| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 05/05/2010 | CN101700868A Preparation method of ultra-long stibium-doped zinc oxide micrometer line |
| 05/05/2010 | CN101700867A Manufacture method of MEMS packaged glass microcavity with optical window |
| 05/05/2010 | CN101700866A Method for realizing micro-patterning on substrate |
| 05/04/2010 | US7709964 Structure of a micro electro mechanical system and the manufacturing method thereof |
| 05/04/2010 | US7709933 Structural element having a porous region at least regionally provided with a cover layer and its use as well as method for setting the thermal conductivity of a porous region |
| 05/04/2010 | US7709126 Electrokinetic micro power cell using pile-up disk type microfluidic-chip with multi-channel |
| 05/04/2010 | US7708926 Capillary imprinting technique |
| 05/04/2010 | CA2384889C Temporary bridge for micro machined structures |
| 04/29/2010 | WO2010047772A2 Deposition of nanowires and other nanoscale objects on surfaces |
| 04/29/2010 | WO2009100988A3 Tubular multifunction sensor in fluids method for production and use thereof |
| 04/29/2010 | US20100106105 Microneedle Structure And Production Method Therefor |
| 04/29/2010 | US20100104480 Method for improving the bonding properties of microstructured substrates, and devices prepared with this method |
| 04/29/2010 | DE102009042319A1 Sensorknoten-Modul Sensor node module |
| 04/27/2010 | US7706044 Optical interference display cell and method of making the same |
| 04/27/2010 | US7704772 Method of manufacture for microelectromechanical devices |
| 04/27/2010 | US7704432 Imprint lithographic method for making a polymeric structure |
| 04/27/2010 | US7704322 Microfluidic free interface diffusion techniques |
| 04/22/2010 | WO2010011733A3 Electro-mechanical switches and methods of use thereof |
| 04/22/2010 | WO2009149980A3 Method for producing a micromechanical membrane structure with access from the rear of the substrate |
| 04/22/2010 | US20100098857 Methods utilizing scanning probe microscope tips and products therefor or produced thereby |
| 04/21/2010 | EP2178127A1 Device structure and method for manufacturing the same |
| 04/21/2010 | EP2177957A2 Analogue indicating organ in crystalline material, timepiece provided with such an indicating organ, and manufacturing method thereof |
| 04/21/2010 | EP2177950A1 Replication and transfer of microstructures and nanostructures |
| 04/21/2010 | CN101695992A Method for manufacturing electric heating drive micro-clamp based on body silicon processing technique |
| 04/21/2010 | CN101125482B Structure with through hole, production method thereof, and liquid discharge head |
| 04/21/2010 | CN101121499B Deeply etching method |
| 04/20/2010 | CA2449193C Method of manufacturing a microfluidic structure, in particular a biochip, and structure obtained by said method |
| 04/15/2010 | WO2009127455A3 Method for producing a micromechanical membrane structure having fixed counter element |
| 04/15/2010 | US20100089868 Method for producing a micromechanical component having a filler layer and a masking layer |
| 04/15/2010 | DE102008052100A1 Flexibly deformable retaining element e.g. electrostatic retaining element, for retaining e.g. wafer, has actuator exerting compressive- and/or tractive force for expansion and constriction of recess and/or deformation of element |
| 04/14/2010 | EP2174908A2 Device and use thereof |
| 04/14/2010 | CN101694989A Monolithic filter component based on acoustic interface waves and integrated with MEMS switches and manufacture method thereof |
| 04/14/2010 | CN101694895A Series radio-frequency micro-electromechanical switch amplified on basis of heat driving and preparation method of same |
| 04/14/2010 | CN101694829A Sensor of electromechanical performance and microscopic structure for transmission electronic microscope and manufacturing method thereof |
| 04/14/2010 | CN101694409A Method for manufacturing all-silica pressure chips of SOI oil pressure sensor |
