| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 08/17/2011 | CN101738280B Mems pressure sensor and manufacturing method thereof |
| 08/16/2011 | US7998331 Method for electrochemical fabrication |
| 08/11/2011 | WO2011095386A2 Production method for a porous micro needle assembly having rear face connection and corresponding porous micro needle assembly |
| 08/11/2011 | WO2011046986A3 Method and apparatus for forming mems device |
| 08/11/2011 | DE10231729B4 Bauelement mit einer oberflächenmikromechanischen Struktur Component having a surface-micromechanical structure |
| 08/11/2011 | DE10223359B4 Mikromechanisches Bauteil und Verfahren zur Herstellung einer Anti-Haftschicht auf einem mikromechanischen Bauteil Micromechanical element and method for producing an anti-adhesive layer on a micromechanical component |
| 08/11/2011 | DE10219254B4 Mikromechanisches Bauelement mit einem Isolationsbereich und entsprechendes Herstellungsverfahren Micromechanical component with an isolation region and corresponding method of production |
| 08/11/2011 | DE10213579B4 Deformierbare Spiegelvorrichtung Deformable mirror device |
| 08/11/2011 | DE102011010112A1 Struktur und Verfahren zur Formgebung eines Grabenbodens in Silizium nach der Oxidation Structure and method for forming a grave soil in silicon after oxidation |
| 08/11/2011 | DE102010001759A1 Mikromechanisches System und Verfahren zum Herstellen eines mikromechanischen Systems A micromechanical system and method for producing a micro-mechanical system |
| 08/10/2011 | CN201923843U 一种制备二氧化钛纳米管阵列的装置 A titania nanotube arrays prepared device |
| 08/10/2011 | CN1832899B Optical microelectromechanical structure |
| 08/10/2011 | CN102149628A Switches for microfluidic systems |
| 08/10/2011 | CN102147569A Processing method of micro-component in multi-layer structure and solidified SU-8 photoresist sheet |
| 08/10/2011 | CN102147414A Nano probe based method for detecting trace proteins by using microfluidic chip |
| 08/10/2011 | CN102145875A Preparation method of polydimethylsiloxane micro-nanofluidic chip |
| 08/10/2011 | CN102145874A Micro-electro-mechanical device and manufacturing method thereof |
| 08/10/2011 | CN101692016B Atmospheric pressure sensor compatible with CMOS process and preparation process thereof |
| 08/10/2011 | CN101613076B Method for preparing and duplicating three-dimensional micro-nano structure stamps in batches |
| 08/09/2011 | US7993905 Device containing cytophilic islands that adhere cells separated by cytophobic regions |
| 08/09/2011 | US7992309 Micromachined cutting blade formed from {211}-oriented silicon |
| 08/04/2011 | WO2011094508A1 Patterned superhydrophobic surfaces to reduce ice formation, adhesion, and accretion |
| 08/04/2011 | WO2011094486A2 Assembly of flat on structured glass layers |
| 08/04/2011 | WO2011093258A1 Dry etching method |
| 08/04/2011 | WO2011092137A2 Miniaturized electrical component comprising an mems and an asic and production method |
| 08/04/2011 | DE102010006132A1 Miniaturisiertes elektrisches Bauelement mit einem MEMS und einem ASIC Miniaturized electrical component with a MEMS and an ASIC |
| 08/04/2011 | DE102010001572A1 Method for manufacturing through-contact in plated through structured component that is utilized as e.g. micro-electro mechanical system sensor element, involves separating conductive sheet in trench via physical vapor deposition of film |
| 08/04/2011 | DE102010001504A1 Method for manufacturing e.g. microfilter unit, that is utilized for filtering e.g. medium in food product application, involves separating filter layers by etching processes such as wet-chemical or dry-chemical etching processes |
| 08/03/2011 | EP2349917A2 Magnetic patterning method and system |
| 08/03/2011 | CN102143906A MEMS device and method for manufacturing the same |
| 08/03/2011 | CN102142482A Method for preparing Schottky contact ZnO nano array ultraviolet detection device |
| 08/03/2011 | CN102141679A Method and device for packaging a substrate |
| 08/03/2011 | CN102141413A Method for realizing heterodyne measurement under all-fiber condition |
| 08/03/2011 | CN102139856A Roller jig |
| 08/03/2011 | CN102139855A Manufacturing method of micro-nano cantilever beam structure for hypersensitive detection |
| 08/03/2011 | CN102139854A MEMS (micro electro mechanical system) structure and manufacturing method thereof |
| 08/03/2011 | CN102139853A Biotinylated PDMS (polydimethylsiloxane) membrane microfluidic chip and processing method thereof |
| 08/03/2011 | CN101723308B MEMS wafer level vacuum packaging process |
| 08/03/2011 | CN101700867B Manufacture method of MEMS packaged glass microcavity with optical window |
| 08/02/2011 | US7988902 Interconnecting microfluidic package and fabrication method |
| 07/28/2011 | WO2011028484A4 System with recessed sensing or processing elements |
| 07/28/2011 | US20110180410 Electrochemically Fabricated Structures Having Dielectric or Active Bases and Methods of and Apparatus for Producing Such Structures |
| 07/28/2011 | DE19932541B4 Verfahren zur Herstellung einer Membran A method for producing a membrane |
