| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 06/25/2009 | DE102007061096A1 Mikromechanisches Bauelement mit auslenkfähigem Element Micromechanical component with auslenkfähigem element |
| 06/25/2009 | DE102007060878A1 Mikromechanisches System Micromechanical System |
| 06/25/2009 | DE10058864B4 Mikromechanikstruktur für integrierte Sensoranordnungen und Verfahren zur Herstellung einer Mikromechanikstruktur Micromechanics structure for integrated sensor arrays and methods for making a micromechanical structure |
| 06/24/2009 | EP2073272A1 Vibration sensor and method for manufacturing the vibration sensor |
| 06/24/2009 | EP2072076A1 Out-of-plane microneedle manufacturing process |
| 06/24/2009 | CN101462692A Method of manufacturing a structure based on anisotropic etching, and silicon substrate with etching mask |
| 06/24/2009 | CN101462691A Clearance forming method for etching sacrificial layer |
| 06/24/2009 | CN100503879C Support for microelectronic, microoptoelectronic or micromechanical devices |
| 06/21/2009 | CA2647126A1 Mems switch with improved standoff voltage control |
| 06/18/2009 | WO2009075650A1 A method of doping and apparatus for doping |
| 06/18/2009 | WO2009074368A2 Production method for a micromechanical component, and micromechanical component |
| 06/18/2009 | WO2008124084A3 Nanoelectromechanical systems and methods for making the same |
| 06/18/2009 | US20090151422 Microfabricated elastomeric valve and pump systems |
| 06/18/2009 | DE19530510B4 Verfahren zur Herstellung eines Halbleitersensors mit aufgehängter bzw. beweglich gehaltener Mikrostruktur A process for producing a semiconductor sensor with movable held or suspended microstructure |
| 06/18/2009 | DE102008006035B3 Micro-technical component for testing characteristics of fluid sample i.e. serum, in e.g. biological field, has protective layer arranged at substrate or cover such that functional element is shielded against incident radiation |
| 06/18/2009 | DE102007060785A1 Method for manufacturing component or multiple components with micromechanical functional units, involves joining base element and attachment element for forming part of housing of component |
| 06/18/2009 | DE102007060632A1 Verfahren zum Herstellen eines Kappenwafers für einen Sensor A method of manufacturing a cap wafer for a sensor |
| 06/18/2009 | DE102007059856A1 Herstellungsverfahren für ein mikromechanisches Bauelement und mikromechaniches Bauelement Manufacturing method for a micromechanical component and component mikromechaniches |
| 06/18/2009 | DE102007059717A1 Vorrichtung und Verfahren zur Herstellung von Mikrobauteilen sowie Verwendung einer derartigen Vorrichtung Device and method for the production of micro-components and the use of such a device |
| 06/18/2009 | DE102007057492A1 Mikroelektromechanisches System Micro-Electro-Mechanical System |
| 06/18/2009 | DE102006059459B4 Vorrichtung zur Aufnahme oder Manipulation einer Flüssigkeit und Verfahren zur Herstellung einer derartigen Vorrichtung A device for receiving or manipulating a fluid and methods of making such a device |
| 06/17/2009 | EP2069061A1 Micromixer using integrated three-dimensional porous structure |
| 06/17/2009 | CN101456534A Micro-nano fabrication method for auxiliary etch by combining focused ion beam injection and xenon fluoride gas |
| 06/17/2009 | CN101456533A Method for manufacturing electric pole in micro fixed scroll vane |
| 06/17/2009 | CN101456532A Micro scroll vane and method for producing micro scroll vane substrates |
| 06/17/2009 | CN101456531A Method for producing air-gap structure by selective etching aluminum arsenide using dilute hydrochloric acid |
| 06/11/2009 | WO2009073290A2 Molded sensor package and assembly method |
| 06/11/2009 | WO2009071595A2 Device with encapsulated integrated circuit and a n/mems and method for production |
| 06/11/2009 | WO2009071487A1 Method for making a micro-etching at the surface of a material |
| 06/11/2009 | WO2009029319A3 Self-healing materials with microfluidic networks |
| 06/11/2009 | US20090149944 Medical Devices and EFAB Methods and Apparatus for Producing Them |
