Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
07/2010
07/21/2010CN101780941A Mems device and method for manufacturing the same
07/21/2010CN101324473B Piezoresistance sensor chip and machining process thereof
07/20/2010US7759609 Method for manufacturing a patterned structure
07/20/2010US7759217 Controlled process and resulting device
07/15/2010WO2010080115A2 Improved reagent storage in microfluidic systems and related articles and methods
07/15/2010WO2010079005A1 Method for reducing tip-to-tip spacing between lines
07/15/2010WO2010039660A3 Multi-thickness layers for mems and mask - saving sequence for same
07/15/2010US20100175999 Microfluidic device
07/15/2010US20100175767 Microfabricated Elastomeric Valve and Pump Systems
07/15/2010DE102009000116A1 Micromechanical structure e.g. acceleration sensor, has substrate with main extension plane, and insulation layer arranged between another insulation layer and conductive layer along vertical direction and consisting of silicon carbide
07/14/2010EP2205522A2 Carbon nanotube synthesis for nanopore devices
07/14/2010EP2205521A1 Tool for making microstructured articles
07/14/2010EP2205356A1 Microfluidic channel, method for its implementation, and microfluidic system containing said channel
07/14/2010CN101778712A Method for the production of a microfluidic system on a polymer surface
07/14/2010CN101776603A Enhancement method for raman scattering by using artificial metal micro-nano structure
07/14/2010CN101776501A MEMS presser sensor chip and manufacturing method thereof
07/14/2010CN101776483A Non-refrigerant thermopile infrared detector and manufacturing method thereof
07/14/2010CN101776476A Systems, gyroscope sensors, and fabrication methods for forming structures for the gyroscope sensors.
07/14/2010CN101774532A Method for machining nanometer channel on microfluid chip
07/14/2010CN101774531A MEMS microbridge structure contact hole preparation method
07/14/2010CN101774530A Microbolometer and preparation method thereof
07/14/2010CN101774529A MEMS atom cavity chip and preparation method thereof
07/13/2010US7755824 Micromirror unit with torsion connector having nonconstant width
07/13/2010US7755152 Semiconductor component configured as a diaphragm sensor
07/13/2010US7754010 Microfabricated elastomeric valve and pump systems
07/13/2010US7753888 Method and/or apparatus for puncturing a surface for extraction, in situ analysis, and/or substance delivery using microneedles
07/08/2010WO2010056435A3 Transducer with decoupled sensing in mutually orthogonal directions
07/08/2010DE102009000053A1 Bauelement mit einer mikromechanischen Mikrofonstruktur Component having a micromechanical microphone structure
07/08/2010DE102009000048A1 Mikrotechnisches System und Verfahren zur Herstellung eines mikrotechnischen Systems Technical micro system and method for producing a micro technical system
07/08/2010DE102007019031B4 Optoelektronische Baugruppe und Verfahren zur Herstellung einer optoelektronischen Baugruppe The optoelectronic assembly and method for producing an optoelectronic assembly
07/08/2010DE10162983B4 Kontaktfederanordnung zur elektrischen Kontaktierung eines Halbleiterwafers zu Testzwecken sowie Verfahren zu deren Herstellung For testing contact spring arrangement for making electrical contact of a semiconductor wafer as well as processes for their preparation
07/07/2010EP2204348A2 Method of making bio MEMS devices
07/07/2010EP2204238A1 Process for manufacturing an integrated membrane of nozzles in mems technology for a spray device, and spray device using such membrane
07/07/2010EP2203380A2 Microfluidic component and method for producing the same
07/07/2010CN201522985U Sensor for quantitatively testing force-electricity property and microstructure
07/07/2010CN201522471U Capacitance type relative humidity sensor
07/07/2010CN201522458U Sensor measuring force-electricity properties and microstructure of transmission electron microscope
07/07/2010CN101771168A Method for preparing miniature lithium battery
07/07/2010CN101767766A Method for manufacturing nanometer space in micro-nano mechanical device
07/07/2010CN101767765A Micro electromechanical element with protective ring and manufacture method thereof
07/06/2010US7750462 Microelectromechanical systems using thermocompression bonding
07/06/2010US7749448 For use in microarraying systems, dip pen nanolithography systems, fluidic circuits, and microfluidic systems
07/01/2010WO2010075012A2 Method and apparatus for microcontact printing of mems
07/01/2010WO2010074649A1 Via structure and method thereof
07/01/2010WO2010072675A2 Method for producing thin, free-standing layers of solid state materials with structured surfaces
07/01/2010WO2010072455A1 Device and method for producing a device
07/01/2010WO2010072431A1 Hybrid mems rf switch and method of fabricating same
07/01/2010WO2010072044A1 Method for preparing a micro-electro-mechanical systems mechanical relay based on metallic titanium
07/01/2010WO2010071918A1 Patch production
07/01/2010US20100162823 Mems sensor and mems sensor manufacture method
07/01/2010DE102009051342A1 Mikroelektronisches Gehäuse und Verfahren zum Anordnen in einem Gehäuse Microelectronic package and method for arranging in a housing
