| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 11/05/2009 | WO2009132891A2 Micromechanical component and method for producing the same |
| 11/05/2009 | WO2009073290A3 Molded sensor package and assembly method |
| 11/05/2009 | WO2009071595A3 Device with encapsulated integrated circuit and a n/mems and method for production |
| 11/05/2009 | DE102008021108A1 Sensor arrangement producing method, involves contacting sensor element and lead frame with contact connecting element, and covering sensor element by sealing compound, where region of sensor element is free from sealing compound |
| 11/05/2009 | DE102008001248A1 Herstellungsverfahren für ein mikromechanisches Bauteil und mikromechanisches Bauteil Manufacturing method for a micromechanical component and micromechanical component |
| 11/04/2009 | EP1345844B1 Soi/glass process for forming thin silicon micromachined structures |
| 10/29/2009 | WO2009130681A2 Semiconductor device and method of manufacturing a semiconductor device |
| 10/29/2009 | WO2009130274A1 Process for manufacturing reconfigurable microchannels |
| 10/29/2009 | DE102009018266A1 Sensor zur Erfassung einer physikalischen Grösse und Verfahren zu dessen Fertigung Sensor for detecting a physical quantity and process for its manufacturing |
| 10/29/2009 | DE102009017328A1 Integrierte MEMS-Vorrichtung und Steuerschaltung Integrated MEMS device and control circuit |
| 10/29/2009 | DE102008001422A1 Mikromechanisches Bauteil und Verfahren zu dessen Herstellung Micromechanical element and process for its preparation |
| 10/29/2009 | DE102008001185A1 Verfahren zur Herstellung einer mikromechanischen Membranstruktur mit feststehendem Gegenelement Process for producing a micromechanical membrane structure having a fixed counter-element |
| 10/29/2009 | DE102008001063A1 Verfahren zur Herstellung von siliziumhaltigen keramischen Strukturen Process for the preparation of silicon-containing ceramic structures |
| 10/28/2009 | CN101567394A Vertical surrounding grid junction type field effect transistor, preparation method and applications thereof |
| 10/28/2009 | CN101567368A Wafer circuit protection structure and manufacturing method thereof |
| 10/28/2009 | CN101567301A Method for forming viscous grain by wafer separation |
| 10/28/2009 | CN101566643A Structure of film thermoelectric converter based on bi-material microcantilevel and fabricating method thereof |
| 10/28/2009 | CN101566510A Pressure sensor, manufacturing method thereof, and electronic component provided therewith |
| 10/28/2009 | CN101566506A Structure of film thermoelectric converter based on micro bridge resonator and fabricating method thereof |
| 10/28/2009 | CN101566502A Thermo-optical infrared detector and preparation method thereof |
| 10/28/2009 | CN101565163A Preparation method of Zn2.33Sb0.67O4 in-situ growth material coated with ZnO fiber heterostructure |
| 10/28/2009 | CN100555669C Method for producing variable capacitor of micro electromechanical system |
| 10/28/2009 | CN100555499C Downward type MEMS switch and method for fabricating the same |
| 10/28/2009 | CN100554137C Multi-scale cantilever structures having fine holes of nano size and the preparation method thereof |
| 10/27/2009 | US7607826 Thermoelastic device with preselected resistivity, inertness and deposition characteristics |
| 10/22/2009 | WO2009129537A2 Magnetic microstructures for magnetic resonance imaging |
| 10/22/2009 | WO2009129066A2 Method and system for forming an electronic assembly having inertial sensors mounted thereto |
| 10/22/2009 | WO2009128048A1 Tunable capacitor and switch using mems with phase change material |
| 10/22/2009 | WO2009127455A2 Method for producing a micromechanical membrane structure having fixed counter element |
| 10/22/2009 | WO2009127273A2 Method for the production of a micromechanical component, and micromechanical component |
| 10/22/2009 | WO2009077234A3 Method for producing a capping wafer for a sensor |
| 10/22/2009 | WO2009039378A3 Microfluidic structures with circular cross-section |
| 10/22/2009 | DE102008001238A1 Mikromechanisches Bauteil, Verfahren zum Betreiben eines mikromechanischen Bauteils und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element, method for operating a micromechanical component and manufacturing method for a micromechanical component |
