| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 04/13/2011 | EP2308798A1 Method for treating a getter material and method for encapsulating such a getter material |
| 04/13/2011 | EP2307308A2 Method for capping a mems wafer and mems wafer |
| 04/13/2011 | EP2307307A2 Micro-posts having improved uniformity and a method of manufacture thereof |
| 04/13/2011 | EP1383707B1 Fabrication of silicon micro mechanical structures |
| 04/13/2011 | CN102015524A Graphoepitaxial self-assembly of arrays of downward facing half-cylinders |
| 04/13/2011 | CN102015523A Micromechanical component and method for producing the same |
| 04/13/2011 | CN102012633A Method for making self-supporting structure of nano fluid system based on SU-8 photoresist |
| 04/13/2011 | CN102012434A Capacitive angular speed sensor of micro electro mechanical system and manufacturing method thereof |
| 04/13/2011 | CN102009946A Method for manufacturing component including micro-structured or nano-structured element |
| 04/13/2011 | CN102009945A Method for machining micro-mechanical quartz tuning fork gyro sensitive structure |
| 04/13/2011 | CN102009944A Destressing construction technique for non-substrate molding package |
| 04/13/2011 | CN102009943A Microelectronic device and manufacturing method of micro-electromechanical resonator thereof |
| 04/13/2011 | CN102009942A Microsystem |
| 04/13/2011 | CN102009941A Micro-nano fluid system and preparation method thereof |
| 04/13/2011 | CN102008927A Method for preparing multilayer amorphous alloy based microstructure |
| 04/13/2011 | CN101590998B Method for preparing capillary electrophoresis chip |
| 04/13/2011 | CN101086956B Method for fabricating semiconductor device |
| 04/13/2011 | CN101023508B Improved method and apparatus for the etching of microstructures |
| 04/12/2011 | US7923278 Integrated getter area for wafer level encapsulated microelectromechanical systems |
| 04/12/2011 | US7923194 Sacrificial compositions and methods of fabricating a structure using sacrificial compositions |
| 04/12/2011 | CA2485749C Device for the actively-controlled and localised deposition of at least one biological solution |
| 04/08/2011 | CA2681897A1 Microfluidic device, composition and method of forming |
| 04/07/2011 | WO2010054244A4 Method of using a plurality of smaller mems devices to replace a larger mems device |
| 04/07/2011 | WO2010052682A3 Mems with poly-silicon cap layer |
| 04/07/2011 | DE102009048384A1 Miniaturisierte Online-Spurenanalytik Miniaturized on-line trace analysis |
| 04/07/2011 | DE102009047922A1 Gitterstruktur für die Oberflächenplasmonenresonanzspektroskopie Grid structure for surface plasmon resonance spectroscopy |
| 04/07/2011 | DE102009045391A1 Mikromechanische Struktur und Verfahren zur Herstellung einer mikromechanischen Struktur Micromechanical structure and method for making a micromechanical structure |
| 04/07/2011 | DE102009045385A1 Method for closing trench of e.g. microelectronic-electromechanical system component, involves applying lattice on micromechanical component over trench to be formed, and closing openings of lattice by separating filling layer on lattice |
| 04/07/2011 | DE102009045270A1 Method for separating microelectronic or micromechanical components i.e. chips, involves producing separating trench in output component, and expanding film for breaking output component along separating trench |
| 04/07/2011 | DE102009045158A1 Sensoranordnung und Verfahren zur Herstellung einer Sensoranordnung Sensor arrangement and method of manufacturing a sensor arrangement |
| 04/07/2011 | DE102009044115A1 Mikrostrukturierter Formkörper mit perforierten Teilen und Verfahren zu dessen Herstellung Microstructured molding with perforated components and process for its preparation |
| 04/07/2011 | DE102009044113A1 Teilweise perforierter mikrostrukturierter Formkörper und Verfahren zu dessen Herstellung Partially perforated microstructured molding and process for its preparation |
| 04/07/2011 | DE102009044112A1 Mikrostrukturiertes Verbundbauteil sowie Verfahren und Vorrichtung zu dessen Herstellung Microstructured composite component and method and apparatus for its production |
| 04/07/2011 | DE102009043412A1 Three-dimensional microstructure-integrated connection element e.g. plug, for use in macroscopic field, has columns provided with column-material and diameter of preset values, and gap arranged between columns and exhibiting column distance |
| 04/06/2011 | EP2306542A1 Method of manufacturing localised patterns |
| 04/06/2011 | EP2306498A1 Method for manufacturing multistep substrate |
| 04/06/2011 | EP2303769A2 Encapsulation, mems and method of selective encapsulation |
| 04/06/2011 | EP2197781B1 Composite comprising at least two semiconductor substrates and production method |
| 04/06/2011 | CN102007559A Tunable capacitor and switch using mems with phase change material |
| 04/06/2011 | CN102007066A Patch production |
| 04/06/2011 | CN102005403A Wafer bearing device |
| 04/06/2011 | CN102005330A Micro-inertia switch chip and preparation method thereof |
| 04/06/2011 | CN102004137A Micro gas-phase chromatographic column with ultrahigh depth-to-width ratio and MEMS machining method thereof |
| 04/06/2011 | CN102001618A Masking method for deep-etching multi-layer silicon structure by dry method |
| 04/06/2011 | CN102001617A Displacement loading device and method for flexible electronic device |
