| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 12/15/2009 | US7631769 Fluid control device and method of manufacturing the same |
| 12/15/2009 | CA2450367C Microneedles for minimally invasive drug delivery |
| 12/15/2009 | CA2410306C Micromachined fluidic device and method for making same |
| 12/10/2009 | WO2009149213A2 Low temperature amorphous silicon sacrificial layer for controlled adhesion in mems devices |
| 12/10/2009 | WO2009149197A2 High aspect ratio microelectrode arrays enabled to have customizable lengths and methods of making the same |
| 12/10/2009 | WO2009147556A2 Microscopic structure packaging method and device with packaged microscopic structure |
| 12/10/2009 | WO2009064490A3 Microchannel structures having bonded layers including height control features |
| 12/10/2009 | WO2009045473A3 Carbon nanotube synthesis for nanopore devices |
| 12/10/2009 | DE102009021439A1 Verfahren zum Herstellen eines Spektroskopiemoduls und Spektroskopiemodul A method for producing a spectroscopy module and spectroscopy module |
| 12/10/2009 | DE102009021436A1 Spektroskopiemodul Spectroscopy module |
| 12/10/2009 | DE102008025202A1 Hermetisch geschlossenes Gehäuse für elektronische Bauelemente und Herstellungsverfahren Hermetically sealed enclosure for electronic components and manufacturing processes |
| 12/10/2009 | DE102008011972A1 Vorrichtung zur selbstjustierenden Montage und Halterung von Mikrokanalplatten in Mikrosystemen Device for self-aligning and mounting bracket of microchannel plates in microsystems |
| 12/09/2009 | EP2129619A2 Eliminate release etch attack by interface modification in sacrificial layers |
| 12/09/2009 | EP2129526A1 Metal film protection during printhead fabrication with minimum number of mems processing steps |
| 12/09/2009 | EP1556530B1 A method of forming nanostructured catalysts for nanowire growth |
| 12/09/2009 | CN101597021A Method for structuring a device layer of a substrate |
| 12/09/2009 | CN101597019A Film micro-bridge structure taking polyimide as mechanical carrier and preparation method thereof |
| 12/08/2009 | US7629190 Method for making a micromechanical device by using a sacrificial substrate |
| 12/03/2009 | WO2009145963A1 Capacitive sensor with stress relief that compensates for package stress |
| 12/03/2009 | WO2009144619A2 Mems devices |
| 12/03/2009 | WO2009059850A3 Micromechanical component, and short process for producing mems components |
| 12/03/2009 | US20090294803 Methods and devices for fabricating and assembling printable semiconductor elements |
| 12/03/2009 | DE102009021438A1 Spektroskopiemodul Spectroscopy module |
| 12/03/2009 | DE102008026182A1 Mikrostrukturbauelement mit einem kompressiv verspannten Material mit kleinem ε Microstructure device with a compressively stressed material with small ε |
| 12/03/2009 | DE102008025354A1 System to produce microstructured functional surfaces on substrates with laser, by individually/combinedly arranging substrate surfaces and device to couple, guide, focus or form laser beam as ultrashort pulse laser under normal condition |
| 12/03/2009 | DE102005063366B4 Chemische Reaktionspatrone Chemical reaction cartridge |
| 12/03/2009 | DE10122602B4 Nanoröhren-Emitterstruktur für eine Feldemissionsanzeige Nanotube emitter structure for a field emission display |
| 12/02/2009 | EP2125607A1 Method for the production of a component and sensor element |
| 12/02/2009 | EP1497695B1 Nanoimprint resist |
| 12/02/2009 | CN101592627A Method for manufacturing and integrating multichannel high-sensitive biosensor |
| 12/02/2009 | CN101592578A Silicon cantilever sensor, preparation method and application thereof |
| 12/02/2009 | CN101591015A Preparation method of banded carbon nano tube film |
| 12/02/2009 | CN101590999A Micro cantilever beam driving member based on antiferroelectric thick film field induced phase transition strain effect |
