| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 05/14/2009 | DE102007050976A1 Verfahren zur Umformung einer Folie A method for forming a film |
| 05/14/2009 | DE102006058325B4 Halbleiterdynamiksensor und Verfahren zur Herstellung desselben A semiconductor dynamic sensor and method for manufacturing the same |
| 05/13/2009 | EP2058277A1 Apparatus with a surface having cells coupled to bubbles for enhanced drag reduction of a fluid and associated method |
| 05/13/2009 | EP2057093A1 Microelectromechanical systems encapsulation process with anti-stiction coating |
| 05/13/2009 | CN101432223A Process for collective manufacturing of small volume high precision membranes and cavities |
| 05/13/2009 | CN101431172A Reconfigurable microwave low-pass filter containing MEMS switch and its manufacturing method |
| 05/13/2009 | CN101428752A Growth method of group III nitrides |
| 05/13/2009 | CN101428751A Micro electro-mechanical system and manufacturing method therefor |
| 05/13/2009 | CN100487837C Micro-electromechanical varactor with enhanced tuning range |
| 05/12/2009 | US7532404 Optical device having micro lens array |
| 05/12/2009 | US7532385 Optical interference display panel and manufacturing method thereof |
| 05/12/2009 | US7531229 Microstructured component and method for its manufacture |
| 05/12/2009 | US7531120 Method of making a product with a micro or nano sized structure and product |
| 05/07/2009 | WO2009056654A1 Method for the production of micro/nanofluidic devices for flow control and resulting device |
| 05/07/2009 | WO2009056414A2 Module housing and method for producing a module housing |
| 05/07/2009 | WO2009055862A1 Method of component assembly on a substrate |
| 05/07/2009 | WO2009013255A3 Method for transferring an epitaxial layer from a donor wafer to a system wafer appertaining to microsystems technology |
| 05/07/2009 | WO2008125094A4 Method for forming a nanostructure and/or microstructure on a surface, and apparatus for carrying out said method |
| 05/07/2009 | DE102007052663A1 Mikromechanisches Bauelement, Kurzprozess zur Herstellung von MEMS-Bauelementen Micromechanical component, short process for the manufacture of MEMS devices |
| 05/07/2009 | DE102007052661A1 Verfahren zur Herstellung von mikromechanischen Strukturen mit reliefartigem Seitenwandverlauf oder einstellbarem Neigungswinkel A process for producing micromechanical structures having a relief-like side wall profile or an adjustable angle of inclination |
| 05/07/2009 | DE102007052610A1 Nanosondenspitze für fortschrittliche Rastersondenmikroskopie mit einem Schichtsondenmaterial, das durch Lithographie und/oder durch lonenstrahltechniken strukturiert ist Nano Probe Tip for advanced scanning probe microscopy with a layer of special material which is patterned by lithography and / or by lonenstrahltechniken |
| 05/07/2009 | DE102007029439B4 Stoßantrieb-Aktuator, seine Verwendung in einem Mikro-Drehmotor und Verfahren zur Herstellung eines Mikro-Drehmotors Impact drive actuator, its use in a micro-torque motor and method for manufacturing a micro rotary motor |
| 05/06/2009 | EP2055668A2 Manufacturing method of an electronic device including overmoulded MEMS devices |
| 05/06/2009 | EP2054338A1 Protection of cavities opening onto a face of a microstructured element |
| 05/06/2009 | EP2054337A2 Phase-separated composite for microfluidic applications |
| 05/06/2009 | CN101426718A MEMS device |
| 05/06/2009 | CN100485834C Method for producing amorphous FeCuNbCrSiB film solenoid micro-inductance device |
| 05/06/2009 | CN100484498C A flexible retina chip and preparation method thereof |
| 05/02/2009 | CA2609840A1 Micropillar array electrospray chip |
| 05/01/2009 | CA2653038A1 A microfluidic pipetting system for micro-dosing biological materials and macromolecules |
| 04/30/2009 | WO2009053714A1 Adhesive microstructures |
| 04/30/2009 | WO2009052805A2 Nozzle element, filter element and/or positioning element |