| 04/14/2010 | CN101693519A Process for preparing silicon dioxide nano-cone array |
| 04/14/2010 | CN101693515A Preparation method of patternable thin polymer film in MEMS field |
| 04/14/2010 | CN101693514A Method for preparing magnetic suspended coding micro-block array chips and method for applying the preparation method |
| 04/14/2010 | CN101693513A Plastic micro-fluidic chip integrated with microelectrode and method for preparing the chip |
| 04/14/2010 | CN101693512A Compound cantilever beam needle point used for micro-nano microtechnique and manufacturing method thereof |
| 04/14/2010 | CN101342404B Method for manufacturing different-plane metal hollow fine needle for transdermal drug administration |
| 04/14/2010 | CN101276020B Method for preparing microelectron mechanical system optical multiplexer chip |
| 04/13/2010 | US7695894 negative tone photoinitiators; polynorbornenes, polycarbonates |
| 04/08/2010 | WO2010039453A2 Inertial sensor with dual cavity package and method of fabrication |
| 04/08/2010 | WO2010037689A1 Micrometer-scale or nanometer-scale spatially controlled incorporation of particles in a conducting surface layer of a support |
| 04/08/2010 | US20100086877 Pattern forming method and pattern form |
| 04/08/2010 | DE102008048064A1 Mikrofluidisches Ventil, mikrofluidische Pumpe, mikrofluidisches System und ein Herstellungsverfahren The microfluidic valve, microfluidic pump microfluidic system and a production method |
| 04/08/2010 | DE102005017632B4 Verfahren zur Modifikation der Oberfläche einer Probe mittels eines gepulsten Ionenstrahls oder mittels eines ionenstrahlgenerierten Teilchenstrahls mit homogen oder gaußförmig verteilter Stromdichte A method of modifying the surface of a sample by means of a pulsed ion beam or ion beam generated by a particle beam with homogeneously distributed, or Gaussian current density |
| 04/07/2010 | EP2172527A1 A method for preparing a composite material having nanofibers exposed therefrom |
| 04/07/2010 | EP2172415A1 Silicon structure, method for manufacturing the same, and sensor chip |
| 04/07/2010 | EP2171750A1 Method for etching a layer of a silicon semiconductor substrate |
| 04/07/2010 | EP2170582A1 Method for the production of a microfluidic system on a polymer surface |
| 04/07/2010 | CN101692152A Polymer laser ablation based three-dimensional photoetching method |
| 04/07/2010 | CN101692099A Piezoresistive double-shaft micro-accelerometer with on-chip zero offset compensation and manufacturing method thereof |
| 04/07/2010 | CN101692016A Atmospheric pressure sensor compatible with CMOS process and preparation process thereof |
| 04/07/2010 | CN101691203A Method and device for alignment and assembly of glass micro nanofluidic chip |
| 04/07/2010 | CN101691202A Method for preparing polyvinylidene fluoride piezo film with microstructure |
| 04/07/2010 | CN101691200A Low temperature vacuum encapsulation structure of non-refrigeration infrared detector and manufacturing method thereof |
| 04/07/2010 | CN101205055B Processing method of preparation hanging variable capacitance |
| 04/07/2010 | CN101013197B Method for forming alignment on a transparent substrate |
| 04/06/2010 | US7691307 Adhesive microstructure and method of forming same |
| 04/02/2010 | CA2640501A1 Fabrication and use of submicron wide suspended structures |
| 04/01/2010 | WO2010034650A2 Contact arrangement for establishing a spaced, electrically conducting connection between microstructured components |
| 04/01/2010 | WO2010034552A2 Micromechanical component and method for the production thereof |
| 04/01/2010 | WO2009124605A3 Micromechanical component having a slanted structure and corresponding production method |
| 04/01/2010 | WO2009086978A3 Production method for a micromechanical electrostatic adjuster device and micromechanical electrostatic adjuster device |
| 04/01/2010 | WO2009046954A3 Method and arrangement for the production of nano-imprint stamps and micromechanically tunable filter/detector array |
