| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 09/24/2008 | CN100420622C Secondary template duplicating process method based on dimethyl silicone polymer mini component |
| 09/24/2008 | CN100420621C Mirror process |
| 09/24/2008 | CN100420620C Method for manufacturing electric tunable optical filter chip of micro-electrical-mechanical system |
| 09/24/2008 | CN100420575C Electrostatic actuator, droplet discharging head, droplet discharging apparatus, electrostatic device |
| 09/23/2008 | US7427808 Micro-sensor |
| 09/23/2008 | US7427526 Deposited thin films and their use in separation and sacrificial layer applications |
| 09/23/2008 | US7427359 Self-filling wet electrochemical cells by laser processing |
| 09/18/2008 | WO2008109913A1 Metal film protection during printhead fabrication with minimum number of mems processing steps |
| 09/18/2008 | US20080225505 Method of producing a MEMS device |
| 09/18/2008 | DE19680590B4 Verfahren zur Herstellung von Beschleunigungssensoren A process for producing acceleration sensors |
| 09/18/2008 | DE102007012464A1 Micromechanical or electronic component producing method, involves providing molding tool for relative positioning between substrate material and cover material during attachment of substrate material and cover material |
| 09/17/2008 | EP1970346A2 Microchannels for biomens devices |
| 09/17/2008 | EP1970345A2 Method and system for a composite polymer for printed MEMS |
| 09/17/2008 | EP1968733A1 Fluid mixing apparatus, integrated fluid mixing apparatus, fluid mixing system and process for producing a fluid mixing apparatus |
| 09/17/2008 | EP1476394B1 Thin film encapsulation of mems devices |
| 09/17/2008 | CN101268012A Fine structure body and method for manufacturing same |
| 09/17/2008 | CN101266176A Si-Si bonding isolator upper silicon high-temperature pressure sensor chip and manufacture method |
| 09/17/2008 | CN101264859A Pressure transducer diaphragm and method of making same |
| 09/12/2008 | WO2008108178A1 Microchip manufacturing method |
| 09/12/2008 | WO2008106928A2 Method for the production of membranes that can be electrically and/or magnetically activated, and magnetic actuator having such a membrane |
| 09/11/2008 | US20080220216 Microfabricated elastomeric valve and pump systems |
| 09/11/2008 | DE102007010913A1 Drucksensor Pressure sensor |
| 09/10/2008 | EP1967581A1 CMOS compatible microneedle structures |
| 09/10/2008 | EP1967489A2 Functional device package |
| 09/10/2008 | EP1967488A2 Method for producing semiconductor device and a semiconductor device, more especially a membrane sensor |
| 09/10/2008 | EP1966077A2 Process of forming a microphone using support member |
| 09/10/2008 | EP1966076A1 Method for producing a membrane on a semiconductor substrate and micromechanical component with such a membrane |
| 09/10/2008 | CN101263077A A method of manufacturing a mems capacitor microphone, a stack of foils comprising such a mems capacitor microphone, an electronic device comprising such a mems capacitor microphone and use of the ele |
| 09/10/2008 | CN101261977A Electronic device packages and methods of formation |
| 09/10/2008 | CN101261965A Encapsulation structure with micro hole and its making method |
| 09/10/2008 | CN101261964A Functional device package |
| 09/10/2008 | CN101261963A Miniature electronic part and its encapsulation part and making method |
| 09/10/2008 | CN101261932A A bonding method for low-temperature round slice |
| 09/10/2008 | CN100417587C Method of mfg micron/nanometer combined structural element |
| 09/09/2008 | US7422928 Process for fabricating a micro-electro-mechanical system with movable components |
| 09/04/2008 | WO2008084365A3 Etching with improved control of critical feature dimensions at the bottom of thick layers |
| 09/04/2008 | US20080213821 Multicompartment optical apparatus for separation of preferential cells in fluids; medical sorting and diagnosis |
| 09/04/2008 | US20080210322 Microfabricated elastomeric valve and pump systems |
| 09/04/2008 | US20080210321 Microfabricated elastomeric valve and pump systems |
| 09/04/2008 | US20080210320 Microfabricated elastomeric valve and pump systems |
| 09/04/2008 | US20080210319 Microfabricated elastomeric valve and pump systems |
| 09/04/2008 | DE102007010462A1 Method for manufacturing micro-mechanical micromechanical particle radiation source, involves fixing surface layer made of electrical semi-conducting or conducting material on surface of substrate |
| 09/04/2008 | DE102006057567B4 Mikrooptisches Element mit einem Substrat, an dem an einer optisch wirksamen Oberfläche mindestens eine Höhenstufe ausgebildet ist, Verfahren zu seiner Herstellung und Verwendungen Micro-optical element comprising a substrate on which at least one optically effective surface of a height level is formed, process for its preparation and uses |
| 09/03/2008 | EP1963227A1 Micromechanical component and production method |
| 09/03/2008 | EP1675802B1 Method for patterning a substrate surface |
| 09/03/2008 | EP1487738B1 Silicon carbide microelectromechanical devices with electronic circuitry |
| 09/03/2008 | CN101258102A A method of manufacturing a microsystem, such a microsystem, a stack of foils comprising such a microsystem, an electronic device comprising such a microsystem and use of the electronic device |
| 09/03/2008 | CN101258101A Methods for forming layers within a MEMS device to achieve a tapered edge |
| 09/03/2008 | CN101256105A Monocrystaline silicon transverse miniature MEMS pirani meter and preparation method thereof |
