| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 01/26/2011 | EP1057006B1 A method of producing a detector arrangement including a gas sensor, and a detector arrangement produced in accordance with the method |
| 01/26/2011 | CN1941283B Semiconductor device fabrication method |
| 01/26/2011 | CN101957246A Integrated detector for micro-force micro-displacement measurement system |
| 01/26/2011 | CN101957201A Capacitive MEMS gyroscope and method of making the same |
| 01/26/2011 | CN101955152A Method of wafer-level airtight package with inverted Y-shaped through hole |
| 01/26/2011 | CN101634662B Micro-accelerometer and preparation method thereof |
| 01/26/2011 | CN101486438B Flexible MEMS resistance reducing covering and method of manufacturing the same |
| 01/26/2011 | CN101363731B Rock quartz micro mechanical gyroscope based on shear stress detection and method for making same |
| 01/26/2011 | CN101121498B Method for manufacturing micro-torsion shaft |
| 01/25/2011 | US7875941 Thin film encapsulation of MEMS devices |
| 01/25/2011 | US7875940 Micromachine and production method thereof |
| 01/25/2011 | CA2378190C Microfabricated elastomeric valve and pump systems |
| 01/20/2011 | WO2011006699A1 Multichannel micro-needles |
| 01/20/2011 | WO2010075012A3 Method and apparatus for microcontact printing of mems |
| 01/20/2011 | WO2010034650A3 Contact arrangement for establishing a spaced, electrically conducting connection between microstructured components |
| 01/20/2011 | WO2010018029A3 Method for producing a micromechanical component comprising electrodes on two levels, and micromechanical component |
| 01/20/2011 | DE102009033511A1 Micro mirror arrangement for forming pupil in lighting system utilized for microlithography, has anti-reflex coating with absorbing layer made of non-metallic material whose absorption coefficient and wavelength are set as specific value |
| 01/19/2011 | EP2276047A1 Mem switch and method for manufacturing the same |
| 01/19/2011 | EP2275384A1 Threshold acceleration sensor and method of manufacturing |
| 01/19/2011 | EP2274108A1 Methods of manufacturing capacitive electromechanical transducer and capacitive electromechanical transducers |
| 01/19/2011 | CN1994861B All-optical micromachine non-frigorific infrared thermal imaging chip structure and its production method |
| 01/19/2011 | CN101952214A Durable frit composition & composites and devices comprised thereof |
| 01/19/2011 | CN101952196A Method of making a multilayer substrate with embedded metallization |
| 01/19/2011 | CN101952195A One-dimensional arrays of block copolymer cylinders and applications thereof |
| 01/19/2011 | CN101950126A Method for manufacturing three-dimensional smooth curved surface microstructure based on SU-8 thick photo-resist |
| 01/19/2011 | CN101949878A Polyimide film miniature quick-response humidity sensing element and manufacturing method thereof |
| 01/19/2011 | CN101614604B Silicon resonation type pressure sensor based on synovial membrane differential structure and manufacturing method thereof |
| 01/19/2011 | CN101256105B Monocrystaline silicon transverse miniature MEMS pirani meter and preparation method thereof |
| 01/19/2011 | CN101056072B Staggered vertical comb drive fabrication method |
| 01/19/2011 | CN101036086B A flexible nano-imprint stamp |
| 01/18/2011 | US7872333 Layer system comprising a silicon layer and a passivation layer, method for production a passivation layer on a silicon layer and the use of said system and method |
| 01/13/2011 | WO2011005921A2 Fabrication of multi-dimensional microstructures |
| 01/13/2011 | WO2011004991A1 Wide area stamp for antireflective surface |
| 01/13/2011 | WO2011003908A1 Sealed cavity and method for making such a sealed cavity |
| 01/13/2011 | WO2010117615A3 Sensor device with reduced parasitic-induced error |
| 01/13/2011 | WO2010117593A3 Bridge sensor with collocated electronics and two-wire interface |
| 01/13/2011 | US20110005341 Filtering apparatus for filtering a fluid |
| 01/13/2011 | DE102010029284A1 MEMS-Bauelement MEMS device |
| 01/12/2011 | EP2271581A1 Surfaces, including microfluidic channels, with controlled wetting properties |
| 01/12/2011 | CN101945819A Micro-electromechanical device and method for fabricating the same |
| 01/12/2011 | CN101944860A Piezoelectric cantilever vibration energy harvester and preparation method thereof |
| 01/12/2011 | CN101941673A Micro electro mechanical system wafer-level vacuum packaging method |
| 01/12/2011 | CN101941672A Photocatalysis technolog based method for preparing semiconductor nano and metal nano microelectrode array |
| 01/12/2011 | CN101941671A Electrostatic type vibration energy collector construction member and manufacturing method thereof |
| 01/12/2011 | CN101481079B Preparation of micro-nano lens array |
| 01/12/2011 | CN101450786B Pressure sensor for micro electro-mechanical system and production method thereof |
| 01/11/2011 | US7867886 Method of enclosing a micro-electromechanical element |
| 01/11/2011 | CA2463900C Digital optical switch apparatus and process for manufacturing same |
| 01/11/2011 | CA2413965C Accelerometer with folded beams |
| 01/06/2011 | WO2011001779A1 Method for manufacturing silicon structure, device for manufacturing same, and program for manufacturing same |
| 01/06/2011 | WO2011001778A1 Method for manufacturing silicon structure, device for manufacturing same, and program for manufacturing same |
| 01/06/2011 | WO2011001680A1 Resonator and production method thereof |
