| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 02/24/2009 | US7495302 Micromechanical component having a diaphragm |
| 02/24/2009 | US7494555 Microfabricated elastomeric valve and pump systems |
| 02/24/2009 | CA2224278C Flow-through sampling cell and use thereof |
| 02/19/2009 | WO2008124372A3 Eliminate release etch attack by interface modification in sacrificial layers |
| 02/19/2009 | DE102007035633A1 Micromechanical structure e.g. electrostatic drive, manufacturing method, involves using structures etched in silicon substrate as negative region, removing partial regions of substrate and opening galvanically produced metal structures |
| 02/18/2009 | EP1349731B1 Microscale nozzle and method for manufacturing the same |
| 02/18/2009 | CN101368826A Vibration isolation frame work decoupled silicon micro-gyroscope and preparation thereof |
| 02/18/2009 | CN101368825A Angle vibration silicon micro-gyroscope and preparation thereof |
| 02/18/2009 | CN101367504A Method for manufacturing micro-electronic mechanical system with micro-mirror |
| 02/17/2009 | US7491422 Direct-write nanolithography method of transporting ink with an elastomeric polymer coated nanoscopic tip to form a structure having internal hollows on a substrate |
| 02/17/2009 | US7491288 Method of cutting laminate with laser and laminate |
| 02/12/2009 | WO2009020682A2 Chemical functionalization of solid-state nanopores and nanopore arrays and applications thereof |
| 02/12/2009 | WO2009019316A2 Method for forming mems structures comprising narrow gaps |
| 02/12/2009 | WO2009019266A2 Method of low-temperature transfer from a layer of self-assembled molecules |
| 02/12/2009 | US20090038948 Electrochemically Fabricated Structures Having Dielectric or Active Bases and Methods of and Apparatus for Producing Such Structures |
| 02/11/2009 | EP2023357A1 A method for fabricating a capacitor and a capacitor |
| 02/11/2009 | EP2022753A1 Flexible micro/nanofluidic devices |
| 02/11/2009 | EP2022633A2 Sensor device and printing machine with a sensor device |
| 02/11/2009 | EP2021860A2 Patterning of mechanical layer in mems to reduce stresses at supports |
| 02/11/2009 | EP2021273A2 Electrode and interconnect materials for mems devices |
| 02/11/2009 | EP2021113A2 Microfluidic devices |
| 02/11/2009 | CN101363731A Rock quartz micro mechanical gyroscope based on shear stress detection and method for making same |
| 02/11/2009 | CN100461448C Wafer-level seal for non-silicon-based devices |
| 02/11/2009 | CN100460028C Miniature needle array for medicine transmission and making process thereof |
| 02/10/2009 | US7489837 Optical microelectromechantical structure |
| 02/07/2009 | CA2638477A1 Integrated electrical cross-talk walls for electrostatic mems |
| 02/05/2009 | WO2009016304A2 Method for coating two elements hybridized by means of a soldering material |
| 02/05/2009 | WO2009015984A2 Wafer joining method, wafer assemblage, and chip |
| 02/05/2009 | US20090035838 Microfabricated Crossflow Devices and Methods |
| 02/05/2009 | DE102007037375A1 Verfahren zum Ausbilden einer Struktur auf einem Substrat und ein Bauelement A method of forming a structure on a substrate and a component |
| 02/05/2009 | DE102007035858A1 Integrated circuit for use in e.g. semiconductor device, has memory cell array with spatially positioned cavities, where size of cavities are selected such that mechanical stress occurring inside array is compensated partially by cavities |
| 02/05/2009 | DE102007035721A1 Mikroventil, Verfahren zum Herstellen eines Mikroventils sowie Mikropumpe Microvalve method of making a microvalve and micropump |
| 02/05/2009 | DE102007035693A1 Monolithisches, poröses Bauteil aus im wesentlichen parallelen Nanoröhren, Verfahren zu dessen Herstellung und Verwendung desselben Of the same monolithic, porous member of substantially parallel nanotubes, a process for its preparation and use |