| 10/22/2009 | DE102008001232A1 Elektrodenkamm, mikromechanisches Bauteil und Herstellungsverfahren für einen Elektrodenkamm und für ein mikromechanisches Bauteil Electrode comb, micromechanical component and manufacturing method for an electrode comb, and for a micromechanical component |
| 10/22/2009 | DE102008001005A1 Method for the production of layered composite with epitactically grown layer made of magnetic shape-memory material, comprises subjecting a sacrificial layer on one- or multilayered substrate |
| 10/22/2009 | CA2721797A1 Magnetic microstructures for magnetic resonance imaging |
| 10/21/2009 | EP2110360A2 Method for preparing a polymer film having nanometric patterns on its surface and a microstructure in its thickness on all or part thereof according to a specific system |
| 10/21/2009 | EP2109583A1 Surface roughening process |
| 10/21/2009 | EP2109582A1 Process for forming and controlling rough interfaces |
| 10/21/2009 | CN101561510A Chip of three-dimensional MEMS geophone and preparation method thereof |
| 10/21/2009 | CN101561446A Glass micro-nano-fluidic control chip, preparation and assembly method and auxiliary assembly device thereof |
| 10/21/2009 | CN101561319A Capacitive MEMS non-refrigerated infrared detector and preparation method thereof |
| 10/21/2009 | CN101559916A Method for preparing masking microstructure |
| 10/21/2009 | CN101559915A Process for preparing sacrifice layer of MEMS device |
| 10/21/2009 | CN101559914A Digital micro-droplet drive with deep submicron pore structure and manufacturing method thereof |
| 10/21/2009 | CN101559913A Structure for increasing strength and service life of deformable beam and application thereof |
| 10/21/2009 | CN100551815C Method for manufacturing three-dimensional nerve microelectrode |
| 10/21/2009 | CN100551462C Preparation method of biological microelectrode array based on flexible substrate |
| 10/15/2009 | WO2009125038A1 Multiple prototyping method for mechanical capacitive microsensors |
| 10/15/2009 | WO2009124857A2 Method for the production of ceramic structures containing silicon |
| 10/15/2009 | WO2009124605A2 Micromechanical component having a slanted structure and corresponding production method |
| 10/15/2009 | US20090256219 Method for manufacturing a semiconductor component, as well as a semiconductor component, in a particular a diaphragm sensor |
| 10/15/2009 | DE102008001075A1 Micromechanical component e.g. micromirror, manufacturing method for e.g. microfluidics, involves bending base components by fastening outer surfaces of respective subunits to corresponding surfaces formed on upper side of base substrate |
| 10/15/2009 | DE102008001058A1 Mikromechanische Elektrodenstruktur, entsprechendes Herstellungsverfahren und Mikroaktuatorvorrichtung Micromechanical electrode structure, method of manufacture and Mikroaktuatorvorrichtung |
| 10/15/2009 | DE102008001053A1 Elektrodenkamm, mikromechanisches Bauteil und Herstellungsverfahren für einen Elektrodenkamm oder ein mikromechanisches Bauteil Electrode comb, micromechanical component and manufacturing method for an electrode comb or a micromechanical component |
| 10/15/2009 | DE102008001042A1 Manufacturing method for micromechanical structure, involves producing functional layer made of one material, where sealing layer is produced on functional layer, and is made of another material |
| 10/15/2009 | DE102008001038A1 Mikromechanisches Bauelement mit Schrägstruktur und entsprechendes Herstellungsverfahren Micromechanical component with helical structure and corresponding manufacturing method |
| 10/14/2009 | EP2108444A1 Process of preparation of a membrane comprising micropassages filled with porous material obtained by chemical mechanical polishing |
| 10/14/2009 | EP2010449B1 Micromechanical component with wafer through-plating and corresponding production method |
| 10/14/2009 | CN101557875A Device for the intake or manipulation of a liquid |
| 10/14/2009 | CN101554987A Wafer-grade vacuum encapsulation process for micro-electro-mechanical system |
| 10/14/2009 | CN101554711A Micromachining methods and systems |
| 10/14/2009 | CN100548870C Method of forming a micromechanical structure and mould for making micromechanical structure |