| 04/01/2010 | WO2009037456A3 Mems device with reduced stress in the membrane and manufacturing method |
| 04/01/2010 | DE102008042443A1 Method for producing micromechanical component, involves producing micromechanical component with functional element and functional surface |
| 04/01/2010 | DE102008042432A1 Verfahren zur Herstellung eines Halbleiterbauelements A process for producing a semiconductor device |
| 04/01/2010 | DE102008042366A1 Sensor und Verfahren zur Herstellung eines Sensors Sensor and method for manufacturing a sensor |
| 04/01/2010 | DE102008042350A1 Mikromechanisches Bauelement und Verfahren zu dessen Herstellung Micromechanical component and method for its production |
| 04/01/2010 | DE102008042347A1 Micromechanical sensor for measuring acceleration or turning rate, has semiconductor material, in which cavity is formed |
| 04/01/2010 | DE102008042346A1 Magnetjoch, mikromechanisches Bauteil und Herstellungsverfahren für ein Magnetjoch und ein mikromechanisches Bauteil Magnetic yoke micromechanical component and manufacturing method for a magnetic yoke and a micromechanical component |
| 04/01/2010 | DE102008042258A1 Verfahren zur Herstellung eines mikromechanischen Chips sowie ein Bauelement mit einem derartigen Chip Process for producing a micromechanical chips and a chip component having such a |
| 03/31/2010 | EP2168910A2 Method for making a micromechanical SiC structure |
| 03/31/2010 | EP1187653B1 Devices for enhanced microneedle penetration of biological barriers |
| 03/31/2010 | CN201433096Y Device for realizing digital microfluid transport between microfluidic chips |
| 03/30/2010 | US7687298 Microelectromechanical device with integrated conductive shield |
| 03/30/2010 | US7687007 devised for forming a structured nanoscale pattern on an object and having a layer which is anti-adhesive with regard to the object; stamp blank is provided with a structured pattern on a surface |
| 03/30/2010 | US7686967 Temperature controlled microfabricated two-pin liquid sample dispensing system |
| 03/25/2010 | WO2010032846A1 High-accuracy patterning method for polymeric biomaterial having biocompatibility |
| 03/25/2010 | WO2010031716A1 Machine and method for machining a part by micro-electrical discharge machining |
| 03/25/2010 | WO2010012966A3 Method and device for encapsulating microstructures |
| 03/25/2010 | US20100074815 Master and Microreactor |
| 03/25/2010 | US20100072577 Methods and Devices for Fabricating and Assembling Printable Semiconductor Elements |
| 03/25/2010 | DE102009034577A1 Halbleiteranordnung und Herstellungsverfahren A semiconductor device and manufacturing method |
| 03/25/2010 | DE102009031545A1 MEMS-Substrate, -Bauelemente und Verfahren zur Herstellung derselben MEMS substrates, modules area and methods of manufacturing the same |
| 03/25/2010 | DE102008042196A1 Verfahren zum Herstellen eines mikrofluidischen Bauelementes sowie mikrofluidisches Bauelement A method for producing a microfluidic component and microfluidic device |
| 03/24/2010 | EP1776313B1 Method of producing a mems device |
| 03/24/2010 | CN201427858Y Carbon dioxide solid sublimating device used for sacrificial layer release |
| 03/24/2010 | CN101681851A connecting microsized devices using ablative films |
| 03/24/2010 | CN101678312A Extruded body devices and methods for fluid processing |
| 03/24/2010 | CN100595921C High-temperature resisting one-chip integrated micro-sensor structure and system integrating method |
| 03/23/2010 | US7682571 Micro-fluidic heating system |
| 03/23/2010 | US7682552 Capacitive measurement method and system for nanoimprint process monitoring |
| 03/23/2010 | US7682541 Manufacturing method of a microchemical chip made of a resin |
| 03/23/2010 | US7681306 Method of forming an assembly to house one or more micro components |
| 03/18/2010 | WO2010030460A2 Apparatus and method of wafer bonding using compatible alloy |
| 03/18/2010 | WO2010030459A2 Substrate bonding with bonding material having rare earth metal |