| 02/05/2009 | DE102007034963A1 Zelle mit einer Kavität und einer die Kavität umgebenden Wandung, Verfahren zur Herstellung einer derartigen Zelle, deren Verwendung und Wandung mit einer darin ausbildbaren Ausnehmung Cell with a cavity and a wall surrounding the cavity, methods of making such a cell, the use of which and the wall with a recess embodied therein |
| 02/04/2009 | EP2020021A1 Improved semiconductor seal ring |
| 02/04/2009 | EP2019812A1 Method for producing a micromechanical component, and micromechanical component |
| 02/04/2009 | CN101360851A Master electrode and method for manufacturing it |
| 02/04/2009 | CN101360680A Method of forming a sealed channel of a microfluidic reactor and a microfluidic reactor comprising such channel |
| 02/04/2009 | CN101360354A Electronic component, fabrication method for the same and electronic device having the same |
| 02/04/2009 | CN101359605A Method of room temperature covalent bonding |
| 02/04/2009 | CN101358941A Double-face nanometer band electrode array integration sensor capable of being cut and method for manufacturing same |
| 02/04/2009 | CN101357747A Preparation method of no-refrigeration infrared focal plane micro-bridge structure |
| 02/04/2009 | CN100459031C Silica micro-mechanical two-dimensional obliquity sensor silicon chip and production method |
| 02/04/2009 | CN100457887C Biological identification system with integrated sensor chip |
| 02/03/2009 | US7485485 Method and apparatus for making a MEMS scanner |
| 01/29/2009 | WO2009014118A1 Mems sensor, and mems sensor manufacturing method |
| 01/29/2009 | WO2009013255A2 Method for transferring an epitaxial layer from a donor wafer to a system wafer appertaining to microsystems technology |
| 01/29/2009 | WO2008148917A3 Production method for a micrometric fluid focusing device |
| 01/29/2009 | WO2008124595A3 Polysilicon deposition and anneal process enabling thick polysilicon films for mems applications |
| 01/29/2009 | WO2008113325A3 Method for producing a micromechanical component comprising a partial protective layer |
| 01/29/2009 | WO2008079887A3 Stacked mems device |
| 01/29/2009 | US20090029500 Hermetic pacakging and method of manufacture and use therefore |
| 01/29/2009 | DE102007035060A1 Connection for semiconductor component with carrier element, has holes arranged one above other in semiconductor component and carrier element, where hole of semiconductor component is conically formed |
| 01/29/2009 | DE102005063368B4 Chemische Reaktionspatrone Chemical reaction cartridge |
| 01/28/2009 | EP2019081A2 Boron doped shell for MEMS device |
| 01/28/2009 | EP2019080A2 Method of controlling film stress in MEMS devices |
| 01/28/2009 | CN101355076A Integrated circuit having a semiconductor substrate with a barrier layer |
| 01/28/2009 | CN101354404A Metal-silicon compound cantilever beam type microelectronic mechanical system probe card and manufacture method thereof |
| 01/28/2009 | CN101353153A MEMS sensor and manufacturing method thereof |
| 01/28/2009 | CN101353152A MEMS sensor and manufacturing method thereof |
| 01/28/2009 | CN100456422C Pattern transfer method |
| 01/28/2009 | CN100456418C Method of mfg. self-collating nanotube array and nano points |
| 01/27/2009 | US7482730 High performance MEMS scanner |
| 01/27/2009 | US7482196 Method of manufacturing a semiconductor device having MEMS |
| 01/27/2009 | US7482190 Micromechanical strained semiconductor by wafer bonding |
| 01/27/2009 | US7482052 Method for processing by laser, apparatus for processing by laser, and three-dimensional structure |
| 01/22/2009 | WO2009010391A1 Method for etching a layer of a silicon semiconductor substrate |
| 01/22/2009 | WO2008118635A3 Sub-10 nm line features via rapid graphoepitaxial self-assembly of amphipilic monolayers |
