEMS) device |
| 05/06/2008 | US7368044 Non-conformable masks and methods and apparatus for forming three-dimensional structures |
| 05/06/2008 | CA2447282C Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 05/02/2008 | WO2008051781A2 Vertically integrated mems |
| 05/02/2008 | WO2008051351A2 Sacrificial spacer process and resultant structure for mems support structure |
| 05/02/2008 | WO2008051238A2 Nanochannel apparatus and method of fabricating |
| 05/02/2008 | WO2008049688A1 Micromechanical component with antistick layer |
| 05/01/2008 | US20080099338 Depositing a first pattern onto a substrate using the first mask to forming a first layer, removing the first mask, depositing a second material, building additional layers adjacent to and adhered to previously formed layers; removing undesired elements of material via etching or electropolishing |
| 04/30/2008 | EP1915321A2 Creating novel structures using deep trenching of oriented silicon substrates |
| 04/30/2008 | EP1915320A1 Method for manufacturing a microelectronic package comprising a silicon mems microphone |
| 04/30/2008 | EP1567580A4 Sacrificial compositions, methods of use thereof, and methods of decomposition thereof |
| 04/30/2008 | EP1495154B1 Method for forming housings for electronic components and electronic components that are hermetically encapsulated thereby |
| 04/30/2008 | DE19829609B4 Verfahren zur Herstellung eines Mikrosystems A process for producing a microsystem |
| 04/30/2008 | DE102006050365A1 Solid body structured surface for use in e.g. transportation engineering, has characteristics of projections and/or carrier layer specifically changeable such that adhesive power of contact surface is adjustable |
| 04/30/2008 | DE102006050188A1 Micromechanical component e.g. inertial sensor, has functional unit with functional surface comprising non-adhesive layer applied on regions, where layer is stable with respect to temperature of above specific value |
| 04/30/2008 | DE102006050023A1 Verfahren zur Bearbeitung von Material durch Schwerionenbestrahlung und nachfolgenden Ätzprozess A method for processing material by heavy ion irradiation and subsequent etching process |
| 04/30/2008 | DE102006049259A1 Verfahren zur Herstellung eines mikromechanischen Bauelementes mit einer Dünnschicht-Verkappung A process for producing a micromechanical component with a thin-capping |
| 04/30/2008 | DE102006004922B4 Miniaturisiertes Federelement und Verfahren zu dessen Herstellung, Balkensonde, Rasterkraftmikroskop sowie Verfahren zu dessen Betrieb Miniaturized spring element and method for its manufacture, probe beam, atomic force microscope and method for its operation |
| 04/30/2008 | CN101170002A RF micro-inductance with suspending structure and its making method |
| 04/30/2008 | CN101168436A Method for preparing optical switch with high on-off ratio |
| 04/30/2008 | CN101168435A Method for manufacturing three-dimensional nerve microelectrode |
| 04/29/2008 | US7365405 Metrology structure and methods |
| 04/29/2008 | US7364942 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor |
| 04/24/2008 | WO2008046682A1 Method for producing a micromechanical component with thin-film capping |
| 04/24/2008 | US20080096313 Methods for Depositing, Releasing and Packaging Micro-Electromechanical Devices on Wafer Substrates |
| 04/24/2008 | US20080096216 Using immobillized probes to detect preferential gene sequences; high throughput assay; microfluidics |
| 04/24/2008 | US20080093605 Method for monolithically integrating silicon carbide microelectromechanical devices with electronic circuitry |
| 04/24/2008 | DE102006052630A1 Mikromechanisches Bauelement mit monolithisch integrierter Schaltung und Verfahren zur Herstellung eines Bauelements Micromechanical component with a monolithic integrated circuit and method for producing a component |
| 04/24/2008 | DE102006049886A1 Micromechanical component for use as e.g. humidity sensor, has two surfaces fixed relative to substrate and micromechanical structure, respectively, where one of surfaces is moved parallel to main extension plane of substrate |
| 04/24/2008 | DE102006049560A1 Carrier for use in chemical or biochemical assays comprises immobilization zones with membranes that comprise a layer of immobilization material and are overmolded with a thermoplastic material |
| 04/23/2008 | EP1912890A2 Chip scale package for a micro component |
| 04/23/2008 | EP1912889A1 A method of processing substrates |
| 04/23/2008 | EP1444543B1 Digital optical switch apparatus and process for manufacturing same |
| 04/23/2008 | CN101164863A Mems device and fabrication method thereof |
| 04/17/2008 | WO2008045544A2 Patterning methods |
| 04/17/2008 | WO2008012713A3 Frame and method of manufacturing assembly |
| 04/17/2008 | DE102006049432A1 Verfahren zur Herstellung von selbst aggregierenden Monolagen auf Festkörperoberflächen Process for the preparation of self-aggregating monolayers on solid surfaces |
| 04/16/2008 | EP1299905B1 Method for cutting a block of material and for forming a thin film |
| 04/16/2008 | CN101163638A Device and use thereof |
| 04/15/2008 | US7359030 Lithographic apparatus and device manufacturing method |
| 04/10/2008 | WO2008020397A3 Phase-separated composite for microfluidic applications |
| 04/10/2008 | WO2008001253A3 Integrated single-crystal mems device |
| 04/10/2008 | WO2007144677A8 Cmos integrated process for fabricating monocrystalline silicon micromechanical elements by porous silicon micromachining and sensor chip comprising such element |
| 04/10/2008 | WO2007143072B1 Wet etch suitable for creating square cuts in si and resulting structures |
| 04/10/2008 | DE102006043388B3 Verfahren zur Kompensation herstellungsbedingt auftretender Abweichungen bei der Herstellung mikromechanischer Elemente und deren Verwendung Method for compensating for production reasons occurring deviations in the manufacture of micromechanical elements, and their use |
| 04/10/2008 | DE102004013161B4 Mikrofluidik-Chip Microfluidic chip |
| 04/09/2008 | EP1166352B1 Micro-relay |
| 04/09/2008 | CN101160257A Micromachine structure system and method for manufacturing same |
| 04/09/2008 | CN101159171A Semiconductor probe having wedge shape resistive tip and method of fabricating the same |
| 04/09/2008 | CN101158809A Sub-wavelength micro-nano structure using polystyrol ball to focused photoetching form |
| 04/09/2008 | CN101158747A Flexible cantilever micro-mechanical-optical switch preparation method |
| 04/09/2008 | CN101157435A Method for manufacturing wafer-level MEMS micro channel |
| 04/08/2008 | US7355268 High reflector tunable stress coating, such as for a MEMS mirror |
| 04/08/2008 | US7353593 Method for assembling micro structures |