| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 06/08/2011 | CN102086019A Method for manufacturing monolithic polysilicon cantilever structure |
| 06/08/2011 | CN102086018A Preparation method for cone-shaped micro-pool array stereo-structure electrode |
| 06/08/2011 | CN102086016A MEMS (micro-electro-mechanical system) micro-bridge structure and manufacturing method thereof |
| 06/08/2011 | CN101487747B Absolute pressure transducer chip based on surface micro-machining and its production method |
| 06/07/2011 | CA2407973C Biological identification system with integrated sensor chip |
| 06/03/2011 | WO2011064716A2 Method for producing at least one cavity in a microelectronic and/or micromechanical structure and a sensor or actuator comprising such a cavity |
| 06/03/2011 | WO2010089261A3 Sensor module and method for producing sensor modules |
| 06/01/2011 | EP2327659A1 Method of manufacturing a semiconductor device and semiconductor devices resulting therefrom |
| 06/01/2011 | EP2327658A1 Method for manufacturing microelectronic devices and devices according to such method |
| 06/01/2011 | EP2326995A1 Gearing system for a timepiece |
| 06/01/2011 | EP2326592A2 Encapsulation, mems and encapsulation method |
| 06/01/2011 | EP2326450A1 Machine and method for machining a part by micro-electrical discharge machining |
| 06/01/2011 | EP1187789B1 Precisely defined microelectromechanical structures and associated fabrication methods |
| 06/01/2011 | DE102010062149A1 MEMS-Mikrophonhäusung und MEMS-Mikrophonmodul MEMS and MEMS microphone module Mikrophonhäusung |
| 06/01/2011 | DE102010048468A1 Dynamisches Projektionsverfahren zur Mikrofachwerkschaumherstellung Dynamic projection method microtruss foam production |
| 06/01/2011 | DE102009056052A1 Anordnung mit einem Träger und einer Schicht Arrangement comprising a support and a layer |
| 06/01/2011 | DE10161047B4 Verfahren zur Herstellung eines Sensors mit Membranstruktur A method for producing a sensor with membrane structure |
| 06/01/2011 | CN1926918B Electret condenser |
| 06/01/2011 | CN102084467A Process for fabricating nanowire arrays |
| 06/01/2011 | CN102082105A Thermal wind sensor based on anodic bonding technology and preparation method thereof |
| 06/01/2011 | CN102081335A Liquid patterned device for photoelectric synergic induced anisotropic infiltration and manufacturing method |
| 06/01/2011 | CN102081194A Method for realizing micronano all-optical color |
| 06/01/2011 | CN102079505A Ordered structure array of two-dimensional hollow balls and preparing method thereof |
| 06/01/2011 | CN102079504A Method for manufacturing high-density silicon-based nano-holes |
| 06/01/2011 | CN102079503A Etching method of silicon substrate forming MEMS (Micro Electro Mechanical System) device |
| 06/01/2011 | CN102079502A MEMS (micro electro mechanical system) device and wafer-level vacuum packaging method thereof |
| 06/01/2011 | CN102079501A Optical detecting method, optical micro-electromechanical detector and manufacturing method thereof |
| 06/01/2011 | CN102079500A Micro electro mechanical system (MEMS) chip and preparing method thereof |
| 06/01/2011 | CN102079499A Cantilever trace detection sensor and preparation method thereof |
| 06/01/2011 | CN102079498A Flexible electrothermal drive micro-gripper and manufacturing process method |
| 06/01/2011 | CN101700869B Method for preparing flexible substrate biological microelectrode array based on substrate graph |
| 06/01/2011 | CN101613075B Method for constructing virtual channel for restricting liquid drop movement |
| 06/01/2011 | CN101434375B Method for manufacturing semiconductor micro electromechanical structure |
| 06/01/2011 | CN101417784B Method for preparing spin microscopic micro-cantilever detector method based on electron jet plasma etching |
| 06/01/2011 | CN101402446B Method for manufacturing drag reduction surface |