| 12/02/2009 | CN101590998A Method for preparing capillary electrophoresis chip |
| 12/02/2009 | CN101590997A Method for manufacturing integrated piezoresistance SiO2 cantilever by wet etching |
| 12/02/2009 | CN101590995A Same plane sensor and manufacturing method thereof |
| 12/02/2009 | CN100565796C Method and system for manufacturing semiconductor device |
| 12/02/2009 | CN100564241C Method for preparing GaAs micro/nono optical element |
| 12/02/2009 | CA2633534A1 Mems based rf components with vertical motion and parallel-plate structure and manufacture thereof using standard cmos technologies |
| 12/01/2009 | US7626745 Diffractive thin-film piezoelectric micromirror and method of producing the same |
| 11/26/2009 | WO2009141194A2 Method for the production of separate micromechanical parts arranged on a silicon substrate, and parts made therewith |
| 11/26/2009 | WO2009113063A8 Method for fabricating nano-scale patterned surfaces |
| 11/26/2009 | WO2009102551A3 One-dimensional arrays of block copolymer cylinders and applications thereof |
| 11/26/2009 | DE102008001952A1 Verfahren zur Herstellung von vereinzelten, auf einem Siliziumsubstrat angeordneten mikromechanischen Bauteilen und hieraus hergestellte Bauteile Process for the preparation of isolated, arranged on a silicon substrate micromechanical components and components produced therefrom |
| 11/26/2009 | DE102008001859A1 Actuator has electrode arrangement, which comprises two electrodes, and electrode arrangement which is formed as inter-digital electrode and electrodes are formed as engaged inter-digital electrode lines deformable commonly with dielectric |
| 11/26/2009 | DE102008001738A1 Verfahren zur Herstellung von Chips A process for the production of chips |
| 11/26/2009 | DE102005056780B4 Markierte plasmapolymere Schicht und Erzeugnis mit markiertem Schichtsystem, deren Verwendung und Verfahren zu deren Herstellung Labeled plasma polymer layer and produce with labeled layer system, their use and processes for their preparation |
| 11/26/2009 | DE10047500B4 Mikromechanische Membran und Verfahren zu ihrer Herstellung Micromechanical membrane and processes for their preparation |
| 11/25/2009 | EP2121515A2 Method for producing a micromechanical component comprising a partial protective layer |
| 11/25/2009 | EP2121514A2 Methods using block copolymer self-assembly for sub-lithographic patterning |
| 11/25/2009 | EP2121512A1 Protection box for a microelectromechanical system including a wiring relay |
| 11/25/2009 | EP2027058B1 Monolithically integrated monocrystalline micromechanical elements |
| 11/25/2009 | EP1086214B1 Microneedle devices and methods of their manufacture |
| 11/25/2009 | CN101588988A Two-dimensional arrays of holes with sub-lithographic diameters formed by block copolymer self-assembly |
| 11/25/2009 | CN101588529A Silica-based condenser microphone and production method thereof |
| 11/25/2009 | CN101586985A Monolithic integrated non-refrigerated infrared/ultraviolet double-color detector and manufacture method thereof |
| 11/25/2009 | CN101585508A Preparation method of organic glass micro-fluidic chip based on photosensitive thixotrope film |
| 11/25/2009 | CN101585507A Method for producing through-hole structure in PDMS micro-fluidic chip |
| 11/25/2009 | CN100562484C Cantilever structure and its making process and application |
| 11/24/2009 | US7622367 Methods and devices for fabricating and assembling printable semiconductor elements |
| 11/19/2009 | WO2009140340A1 Process of fabricating microfluidic device chips and chips formed thereby |
| 11/19/2009 | WO2009138906A2 Mems devices and fabrication thereof |
| 11/19/2009 | WO2009138138A2 Method for producing chips |
| 11/19/2009 | US20090282681 Valve unit, microfluidic device including the same, and method of fabricating the valve unit |
| 11/19/2009 | DE19537814B4 Sensor und Verfahren zur Herstellung eines Sensors Sensor and method for manufacturing a sensor |