| 04/30/2009 | US20090107952 Sacrificial Compositions And Methods Of Fabricating A Structure Using Sacrificial Compositions |
| 04/30/2009 | DE102007051487A1 Düsen-, Filter- oder/und Positionierelement Nozzle, filter or / and positioning |
| 04/30/2009 | DE102007049936A1 Verfahren zum Herstellen funktioneller Oberflächenbereiche auf einem Flächensubstrat A method of manufacturing a functional surface areas on a surface of substrate |
| 04/30/2009 | DE102005063367B4 Chemische Reaktionspatrone und Verfahren zum Betätigen einer chemischen Reaktionspatrone Chemical reaction cartridge and method of operating a chemical reaction cartridge |
| 04/29/2009 | EP2051929A1 Method for the production of mems structures |
| 04/29/2009 | CN101421178A A method for manufacturing an electronic assembly, electronic assembly, covering piece and substrate |
| 04/29/2009 | CN101421177A Inter-layer connection for foil MEMS technology |
| 04/29/2009 | CN101417784A Method for preparing spin microscopic micro-cantilever detector method based on electron jet plasma countermark |
| 04/29/2009 | CN100483829C Stack silicon-base miniature fuel celles and manufacturing method |
| 04/29/2009 | CN100483740C MOS transistor with deformable gate |
| 04/29/2009 | CN100483610C Conductive etch stop for etching a sacrificial layer |
| 04/28/2009 | US7525732 Method for forming finely-structured parts, finely-structured parts formed thereby, and product using such finely-structured part |
| 04/28/2009 | US7525718 Spatial light modulator using an integrated circuit actuator and method of making and using same |
| 04/28/2009 | US7524427 Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates |
| 04/23/2009 | WO2009051814A1 Method of forming structured sintered articles |
| 04/23/2009 | WO2009050209A2 Manufacturing a mems element having cantilever and cavity on a substrate |
| 04/23/2009 | WO2009049958A2 Composite comprising at least two semiconductor substrates and production method |
| 04/23/2009 | WO2009049957A1 Composite element consisting of at least two semiconductor substrates, and production method |
| 04/23/2009 | WO2008121828A8 Methods of macromolecular analysis using nanochannel arrays |
| 04/23/2009 | DE102007050002A1 Mikromechanisches Sensor- oder Aktorbauelement und Verfahren zur Herstellung von mikromechanischen Sensor- oder Aktorbauelementen Micromechanical sensor or actuator device and method for producing micromechanical sensor or actuator components |
| 04/22/2009 | EP2050713A1 Method of manufacturing a cavity with an apertured seal bead and structure obtained |
| 04/22/2009 | EP2050712A2 Sealed wafer packaging of microelectromechanical systems |
| 04/22/2009 | EP2049435A2 A multi-die apparatus including moveable portions |
| 04/22/2009 | EP2049262A2 Nanonozzle device arrays: their preparation and use for macromolecular analysis |
| 04/22/2009 | CN101414701A Microelectron mechanical socle beam type microwave power coupler and preparation method thereof |
| 04/22/2009 | CN101414058A Device on a transparent substrate and micro mechanical-electric system device |
| 04/22/2009 | CN101413138A Method for improving accuracy of size of micro-electroforming cast layer |
| 04/22/2009 | CN101412494A Substrate support device |
| 04/22/2009 | CN101412493A Micromechanical sensor- or actuator component and method for the production of micromechanical sensor- or actuator components |
| 04/22/2009 | CN100480851C Method for fabricating soft mold |
| 04/21/2009 | US7521363 MEMS device with non-standard profile |
| 04/16/2009 | WO2009048321A2 Methods for manufacturing a microstructure |
| 04/16/2009 | WO2009047573A1 Microfluidic channel, method for its implementation, and microfluidic system containing said channel |
| 04/16/2009 | WO2009002788A3 Indication of the end-point reaction between xef2 and molybdenum |
| 04/16/2009 | US20090099001 Borosilicate glass compositions and uses thereof |
