Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
09/2010
09/02/2010DE112008002554T5 Verfahren zur Herstellung eines MEMS-Elements auf einem Substrat A method for producing a MEMS element on a substrate
09/02/2010DE102008036923B4 Mit Keramik beschichteter Träger, Verfahren zu dessen Herstellung und Verwendung desselben Thereof with ceramic-coated carrier, process for its preparation and use
09/02/2010DE102007040792B4 Herstellungsverfahren für Vorrichtung und Dice-Verfahren und Herstellungsverfahren für eine MEMS-Vorrichtung Manufacturing method for device and dicing processes and manufacturing techniques for a MEMS device
09/02/2010DE102005015584B4 Verfahren zur Herstellung eines mikromechanischen Bauteils A process for producing a micro mechanical component
09/02/2010CA2752733A1 Method for making microchannels on a substrate, and substrate including such microchannels
09/01/2010EP1363763B1 Process of stripe coating to produce microstructured composite articles
09/01/2010CN101821847A Composite element consisting of at least two semiconductor substrates, and production method
09/01/2010CN101821006A Microfluidic channel, method for its implementation, and microfluidic system containing said channel
09/01/2010CN101819214A Integrated anemograph based on ceramics wafer level package and preparation method thereof
09/01/2010CN101817497A Method for preparing all-dry etching dissolved silicon chip for microstructure manufacturing
09/01/2010CN101817496A Micro-electro-mechanical systems interconnection pins and method for forming the same
09/01/2010CN101307452B Method for preparing Ni/Si nano-wire array and micro-nano humidity sensor based on the nano-wire array
09/01/2010CN101244303B Miniature solid or hollow silicon needle, silicon needle array and preparing method thereof
09/01/2010CN101172184B Three-dimensional flexible nervus and preparation method
09/01/2010CN101003355B Direct write nano etching method
08/2010
08/31/2010US7786002 Method for producing a component comprising a conductor structure that is suitable for use at high frequencies
08/26/2010WO2010094102A1 Device for grasping and active release of micro and nano objects
08/26/2010US20100216669 Capillary-Channel Probes For Liquid Pickup, Transportation And Dispense Using Stressy Metal
08/26/2010US20100214643 Mems device with integrated via and spacer
08/26/2010US20100213161 Capillary-Channel Probes For Liquid Pickup, Transportation And Dispense Using Stressy Metal
08/26/2010US20100213068 Methods of and Apparatus for Molding Structures Using Sacrificial Metal Patterns
08/26/2010DE102009006064A1 Producing a microstructured film, comprises hardening a film-forming substance with pore inducer and/or pores partially embedded in the film-forming substance, and structurally applying a supporting substance on the film-forming substance
08/26/2010DE102007024902B4 Vorrichtung mit Membranstuktur zur Detektion von Wärmestrahlung, Verfahren zum Herstellen und Verwendung der Vorrichtung Device with Membranstuktur for detection of thermal radiation, methods of making and using the apparatus
08/26/2010CA2750918A1 Device for grasping and active release of micro and nano objects
08/25/2010EP2221852A1 Trench isolation for micromechanical devices
08/25/2010CN201561985U Piezoresistive monolithic integrated tri-axial acceleration transducer
08/25/2010CN1942023B Method for producing microphone unit, thermal-oxidative layer and low-stress structural layer
08/25/2010CN101813701A Method for preparing protein chip by in-situ synthesis
08/25/2010CN101811657A Micro-electromechanical sensor and manufacturing method
08/25/2010CN101811656A MEMS element and method of manufacturing the same
08/25/2010CN101269790B Surface discharge element and method for manufacturing same
08/24/2010US7781305 Controlled cleaving process
08/19/2010WO2009156201A3 Microelectromechanical sensor element
08/19/2010WO2009113063A3 Method for fabricating nano-scale patterned surfaces
08/18/2010EP2219215A1 Semiconductor device and method for manufacturing the same
08/18/2010EP2217526A2 Method for producing micromechanical structures having a protruding lateral wall progression or an adjustable angle of inclination
08/18/2010CN1685507B Method for producing a component comprising a conductor structure that is suitable for use at high frequencies
08/18/2010CN101808933A Multicomponent sacrificial structure
08/18/2010CN101806767A Disposable biosensor electrode for detecting benzoic acid in food and preparation method thereof
08/18/2010CN101804960A Ultra-fine cone electrode array and method for manufacturing same
08/18/2010CN101281133B Preparation of surface reinforced Raman active substrate of large area micro-nano dendritical structure array
08/18/2010CN101170002B RF micro-inductance with suspending structure and its making method
08/17/2010US7774920 Fabrication of metallic microstructures via exposure of photosensitive compostion
08/12/2010WO2010091278A2 Energy conversion cell having a dielectrically graded region to alter transport, and methods thereof
08/12/2010WO2010090798A2 Substrate bonding with metal germanium silicon material
08/12/2010WO2010089261A2 Sensor module and method for producing sensor modules
08/12/2010WO2010088765A1 Method for producing a stamp for hot embossing
08/12/2010WO2010088726A1 Fabrication of nanoparticles on solid surfaces