| 01/06/2011 | WO2011000898A1 Simplified copper-copper adhering method |
| 01/06/2011 | WO2010107851A3 Rapid fabrication of a microelectronic temporary support for inorganic substrates |
| 01/06/2011 | WO2010034552A3 Micromechanical component with cap electrodes and method for the production thereof |
| 01/05/2011 | EP2269946A1 Capped integrated device with protective cap, composite wafer incorporating integrated devices and process for bonding integrated devices with respective protective caps |
| 01/05/2011 | EP2269201A1 Tunable capacitor and switch using mems with phase change material |
| 01/05/2011 | EP2268569A2 Method and arrangement for the production of nano-imprint stamps and micromechanically tunable filter/detector array |
| 01/05/2011 | EP2268568A2 Method of sealing a cavity |
| 01/05/2011 | EP2268404A1 Process for manufacturing reconfigurable microchannels |
| 01/05/2011 | DE102009042191A1 Wafer-Level-gekapselte integrierte MEMS-Schaltung Wafer-level MEMS encapsulated integrated circuit |
| 01/05/2011 | DE102009027382A1 Electronic component for use with electromagnetic vulnerability protection, has guide element and micro-component which is electrically connected to guide element |
| 01/05/2011 | DE102009027343A1 Verfahren zur Herstellung eines elektronischen Bauteils A method of manufacturing an electronic component |
| 01/05/2011 | CN1950291B Reduction of etching charge damage in manufacture of microelectromechanical devices |
| 01/05/2011 | CN101938862A Solenoid type heating resistor-containing three-dimensional microheater and manufacturing method thereof |
| 01/05/2011 | CN101937128A MEMS micro-lens driven by three piezoelectric cantilever beams and manufacturing method thereof |
| 01/05/2011 | CN101936992A Method for quickly detecting colibacillus and used micro flow control chip as well as preparation technique |
| 01/05/2011 | CN101936937A Micro-cantilever gas sensor and manufacturing method thereof |
| 01/05/2011 | CN101935857A Preparation method of friction-reduction anti-adhesion nano organic film based on micro device |
| 01/05/2011 | CN101935011A Method for preparing out-of-plane medicament-carrying microneedle array |
| 01/05/2011 | CN101935010A Preparation method of carbon nano tube nasaltube type gas-sensitive sensor based on polyimide flexible substrate |
| 01/05/2011 | CN101935009A Method for manufacturing intermediate P-type electrode of tunable resonant cavity enhanced detector |
| 01/05/2011 | CN101935008A Method of micro cantilever beam sensor using functional carbon nano tubes as sensitive materials |
| 01/05/2011 | CN101313234B Method for manufacturing diffraction grid |
| 01/04/2011 | US7863200 Process of vapor depositing glass layers for wafer-level hermetic encapsulation of electronic modules |
| 01/04/2011 | US7862885 Method of room temperature covalent bonding |
| 01/04/2011 | US7862732 Method for forming micro lenses and semiconductor device including the micro lenses |
| 01/04/2011 | US7862731 Method for producing insulation structures |
| 12/30/2010 | US20100330332 Cover for microsystems and method for producing a cover |
| 12/30/2010 | DE102009038108A1 Method for applying micro or nano scale structures on solid bodies, involves pressing tip of needle shaped embossing tool by using position device on multiple different positions of surface of body |
| 12/30/2010 | DE102009027284A1 Method for manufacturing micromechanical structure, involves forming substrate with main extension level and manufacturing two caverns within substrate |
| 12/30/2010 | DE102009027180A1 Mikromechanisches Element sowie Verfahren zu dessen Herstelllung The micromechanical element and method of Manufacture |
| 12/30/2010 | DE10003066B4 Halbleitersensor für eine physikalische Größe und Verfahren zum Herstellen desselben Of the same semiconductor sensor for a physical quantity and methods of making |
| 12/29/2010 | WO2010151471A1 Methods of wet etching a self-assembled monolayer patterned substrate and metal patterned articles |
| 12/29/2010 | WO2010012547A3 Method for capping a mems wafer and mems wafer |
| 12/29/2010 | EP2265543A2 Method for the production of ceramic structures containing silicon |
| 12/29/2010 | EP1382565B1 A method of forming a hollow structure from a silicon structure |
| 12/29/2010 | CN101932146A Three-dimensional microheater with arc groove heating membrane area and manufacturing method thereof |
| 12/29/2010 | CN101931852A Manufacturing method of silicon microphone |
| 12/29/2010 | CN101931379A Resonator and a method of manufacturing the same, and oscillator and electronic apparatus including the same |
| 12/29/2010 | CN101929977A Enzyme bioelectrochemical sensing chip and preparation and using methods thereof |
| 12/29/2010 | CN101927977A Fabrication method of cmos microelectromechanical system (mems) device |
| 12/29/2010 | CN101927976A Infrared detector with micro-bridge structure and manufacturing method thereof |
| 12/29/2010 | CN101367504B Method for manufacturing micro-electronic mechanical system with micro-mirror |
| 12/29/2010 | CN101261963B Miniature electronic part and making method |
| 12/28/2010 | US7859370 Electrostatic actuator |
| 12/28/2010 | US7859093 Method for protecting encapsulated sensor structures using stack packaging |
| 12/23/2010 | WO2010148398A2 A thin-film device and method of fabricating the same |
| 12/23/2010 | WO2010147796A2 Selective uv-ozone dry etching of anti-stiction coatings for mems device fabrication |
| 12/23/2010 | WO2010146138A1 Method for producing a planar membrane |