| 01/22/2009 | WO2008106928A3 Method for the production of membranes that can be electrically and/or magnetically activated, and magnetic actuator having such a membrane |
| 01/22/2009 | WO2008100279A3 Selective etching of mems using gaseous halides and reactive co-etchants |
| 01/22/2009 | US20090019847 Stepping Actuator and Method of Fabrication |
| 01/22/2009 | DE10233462B4 Vorrichtung zum Prägen und zur Entformung von Strukturkörpern Apparatus for embossing and demolding of structural bodies |
| 01/22/2009 | DE102007034888B3 Mikrosystem und Verfahren zum Herstellen eines Mikrosystems Micro system and method for producing a microsystem |
| 01/22/2009 | DE102007034701A1 Halbleitersubstrat und Verfahren zum Herstellen eines Halbleiterbauelements Semiconductor substrate and method for fabricating a semiconductor device |
| 01/22/2009 | DE102007025649A1 Verfahren zum Übertragen einer Epitaxie-Schicht von einer Spender- auf eine Systemscheibe der Mikrosystemtechnik A method for transmitting an epitaxial layer of a donor to a system disk microsystem technology |
| 01/21/2009 | EP2017888A2 Electronic component package and method of manufacturing the same, and electronic component device |
| 01/21/2009 | EP2017628A1 Physical sensor and method of manufacturing |
| 01/21/2009 | EP2016997A1 Microfluidic device, method of mixing, process of manufacturing and use of the device |
| 01/21/2009 | EP2016023A2 Superhydrophobic surfaces and fabrication process |
| 01/21/2009 | EP1264336B1 Forming microscale structures from polycrystalline materials |
| 01/21/2009 | CN101351401A Process of forming a microphone using support member |
| 01/21/2009 | CN101351400A Method for manufacturing micromechanical components |
| 01/21/2009 | CN101349560A Horizontal attitude sensitive chip and manufacturing method thereof, horizontal attitude sensor |
| 01/21/2009 | CN100453444C Method for producing nano-stamped template by laminated sided-wall technology |
| 01/20/2009 | US7479318 Fibrillar microstructure and processes for the production thereof |
| 01/20/2009 | US7479234 Method for producing cavities having optically transparent wall |
| 01/20/2009 | US7479232 Method for producing a semiconductor component and a semiconductor component produced according to the method |
| 01/20/2009 | US7479186 Systems and methods for mixing reactants |
| 01/15/2009 | WO2008132024A3 Method for producing a micromechanical component having a filler layer and a masking layer |
| 01/15/2009 | US20090015903 Complex Microdevices and Apparatus and Methods for Fabricating Such Devices |
| 01/15/2009 | DE102006052192B4 Schichtenverbund mit nicht durchgängigen Öffnungen, Verfahren zur Herstellung und Bauelement damit Composite layers so with non-conducting apertures, methods of making and component |
| 01/15/2009 | DE102005063369B4 Verfahren zum Betätigen einer chemischen Reaktionspatrone A method of operating a chemical reaction cartridge |
| 01/14/2009 | EP2014612A2 Method of manufacturing micro electro mechanical systems device |
| 01/14/2009 | EP2013137A1 Process for collective manufacturing of small volume high precision membranes and cavities |
| 01/14/2009 | EP1544161B1 Three-dimensional structure element and method of manufacturing the element, optical switch, and micro device |
| 01/14/2009 | EP1221176B1 Method of etching a layer using sacrificial elements |
| 01/14/2009 | EP1186002A4 Ic-compatible parylene mems technology and its application in integrated sensors |
| 01/14/2009 | CN101344413A Flat diaphragm type gas flow sensor and method of producing the same |
| 01/14/2009 | CN101343033A Method for manufacturing miniature spring mechanical sensor for film performance test |
| 01/14/2009 | CN101342404A Method for manufacturing different-plane metal hollow fine needle for transdermal drug administration |