| 06/01/2011 | CN101386403B Micro optical fibre voltage sensor based on ring micro-cavity |
| 06/01/2011 | CN101208260B Method for fabricating micromachine component of resin |
| 06/01/2011 | CN101172185B Process for producing implantation type two-sided flexible tiny array electrode |
| 05/26/2011 | WO2011011333A3 Nanomolding micron and nano scale features |
| 05/26/2011 | DE102010044196A1 Mikrobearbeitete Wandler und Verfahren der Herstellung The micromachined transducers and method of manufacture |
| 05/26/2011 | DE102009044645A1 Verfahren zur Herstellung wenigstens einer Kavität in einer mikroelektronischen und/oder mikromechanischen Struktur und Sensor oder Aktor mit einer solchen Kavität A process for producing at least one cavity in a microelectronic and / or micromechanical structure and with a sensor or actuator such cavity |
| 05/25/2011 | EP2325135A1 Microscopic structure packaging method and device with packaged microscopic structure |
| 05/25/2011 | CN102076602A A method for packaging a display device and the device obtained thereof |
| 05/25/2011 | CN102072967A Gold-gold bonding process-based thermal type wind speed and direction sensor and preparation method thereof |
| 05/25/2011 | CN102070120A Preparation method for high-density interposer for microelectronic system-in-package |
| 05/25/2011 | CN102070119A Bending and forming method of thin silicon wafer |
| 05/25/2011 | CN102070118A Microheating plate for metal oxide semiconductor nano-film gas sensor |
| 05/19/2011 | WO2011060188A2 System and method for manufacturing a display device having an electrically connected front plate and back plate |
| 05/19/2011 | WO2011058140A2 Method for producing at least one deformable membrane micropump and deformable membrane micropump |
| 05/19/2011 | WO2011036568A3 Polymer matrix formed by polymeric walls alternated with empty channels and realization method |
| 05/19/2011 | WO2011031432A3 Layered sintered microfluidic devices with controlled compression during sintering and associated methods |
| 05/19/2011 | WO2011028484A3 System with recessed sensing or processing elements |
| 05/19/2011 | WO2010145907A3 Methods and systems for fabrication of mems cmos devices |
| 05/18/2011 | EP2321216A2 Method and device for encapsulating microstructures |
| 05/18/2011 | EP2217526B1 Method for producing micromechanical structures having a protruding lateral wall progression or an adjustable angle of inclination |
| 05/18/2011 | EP1527214B1 Method for producing metal or ceramic microcomponents |
| 05/18/2011 | CN1944236B Semiconductor device, method for manufacturing the same and method for inspecting the same |
| 05/18/2011 | CN102067289A Method for manufacturing multistep substrate |
| 05/18/2011 | CN102066873A Method and system for forming an electronic assembly having inertial sensors mounted thereto |
| 05/18/2011 | CN102065362A MEMS microphone package and packaging method |
| 05/18/2011 | CN102062662A Monolithic integrated SiC MEMS (Micro-Electro-Mechanical Systems) pressure sensor and production method thereof |
| 05/18/2011 | CN102062524A Automatic drying equipment for MEMS (micro electro mechanical system) device wafer |
| 05/18/2011 | CN102060263A Preparation of ZnO/ ZnS/ Ag nano-rod array in microchannel |
| 05/18/2011 | CN102060262A Method for manufacturing micro-nano fluid control system by using low-pressure bonding technology |
| 05/18/2011 | CN102060261A Method for enhancing lateral stiffness of multi-walled nanotube device by irradiation of electron beam |
| 05/18/2011 | CN102060260A Micromechanical structure device production method taking tin as sacrifice layer |
| 05/18/2011 | CN101261964B Functional device package |
| 05/18/2011 | CN101077766B Electromechanical element and electronic circuit device, and method for manufacturing the same |
| 05/17/2011 | USRE42359 Dynamical quantity sensor |
