Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
12/2008
12/11/2008DE102007026445A1 Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component and process for producing a micromechanical component
12/11/2008DE102007025992A1 Verfahren zur Herstellung eines MEMS-Packages A method for producing a MEMS package
12/11/2008DE102007024902A1 Vorrichtung mit Membranstuktur zur Detektion von Wärmestrahlung, Verfahren zum Herstellen und Verwendung der Vorrichtung Device with Membranstuktur for detection of thermal radiation, methods of making and using the apparatus
12/10/2008EP2001062A2 Membrane structure element and method for manufacturing same
12/10/2008EP1999302A1 Method for electrochemically structuring a conductuve or semiconductor material, and device for implementing it
12/10/2008CN101320081A Micro electro-mechanical system magnetic field sensor and measuring method
12/10/2008CN100442446C Semiconductor device
12/10/2008CN100441388C Microneedle preparation method based on multiplayer processing technology
12/09/2008US7463454 Micro-actuator for hard drive utilizing insulating portions to separate biasing regions from adjacent regions of the micro-actuator and simplified manufacture process therefore
12/09/2008US7462449 Using immobilized microfluidic chip as tool in sequencing of preferential nucleotide sequences; high throughput assay
12/09/2008US7462312 Method of fabricating element having microstructure
12/04/2008DE10260859B4 Strukturkörper mit einem porösen Bereich und dessen Verwendung sowie Verfahren zur Einstellung der Wärmeleitfähigkeit eines porösen Bereiches Structure body having a porous region, and its use as well as methods for setting the thermal conductivity of a porous portion
12/04/2008DE102007047162A1 Microstructure or nanostructure producing method for substrate, involves connecting composite including template, outlet layer and barrier layer, with carrier, removing template such that metallic columns remain on carrier at contact point
12/04/2008DE102007025880A1 Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements mit einer Dünnschichtkappe Micromechanical component and process for producing a micromechanical component with a thin film cap
12/03/2008EP1997772A2 Method of fabrication of a microfluidic device
12/03/2008EP1996507A2 Method for fabricating a mems microphone
12/03/2008EP1861926B1 Method of manufacturing vibrating micromechanical structures
12/03/2008CN101316790A Method of fabricating reflective spatial light modulator having high contrast ratio
12/03/2008CN100440420C Method of forming semiconductor devices through epitaxy
12/03/2008CN100439234C Anchor production method in xenon difluoride gas corrosion process
12/03/2008CN100439233C Method for selectively covering a micro machined surface
12/02/2008US7459331 Micro mirror unit and method of making the same
12/02/2008US7459329 Method of fabricating silicon-based MEMS devices
12/02/2008US7459325 MEMS passivation with transition metals
12/02/2008US7459267 Sacrificial compositions and methods of fabricating a structure using sacrificial compositions
12/02/2008CA2436207C Method of manufacturing microneedle structures using soft lithography and photolithography
11/2008
11/27/2008WO2008141359A1 Method of removing mems devices from a handle substrate
11/27/2008WO2008067294A3 Microfabrication methods for forming robust isolation and packaging
11/27/2008WO2008067206A3 Fluid paths in etchable materials
11/27/2008WO2008067097A3 Microelectromechanical devices and fabrication methods
11/27/2008US20080289710 Microfabricated elastomeric valve and pump systems
11/27/2008DE102007024199A1 Micromechanical component, has carrier element made of semiconductor material and including silicon membranes with porous structures, where porous structures include uniform microporous structure over surface of membranes
11/26/2008EP1993948A1 Mems device
11/26/2008EP1573802B1 Method of the production of cavities in a silicon sheet
11/26/2008CN101313234A Method for manufacturing diffraction grid
11/26/2008CN101312904A Method for manufacturing a microelectromechanical component, and a microelectromechanical component
11/26/2008CN101312903A Method for manufacturing a microelectromechanical component, and a microelectromechanical component
11/26/2008CN100438334C Micromechanical electrostatic resonator
11/26/2008CN100437929C Method for etching hole with different aspect ratio
11/26/2008CN100436306C Touch sensor and its manufacture method
11/25/2008US7456028 Immobilization analysis; polymerase chain reactions
11/25/2008US7455955 Planarization method for multi-layer lithography processing
11/20/2008WO2008138934A2 A method for the manufacture of patterned functional monolayer structures and products thereof
11/20/2008WO2008097736A3 Methods using block copolymer self-assembly for sub-lithographic patterning
11/20/2008WO2008085495A3 Micromirror manufacturing method
11/20/2008US20080286970 Method for producing a semiconductor component and a semiconductor component produced according to the method
11/20/2008US20080286945 Controlled process and resulting device
11/20/2008US20080285109 Micromirror unit with torsion connector having nonconstant width
11/20/2008DE102007023286A1 Verfahren zur Herstellung einer Membran in einem Rahmen A method for producing a membrane in a frame
11/20/2008DE102007022959A1 Semiconductor device manufacturing method, involves coating semiconductor chip with casting compound e.g. thermoplastic material, forming through hole in casting compound, and depositing electric conductive materials in through hole
11/20/2008DE102007022509A1 Mikromechanisches Bauteil mit Dünnschichtverkappung und Herstellungsverfahrung Micromechanical component with Dünnschichtverkappung and Herstellungsverfahrung