| 04/16/2009 | US20090095927 Thermally actuated valves, photovoltaic cells and arrays comprising same, and methods for producing same |
| 04/16/2009 | US20090095632 Electrochemical Fabrication Method and Apparatus for Producing Three-Dimensional Structures Having Improved Surface Finish |
| 04/16/2009 | DE102008046860A1 Mikrohergestellter akustischer Transducer mit einer Mehrschichtelektrode The fabricated micro-acoustic transducer with a multilayer electrode |
| 04/16/2009 | DE102006052693B4 Verfahren zur Fertigung eines Halbleitersensors A method for manufacturing a semiconductor sensor |
| 04/16/2009 | DE102006030267B4 Nano-Einprägetechnik mit erhöhter Flexibilität in Bezug auf die Justierung und die Formung von Strukturelementen Nano-imprint technique with increased flexibility in terms of the adjustment and the formation of structural elements |
| 04/16/2009 | DE102005008878B4 Verfahren zur Bestimmung der Position eines Fräswerkzeuges und ein zur Durchführung des Verfahrens bestimmter Bearbeitungskopf A method for determining the position of a milling tool and a specific method for carrying out the machining head |
| 04/16/2009 | CA2702156A1 Microfluidic channel, method for its implementation, and microfluidic system containing said channel |
| 04/15/2009 | EP2047596A2 Frame and method of manufacturing assembly |
| 04/15/2009 | EP2046677A1 Method of etching a sacrificial silicon oxide layer |
| 04/15/2009 | EP2046676A2 Production of microfluidic polymeric devices by photo-assisted and/ or thermally assisted printing |
| 04/15/2009 | EP2046490A1 Method for producing a component, particularly a micromechanical and/or microfluidic and/or microelectronic component, and component |
| 04/15/2009 | CN101410999A Membrane structure element and method of manufacturing same |
| 04/15/2009 | CN101410324A Microstructured tool and method of making same using laser ablation |
| 04/15/2009 | CN101410323A Stamping methods and devices |
| 04/15/2009 | CN100479127C Micro-mechanical wafer chip test detecting card and its production |
| 04/15/2009 | CN100478178C Liquid drop discharge head and manufacture method thereof, micro device, ink-jet head, ink cartridge, and ink-jet printing device |
| 04/15/2009 | CN100478040C Microneedles and microneedle fabrication |
| 04/14/2009 | US7517462 Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates |
| 04/14/2009 | CA2420859C Microneedle structure and production method therefor |
| 04/14/2009 | CA2314920C Device and method for creating aerosols for drug delivery |
| 04/09/2009 | WO2009045473A2 Carbon nanotube synthesis for nanopore devices |
| 04/09/2009 | WO2009044901A1 X method for forming flow passage using rotating tilt exposure method |
| 04/09/2009 | WO2009043614A2 Microfluidic component and method for producing the same |
| 04/09/2009 | WO2008115716A3 Mems cavity-coating layers and methods |
| 04/09/2009 | WO2008072187A9 Method for improving the bonding properties of microstructured substrates, and devices prepared with this method |
| 04/09/2009 | US20090093874 Medical Devices and EFAB Methods and Apparatus for Producing Them |
| 04/09/2009 | US20090093103 Method and device for controlled cleaving process |
| 04/09/2009 | DE10130713B4 Halbleiterchip mit Sensorelementen und dynamischer Halbleitersensorchip und Verfahren zu deren Herstellung Semiconductor chip having sensing elements and dynamic semiconductor sensor chip and methods of manufacture |
| 04/09/2009 | CA2700862A1 Carbon nanotube synthesis for nanopore devices |
| 04/08/2009 | EP2043781A1 Arrangement comprising nanoparticles, and method for the production thereof |
| 04/08/2009 | EP2043552A1 A method for the production of structured layers of titanium and nickel |
| 04/08/2009 | EP2001062A9 Membrane structure element and method for manufacturing same |
| 04/08/2009 | CN101402446A Method for manufacturing drag reduction surface |