07/01/2010DE102008061879A1 Verfahren und Maschinen zur Herstellung eines Mikrostrukturen beinhaltenden Materialbandes A method and machine for producing a microstructure-containing material strip
07/01/2010CA2760573A1 Patch production
07/01/2010CA2747840A1 Method for producing thin, free-standing layers of solid state materials with structured surfaces
06/2010
06/30/2010EP2202526A2 Mems sensor and mems sensor manufacture method
06/30/2010EP2201831A2 Bump structure with multiple layers and method of manufacture
06/30/2010EP2200931A2 Microfluidic structures with circular cross-section
06/30/2010EP2200930A2 Method for printing a nanostructure and/or microstructure, stamp and substrate
06/30/2010EP2200929A2 Monocrystalline silicon micromirrors for maskless lithography
06/30/2010CN101765462A Methods of macromolecular analysis using nanochannel arrays
06/30/2010CN101762714A Shrinking valve in microfluidic chip
06/30/2010CN101762623A Semiconductor-type gas sensor with A1N heat isolation panel double-side micro structure and manufacturing method thereof
06/30/2010CN101762356A Vacuum micro-electronics pressure sensor
06/30/2010CN101759143A Method for controlling growth of micro-nano pore structure on silicon surface
06/30/2010CN101759138A Positive pressure thermoforming manufacturing method of wafer-level glass micro-channel
06/30/2010CN101759137A Method for manufacturing electrothermal driving photoresist micro gripper
06/30/2010CN101759135A Sensor and manufacture method thereof
06/29/2010US7745100 Polymers, methods of use thereof, and methods of decomposition thereof
06/29/2010US7744718 Microsystem component and method for gluing microcomponents to a substrate
06/24/2010WO2010039855A3 Vertical mount package for mems sensors
06/24/2010WO2010031987A3 Encapsulation method
06/24/2010WO2010029656A3 Mems device and method for manufacturing the same
06/24/2010WO2009147556A3 Microscopic structure packaging method and device with packaged microscopic structure
06/24/2010US20100158761 Microfluidic control apparatus and method of assembling the same
06/24/2010DE102009055283A1 Halbleitervorrichtung und Verfahren zu ihrer Herstellung Semiconductor device and process for their preparation
06/23/2010EP2199252A1 Method of making a micro electro mechanical system (MEMS) device
06/23/2010EP2198454A1 Composite element consisting of at least two semiconductor substrates, and production method
06/23/2010EP2197781A2 Composite comprising at least two semiconductor substrates and production method
06/23/2010EP2197780A1 Structure comprising a getter layer and an adjusting sublayer, and fabrication process
06/23/2010CN1958301B A method of patterning molecules on a substrate using a micro-contact printing process
06/23/2010CN101746712A Phase-change material for compositing VO2 sheet and porous nanometer structure on silicon wafer and preparation method thereof
06/23/2010CN101746710A Manufacturing method of embedded metal through-hole wafer and device thereof
06/23/2010CN101746709A Method for forming microscopic structures on a substrate
06/23/2010CN101746706A Micro-electromechanical system (MEMS) wafer-level vacuum packaging transverse interconnection structure and manufacture method thereof
06/23/2010CN101746705A Phase-change material for compositing VO2 nanometer flower structure on silicon wafer and preparation method thereof
06/23/2010CN101746704A MEMS (micro electro mechanical system) element with function of dust prevention and manufacturing method thereof
06/23/2010CN101308777B Nanostructure and manufacturing method of nanostructure
06/23/2010CN101249937B Method for processing micron/submicron sized block sample
06/22/2010CA2399027C Method for fabricating micro-structures with various surface properties in multilayer body by plasma etching
06/17/2010WO2010066494A2 Arrangement of two substrates having a slid bond and method for producing such an arrangement
06/17/2010WO2009137038A3 Channel and method of forming channels
06/17/2010WO2009134838A3 System and method of encapsulation
06/17/2010WO2009117238A3 Methods of improving long range order in self-assembly of block copolymer films with ionic liquids
06/17/2010DE102009004305A1 Verfahren zur Herstellung von plattenförmigen Körpern mit mikro- und/oder nanostrukturierten Oberflächen oder von mikro- und/oder nanogroß durchbrochenen Folien Process for the preparation of plate-shaped bodies with micro- and / or nano-structured surfaces or micro- and / or nano large perforated sheets
06/17/2010DE102008054481A1 Sensor und Verfahren zu dessen Herstellung Sensor and method for its production
06/17/2010DE10024266B4 Verfahren zur Herstellung eines mikromechanischen Bauelements A process for producing a micromechanical component
06/16/2010EP1290497B1 Method for the production of a template and the template thus produced
06/16/2010CN201506706U Hot-pressing encapsulating device of polymer micro-flow control chip
06/16/2010CN1926056B Slotted forming methods and fluid ejecting device
06/16/2010CN1863729B Method for patterning a substrate surface
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