| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 09/23/2009 | CN101538006A Method for preparing optical modulation thermal imaging focal plane array |
| 09/23/2009 | CN101538005A Manufacture method for optical modulation thermal imaging focal plane array |
| 09/23/2009 | CN101538004A Micro-hole substrates and methods of manufacturing the same |
| 09/23/2009 | CN101538003A Micromechanical transformer and manufacturing method thereof |
| 09/22/2009 | US7592263 Method of manufacturing semiconductor device |
| 09/17/2009 | WO2009113063A2 Method for fabricating nano-scale patterned surfaces |
| 09/17/2009 | WO2009111874A1 Low-temperature wafer level processing for mems devices |
| 09/17/2009 | WO2009059868A3 Method for producing micromechanical structures having a protruding lateral wall progression or an adjustable angle of inclination |
| 09/17/2009 | US20090233815 Capillary-Channel Probes For Liquid Pickup, Transportation And Dispense Using Stressy Metal |
| 09/17/2009 | DE19861287B4 Verfahren zum Bilden einer Tintenstrahldüse A method of forming an ink jet nozzle |
| 09/16/2009 | EP2100849A1 Method of manufacturing molecular plasmonic nanostructures, molecular plasmonic nanostructures obtainable by said method and their use |
| 09/16/2009 | EP2100179A1 Micromirror actuator with encapsulation possibility and method for production thereof |
| 09/16/2009 | EP2099567A1 Device for the intake or manipulation of a liquid |
| 09/16/2009 | EP1663850B1 Process for fabricating a micro-electro-mechanical system with movable components |
| 09/16/2009 | CN101535171A A sealing structure and a method of manufacturing the same |
| 09/16/2009 | CN101534103A Radio frequency filter capable of single chip integration and manufacture method thereof |
| 09/16/2009 | CN101531335A Method for preparing metal surface superhydrophobic microstructure by femto-second laser |
| 09/16/2009 | CN101531334A Magnetic drive micro-inertial sensor for increasing detection capacitance and preparation method |
| 09/16/2009 | CN101531333A Sensor self-powered circuit based on MEMS, and manufacturing process thereof |
| 09/11/2009 | WO2009111737A1 Reconfigurable lithographic structures |
| 09/11/2009 | WO2009111487A1 Process of making a microtube and microfluidic devices formed therewith |
| 09/11/2009 | WO2009110801A2 Manufacturing micro components including a cover structure |
| 09/11/2009 | WO2009109727A1 Method for functionalising the wall of a pore |
| 09/11/2009 | WO2009083565A3 Micromechanical or nanomechanical device with anti-bonding interface layer |
| 09/11/2009 | WO2007107736A3 Method for fabricating a mems microphone |
| 09/11/2009 | CA2714185A1 Method for functionalising the wall of a pore |
| 09/10/2009 | US20090226680 Process for modifying the properties of a thin layer and substrate applying said process |
| 09/10/2009 | US20090223924 Method of fabricating reflective mirror by wet-etch using improved mask pattern and reflective mirror fabricated using the same |
| 09/10/2009 | DE102008061151A1 Halbleiterbauelement und Verfahren zu seiner Herstellung Semiconductor device and process for its preparation |
| 09/10/2009 | DE102008012384A1 Deckel für Mikro-Systeme und Verfahren zur Herstellung eines Deckels Lid for micro-systems and method for producing a lid |
| 09/10/2009 | DE102008011531A1 Method for processing object e.g. quartz substrate with miniaturized molybdenum structure, involves integrating detected interaction products of electron beam to form total signal to detect whether to continue or terminate process |
| 09/10/2009 | DE102008011530A1 Method for processing object e.g. quartz substrate with miniaturized molybdenum structure, involves integrating detected interaction products of electron beam to form total signal to detect whether to continue or terminate process |
| 09/09/2009 | EP2098478A1 Manufacturing micro components including a cover structure. |
| 09/09/2009 | EP2097349A2 Switches for shorting during mems etch release |
| 09/09/2009 | CN101528590A Micromechanical component with antistick layer |
| 09/09/2009 | CN101528589A Method for producing a micromechanical component with thin-film capping |
| 09/09/2009 | CN101525115A Micro inertial sensor embedded with movable electrode and manufacturing method thereof |
| 09/08/2009 | US7586668 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 09/08/2009 | US7585743 Manufacturing method for a semiconductor substrate comprising at least a buried cavity and devices formed with this method |
| 09/08/2009 | CA2351132C Method of fabricating a suspended microstructure with a sloped support, and a suspended microstructure fabricated by the method |
| 09/03/2009 | WO2009107835A1 Mems device and manufacturing method of the same |
| 09/03/2009 | WO2009106022A2 Method of making electrostatically charged patterns |
| 09/03/2009 | WO2009050209A3 Manufacturing a mems element having cantilever and cavity on a substrate |
| 09/03/2009 | US20090219605 Optical interference display panel and manufacturing method thereof |
| 09/03/2009 | DE102008011175A1 Mikromechanischer Aktuator The micromechanical actuator |
| 09/02/2009 | EP2095407A1 Method for forming microwires and/or nanowires |
| 09/02/2009 | EP2094603A1 Method for forming non-aligned microcavities of different depths |
| 09/02/2009 | EP2094602A2 A sealing structure and a method of manufacturing the same |
| 09/02/2009 | CN101520350A Process for manufacturing improved high-sensitivity low pressure sensor chip |
| 09/01/2009 | US7582497 Method of manufacturing micro-optic device |
