| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 08/12/2009 | EP2088120A2 Systems and methods for MEMS device fabrication |
| 08/12/2009 | EP2086682A1 Replica moulding of microstructures for supporting microscopic biological material |
| 08/12/2009 | EP1252028B1 Method of fabricating a micro machined structure |
| 08/12/2009 | CN201289468Y Two-sided nanometer belt electrode array integrated sensor capable of being cut up |
| 08/11/2009 | US7573111 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 08/11/2009 | US7572660 Electrical through-plating of semiconductor chips |
| 08/06/2009 | WO2009095520A1 Method for defining and producing reactive chemical nanomemtric surface patterns by means of gaseous-phase soft lithography, resulting patterns and devices and uses thereof |
| 08/06/2009 | WO2009094773A1 Method of depositing a polymer micropattern on a substrate |
| 08/06/2009 | US20090194572 Method of manufacturing electro-optical device |
| 08/06/2009 | DE102008007345A1 Mikromechanisches Bauelement und Verfahren zur Herstellung desselben Micromechanical component and method of manufacturing the same |
| 08/05/2009 | EP2084747A1 Monolithic ic and mems microfabrication process |
| 08/05/2009 | EP2084734A1 Plasma etching method for producing positive etching profiles in silicon substrates |
| 08/05/2009 | EP2084104A1 Electrical microvalve and method of manufacturing thereof |
| 08/05/2009 | EP2084103A1 Micromechanical component with antistick layer |
| 08/05/2009 | EP2084102A1 Method for producing a micromechanical component with thin-film capping |
| 08/05/2009 | EP2084101A2 Vertically integrated mems |
| 08/05/2009 | EP1417518A4 Stress tuned blazed grating light valve |
| 08/05/2009 | CN101500936A Phase-separated composite for microfluidic applications |
| 08/05/2009 | CN101500935A Method of etching a sacrificial silicon oxide layer |
| 08/05/2009 | CN101500934A Production of microfluidic devices using laser-induced shockwaves |
| 08/05/2009 | CN100524618C Resistless lithography method for producing fine structures |
| 08/05/2009 | CN100524614C Method of manufacturing an electronic device and electronic device |
| 08/04/2009 | US7569412 Method for manufacturing a diaphragm sensor |
| 08/04/2009 | US7569411 Metal MEMS devices and methods of making same |
| 08/04/2009 | US7569252 Lithography; capillary transportation; pen for writing patterns |
| 08/04/2009 | US7569152 Method for separating a useful layer and component obtained by said method |
| 07/30/2009 | WO2009094626A1 Device for fluid spreading and transport |
| 07/30/2009 | WO2009093176A2 Clean and hermetic sealing of a package cavity |
| 07/30/2009 | US20090188794 Device for Fluid Spreading and Transport |
| 07/30/2009 | US20090188576 Check valve diaphragm micropump |
| 07/30/2009 | DE102008062499A1 Mems-Bauelemente und Verfahren zur Herstellung derselben MEMS devices and methods for manufacturing the same |
| 07/30/2009 | DE102008005686A1 MEMS-Bauelement, Verfahren zur Herstellung eines MEMS-Bauelements und Verfahren zur Handhabung eines MEMS-Bauelements MEMS device, method for manufacturing a MEMS device and method for handling a MEMS device |
| 07/30/2009 | DE102008005521A1 Capacitive transducer for use as actuator or sensor in e.g. micromechanical component, has plate electrodes arranged in plane that is parallel to another plane such that electrodes overlap each other during tilting of one of plates |
| 07/29/2009 | EP2082989A2 Method for manufacturing a sensor device |
| 07/29/2009 | CN100521095C Method of forming inkjet print head |
| 07/28/2009 | US7566957 Support device with discrete getter material microelectronic devices |
| 07/28/2009 | US7566939 Fabrication of silicon micro-mechanical structures |
| 07/23/2009 | WO2009049958A3 Composite comprising at least two semiconductor substrates and production method |
| 07/23/2009 | DE102008004639A1 Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element and manufacturing method for a micromechanical component |
| 07/23/2009 | DE102007063040A1 Production of micro-reactors comprises coating a plate having channels and joint regions on the surface with a joining layer, applying a layer made from a suspension containing catalyst support particles and further processing |
| 07/22/2009 | EP2080734A1 Method for manufacturing air cavities in microstructures |
| 07/22/2009 | CN100517068C Nanoimprint photoresist |
| 07/22/2009 | CN100515921C Method for fabricating microstructure and microstructure |
| 07/16/2009 | WO2009087284A1 Structure comprising a getter layer and an adjusting sublayer, and fabrication process |
| 07/16/2009 | WO2009086986A2 Method for producing porous microstructures, porous microstructures produced by this method and use thereof |
| 07/16/2009 | WO2009086978A2 Production method for a micromechanical electrostatic adjuster device and micromechanical electrostatic adjuster device |
| 07/16/2009 | WO2009086915A1 A method for making a 3d nanostructure having a nanosubstructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanowires obtainable by this method |
| 07/16/2009 | WO2009086624A1 Microfluidic microarray system and method for the multiplexed analysis of biomolecules |
| 07/16/2009 | WO2009069023A3 Apparatus and method for detection of an analyte in a sample |
| 07/16/2009 | US20090181487 Method of making microminiature moving device |
| 07/16/2009 | DE102008003792A1 Verfahren zum Herstellen einer Mikropumpe sowie Mikropumpe A method of manufacturing a micro-pump, as well as micropump |
