| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 04/08/2009 | CN101402445A Method for manufacturing micro-structure with self-alignment and manufactured infrared thermopile detector |
| 04/08/2009 | CN100477186C High frequency integrated circuit (HFIC) microsystem assembly and method for fabricating the same |
| 04/08/2009 | CN100477077C Method for making double-side technology |
| 04/08/2009 | CN100475686C Production method of monocrystalline silicon sheet surface self-assembly polyelectrolyte-rare earth nanometer film |
| 04/07/2009 | US7515783 Micro-optic device and method of manufacturing same |
| 04/07/2009 | US7515023 Micro-switching device and method of manufacturing micro-switching device |
| 04/07/2009 | US7514283 Method of fabricating electromechanical device having a controlled atmosphere |
| 04/07/2009 | US7514012 Pre-oxidization of deformable elements of microstructures |
| 04/02/2009 | WO2009041951A1 Optimization of desiccant usage in a mems package |
| 04/02/2009 | WO2009041950A1 Method of manufacturing a mems package using partially reactivated desiccant |
| 04/02/2009 | WO2009041948A1 Multicomponent sacrificial structure |
| 04/02/2009 | WO2008148736A3 Method for producing a mems package |
| 04/02/2009 | US20090087357 Microchemical device and method for fabricating the same |
| 04/02/2009 | US20090084756 Electrochemical Fabrication Method and Application for Producing Three-Dimensional Structures Having Improved Surface Finish |
| 04/02/2009 | DE102007046498A1 Mikroelektromechanisches Bauelement und Herstellungsverfahren The micro-electro-mechanical device and manufacturing method |
| 04/02/2009 | DE102007046305A1 Mikrofluidisches Bauelement sowie Herstellungsverfahren Microfluidic device and manufacturing method |
| 04/02/2009 | DE102007044806A1 Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component and process for producing a micromechanical component |
| 04/01/2009 | EP2042467A1 Method of manufacturing a microfluid component comprising at least one microchannel filled with nanostructures |
| 04/01/2009 | EP2042466A2 A method for fabricating a structure for a microelectromechanical systems (MEMS) device |
| 04/01/2009 | EP2040809A2 Microfluidic device for crystallization and chrystallographic analysis of molecules |
| 04/01/2009 | EP1890958B1 Micromechanical component with active elements and method for producing a component of this type |
| 04/01/2009 | EP1549475A4 Imprint lithography processes and systems |
| 04/01/2009 | EP1345551B1 Microfabricated elastomeric valve and pump systems |
| 04/01/2009 | CN101398617A Replication and transfer of microstructures and nanostructures |
| 04/01/2009 | CN101397120A Micromachined electromechanical device |
| 04/01/2009 | CN100474029C Micro-optic device manufacturing method |
| 03/26/2009 | WO2009037360A2 Monocrystalline silicon micromirrors for maskless lithography |
| 03/26/2009 | WO2009037030A2 Method for printing a nanostructure and/or microstructure, stamp and substrate |
| 03/26/2009 | WO2009006340A3 Electromechanical device treatment with water vapor |
| 03/26/2009 | WO2008152151A3 Structured layer deposition on processed wafers used in microsystem technology |
| 03/26/2009 | WO2008124219A3 Registered structure formation via the apllication of directed thermal energy to diblock copolymer films |
| 03/26/2009 | WO2008079887A4 Stacked mems device |
| 03/25/2009 | EP2038920A1 Method for packaging components |
| 03/25/2009 | EP2038207A2 Integrated single-crystal mems device |
| 03/25/2009 | EP2038206A2 Mems-based nanopositioners and nanomanipulators |
| 03/25/2009 | EP2038061A1 Microfluidic device with variable volume material |
| 03/25/2009 | EP1776229A4 Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates |
| 03/25/2009 | EP1412550B1 Support with getter-material for micromechanical device |
| 03/25/2009 | CN101391744A Method for preparing micro needle array by means of lithography based on tilting rotary substrate and template |
| 03/25/2009 | CN101391743A Method for manufacturing semiconductor device |
| 03/24/2009 | US7507669 Gap tuning for surface micromachined structures in an epitaxial reactor |
| 03/19/2009 | WO2009035126A1 Method of producing microfluidic device |
| 03/19/2009 | WO2009034697A1 Silicon structure, method for manufacturing the same, and sensor chip |
| 03/19/2009 | WO2009033871A1 Method for producing a multiplicity of chips and correspondingly produced chip |
| 03/19/2009 | WO2008130493A3 Connecting microsized devices using ablative films |
| 03/19/2009 | WO2008125094A3 Method for forming a nanostructure and/or microstructure on a surface, and apparatus for carrying out said method |
| 03/19/2009 | WO2008009803A4 Production of microfluidic polymeric devices by photo-assisted and/ or thermally assisted printing |
| 03/19/2009 | DE102007044505A1 Verfahren zum lithographischen Erzeugen von Nano- und/oder Mikrostrukturen, Stempel sowie Substrat Lithographic method for producing nano- and / or micro-structures, stamp and substrate |
| 03/19/2009 | DE102007044504A1 Verfahren zum Aufdrucken einer Nano- und/oder Mikrostruktur, Stempel sowie Substrat A method for printing a nano- and / or microstructure, stamp and substrate |
| 03/19/2009 | DE102007043396A1 Method for manufacturing electrical conducting structures, involves producing channels on surface of substrate by mechanical and additionally thermal effects and ink is applied on channels |
