| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 07/08/2008 | US7396475 Method of forming stepped structures employing imprint lithography |
| 07/08/2008 | CA2429940C Miniature ultrasound transducer |
| 07/03/2008 | WO2008079887A2 Stacked mems device |
| 07/03/2008 | WO2008077581A1 Integrated arrangement and method for the production thereof |
| 07/03/2008 | WO2008045544A3 Patterning methods |
| 07/03/2008 | US20080160266 Metallic coatings on silicon substrates |
| 07/03/2008 | US20080157078 Metrology Structure And Methods |
| 07/03/2008 | DE102006059459A1 Device for intake or manipulation of fluid, particularly liquid, has carrier, covering film, and chamber formed between carrier and covering film and flat or not preformed covering film is laminated onto carrier |
| 07/03/2008 | CA2658122A1 Nanonozzle device arrays: their preparation and use for macromolecular analysis |
| 07/02/2008 | EP1938364A1 A method for fabricating nanogap and nanogap sensor |
| 07/02/2008 | CN101213142A A method of manufacturing a mems element |
| 07/02/2008 | CN101211861A Integrated micro-sensor preparation method |
| 07/02/2008 | CN100399005C Method for producing heat shear stress sensor device based on vacuum adhesive process |
| 07/01/2008 | US7393714 Method of manufacturing external force detection sensor |
| 07/01/2008 | US7393712 Fluidic MEMS device |
| 07/01/2008 | US7393517 Chemical conversion of templates by controlled chemical reactions into near net-shaped, micro- and nano-components of desired composition |
| 06/26/2008 | WO2008074862A1 Method for forming microwires and/or nanowires |
| 06/26/2008 | WO2008074861A1 Method for forming non-aligned microcavities of different depths |
| 06/26/2008 | DE19812583B4 Verfahren zur Herstellung eines Bauelementes A method for producing a component |
| 06/26/2008 | DE102006061233A1 Method for producing micro mechanic sensors and actuators, involves separating structuring of layers by depositing layers in substrate |
| 06/26/2008 | DE10053307B4 Kapsel für Mikrosensoren, Verfahren zur Verkapselung von Mikrosensoren und Kapselelement Capsule for micro sensors, processes for the encapsulation of micro-sensors and capsule element |
| 06/25/2008 | EP1935841A2 Dicing technique for flip-chip usp wafers |
| 06/25/2008 | EP1934133A1 Method of fabricating suspended beam in a mems process |
| 06/25/2008 | CN101208260A Method for fabricating micromachine component of resin |
| 06/25/2008 | CN101206411A Method for preparing sub-wavelength micro noy structure by forming using focused light |
| 06/25/2008 | CN101205055A Processing method of preparation hanging variable capacitance |
| 06/25/2008 | CN101205054A Minitype metal nickel mould producing method |
| 06/25/2008 | CN101204603A Embedded MENS bioelectrode and preparation technology thereof |
| 06/25/2008 | CN100397616C Body silicon MEMS and CMOS circuit integrating method capable of removing residual silicon |
| 06/25/2008 | CN100397593C Method for the production of structured layers on substrates |
| 06/25/2008 | CN100396595C Method for preparing nanometer suspension arm structure using nanometer embossing and reactive ion etching technology |
| 06/25/2008 | CN100396594C Method for making and releasing sacrificial layer by using salient point based on silicon substrate |
| 06/25/2008 | CN100396593C Method for making single-layer bimaterial micro-cantilever beam heat-shield focal plane array |
| 06/19/2008 | WO2008072187A2 Method for improving the bonding properties of microstructured substrates, and devices prepared with this method |
| 06/19/2008 | WO2008071545A1 Protection box for a microelectromechanical system including a wiring relay |
| 06/19/2008 | WO2008071351A1 Device for the intake or manipulation of a liquid |
| 06/19/2008 | WO2008053008A3 Method for manufacturing a micromachined device |
| 06/19/2008 | WO2007015050A8 A method of processing substrates |
| 06/19/2008 | US20080145970 Stack structure and method of manufacturing the same |