08/12/2010US20100203294 Polymers, Methods Of Use Thereof, And Methods Of Decomposition Thereof
08/12/2010US20100201042 Step and Repeat Imprint Lithography Processes
08/12/2010US20100200782 Microfabricated Elastomeric Valve And Pump Systems
08/12/2010CA2751057A1 Method for producing a stamp for hot embossing
08/11/2010EP2216290A2 Mitigation of high stress areas in vertically offset structures
08/11/2010EP2215008A2 Module housing and method for producing a module housing
08/11/2010EP2215007A1 Method of forming structured sintered articles
08/11/2010EP2215006A2 Device with encapsulated integrated circuit and a n/mems and method for production
08/11/2010CN101803003A Method for producing a multiplicity of chips and correspondingly produced chip
08/11/2010CN101801838A Interferometric optical modulator with broadband reflection characteristics
08/11/2010CN101320081B Micro electro-mechanical system magnetic field sensor and measuring method
08/05/2010WO2010088267A2 Method and apparatus for etching
08/05/2010WO2010088111A2 Bonded microelectromechanical assemblies
08/05/2010WO2009020682A3 Chemical functionalization of solid-state nanopores and nanopore arrays and applications thereof
08/05/2010US20100193366 Method For Electrochemical Fabrication
08/05/2010DE102009000599A1 Elektrostatischer Antrieb, Verfahren zum Betreiben eines mikromechanischen Bauteils mit einem elektrostatischen Antrieb und Herstellungsverfahren für einen elektrostatischen Antrieb An electrostatic drive method for operating a micromechanical component with an electrostatic actuator and a manufacturing method for the electrostatic drive
08/05/2010DE10046621B4 Verfahren zur Herstellung eines Membransensor-Arrays sowie Membransensor-Array A method for producing a membrane sensor array as well as membrane sensor array
08/04/2010EP2213616A1 Method for closing a cavity for at least one microelectronic device
08/04/2010EP2213615A2 Microfluidic Large Scale Integration
08/04/2010EP2212239A1 Method of component assembly on a substrate
08/04/2010CN101795961A Tool for making microstructured articles
08/04/2010CN101795505A Low-power consumption micro-heater with mesh-structured heating film and fabrication method thereof
08/04/2010CN101794733A Methods of forming semiconductor device
08/04/2010CN101792113A Method and apparatus for protecting wiring and integrated circuit device
08/04/2010CN101792112A Micro fluid control detection device based on surface-enhanced Raman scattering active substrate
08/04/2010CN101792111A Method for preparing multilayer raised compound film
08/04/2010CN101792109A Micro inertial sensor with transversely movable electrodes embedded and manufacturing method thereof
08/04/2010CN101792108A Large capacitance micro inertial sensor based on slide-film damping and manufacturing method thereof
08/04/2010CN101792106A Etching solution for processing N-type silicon microchannel array by photon-assisted electrochemical etching method
08/04/2010CN101071061B Process control monitor of interferometric modulators
08/03/2010US7766055 Microfabricated elastomeric valve and pump systems
08/03/2010CA2381643C Multilayer microstructures and laser based method for precision and reduced damage patterning of such structures
07/2010
07/29/2010US20100187105 Microfabricated Elastomeric Valve And Pump Systems
07/29/2010DE102009000429A1 Micro-mechanical device, e.g. for an acceleration sensor for releasing an airbag on a motor vehicle, has a moving element, limiting surfaces and restricting knobs
07/29/2010DE102009000389A1 Integrierter Schaltkreis und Herstellungsverfahren hierfür Integrated circuit and manufacturing method thereof
07/29/2010DE10004964B4 Mikromechanische Kappenstruktur Micromechanical cap structure
07/28/2010EP2211223A1 Method for generating a deflectable mirror structure and a micromirror device
07/28/2010CN101788605A Wireless-receiving system for detecting microelectronic mechanical microwave frequency and preparation method thereof
07/28/2010CN101786593A Processing method of differential type high-precision accelerometer
07/28/2010CN101226850B Silicon micro mechanical pressure switch, preparation method and uses thereof
07/27/2010US7763203 Method of manufacturing microneedle structures using photolithography
07/22/2010WO2010082432A1 Reactor and method for producing a reactor
07/22/2010WO2010081275A1 Micro machining method for a substrate on an underlay
07/22/2010WO2010049081A3 Moulded product, method for the production thereof and use of the same
07/22/2010WO2010008985A3 Encapsulation methods for interfero-metric modulator and mems devices
07/22/2010US20100180961 Microfluidic structures with integrated devices
07/22/2010DE102009000352A1 Sensor device has housing, sensor chip and evaluation chip, where housing has inner chamber, in which sensor chip and evaluation chip are arranged, and sensor chip is arranged on bottom area of housing
07/21/2010EP2207749A2 Methods for manufacturing a microstructure
07/21/2010CN101783658A Preparation method of submicron-scale surface acoustic wave delay line for gas detection
07/21/2010CN101780944A Preparation method of MEMS microbridge structure
07/21/2010CN101780943A Method for preparing nano-scale silicon oxide groove
07/21/2010CN101780942A Wafer level vacuum packaging method of MEMS (Micro-electromechanical System) component
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