| 03/18/2009 | EP2036586A1 Method for manufacturing microneedle |
| 03/18/2009 | EP2036132A2 An integrated circuit device having barrier and method of fabricating the same |
| 03/18/2009 | EP2035328A1 Method for producing porous micro-needles and use thereof |
| 03/18/2009 | EP2035327A2 Mems device and method of fabricating the same |
| 03/18/2009 | EP1810948B1 Process to create an array of stress fields on a substrate for nucleation and growth of nanostructures |
| 03/18/2009 | CN101389566A Electrical conditioning of mems device and insulating layer thereof |
| 03/18/2009 | CN101388364A Electric isolation region forming method adopting low temperature process, single chip integration method and chip |
| 03/18/2009 | CN101387664A Microelectronic machinery microwave frequency detector and method for making same |
| 03/18/2009 | CN101386403A Micro optical fibre voltage sensor based on ring micro-cavity |
| 03/18/2009 | CN101386402A Infrared detector and manufacturing method thereof |
| 03/18/2009 | CN101386401A Monitoring structure of infrared detector pixel stress and monitoring method |
| 03/18/2009 | CN101386400A Capacitance single mass three-shaft acceleration transducer and preparation method |
| 03/18/2009 | CN100470778C Device comprising multi-layer thin film having excellent adhesive strength and method for fabricating the same |
| 03/17/2009 | US7504136 Method and system for forming a film of material using plasmon assisted chemical reactions |
| 03/12/2009 | WO2009032815A1 Tool for making microstructured articles |
| 03/12/2009 | WO2009032525A2 Interferometric optical modulator with broadband reflection characteristics |
| 03/12/2009 | US20090069458 Polymers, Methods Of Use Thereof, And Methods Of Decomposition Thereof |
| 03/12/2009 | US20090068781 Method of manufacture for microelectromechanical devices |
| 03/12/2009 | US20090064785 Integrated micro electro-mechanical system and manufacturing method thereof |
| 03/12/2009 | DE102007057044A1 Mikromechanische Feder Micromechanical spring |
| 03/11/2009 | EP2032501A2 Nano-microphone or pressure sensor |
| 03/11/2009 | EP2032500A1 Production of microfluidic devices using laser-induced shockwaves |
| 03/11/2009 | CN101384505A Patterning method and device with a patterned surface |
| 03/11/2009 | CN101382555A Method for producing glass microflow control chip |
| 03/11/2009 | CN101381070A Method for preparing radio frequency single electron transistor displacement sensor |
| 03/11/2009 | CN100468639C Method of room temperature covalent bonding |
| 03/10/2009 | US7501695 High frequency integrated circuit (HFIC) microsystems assembly and method for fabricating the same |
| 03/10/2009 | US7501241 Two-dimensionally arranging biomolecules on a board, forming thin film of nickel by sputtering or evaporation; electrotyping; peeling thin film and supporting layer; high speed replication of the pattern into a template and increasing strength; protein chips; drug development, diagnosis; immobilization |
| 03/05/2009 | WO2008138934A3 A method for the manufacture of patterned functional monolayer structures and products thereof |
| 03/05/2009 | WO2008121828A3 Methods of macromolecular analysis using nanochannel arrays |
| 03/05/2009 | WO2005078772A3 Method and apparatus for making a mems scanner |
| 03/05/2009 | US20090061562 Method of fabricating microelectromechanical systems devices |
| 03/05/2009 | DE102008039706A1 Halbleiterbauelement Semiconductor device |
| 03/04/2009 | EP2030947A2 Interferometric optical modulator with broadband reflection characteristics |
| 03/04/2009 | EP2030225A2 Wet etch suitable for creating square cuts in si and resulting structures |
| 03/04/2009 | EP2029474A1 Micromechanic component and method for the production thereof |
| 03/04/2009 | CN101376491A Method for manufacturing micro-electro-mechanical system magnetic executor having double structure |
| 03/04/2009 | CN101376490A Manufacturing method of micro-electro-mechanism system magnetic executor based on overhead metal wire bridge |
| 03/04/2009 | CN101376489A Method for manufacturing micro electro-mechanical system magnetic executor |
| 03/04/2009 | CN100466381C Method for flexible interlinkage with built-in type device |
| 03/04/2009 | CN100466203C Contoured insulator layer on silicon-on-insulator wafers and the production method thereof |
| 03/03/2009 | US7498266 Method for structuring of silicon substrates for microsystem technological device elements and associated silicon substrate |
| 03/03/2009 | US7497980 Microneedles and microneedle fabrication |
| 02/26/2009 | WO2009026250A1 System and method for measuring adhesion forces in mems devices |
| 02/26/2009 | US20090049911 Integrated micro electro-mechanical system and manufacturing method thereof |
| 02/25/2009 | EP2028703A2 Fabrication of piezoelectric single crystalline thin layer on silicon wafer |
| 02/25/2009 | EP2027058A2 Cmos integrated process for fabricating monocrystalline silicon |
| 02/25/2009 | CN101372311A High depth-to-width ratio silicon oxide etching technique |
| 02/25/2009 | CN101372310A Nano-scale localization platform based on bulk silicon process and method for processing vertical sidewall surface piezoresistance thereof |
| 02/24/2009 | US7495348 Process for producing copy protection for an electronic circuit |