Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
10/2010
10/14/2010WO2010116324A1 Backplate for microphone
10/14/2010WO2010088267A3 Method and apparatus for etching
10/14/2010DE102009002255A1 Method for manufacturing conductive vias in e.g. semiconductor component, involves depositing protective layer on portion of insulation layer, and partially fixing functional layer at bottom of trenches
10/13/2010EP2239961A1 Backplate for microphone
10/13/2010EP2239619A1 Optical device, sealing board and method for manufacturing optical device
10/13/2010CN1729086B Micro-mechanical thermo structure and method for manufacturing such micro-mechanical structure
10/13/2010CN101860262A Piezoelectric twin-wafer type MEMS energy collector and preparation method thereof
10/13/2010CN101858928A Capacitance-type triaxial accelerator for micromotor system
10/13/2010CN101857187A Flexible electric heating micro gripper with parallel opening-closing jaw
10/13/2010CN101359605B Method of room temperature covalent bonding
10/13/2010CN101223630B Structure formed in diamond
10/07/2010WO2010112676A1 A casing of a sensor measuring oscillations, and a sensor for measuring oscillations
10/07/2010WO2010112428A1 Production of a microelectronic device comprising a monocrystalline silicon nems component and a transistor, the gate of which is produced in the same layer as the movable structure of said component
10/07/2010WO2010093805A3 Pixel black mask design and formation technique
10/07/2010WO2009141194A3 Method for the production of separate micromechanical parts arranged on a silicon substrate, and parts made therewith
10/07/2010DE102009015306A1 Method for manufacturing micro-electro-mechanical system components, involves producing perforated layer on upper side of wafer from semiconductor material
10/07/2010DE102009005972A1 Creating a periodic pattern on or in a processing substrate, comprises exposing the processing substrate to an interfering radiation field, which forms itself in a space area by interacting partial fields of different diffraction orders
10/07/2010DE102009001969A1 Sensormodul Sensor module
10/06/2010EP2237049A1 Process of fabricating a capacitive tri-axial accelerometer
10/06/2010EP2236456A1 Front end micro cavity
10/06/2010EP2235743A1 Two-dimensional patterning employing self-assembled material
10/06/2010EP2235742A2 Process for the production of microelectromechanical systems
10/06/2010EP2234917A2 Method for producing a capping wafer for a sensor
10/06/2010EP2234723A2 Apparatus and method for detection of an analyte in a sample
10/06/2010EP1411144B1 Method for forming ultra-high strength elastic diamond like carbon structure
10/06/2010CN101855586A Microelectromechanical device with optical function separated from mechanical and electrical function
10/06/2010CN101852770A Quick-response surface acoustic wave gas sensor and method for preparing same
10/06/2010CN101850945A Method for removing solvent from micro/nano structure
10/06/2010CN101850944A Method for sedimentating silicon nitride thin film by using 13.56 MHz radio frequency power source
10/06/2010CN101850943A Mems sensor and mems sensor manufacture method
10/05/2010US7808091 Wafer structure with discrete gettering material
09/2010
09/30/2010WO2010090798A3 Substrate bonding with metal germanium silicon material
09/30/2010DE102009000642A1 Verfahren zur Herstellung mikrostrukturierter Bauteile mittels Photolithographie A process for producing microstructured components by means of photolithography,
09/29/2010EP2231507A1 A method for making a 3d nanostructure having a nanosubstructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanowires obtainable by this method
09/29/2010EP1241930B1 Adhesive microstructure and method of forming same
09/29/2010CN1966392B Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
09/29/2010CN1572719B MEMS device and method of forming MEMS device
09/29/2010CN101844739A Manufacturing method of subminiature MEMS gyroscope sensor
09/29/2010CN101567301B Method for forming viscous grain by wafer separation
09/29/2010CN101274737B Multicomponent 1-3 composite microstructure film and preparation thereof
09/29/2010CN101271124B L-beam piezoresistance type micro-accelerometer and production method thereof
09/29/2010CN101062761B Method for producing nano-beam with right-angled triangle cross-section by wet method corrosion technique
09/28/2010US7803712 Multilevel imprint lithography
09/28/2010US7803646 Method for producing a component having a semiconductor substrate and component
09/23/2010WO2010107851A2 Rapid fabrication of a microelectronic temporary support for inorganic substrates
09/23/2010WO2010107618A2 Method of accurately spacing z-axis electrode
09/23/2010WO2010107122A1 Hollow microtube structures, production method thereof, and living organism inspection device
09/23/2010WO2010017934A3 Method for transferring nanostructures into a substrate
09/23/2010WO2009117456A3 Functional micro-and/or nano-structure bearing constructions and/or methods for fabricating same
09/23/2010US20100237446 Thin film encapsulation of mems devices