| 06/11/2009 | US20090146228 Microminiature moving device |
| 06/10/2009 | DE10207341B4 Verfahren zum Erzeugen akustischer Dünnfilmvolumenresonatoren (FBARs) mit unterschiedlichen Frequenzen auf einem einzelnen Substrat und Vorrichtung, die das Verfahren beinhaltet A method of generating acoustic thin film bulk resonators (FBARs) with different frequencies on a single substrate and device including the method |
| 06/10/2009 | DE102006057384B4 Halbleiterbauelement und Verfahren zum Herstellen eines solchen A semiconductor device and method for manufacturing such a |
| 06/10/2009 | CN101450787A Method for producing heat insulation antiblocking cavity based on silicon substrate |
| 06/10/2009 | CN101450786A Pressure sensor for micro electro-mechanical system and production method thereof |
| 06/10/2009 | CN100498209C Method and system to measure characteristics of a film disposed on a substrate |
| 06/09/2009 | US7545251 Micro-electromechanical actuator |
| 06/09/2009 | US7545234 Microelectromechanical device having a common ground plane layer and a set of contact teeth and method for making aspects thereof |
| 06/04/2009 | WO2009070290A1 Durable frit composition & composites and devices comprised thereof |
| 06/04/2009 | WO2009069023A2 Apparatus and method for detection of an analyte in a sample |
| 06/04/2009 | WO2009048321A3 Methods for manufacturing a microstructure |
| 06/04/2009 | WO2009043614A3 Microfluidic component and method for producing the same |
| 06/04/2009 | WO2009037030A3 Method for printing a nanostructure and/or microstructure, stamp and substrate |
| 06/04/2009 | WO2009004547A3 Production process of a micro/nano-fluidic device having at least one channel with a section of micro/nano -metric size |
| 06/04/2009 | CA2706942A1 Durable frit composition and composites and devices comprised thereof |
| 06/04/2009 | CA2701069A1 Apparatus and method for detection of an analyte in a sample |
| 06/03/2009 | EP2065736A1 Antireflection structure, process for producing the same and process for producing optical member |
| 06/03/2009 | EP2065347A1 Durable frit composition and composites and devices comprised thereof |
| 06/03/2009 | EP2065336A1 Method for making a device with a suspended membrane |
| 06/03/2009 | EP2064734A2 Release strategies for making transferable semiconductor structures, devices and device components |
| 06/03/2009 | EP2064148A1 Optimization of desiccant usage in a mems package |
| 06/03/2009 | EP2064147A1 Integrated mems packaging |
| 06/03/2009 | EP1578579B1 Micro-mechanical thermo structure and method for manufacturing such micro-mechanical structure |
| 06/03/2009 | CN101445218A Fabrication method of Ti movable device |
| 06/03/2009 | CN101445217A On-substrate base sheet micro-processing method |
| 06/03/2009 | CN100494046C Structure and production of air-sealed packaged micromechanical system device with convex point connection |
| 06/02/2009 | US7540968 Micro movable device and method of making the same using wet etching |
| 05/28/2009 | US20090137079 Method for manufacturing a microelectromechanical component, and a microelectromechanical component |
| 05/28/2009 | US20090134522 Micro-Electromechanical System Memory Device and Method of Making the Same |
| 05/28/2009 | DE102007057037A1 Sensorelement für spektroskopische oder optische Messungen und Verfahren zu dessen Herstellung Sensor element for spectroscopic or optical measurements and process for its preparation |
| 05/28/2009 | DE102007056992A1 Sub micrometer structures producing method for structuring of e.g. scanning tips, for micro or nano-technology, involves selectively etching layer to be structured, and removing upper masking layer afterwards |
| 05/28/2009 | DE102007055018A1 Verfahren zum Verbinden einer Edelmetalloberfläche mit einem Polymer A method of joining a noble metal surface with a polymer |
| 05/27/2009 | EP2062849A2 Method for Obtaining Controller Sidewall Profile in Print-Patterned Structures |
| 05/27/2009 | EP2062293A1 Functional element package and fabrication method therefor |