11/20/2008DE102007021920A1 Mikromechanisches Bauelement, mikromechanisches System, Vorrichtung zum Einstellen einer Empfindlichkeit eines mikromechanischen Bauelements, Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component, micro-mechanical system, means for adjusting a sensitivity of a micromechanical component, method for producing a micromechanical component
11/19/2008EP1992590A1 Packaging assembly for an optical chip in a gyroscopic unit
11/19/2008EP1992589A2 Packaging of MEMS microphone
11/19/2008EP1651560B1 Stacked structure and production method thereof
11/19/2008EP1360144B1 Gyroscope and fabrication method thereof
11/19/2008EP1246730B2 Thermal transfer of microstructured layers
11/19/2008CN101310341A A micro-electromechanical system memory device and method of making the same
11/19/2008CN101309854A Electronic device comprising a MEMS element
11/19/2008CN101308803A 半导体器件 Semiconductor devices
11/19/2008CN101308777A Nanostructure and manufacturing method of nanostructure
11/19/2008CN101308110A Low-power consumption double module integrated humidity sensitive chip with heating function and its manufacture method
11/19/2008CN101307481A Multifunctional dielectrophoresis operated micro-electrode on-chip system and its manufacture method
11/19/2008CN101306794A Nanometer micro-electrode and making method
11/19/2008CN100435347C Fabrication of semiconductor devices
11/19/2008CN100435272C Method for protecting etched structure in induction coupling plasma etching
11/19/2008CN100434353C Gas phase synthesis process of nanometer particle array with one-dimensional diameter and number density gradient
11/18/2008CA2272104C Method for making a thin film resonant microbeam absolute pressure sensor
11/13/2008WO2008136316A1 Laminated substrate structure and method for manufacturing the same
11/13/2008WO2008077821A3 Encapsulation module method for production and use thereof
11/13/2008US20080277006 Fabrication of ultra-shallow channels for microfluidic devices and systems
11/13/2008US20080277005 Microfabricated elastomeric valve and pump systems
11/13/2008DE102007029439A1 Stoßantrieb-Aktuator und Mikromotor Impact drive actuator and micromotor
11/13/2008DE102007029438A1 Layout-Design und Verfahren zum Herstellen eines Mikromotors auf SDA-Basis mit niedriger Betriebsspannung und langer Betriebsdauer Layout design, and method for manufacturing a micromotor on SDA-base low-voltage operation and a long service life
11/13/2008DE102007020792A1 Self assembly microstructure e.g. micro rotary fan, has movable portion that includes photosensitive polyimide elastic joint so that movable portion is rotated and lifted up by large surface tension force is generated from joint
11/13/2008DE102006050023B4 Verfahren zur Bearbeitung von Material durch Schwerionenbestrahlung und nachfolgenden Ätzprozess A method for processing material by heavy ion irradiation and subsequent etching process
11/12/2008EP1990671A2 Methods of fabricating MEMS having elevated land regions for routing and devices formed by same
11/12/2008CN101301992A Micromechanical device with temperature stabilization and method for adjusting a defined temperature or a defined temperature course on a micromechanical device
11/12/2008CN101301991A Micromechanical component, device for designing micromechanical component, procedures for manufacturing micromechanical component, and micro-mechanical system
11/11/2008US7449358 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
11/06/2008WO2008134202A1 A microfluidic device and a fluid ejection device incorporating the same
11/06/2008WO2008132024A2 Method for producing a micromechanical component having a filler layer and a masking layer
11/06/2008WO2008063227A3 Microfluidic devices
11/06/2008US20080274493 Apparatus and methods for conducting assays and high throughput screening
11/06/2008US20080272867 Mems device with integral packaging
11/06/2008US20080272447 Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained
11/06/2008DE112007000210T5 Kontaktvorrichtung und Verfahren zur Herstellung derselben Contact device and method for manufacturing the same
11/06/2008DE102008000261A1 Semiconductor device has cap electrical conductivity regions that function as draw-out electrical conductivity regions of cap substrate, are electrically connected to movable and fixed base semiconductor regions of base substrate
11/06/2008DE102007020757A1 Polyimide-thin layer manufacturing method for manufacturing e.g. microchip, in industrial application, involves carrying out melting process to achieve contraction of connection and rotation and removal of regions of microstructure layer
11/05/2008EP1988566A2 Method for creating patterns inside a polymer layer
11/05/2008EP1986951A1 Patterning method and device with a patterned surface
11/05/2008EP1986950A1 Mems components and method for manufacturing same
11/05/2008EP1986949A1 Stamping methods and devices
11/05/2008EP1805356A4 Surface and composition enhancements to high aspect ratio c-mems
11/05/2008EP1377338B9 Method of manufacturing microneedle structures using soft lithography and photolithography
11/05/2008EP1133789B1 Mechanical patterning of a device layer
11/05/2008CN101298314A Technological process for transferring film by means of sacrificial layer
11/05/2008CN101298313A Technological process for quickly releasing edge millimeter-level large area film
11/04/2008US7446382 Method and apparatus for fabrication of passivated microfluidic structures in semiconductor substrates
11/04/2008US7445723 Optical scanner and method of fabricating the same
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