09/23/2010DE102009011308A1 Vorrichtung und Verfahren zur simultanen Mikrostrukturierung und Dotierung von Halbleitersubstraten Apparatus and method for simultaneous microstructuring and doping of semiconductor substrates
09/23/2010DE102009010954A1 Herstellverfahren für eine Negativform für eine galvanische oder elektrophoretische Abscheidung Production process for a negative mold for a galvanic or electrophoretic deposition
09/22/2010EP2230208A1 Electroplating mould and method for manufacturing the same
09/22/2010EP2230207A1 Electroplating mould and method for manufacturing the same
09/22/2010EP2230206A1 Electroplating mould and method for manufacturing same
09/22/2010CN1934671B Method for forming carbonaceous material protrusion and carbonaceous material protrusion
09/22/2010CN101839706A Structure for measuring contact length of micro-cantilever and method thereof
09/22/2010CN101837946A Method for preparing dry adhesive
09/22/2010CN101837945A Encapsulating device of electrothermal microclamp
09/22/2010CN101837944A Method for forming a gyroscope and accelerometer
09/22/2010CN101837943A Sensor for quantitatively measuring mechanical and electrical properties and microstructure and manufacturing method thereof
09/22/2010CN101143700B Method for processing micro-machinery hot flow type sensor
09/21/2010US7799516 Polymers, methods of use thereof, and methods of decomposition thereof
09/21/2010CA2417393C Microdevice with movable microplatform and process for making thereof
09/21/2010CA2393603C Microchip devices for delivery of molecules and methods of fabrication thereof
09/16/2010WO2010104518A1 Structure and fabrication of a microscale flow-rate/ skin friction sensor
09/16/2010WO2010103410A1 Microphone and accelerometer
09/16/2010WO2010102996A1 Method for positioning chips during the production of a reconstituted board
09/16/2010WO2010080115A3 Improved reagent storage in microfluidic systems and related articles and methods
09/16/2010WO2009144619A3 Mems devices
09/16/2010US20100230767 Mems sensor, mems sensor manufacturing method, and electronic device
09/16/2010DE102007010462B4 Verfahren zur Herstellung einer Teilchenstrahlquelle A method for producing a particle beam
09/16/2010DE102005012739B4 Verfahren zur Herstellung räumlicher Feinstrukturen A process for producing spatial fine structures
09/15/2010EP2228401A1 Sacrificial compositions, methods of use thereof, and methods of decomposition thereof
09/15/2010EP2228337A2 Manufacturing an accelerometer on SOI wafer
09/15/2010CN201581133U Low-temperature damage-free deep slant silicon etching system
09/15/2010CN101835085A Method for manufacturing silicon-based condenser microphone
09/15/2010CN101835076A Capacitive sensing device and making method thereof
09/15/2010CN101832831A Piezoresistive sensor chip and manufacture method thereof
09/15/2010CN101831163A Sacrificial compositions, methods of use thereof, and methods of decomposition thereof
09/15/2010CN101830428A Method for manufacturing super hydrophobic surface by microneedle array
09/15/2010CN101830427A Antimagnetic particle three-dimensional control device based on MEMS technology
09/15/2010CN101830426A MEMS sensor, MEMS sensor manufacturing method, and electronic device
09/15/2010CN101830425A Variable rigidity beam, manufacturing method and actuating method thereof
09/15/2010CN101543406B Method for assembling microwire electrode array by using silicon array hole
09/14/2010US7794610 Optical components and production thereof
09/10/2010WO2010101858A2 Hermetic packaging of integrated circuit components
09/10/2010WO2010101023A1 Parallel displacement mechanism and method for manufacturing parallel displacement mechanism
09/09/2010US20100224590 Method for producing microneedle structures employing one-sided processing
09/09/2010DE102010002545A1 Sensorvorrichtung und Herstellverfahren für eine Sensorvorrichtung Sensor device and manufacturing method for a sensor device
09/09/2010DE102010000729A1 Halbleitervorrichtung und Verfahren zu deren Fertigung A semiconductor device and method of manufacturing
09/08/2010EP2224993A1 Out-of-plane microneedle manufacturing process
09/08/2010CN1893142B Minute structure, micromachine, organic transistor, electric appliance, and manufacturing method thereof
09/08/2010CN101825505A MEMS pressure sensitive chip and manufacturing method thereof
09/08/2010CN101823685A Bionic micro/nano structure preparing method
09/08/2010CN101823684A Method for preparing butterfly lepidoptera-simulated hierarchical multi-layer symmetrical micro/nano structure
09/08/2010CN101510508B Method for generating right-angle structure compensation figure of silicon (10) substrate aeolotropism corrosion
09/08/2010CN101413138B Method for improving accuracy of size of micro-electroforming cast layer
09/07/2010US7791440 Microfabricated system for magnetic field generation and focusing
09/02/2010WO2010097548A1 Method for making microchannels on a substrate, and substrate including such microchannels
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