| 09/03/2008 | CN101254893A Method for making micromachine moving piece and metal intraconnection thereof |
| 09/03/2008 | CN100415636C Method for fabricating three-dimensional microstructure by fib-cvd and drawing system for three-dimensional microstructure |
| 09/03/2008 | CN100415635C Method for manufacturing a micro-electromechanical device and micro-electromechanical device obtained therewith |
| 09/02/2008 | US7420264 High reflector tunable stress coating, such as for a MEMS mirror |
| 09/02/2008 | US7419581 Method for producing optically transparent regions in a silicon substrate |
| 08/28/2008 | WO2008101745A1 Micromechanical component, and method for producing a micromechanical component |
| 08/28/2008 | WO2008054504A3 Patterning of mechanical layer in mems to reduce stresses at supports |
| 08/28/2008 | WO2008051238A3 Nanochannel apparatus and method of fabricating |
| 08/28/2008 | US20080207468 Micro-fabricated stamp array for depositing biologic diagnostic testing samples on bio-bindable surface |
| 08/28/2008 | US20080202114 Micro Heat Engine And Method Of Manufacturing |
| 08/28/2008 | DE102007060931A1 Encapsulation module producing and/or micromechanical arrangement encapsulating method, involves forming insulated material mound on base of semiconductor material by structuring and/or etching process |
| 08/28/2008 | DE102007008380A1 Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component and process for producing a micromechanical component |
| 08/27/2008 | EP1961036A1 Wafer level hermetic bond using metal alloy with raised feature |
| 08/27/2008 | EP1248952B1 Micromechanical structure, in particular for an acceleration sensor or yaw rate sensor and a corresponding method for producing the same |
| 08/27/2008 | CN101249937A Method for processing micron/submicron sized block sample |
| 08/27/2008 | CN101249935A Thermal isolation micro-bridge structure and processing method thereof |
| 08/27/2008 | CN100413778C Micro-structure and its fabrication method |
| 08/26/2008 | US7416984 Method of producing a MEMS device |
| 08/21/2008 | WO2008100838A2 Shelled thermal structures for fluid sensing |
| 08/21/2008 | WO2008100279A2 Selective etching of mems using gaseous halides and reactive co-etchants |
| 08/21/2008 | US20080197748 Vertical Comb Drive and Uses Thereof |
| 08/21/2008 | DE102008000128A1 Halbleitersensor und sein Herstellungsverfahren Semiconductor sensor and its manufacturing method |
| 08/21/2008 | DE102007008073A1 Method for transferring surface structures such as interference layers and holograms to glass, ceramic/metallic substrates, comprises applying flexible intermediate support layer to support film and then embossed sol, and producing a stack |
| 08/21/2008 | DE10024697B4 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren Micro-mechanical device and manufacturing method thereof |
| 08/20/2008 | EP1721120A4 Method and system to measure characteristics of a film disposed on a substrate |
| 08/20/2008 | CN101248507A Selection of wavelenghts for end point in a time division multiplexed process |
| 08/20/2008 | CN101246307A Method for manufacturing autogram template by semiconductor technology and autogram template manufactured by the same |
| 08/20/2008 | CN101246259A Minitype optical device and method for producing the same |
| 08/20/2008 | CN101244802A High depth-width ratio micro-machining based on silicon-silicon linking |
| 08/20/2008 | CN101244801A Micro-drive structure for implementing coplane and off-plane movement |
| 08/20/2008 | CN101244303A Miniature solid or hollow silicon needle, silicon needle array and preparing method thereof |
| 08/20/2008 | CN100412604C Micromirror array for projection TV |
| 08/20/2008 | CN100412603C Projection TV with improved micromirror array |
| 08/20/2008 | CN100412602C Micromirror with micromirror element arrays |
| 08/20/2008 | CN100411968C Flexible micro-electromechanical system changer and its manufacturing method and radio loud-speaker |
| 08/14/2008 | WO2008095238A1 Electrode reactivation in a microfluidic device |
| 08/14/2008 | US20080194053 Methods for Fabricating Micro-Electro-Mechanical Devices |
| 08/14/2008 | US20080190171 Shelled thermal structures for fluid sensing |
| 08/14/2008 | DE19680763B4 Microelectromechanical device useful for data storage applications - has cantilevered beam free to move above substrate and carrying insulated conductors is able to position tip on beam in contact with one conductor and move parallel to and perpendicular to substrate plane |
| 08/13/2008 | CN101243010A Chip scale package for a micro component |
| 08/13/2008 | CN101239699A Semiconductor device manufacturing method |
| 08/13/2008 | CN100411189C Micro-switching device and method of manufacturing micro-switching device |
| 08/13/2008 | CN100411126C System and a method for fluid filling wafer level packages |
| 08/12/2008 | US7411714 Micromirror unit with torsion connector having nonconstant width |
| 08/12/2008 | US7411261 MEMS device and fabrication method thereof |
| 08/12/2008 | US7410904 Sensor produced using imprint lithography |
| 08/12/2008 | US7410887 Controlled process and resulting device |
| 08/12/2008 | US7410791 Plate with regions formed of self-assembled monolayer where binding occurs in single-line; transparent to electromagnetic radiation |
| 08/07/2008 | US20080187757 Method of room temperature covalent bonding |
| 08/07/2008 | US20080187472 Magnetic bead-based arrays |
| 08/07/2008 | US20080185043 Microfluidic Device |