| 05/27/2009 | CN101441410A Method for manufacturing nano-scale pattern |
| 05/27/2009 | CN101441324A Method of manufacturing oscillator device, and optical deflector and optical instrument having oscillator device |
| 05/27/2009 | CN101441112A Non-refrigeration infrared detector array based on monocrystal silicon PN junction and preparing method thereof |
| 05/27/2009 | CN101439842A Method for manufacturing micro-mechanical cantilever beam array with substrate silicon as fixing column |
| 05/27/2009 | CN101439841A Non-refrigeration infrared image sensor chip and preparation thereof |
| 05/27/2009 | CN100492589C Substrate of system for bearing stress and method for growing crystal on the substrate |
| 05/26/2009 | US7538930 Micro-mechanical thermo structure and method for manufacturing such micro-mechanical structure |
| 05/26/2009 | US7538042 Method of manufacturing a structure having a projection |
| 05/26/2009 | CA2481619C Micro-optic device and method of manufacturing same |
| 05/22/2009 | WO2009064490A2 Microchannel structures having bonded layers including height control features |
| 05/22/2009 | WO2009019316A3 Method for forming mems structures comprising narrow gaps |
| 05/22/2009 | WO2009015984A3 Wafer joining method, wafer assemblage, and chip |
| 05/21/2009 | US20090131905 Microneedle devices and methods of manufacture and use thereof |
| 05/21/2009 | US20090130857 Method of manufacturing a structure based on anisotropic etching, and silicon substrate with etching mask |
| 05/21/2009 | US20090127640 Method for manufacturing a semiconductor component, as well as a semiconductor component, in particular a membrane sensor |
| 05/21/2009 | US20090126183 Method of fabricating a polymer-based capacitive ultrasonic transducer |
| 05/20/2009 | EP2060950A1 Method for producing original plate, method for producing microneedle patch, microneedle patch, and exposure apparatus |
| 05/20/2009 | EP2060533A2 Semiconductor device and method of manufacturing the same |
| 05/20/2009 | DE10207330B4 Verfahren zum Herstellen akustischer Dünnfilmvolumenresonatoren (FBARs) mit unterschiedlichen Frequenzen auf dem gleichen Substrat durch ein Subtraktionsverfahren und Vorrichtung, die das Verfahren beinhaltet A method of manufacturing thin film bulk acoustic resonators (FBARs) with different frequencies on the same substrate by a subtraction method and apparatus incorporating the method |
| 05/20/2009 | DE102007056151A1 Thermoelectric component has sensor structure provided for determining measured variable on operation of thermoelectric component and is formed by material deposited on carriers of thermoelectric component |
| 05/20/2009 | DE102007054043A1 Micro-analysis module has standard input and output interfaces for assembly of micro-analysis assembly in e.g. medical fluid tests |
| 05/20/2009 | CN101437749A Superhydrophobic surfaces and fabrication process |
| 05/20/2009 | CN101436571A Electrical device and method |
| 05/20/2009 | CN101436555A Method of manufacturing semiconductor package |
| 05/20/2009 | CN101434376A Method for manufacturing suspension micro electromechanical structure |
| 05/20/2009 | CN101434375A Method for manufacturing semiconductor micro electromechanical structure |
| 05/20/2009 | CN101434373A Micro-device and method for manufacturing the same |
| 05/20/2009 | CN100490044C Switch |
| 05/19/2009 | US7534658 Process for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 05/14/2009 | WO2009061168A1 Fabrication method of a micromechanical device |
| 05/14/2009 | WO2009059868A2 Method for producing micromechanical structures having a protruding lateral wall progression or an adjustable angle of inclination |
| 05/14/2009 | WO2009059850A2 Micromechanical component, and short process for producing mems components |
| 05/14/2009 | WO2009032525A3 Interferometric optical modulator with broadband reflection characteristics |
| 05/14/2009 | US20090121383 Fibrillar Microstructure and Processes for the Production Thereof |
| 05/14/2009 | US20090120905 Sacrificial Compositions And Methods Of Fabricating A Structure Using Sacrificial Compositions |