| 04/06/2011 | CN102001616A Method of fabricating and encapsulating mems devices |
| 04/06/2011 | CN102001615A Method for preparing high polymer nanofluidic chip |
| 04/06/2011 | CN102001614A Method and system for MEMS devices |
| 04/06/2011 | CN102001613A Microelectronic device and manufacturing method thereof, and micro electromechanical packaging structure and packaging method thereof |
| 04/06/2011 | CN102000912A Laser micro/nano processing system and method |
| 04/06/2011 | CN101444713B Thermally efficient micromachined device |
| 04/06/2011 | CN101233072B A method of processing substrates |
| 04/05/2011 | US7919345 Method of fabricating micromechanical components with free-standing microstructures or membranes |
| 03/31/2011 | WO2011038158A2 Methods, compositions, systems and apparatus for molecular array fabrication |
| 03/31/2011 | WO2011037435A2 Composition for forming a pattern for a nano-/microfluidic channel, and apparatus for forming a pattern using same |
| 03/31/2011 | WO2011036568A2 Polymer matrix formed by polymeric walls alternated with empty channels and realization method |
| 03/31/2011 | WO2011036496A1 Improved selectivity in a xenon difluoride etch process |
| 03/31/2011 | US20110073560 Microneedle Structure And Production Method Therefor |
| 03/31/2011 | DE102005002967B4 Verfahren zum Herstellen eines Bauelementes mit einem beweglichen Abschnitt A method for manufacturing a component having a movable portion |
| 03/30/2011 | EP2302028A1 Sequencer |
| 03/30/2011 | EP2300356A2 Method for producing a micromechanical membrane structure with access from the rear of the substrate |
| 03/30/2011 | EP2300165A1 Method of fabricating microfluidic systems |
| 03/30/2011 | CN101999162A Methods for formation of substrate elements |
| 03/30/2011 | CN101998930A Method of sealing a cavity |
| 03/30/2011 | CN101997510A Manufacturing method of wafer level encapsulating structure for through-hole vibrator device |
| 03/30/2011 | CN101997187A Micro electro mechanical system plug and socket connectors, manufacturing method thereof and connector assembly |
| 03/30/2011 | CN101995295A Non-refrigerating infrared focal plane array as well as preparation method and application thereof |
| 03/30/2011 | CN101993034A Method for hermetically sealing high-cleanliness MEMS device |
| 03/30/2011 | CN101993033A Micro electro mechanical system structure and manufacturing method |
| 03/30/2011 | CN101993032A Method for manufacturing microstructural film pattern and TFT-LCD array substrate |
| 03/30/2011 | CN101993031A Protection structure and semiconductor structure of contact pad |
| 03/30/2011 | CN101993030A Micro movable device and method for manufacturing the same |
| 03/30/2011 | CN101205054B Minitype metal nickel mould producing method |
| 03/29/2011 | US7915539 Electric part |
| 03/24/2011 | WO2011035185A2 A microfluidic device and uses thereof |
| 03/24/2011 | WO2011033080A1 Magnetic microparticle and method for making such a microparticle |
| 03/24/2011 | WO2010008759A3 Apparatus, method and computer-readable medium for testing a panel of interferometric modulators |
| 03/24/2011 | US20110070675 Method for manufacturing micromechanical components |
| 03/24/2011 | DE202010013706U1 Einrichtung zur Nivellierung Means for leveling |
| 03/24/2011 | DE102009041324A1 Method for manufacturing microstructure for organic LED (OLED) for e.g. LCD, involves structuring materials deposited on base material to transfer microstructure on base material |
| 03/23/2011 | EP2299256A2 Microfabricated crossflow devices and methods |
| 03/23/2011 | EP2298448A2 Microfluidic large scale integration |
| 03/23/2011 | EP2297026A2 Low temperature amorphous silicon sacrificial layer for controlled adhesion in mems devices |
| 03/23/2011 | EP2297025A2 Mems devices |
| 03/23/2011 | EP1814817B1 Method of etching using a sacrificial substrate |
| 03/23/2011 | EP1279071B1 Multi depth substrate fabrication processes |
| 03/23/2011 | CN101988988A Light deflector, method of manufacturing light deflector, and image display device |
| 03/23/2011 | CN101987720A Method of fabricating integrated semiconductor device and structure thereof |
| 03/23/2011 | CN101987719A Sensing element structure and manufacturing method |
| 03/23/2011 | CN101576569B Vacuum micro-electronics acceleration transducer |
| 03/23/2011 | CN101248507B Selection of wavelength for end point in a time division multiplexed process |
| 03/22/2011 | US7910042 Capillary imprinting technique |
| 03/17/2011 | WO2011031432A2 Layered sintered microfluidic devices with controlled compression during sintering and associated methods |
| 03/17/2011 | WO2011030060A2 Method for preparing a functional structured surface and surface obtained by said method |
| 03/17/2011 | DE102004058103B4 Einrichtung zur Spalteinstellung Means for gap adjustment |
| 03/16/2011 | CN101985348A Micron-scale grid structure made of monocrystalline silicon material and manufacturing method thereof |
| 03/16/2011 | CN101666646B Inclined double-end tuning-fork type silica micromechanical gyroscope and making method thereof |
| 03/16/2011 | CN101538003B Micromechanical transformer and manufacturing method thereof |
| 03/16/2011 | CN101276807B Semiconductor device and method of manufacturing the same |
| 03/16/2011 | CN101126898B Method for shrinking pi phase migration lithographic feature size using metal layer |