| 06/19/2008 | DE102006061386B3 Integrierte Anordnung, ihre Verwendung und Verfahren zu ihrer Herstellung Integrated arrangement, their use and processes for their preparation |
| 06/19/2008 | DE102006059084A1 Micromechanical element for use in miniaturized sensors, particularly in safety systems of motor vehicles, includes substrate with micromechanical functional element, where shift sequence is arranged |
| 06/19/2008 | DE102006058563B3 Mikrospiegel-Aktuator mit Kapselungsmöglichkeit sowie Verfahren zur Herstellung Micromirror actuator with Kapselungsmöglichkeit and methods of making |
| 06/19/2008 | DE102004062874B4 Mikrofluidchip des Mehrfachkanaltyps und elektrokinetische Mikroleistungszelle, die einen derartigen Mikrofluidchip verwendet The microfluidic chip of the multi-channel type and electrokinetic micro power cell using such a micro fluid chip |
| 06/19/2008 | DE102004022177B4 Verfahren zur Herstellung eines Koplanarleitungssystem auf einem Substrat und nach einem derartigen Verfahren hergestelltes Bauelement zur Übertragung von elektromagnetischen Wellen A method for producing a Koplanarleitungssystem on a substrate and produced by such a process component for transmitting electromagnetic waves |
| 06/19/2008 | CA2671750A1 Device for the intake or manipulation of a liquid |
| 06/18/2008 | EP1932803A2 MEMS device with Z-axis asymetry |
| 06/18/2008 | EP1931592A1 Method for producing a sensor arrangement comprising a monolithically integrated circuit |
| 06/18/2008 | EP1569865B8 Production of microelectromechanical systems (MEMS) using the high-temperature silicon fusion bonding of wafers |
| 06/18/2008 | CN101203939A Diamond medical devices |
| 06/18/2008 | CN101203066A Electrostatic pressure transducer and manufacturing method therefor |
| 06/18/2008 | CN101200281A Method for realizing microstructure on pyrolytic graphite chip |
| 06/18/2008 | CN101200280A Method for making suspension structure |
| 06/18/2008 | CN101200279A High-sensitivity nickel/silicon composite micro-cantilever and preparation method thereof |
| 06/18/2008 | CN100395171C Method for preparing nano carbon tube micro structure |
| 06/17/2008 | US7387737 Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void |
| 06/12/2008 | WO2008069554A1 Biochip reader |
| 06/12/2008 | US20080138460 Multilayer nano imprint lithography |
| 06/12/2008 | US20080136000 Micromechanical Component Having Multiple Caverns, and Manufacturing Method |
| 06/12/2008 | US20080135826 nanowires, nanoribbons, nanotubes, and nanotapes (e.g., high width to height ratio cross-section) including single crystal SiNW, in a nanochannel template; permanent nanotemplates which control nanostructure growth and also become part of the overall device or array (or both) structure |
| 06/11/2008 | EP1930291A2 Semi-conductor element having sensors and manufacturing process thereof |
| 06/11/2008 | CN101195472A Electrothermal actuator and technique of producing the same |
| 06/11/2008 | CN101195471A MEMS device and manufacturing method thereof |
| 06/11/2008 | CN100393387C Component separating device, method of producing the device, and method of separating component by using the device |
| 06/10/2008 | US7385750 Spatial light modulator using an integrated circuit actuator |
| 06/10/2008 | CA2326677C A method of making a wafer-pair having sealed chambers |
| 06/05/2008 | WO2008067294A2 Microfabrication methods for forming robust isolation and packaging |
| 06/05/2008 | WO2008067206A2 Fluid paths in etchable materials |
| 06/05/2008 | WO2008067097A2 Microelectromechanical devices and fabrication methods |
| 06/05/2008 | WO2008066828A2 Fluid-permeable body having a superhydrophobic surface |
| 06/05/2008 | WO2008064430A1 Replica moulding of microstructures for supporting microscopic biological material |
| 06/05/2008 | WO2007149475A3 Method for packaging an optical mems device |
| 06/05/2008 | US20080130082 Mems processing |
