| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 07/13/2011 | CN102124415A Gearing system for a timepiece |
| 07/13/2011 | CN102122934A Piezo-resistive MEMS resonator |
| 07/13/2011 | CN102121859A Micro piezoresistive device for measuring wall shear stress and manufacturing method thereof |
| 07/13/2011 | CN102120562A Auxiliary pressurizing device for chip bonding |
| 07/13/2011 | CN102120561A Method for forming wafer through hole |
| 07/13/2011 | CN102120560A Cutting method for micro-electro-mechanical wafer |
| 07/13/2011 | CN101339202B Semiconductor device and manufacturing method of the same |
| 07/12/2011 | CA2389314C Methods and apparatus for the electronic, homogeneous assembly and fabrication of devices |
| 07/07/2011 | WO2011081045A2 Vibrating mirror element and manufacturing method for same |
| 07/07/2011 | WO2011080883A1 Electro-mechanical converter, spatial optical modulator, exposure device, and methods for manufacturing them |
| 07/07/2011 | WO2011080409A2 Process for fabricating an electronic component combining an electromechanical system and an electronic circuit |
| 07/07/2011 | WO2011079826A1 A tri wavelength diffraction modulator and a method for modulation |
| 07/07/2011 | US20110165718 Integrated getter area for wafer level encapsulated microelectromechanical systems |
| 07/07/2011 | DE102010064381A1 Drucksensor und Verfahren Pressure sensor and method |
| 07/07/2011 | DE102010000666A1 Bauelement mit einer mikromechanischen Mikrofonstruktur und Verfahren zu dessen Herstellung Component having a micromechanical microphone structure and process for its preparation |
| 07/06/2011 | EP2341030A2 Microelectromechanical system device and method of manufacturing the microelectromechanical system device |
| 07/06/2011 | EP2340287A2 Moulded product, method for the production thereof and use of the same |
| 07/06/2011 | CN1962409B Manufacturing method of microstructure and microelectromechanical system |
| 07/06/2011 | CN1657401B Micromachine semiconductor element and manufacturing method thereof |
| 07/06/2011 | CN102119118A Method for producing a micromechanical component, and micromechanical component |
| 07/06/2011 | CN102119056A Method of fabricating microfluidic systems |
| 07/06/2011 | CN102117946A Radio frequency micro electro mechanical system switch with spring plate contact and manufacturing method thereof |
| 07/06/2011 | CN102115025A Method for preparing polystyrene micro-sphere micro-array by ultrasonic focusing micro-jet process |
| 07/06/2011 | CN102115024A System and method for releasing micro-electromechanical system (MEMS) structure by etching silicon sacrificial layer |
| 07/06/2011 | CN102115023A Fixture structure capable of realizing front face protection and wet chemical etching on rear face of MEMS (micro-electromechanical system) chip |
| 07/06/2011 | CN101481081B Preparation of composite structure super-hydrophobic film |
| 07/06/2011 | CN101349560B Horizontal attitude sensitive chip and manufacturing method thereof, horizontal attitude sensor |
| 07/06/2011 | CN101332971B Passing type microwave power detector based on microelectronic mechanical cantilever beam and manufacturing method |
| 07/06/2011 | CN101126896B Super resolution lithography method based on PDMS template and silver board material |
| 07/05/2011 | US7973373 Microminiature moving device |
| 07/05/2011 | CA2726409A1 Counter-balanced mems mirror with hidden hinge |
| 06/30/2011 | WO2011077089A1 Production of functionalised substrate |
| 06/30/2011 | WO2011076369A2 Method for the production of conical nanostructures on substrate surfaces |
| 06/30/2011 | WO2010139034A4 Method of fabricating mems devices with electrical components in their sidewalls |
| 06/30/2011 | DE102009056712A1 LED for illumination of rooms, has electrical connection elements provided on ends of nano-columns, where contact material of electrical connection elements is applied only at ends of nano-columns and not applied between nano-columns |
| 06/29/2011 | EP2338171A1 Method for making via interconnection |
| 06/29/2011 | EP1337458B1 Surface-micromachined absolute pressure sensor and a method for manufacturing thereof |