| 10/14/2009 | CN100548869C Method for manufacturing suspending structure |
| 10/14/2009 | CN100548868C Method for manufacturing suspending structure and cavity |
| 10/14/2009 | CN100548867C Method for making suspension structure |
| 10/13/2009 | US7601270 Microfabricated elastomeric valve and pump systems |
| 10/08/2009 | WO2009123111A1 Mem switch and method for manufacturing the same |
| 10/08/2009 | DE102008037947A1 Element-Wafer und Verfahren zu dessen Herstellung Element wafer and process for its preparation |
| 10/07/2009 | EP2107040A1 A method of fabricating a membrane having a tapered pore |
| 10/07/2009 | CN101553425A Micro electro mechanical system |
| 10/07/2009 | CN101551403A Integrated silicon chip for testing acceleration, pressure and temperature, and manufacturing method thereof |
| 10/07/2009 | CN101551284A Pressure sensor based on Si-Si direct bonding and manufacturing method thereof |
| 10/07/2009 | CN101549851A Generation method of large-area submicron nonrandom structure graph |
| 10/07/2009 | CN101549849A Method for fast releasing sacrificial layer in film shifting process |
| 10/07/2009 | CN101549848A Method for fabricating large angle turning micro mirror driver |
| 10/07/2009 | CN100547723C Micro movable device and method of making the same using wet etching |
| 10/06/2009 | US7596968 forming a glass comprises alumina, silica, boria, and alkali and/or alkaline earth metal oxide; resists devitrification upon sintering without inhibitor oxide; microfluidics |
| 10/06/2009 | CA2457677C Micro needles and method of manufacture thereof |
| 10/01/2009 | WO2009120355A1 Localized deposition system and method of localized deposition |
| 10/01/2009 | WO2009120343A1 Selective oxidative removal of a self-assembled monolayer for controlled nanofabrication |
| 10/01/2009 | DE102006018675B4 Dünnschichtstruktur zur Verwendung in einer Halbleitervorrichtung mit stationären und beweglichen Elektroden und Herstellungsverfahren derselben Thin film structure for use in a semiconductor device having stationary and movable electrodes, and producing method thereof |
| 10/01/2009 | DE102005063290B4 Verfahren zum Betätigen einer chemischen Reaktionspatrone A method of operating a chemical reaction cartridge |
| 09/30/2009 | CN101544349A Method for preparing protective film playing a role in protecting glass micro-fluidic chips in etching process |
| 09/30/2009 | CN101544348A Composite micro-nano structure array on high light-transmission substrate and method and application thereof |
| 09/30/2009 | CN101543406A Method for assembling microwire electrode array by using silicon array hole |
| 09/29/2009 | US7595539 Method for release of surface micromachined structures in an epitaxial reactor |
| 09/24/2009 | WO2009117456A2 Functional micro-and/or nano-structure bearing constructions and/or methods for fabricating same |
| 09/24/2009 | WO2009117243A1 Thermal anneal of a block copolymer films with top interface constrained to wet both blocks with equal preference |
| 09/24/2009 | WO2009117238A2 Methods of improving long range order in self-assembly of block copolymer films with ionic liquids |
| 09/24/2009 | WO2009116934A1 Substrate integrated waveguide |
| 09/24/2009 | DE112007002956T5 Biochipleser Biochip reader |
| 09/24/2009 | DE10326555B4 Verfahren zur Herstellung einer integrierten Schaltung sowie durch das Verfahren hergestellte integrierte Schaltung A method of manufacturing an integrated circuit and integrated circuit prepared by the process |
| 09/24/2009 | DE102008034165A1 Sensorbaustein Sensor module |
| 09/24/2009 | DE102008013624A1 Mikrosensor mit einem CNT-Sensorelement und Verfahren zu dessen Herstellung Microsensor with a CNT-sensor element and method of production |
| 09/24/2009 | DE102008000786A1 Sensorvorrichtung und Verfahren zur Herstellung einer Sensorvorrichtung Sensor device and method of manufacturing a sensor device |
| 09/24/2009 | DE102005019195B4 Chemische Reaktionspatrone Chemical reaction cartridge |
| 09/23/2009 | EP2103566A2 Micro-Hole substrates and methods of manufacturing the same |
| 09/23/2009 | CN101539586A Element wafer and method for manufacturing the same |
| 09/23/2009 | CN101538704A Method of electroless nickel plating on silicon substrate microchannel |