| 05/17/2011 | US7943081 Step and repeat imprint lithography processes |
| 05/17/2011 | CA2539261C Implantable wireless sensor |
| 05/12/2011 | WO2011030060A3 Method for preparing a functional structured surface and surface obtained by said method |
| 05/12/2011 | WO2011028359A3 Mems device with stress isolation and method of fabrication |
| 05/12/2011 | WO2010139034A3 Method of fabricating mems devices with electrical components in their sidewalls |
| 05/12/2011 | WO2010133422A3 Directed self-assembly of block copolymers using segmented prepatterns |
| 05/12/2011 | DE102009052234A1 Auf Waferebene herstellbarer Chip für Flüssigchromatographie sowie Verfahren für seine Herstellung Producible at the wafer level chip for liquid chromatography, and methods for its preparation |
| 05/12/2011 | DE102009046581A1 Herstellungsverfahren für eine poröse Mikronadelanordnung und entsprechende poröse Mikronadelanordnung und entsprechender Substratverbund Manufacturing method of a porous microneedle array and corresponding porous microneedle array and corresponding composite substrate |
| 05/12/2011 | DE102009046461A1 Capped micro-electromechanical component e.g. inertia sensor, manufacturing method, involves coating functional layer with non-adhesive coating, removing non-adhesive coating from germanium or silicon germanium coating, and applying cap |
| 05/12/2011 | DE102009037011B3 Molecular lithography process for nanopattern generation in a substrate, comprises producing a mask structure with a self-styled organization, from single unbranched macromolecules with negative load |
| 05/12/2011 | DE102009018849A1 Master structure for embossing and/or printing foils in e.g. printing technology for structured application of liquid, has monocrystalline substrate area comprising thickness such that area is formed with curvature radius |
| 05/11/2011 | EP2319558A2 Mems device for delivery of therapeutic agents |
| 05/11/2011 | EP2318305A2 Method for transferring nanostructures into a substrate |
| 05/11/2011 | EP2318304A1 Switches for microfluidic systems |
| 05/11/2011 | EP2084734B1 Plasma etching method for producing positive etching profiles in silicon substrates |
| 05/11/2011 | EP1618599B1 Method of making a nanogap for variable capacitive elements |
| 05/11/2011 | CN102056839A Method for producing a micromechanical membrane structure with access from the rear of the substrate |
| 05/11/2011 | CN102056063A Mems microphone and method for manufacturing same |
| 05/11/2011 | CN102053489A Mercaptan-alkene based high-precision ultraviolet imprinting method of continuous embossment micro optical elements |
| 05/11/2011 | CN102050422A Method for arranging nano wires by combining fiber aid and contact impression |
| 05/11/2011 | CN102050421A Manufacturing method for a porous microneedle array and corresponding porous microneedle array and corresponding substrate composite |
| 05/11/2011 | CN102050420A Method for manufacturing optical panel with grooved surface |
| 05/11/2011 | CN102050419A Magnetic double nano-structure array material and preparation method thereof |
| 05/11/2011 | CN102050418A Three-dimensional integrated structure and production methods thereof |
| 05/11/2011 | CN102050417A Device with microstructure and method of forming such a device |
| 05/11/2011 | CN101586985B Monolithic integrated non-refrigerated infrared/ultraviolet double-color detector |
| 05/11/2011 | CN101531334B Magnetic drive micro-inertial sensor for increasing detection capacitance and preparation method |
| 05/11/2011 | CN101414058B Device on a transparent substrate and micro mechanical-electric system device |
| 05/11/2011 | CN101118819B MEMS switch and manufacturing method thereof |
| 05/05/2011 | WO2011051718A2 Micro-channel structure method and apparatus |
| 05/05/2011 | WO2011051088A1 Pressure sensor, especially differential pressure sensor, and method for preparing a membrane bed for such a sensor |