| 06/29/2011 | CN1824460B Method for determining the position of a milling tool and a machining head designed for carrying out the method |
| 06/29/2011 | CN102112390A Method for capping mems wafer and mems wafer |
| 06/29/2011 | CN102110585A Method for manufacturing metal layer |
| 06/29/2011 | CN102109402A 表面摩擦剪切应力传感器 Surface friction shear stress sensor |
| 06/29/2011 | CN102107853A Etching device of micro-nano ferroelectric domain structure based on atomic force microscope acoustic microscopy system |
| 06/29/2011 | CN102107850A Method for preparing nuclear-shell-structured rutile monocrystal titanium dioxide nanowire array with surface-cladding carbon layer |
| 06/29/2011 | CN102107849A Encapsulation of microelectromechanical sensing device |
| 06/29/2011 | CN102107848A Method of manufacturing suspension radio frequency switch |
| 06/29/2011 | CN102107847A Method for preparing three-dimensional micro-nano device |
| 06/29/2011 | CN102107845A Micron sensing element, and preparation method and application thereof |
| 06/29/2011 | CN101723309B Preparation method of hot micro-actuator based on working in air and liquid |
| 06/29/2011 | CN101475136B Method for manufacturing electrostatic repulsion force driven MEMS distorting lens |
| 06/29/2011 | CN101126897B Continuous surface micro-structure forming method based on microlens array |
| 06/23/2011 | WO2011073013A1 Methods of directed self-assembly with 193 - nm immersion lithography and layered structures formed therefrom |
| 06/23/2011 | US20110151499 Apparatus and methods for conducting assays and high throughput screening |
| 06/23/2011 | US20110151498 Apparatus and methods for conducting assays and high throughput screening |
| 06/22/2011 | DE102008001005B4 Verfahren zur Herstellung eines Schichtverbundes mit epitaktisch gewachsenen Schichten aus einem magnetischen Formgedächtnis-Material und Schichtverbund mit epitaktischen Schichten aus einem magnetischen Formgedächtnis-Material sowie dessen Verwendung A method for producing a layered composite with epitaxially grown layers of a magnetic shape memory material and layer composite with epitaxial layers of a magnetic shape memory material and its use |
| 06/22/2011 | CN102105390A Encapsulation, MEMS and method of selective encapsulation |
| 06/22/2011 | CN102105389A MEMS devices |
| 06/22/2011 | CN102103106A Manufacturing method of three-leg catalytic micro gas sensor with temperature modulation |
| 06/22/2011 | CN102103058A Columnar electrode array structure capable of realizing stress release of sensitive biochemical films and preparation method thereof |
| 06/22/2011 | CN101700868B Preparation method of ultra-long stibium-doped zinc oxide micrometer line |
| 06/22/2011 | CN101249935B Thermal isolation micro-bridge structure and processing method thereof |
| 06/21/2011 | US7964107 Substrate with trenches; depositing block polymer; annealing; evaporation of solvent |
| 06/16/2011 | WO2011071685A2 Micro electromechanical systems (mems) having a gap stop and method therefor |
| 06/16/2011 | US20110143150 Method of room temperature covalent bonding |
| 06/16/2011 | DE102009056894A1 Method for producing microsensor that is utilized for measuring storage of unwanted materials during production of fiber reinforced plastic component, involves separating individual sensor structures from each other |
| 06/16/2011 | DE102009005972B4 Verfahren zum Erzeugen eines periodischen Musters A method for generating a periodic pattern |
| 06/15/2011 | EP2332882A1 Method for forming a three-dimensionally controlled surface coating inside a cavity |
| 06/15/2011 | EP2331455A2 Contact arrangement for establishing a spaced, electrically conducting connection between microstructured components |
| 06/15/2011 | EP2331454A1 Process of fabricating microfluidic device chips and chips formed thereby |
| 06/15/2011 | EP2032501B1 Nano-microphone or pressure sensor |
| 06/15/2011 | CN201864558U Photosensitive mixed polymer photoconductive film control chip based on poly-3-hexylthiophene (P3HT) and C60 derivate [6, 6]-phenyl-C61-butyric acid methyl ester |