| 06/05/2008 | US20080128390 Fluidic MEMS Device |
| 06/05/2008 | DE102007040792A1 Device e.g. semiconductor circuit, manufacturing method, involves dicing devices from substrate e.g. silicon substrate, cleaning surface of volatile protective agent e.g. octamethylcyclotetrasiloxane, and evaporating protective agent |
| 06/05/2008 | DE102006057384A1 Semiconductor component manufacturing method, involves pivoting and/or tilting and/or rotating sensors relative to each other with plane under bending deformation of area, where sensors are displaced parallel to each other with plane |
| 06/05/2008 | CA2671167A1 Replica moulding of microstructures for supporting microscopic biological material |
| 06/04/2008 | EP1927576A1 Method for making microfluidic devices and devices resulting |
| 06/04/2008 | EP1926679A2 A method of manufacturing a microsystem, such a microsystem, a stack of foils comprising such a microsystem, an electronic device comprising such a microsystem and use of the electronic device |
| 06/04/2008 | EP1926678A2 A method of manufacturing a microsystem, such a microsystem, a stack of foils comprising such a microsystem, an electronic device comprising such a microsystem and use of the electronic device |
| 06/04/2008 | CN100392467C Method and system for projecting images on objects |
| 06/04/2008 | CN100391826C Silicon microchannel production method |
| 06/04/2008 | CN100391825C Non-close parked metal hollow ball shell ordered network structure material and its making method |
| 06/03/2008 | US7382031 Component including a fixed element that is in a silicon layer and is mechanically connected to a substrate via an anchoring element and method for its manufacture |
| 06/03/2008 | US7380698 Method of connecting module layers suitable for the production of microstructure modules and a microstructure module |
| 06/03/2008 | CA2232409C Microelectromechanical accelerometer for automotive applications |
| 05/29/2008 | WO2008064124A1 Susbstrate contact for a mems device |
| 05/29/2008 | WO2008063063A1 Product with internal cavities, and method, system and mould for manufacturing such a product |
| 05/29/2008 | WO2008062350A2 A sealing structure and a method of manufacturing the same |
| 05/29/2008 | WO2008061319A1 Micromechanical resonant arrays and methods of making |
| 05/29/2008 | WO2007135682B1 Apparatus for generating pressure and methods of manufacture thereof |
| 05/29/2008 | US20080121618 Method of Electrochemical Fabrication |
| 05/29/2008 | US20080121042 Improved system sensitivity and accuracy; improved performance of micro-machined devices |
| 05/29/2008 | DE102006057567A1 Mikrooptisches Element mit einem Substrat, an dem an einer optisch wirksamen Oberfläche mindestens eine Höhenstufe ausgebildet ist, Verfahren zu seiner Herstellung und Verwendungen Micro-optical element comprising a substrate on which at least one optically effective surface of a height level is formed, process for its preparation and uses |
| 05/29/2008 | DE102006055263A1 Micromechanical thermopile sensor for use as membrane sensor for detecting infrared radiation, has conductive areas laterally distanced from each other and electrically contacted at their upper and/or lower end areas as thermopile structure |
| 05/29/2008 | DE102006051877A1 Mikrofluidische Glas-Chips mit monolithischem Elektrospray-Emitter für die Chip-MS Kopplung Glass microfluidic chips with monolithic electrospray emitter for chip-MS coupling |
| 05/28/2008 | EP1926356A1 Product having a solid body and one or more rooms inside |
| 05/28/2008 | EP1925419A1 Product having a solid body and inside hollow rooms |
| 05/28/2008 | EP1925019A2 Nano-molding process |
| 05/28/2008 | EP1924209A2 Methods and devices for delivering agents across biological barriers |
| 05/27/2008 | US7378280 Multicompartment microfluidic device comprising elastomeric materials for monitoring receptor/ligand interactions; cell sorting; rational drug design and discovery |