| 09/01/2009 | US7582490 Controlled fabrication of gaps in electrically conducting structures |
| 09/01/2009 | US7582219 Method of fabricating reflective mirror by wet-etch using improved mask pattern and reflective mirror fabricated using the same |
| 08/27/2009 | WO2009105382A2 Method of sealing a cavity |
| 08/27/2009 | WO2009105036A1 Method of making a multilayer substrate with embedded metallization |
| 08/27/2009 | WO2009104486A1 Microelectromechanical device and method for fabricating the same |
| 08/27/2009 | WO2009080615A3 Process for the production of microelectromechanical systems |
| 08/27/2009 | US20090215213 Microelectromechanical device having a common ground plane and method for making aspects thereof |
| 08/27/2009 | US20090212664 Micro movable device and method of making the same using wet etching |
| 08/27/2009 | US20090212658 Micro--electromechanical actuator with spacer separated layers |
| 08/27/2009 | DE102008000292A1 Röhrenförmiger Multifunktionssensor in Flüssigkeiten, Verfahren zu seiner Herstellung und Verwendung A tubular multi-function sensor in liquids, process for its preparation and use |
| 08/26/2009 | EP2092808A1 Product with internal cavities, and method, system and mould for manufacturing such a product |
| 08/26/2009 | EP2092567A1 Mems package and packaging method thereof |
| 08/26/2009 | EP2092000A2 Method for improving the bonding properties of microstructured substrates, and devices prepared with this method |
| 08/26/2009 | EP2091648A2 Fluid paths in etchable materials |
| 08/26/2009 | CN101516512A Nanonozzle device arrays: their preparation and use for macromolecular analysis |
| 08/26/2009 | CN101513989A Functional device and manufacturing method thereof |
| 08/26/2009 | CN100533242C Methods of fabricating interferometric modulators by selectively removing a material |
| 08/26/2009 | CN100532248C Process for fabricating a micro-electro-mechanical system with movable components |
| 08/25/2009 | US7579663 Hermetic packaging and method of manufacture and use therefore |
| 08/25/2009 | US7579622 Fabrication of MEMS devices with spin-on glass |
| 08/25/2009 | US7578954 Method for manufacturing microstructures having multiple microelements with through-holes |
| 08/20/2009 | WO2009102551A2 One-dimensional arrays of block copolymer cylinders and applications thereof |
| 08/20/2009 | WO2009100988A2 Tubular multifunction sensor in fluids method for production and use thereof |
| 08/20/2009 | WO2009055862A8 Method of component assembly on a substrate |
| 08/20/2009 | US20090206423 Method for manufacturing micromechanical components |
| 08/20/2009 | DE10228767B4 Mikrovorrichtung und Verfahren für eine Komponententrennung in einem Fluid Micro device and method for separation of components in a fluid |
| 08/20/2009 | DE102008063422A1 Sensor zur Erfassung einer physikalischen Grösse Sensor for detecting a physical quantity |
| 08/19/2009 | EP2090866A1 Dynamic quantity sensor and method of manufacturing it |
| 08/19/2009 | EP2089312A1 A micromechanical structure and a method of fabricating a micromechanical structure |
| 08/19/2009 | EP2089311A2 Method for manufacturing a micromachined device |
| 08/19/2009 | EP1999302B1 Method for electrochemically structuring a conductuve or semiconductor material, and device for implementing it |
| 08/19/2009 | EP1497102B1 Device and method for transferring a pattern to a substrate |
| 08/19/2009 | EP1269526B1 Method for depositing polycrystalline sige suitable for micromachining |
| 08/19/2009 | CN101511722A Methods for reducing surface charges during the manufacture of microelectromechanical systems devices |
| 08/19/2009 | CN101510509A Method for generating right-angle structure compensation figure of silicon (10) substrate aeolotropism corrosion |
| 08/19/2009 | CN101510508A Method for generating right-angle structure compensation figure of silicon (10) substrate aeolotropism corrosion |
| 08/19/2009 | CN101510482A Silicon micro mechanical pressure switch, preparation method and use thereof |
| 08/19/2009 | CN101510467A Super capacitor plate material and preparation method thereof |
| 08/19/2009 | CN101509933A Method for manufacturing micro-acceleration and micro-angular rate integration sensor |
| 08/19/2009 | CN101509888A Method for making silicone base integrable miniature glucose sensor |
| 08/19/2009 | CN100530462C Method for producing solenoid micro-inductance device based on amorphous FeCuNbCrSiB magnetic film |
| 08/19/2009 | CN100528736C Method for manufacturing wafer-level MEMS micro channel |
| 08/19/2009 | CN100528571C Substrate for fluid jet device and method for forming substrate |
| 08/13/2009 | WO2009099791A1 Methods of reducing cd loss in a microelectromechanical device |
| 08/13/2009 | WO2009098398A1 Method of growing, on a dielectric material, nanowires made of semiconductor materials connecting two electrodes |
| 08/13/2009 | WO2009097660A1 Patch production |
| 08/13/2009 | US20090200899 Method of manufacturing micromachine, and micromachine |
| 08/13/2009 | DE102008008206A1 Micromechanical actuator has swivel plate and mounting plate, in which swivel plate is held in tilted manner around axis, where surface electrode is arranged on electrode carrier surface |
| 08/13/2009 | DE102008007665A1 Micro-mechanical component has two comb electrodes, and contact element for applying voltage between comb electrodes, where former comb electrode has connection part and two electrode fingers |
| 08/13/2009 | CA2749347A1 Patch production |