| 11/19/2009 | DE102007047598A1 Verfahren und Anordnung zur Herstellung von Nano-Imprintstempeln sowie mikromechanisch abstimmbares Filter/Detektor-Array Method and apparatus for manufacturing nano-Imprintstempeln and micromachined tunable filter / detector array |
| 11/18/2009 | CN101583559A A micromechanical structure and a method of fabricating a micromechanical structure |
| 11/18/2009 | CN101580223A Manufacturing method of a piezoelectric micro-cantilever beam probe |
| 11/18/2009 | CN101580222A Micro electromechanical component and manufacturing method thereof |
| 11/18/2009 | CN100561288C Minitype optical device and method for producing the same |
| 11/18/2009 | CN100561236C Microelectron-mechanical reconfigurable broad band microwave power detector and method of manufacturing the same |
| 11/18/2009 | CN100561148C Non-refrigeration infrared focal plane array seeker and preparation method thereof |
| 11/17/2009 | US7618525 Method for electrochemical fabrication |
| 11/17/2009 | US7617593 Micromachine and method of fabricating the same |
| 11/12/2009 | WO2009137535A1 Static interferometric display device and method for providing the same |
| 11/12/2009 | WO2009137301A1 Printable static interferometric images |
| 11/12/2009 | WO2009137038A2 Channel and method of forming channels |
| 11/12/2009 | WO2009110801A3 Manufacturing micro components including a cover structure |
| 11/12/2009 | DE19852878B4 Mikromechanisches Bauelement und Herstellungsverfahren hierfür Micro-mechanical device and manufacturing method thereof |
| 11/12/2009 | DE112007002810T5 Ätzverfahren mit verbesserter Kontrolle der kritischen Ausdehnung eines Strukturelements an der Unterseite dicker Schichten Etching process with improved control of the critical dimension of a structure element at the bottom of thick layers |
| 11/12/2009 | DE102008001663A1 Micromechanical component i.e. micro-mirror, has positioning element i.e. mirror plate, adjustable with respect to base substrate by bending spring mechanism based on different internal stresses of subunits |
| 11/11/2009 | EP2116853A1 Microchip manufacturing method |
| 11/11/2009 | EP2116508A2 Optimization of desiccant usage in a MEMS package |
| 11/11/2009 | EP2054338B1 Protection of cavities opening onto a face of a microstructured element |
| 11/11/2009 | CN101578232A Methods using block copolymer self-assembly for sub-lithographic patterning |
| 11/11/2009 | CN101578231A Surface roughening process |
| 11/11/2009 | CN101578230A Process for forming and controlling rough interfaces |
| 11/11/2009 | CN101576570A Suspending inductive device and fabricating method thereof |
| 11/11/2009 | CN101576569A Vacuum micro-electronics acceleration transducer |
| 11/11/2009 | CN101575084A Method for bonding polymeric microfluidic chip in die |
| 11/11/2009 | CN101575083A Micromachined thermopile infrared detector |
| 11/11/2009 | CN100559549C Electronic component and its mfg. method |
| 11/11/2009 | CN100558627C Micro-drive structure for implementing coplane and off-plane movement |
| 11/10/2009 | US7616369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices |
| 11/10/2009 | US7615788 Method for monolithically integrating silicon carbide microelectromechanical devices with electronic circuitry |
| 11/10/2009 | US7615395 Method for containing a device and a corresponding device |
| 11/10/2009 | US7615179 Use of novel micro- and nano-imprinting techniques for making supported three-dimensional micro- and nano-structures for pixel segregation in OLED-based displays; enables assembly of polymers without a glass transition temperature and eliminates heating required to assemble thermoplastic polymers |
| 11/05/2009 | WO2009134838A2 System and method of encapsulation |
| 11/05/2009 | WO2009134635A2 Graphoepitaxial self-assembly of arrays of downward facing half-cylinders |
| 11/05/2009 | WO2009133506A2 Mems device and manufacturing method |