| 07/16/2009 | CA2701363A1 Structure comprising a getter layer and an adjusting sublayer, and fabrication process |
| 07/15/2009 | EP2078694A2 Protection system and method for separating MEMS structures |
| 07/15/2009 | CN101481081A Preparation of composite structure super-hydrophobic film |
| 07/15/2009 | CN101481080A Method for manufacturing miniaturized fluxgate sensor |
| 07/15/2009 | CN101481079A Preparation of micro-nano lens array |
| 07/15/2009 | CN100513145C Method for manufacturing of polymer micro needle array with LIGA process |
| 07/14/2009 | US7560658 Method for forming nanoscale features |
| 07/14/2009 | US7560037 Surfactant-enhanced protection of micromechanical components from galvanic degradation |
| 07/09/2009 | WO2009083565A2 Micromechanical or nanomechanical device with anti-bonding interface layer |
| 07/09/2009 | WO2009082812A1 Direct contact heat control of micro structures |
| 07/09/2009 | WO2009038686A3 Hermetic wafer level cavity package |
| 07/09/2009 | US20090176042 Medical Devices and EFAB Methods and Apparatus for Producing Them |
| 07/09/2009 | US20090176004 Medical Devices and EFAB Methods and Apparatus for Producing Them |
| 07/09/2009 | DE102008003453A1 Verfahren zur Herstellung poröser Mikrostrukturen, nach diesem Verfahren hergestellte poröse Mikrostrukturen sowie deren Verwendung A process for the production of porous microstructures, porous microstructures produced by this process and the use thereof |
| 07/09/2009 | DE102008003452A1 Schutzsystem und Verfahren zur Vereinzelung von MEMS-Strukturen Protection system and method for separation of MEMS structures |
| 07/09/2009 | DE102008003344A1 Mikromechanisches Bauelement und Herstellungsverfahren für ein mikromechanisches Bauelement Micromechanical component and manufacturing method for a micromechanical component |
| 07/09/2009 | DE102008003242A1 Micromechanical component i.e. inertial sensor, has micromechanical functional layer extending over specific percentage of substrate thickness perpendicular to main extension plane of substrate |
| 07/09/2009 | DE102004026654B4 Mikromechanisches HF-Schaltelement sowie Verfahren zur Herstellung Micromechanical RF switching element and methods for preparing |
| 07/08/2009 | EP2077250A2 Single SOI wafer accelerometer fabrication process |
| 07/08/2009 | EP2077249A1 A method for making a 3D nanostructure having a nanosubstructure, and an insulating pyramid having a metallic tip, a pyramid having a nano-apertures and horizontal and/or vertical nanowires obtainable by this method |
| 07/08/2009 | CN101479185A Integrated single-crystal MEMS device |
| 07/08/2009 | CN101475136A Method for manufacturing electrostatic repulsion force driven MEMS distorting lens |
| 07/08/2009 | CN101475135A Method for preparing high depth-to-width ratio carbon micro electro-mechanical device |
| 07/08/2009 | CN100509611C Microelectron mechanical system obverse structure releasing protecting method |
| 07/08/2009 | CN100509610C Method for preparing microelectromechanicl system vibration jet actuator |
| 07/08/2009 | CN100509609C A method and apparatus for fabricating encapsulated micro-channels in a substrate |
| 07/07/2009 | US7557367 Stretchable semiconductor elements and stretchable electrical circuits |
| 07/02/2009 | WO2009080615A2 Process for the production of microelectromechanical systems |
| 07/02/2009 | WO2009079780A1 Low temperature ceramic microelectromechanical structures |
| 07/02/2009 | WO2009023484A3 Shell flow sensor |
| 07/02/2009 | US20090166903 Molded waveguides |
| 07/02/2009 | US20090165877 Actuator elements for microfluidics, responsive to multiple stimuli |
| 07/02/2009 | DE102008044307A1 Verfahren zum Ätzen eines Bauelements unter Verwendung einer Hartmaske und einer Ätzstoppschicht A method for etching a device using a hard mask and an etch stop layer |
| 07/02/2009 | DE102007062707A1 Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component and process for producing a micromechanical component |
| 07/02/2009 | DE102007062089A1 Verfahren zum Erzeugen einer Mikrostruktur A method of producing a microstructure |
| 07/01/2009 | EP2075223A2 Vorrichtung mit vor-freigesetzter Struktur |
| 07/01/2009 | EP2075222A1 Herstellungsverfahren von mechanischen Komponenten von MEMS- und NEMS-Strukturen aus monokristallinem Silizium |
| 07/01/2009 | CN101468786A Manufacturing method of silicon carbide microchannel for microelectron mechanical system |
| 07/01/2009 | CN100507573C Micro-sensor |
| 07/01/2009 | CN100506686C Method for manufacturing piezoresistance type micro-cantilever beam sensor on SOI silicon sheet |
| 06/30/2009 | US7553686 Al2O3 atomic layer deposition to enhance the deposition of hydrophobic or hydrophilic coatings on micro-electromechanical devices |
| 06/30/2009 | US7553393 Method for covering a microfluidic assembly |
| 06/30/2009 | US7553369 Method of altering the properties of a thin film and substrate implementing said method |
| 06/25/2009 | WO2009078190A1 Pattern forming method and pattern formed body |
| 06/25/2009 | WO2009077892A1 Out-of-plane microneedle manufacturing process |
| 06/25/2009 | WO2009077234A2 Method for producing a capping wafer for a sensor |
| 06/25/2009 | WO2009037360A3 Monocrystalline silicon micromirrors for maskless lithography |
| 06/25/2009 | US20090161189 Method of manufacturing a structure based on anisotropic etching, and silicon substrate with etching mask |
| 06/25/2009 | DE102007061980A1 Verfahren zum Erzeugen einer Mikrostruktur A method of producing a microstructure |