| 06/15/2011 | CN201864557U Degassing and gas-filling equipment for low-moisture-content packaging |
| 06/15/2011 | CN1926263B Structure and process for producing structure |
| 06/15/2011 | CN102099282A Method for packaging semiconductors at a wafer level |
| 06/15/2011 | CN102097588A Method for preparing molecular junction by polydimethylsiloxane stencil printing |
| 06/15/2011 | CN102097458A Methods and devices for fabricating and assembling printable semiconductor elements |
| 06/15/2011 | CN102096156A Online light polarization controller based on optical fiber end face metal wire grating and manufacturing method thereof |
| 06/15/2011 | CN102095766A Miniature integrated temperature control type CO2 gas sensor and manufacturing method thereof |
| 06/15/2011 | CN102092675A Method for preparing self-masking uni-junction multiport three-dimensional nano structure |
| 06/15/2011 | CN102092674A Method for preparing micro-electrode array |
| 06/15/2011 | CN102092673A Method for forming slowly changed side wall of micro-electro-mechanical system (MEMS) |
| 06/15/2011 | CN102092672A Method for manufacturing electric connection structure of micro-electro-mechanical system |
| 06/15/2011 | CN102092671A Method for manufacturing planarized sacrificial layer and MEMS (micro-electromechanical system) microbridge structure |
| 06/15/2011 | CN102092670A Carbon nano-tube composite structure and preparation method thereof |
| 06/15/2011 | CN102092669A Microfluidic chip packaging method by combining surface treatment and hot pressing |
| 06/15/2011 | CN101534103B Manufacture method of radio frequency filter capable of single chip integration |
| 06/15/2011 | CN101481084B Micro-inertial sensor with variable pitch capacitor |
| 06/15/2011 | CN101329361B Minitype silicon accelerometer having functions of measuring pressure intensity and temperature variation and its machining method |
| 06/15/2011 | CN101177234B Electronic device and method for manufacturing thereof |
| 06/09/2011 | WO2011067679A2 Electromechanical systems, waveguides and methods of production |
| 06/09/2011 | US20110136932 Polymers, Methods Of Use Thereof, And Methods Of Decomposition Thereof |
| 06/09/2011 | US20110135881 Method for transferring nanostructures into a substrate |
| 06/09/2011 | DE19819456B4 Verfahren zur Herstellung eines mikromechanischen Bauelements A process for producing a micromechanical component |
| 06/09/2011 | DE10223729B4 Verfahren zur Herstellung einer Halbleitervorrichtung, die Imstande ist eine dynamische Größe zu erfassen A method of manufacturing a semiconductor device which is capable of detecting a dynamic amount |
| 06/09/2011 | DE102009047628A1 Micromechanical component i.e. capacitive microphone, has perforated membrane connected with sacrificial layer base by auxiliary layer, where auxiliary layer has same material characteristics as function layer |
| 06/09/2011 | DE102009047599A1 Elektromechanischer Mikroschalter zur Schaltung eines elektrischen Signals, mikroelektromechanisches System, integrierte Schaltung und Verfahren zur Herstellung einer integrierten Schaltung The micro electromechanical switch for switching an electrical signal, microelectromechanical system, integrated circuit and methods for making an integrated circuit |
| 06/09/2011 | DE102009047592A1 Silicon sub-carrier manufacturing method for installing e.g. electronic device, on substrate, involves applying electrically conductive material on insulation layer to form through-connection from one side to another side of substrate |
| 06/09/2011 | DE102009043414A1 Dreidimensionale Mikro-Struktur, Anordnung mit mindestens zwei dreidimensionalen Mikro-Strukturen, Verfahren zum Herstellen der Mikro-Struktur und Verwendung der Mikro-Struktur Three-dimensional micro-structure arrangement with at least two three-dimensional micro-structures, methods of making the micro-structure and use of the micro-structure |
| 06/08/2011 | CN102087382A Fabrication method of isotropic photonic crystal with full-space forbidden band structure |
| 06/08/2011 | CN102086021A Method for preparing micro-nano-scale-span integrated channel |
| 06/08/2011 | CN102086020A Method for manufacturing silicon sub-carrier |