| 07/28/2011 | DE102010001077A1 Method for manufacturing surface-mountable sensor chip e.g. differential pressure sensor chip, involves mounting sensor chip on film, by providing gel into recess of chip, where recess corresponds to aperture in film |
| 07/27/2011 | EP2347993A2 Method for manufacturing a micromachined device and micromachined device made thereof |
| 07/27/2011 | CN102136484A Indium columns for face-down bonding interconnection of infrared focal plane and preparation method thereof |
| 07/27/2011 | CN102135729A Preparation method of carbon micro-nano integrated structure |
| 07/27/2011 | CN102135438A Temperature control device for micro sensor |
| 07/27/2011 | CN102134054A Method for fabricating MEMS device |
| 07/27/2011 | CN102134053A Manufacturing method of biaxial MEMS (micro-electro-mechanical system) gyroscope |
| 07/27/2011 | CN102134052A MIS capacitor lower piezoresistance structure adopting substrate grid and making method |
| 07/27/2011 | CN101559916B Method for preparing masking microstructure |
| 07/27/2011 | CN101551284B Pressure sensor based on Si-Si direct bonding and manufacturing method thereof |
| 07/27/2011 | CN101468784B Semiconductor miniature suspension structure and method of producing the same |
| 07/27/2011 | CN101204603B Embedded MENS bioelectrode and preparation technology thereof |
| 07/21/2011 | WO2011088217A2 Photostructured magnetic devices and methods for making same |
| 07/21/2011 | WO2011086914A1 Structure manufacturing method and liquid discharge head substrate manufacturing method |
| 07/21/2011 | WO2011086209A1 Method for coating electrodes of an electronic device by means of magnetic trapping, resulting electrode, device including same and use of said device |
| 07/21/2011 | WO2011050111A3 Light-based sealing and device packaging |
| 07/21/2011 | WO2011028504A3 Fabrication of a floating rocker mems device for light modulation |
| 07/21/2011 | DE102011008401A1 Kriechbeständiges Polierkissenfenster Kriechbeständiges polishing pad window |
| 07/21/2011 | DE102010063821A1 Selbstformierende Strukturen für die elektrostatische Extraktion von Pigmenten aus Flüssigtinten zur Markierung Selbstformierende structures for electrostatic extraction of pigments from liquid inks for marking |
| 07/21/2011 | DE102010001023A1 Sensorvorrichtung Sensor device |
| 07/21/2011 | DE102010001021A1 Method for manufacturing e.g. micromechanical acceleration sensor, utilized in motor car fitting area, involves selectively corroding sacrificial layer in relation to functional components for movement of components via trenches |
| 07/21/2011 | DE102010000895A1 Verfahren zum Herstellen und Verschließen eines Grabens eines Halbleiterbauelements A method of manufacturing and closing of a trench of a semiconductor device |
| 07/21/2011 | DE102010000892A1 Verfahren zum Bereitstellen und Verbinden von zwei Kontaktbereichen eines Halbleiterbauelements bzw. einem Substrat, sowie ein Substrat mit zwei solchen verbundenen Kontaktbereichen A method for providing and connecting two contact portions of a semiconductor device or a substrate and a substrate associated with two such contact regions |
| 07/21/2011 | DE102010000888A1 Verfahren zum Ausbilden von Gräben in einem Halbleiterbauelement A method of forming trenches in a semiconductor device |
| 07/21/2011 | DE102008045540B4 Verfahren zur Herstellung eines mikrostrukturierten Films A process for producing a microstructured film |
| 07/21/2011 | DE102008027461B4 Vorrichtung und Verfahren zur mikrostrukturierten Plasmabehandlung Apparatus and method for microstructured plasma treatment |
| 07/20/2011 | EP2344416A2 Method of using a plurality of smaller mems devices to replace a larger mems device |
| 07/20/2011 | EP1746622B1 Method for forming carbonaceous material protrusion and carbonaceous material protrusion |
| 07/20/2011 | CN1944235B Electromagnetic-magnetoelectric type micro mechanical resonant beam structure |
| 07/20/2011 | CN102130026A Wafer-level low-temperature packaging method based on gold-tin alloy bonding |
| 07/20/2011 | CN102128841A Detecting device of terahertz imaging system |
| 07/20/2011 | CN102128685A Micro-mechanical CMOS (complementary metal oxide semiconductor) thermopile infrared temperature sensor |
| 07/20/2011 | CN102126703A Two-dimensional multi-shell hollow sphere ordered structure array and preparation method thereof |
| 07/20/2011 | CN102126702A Phase-change material combining hedgehog VO2 nanometer structure on silicon substrate and manufacturing method |
| 07/20/2011 | CN102126699A Method for making graph with microsize by utilizing atomic beams and nanometer holes |
| 07/20/2011 | CN102126698A Phase-change material used for compounding VO2 hollow sphere structure on silicon wafer and preparation method thereof |
| 07/20/2011 | CN102126697A Encapsulating structure with micro electromechanical component and manufacturing method thereof |
| 07/20/2011 | CN101535171B A sealing structure and a method of manufacturing the same |
| 07/20/2011 | CN101447775B Polycrystalline cubic-phase silicon carbide micro-electro-mechanical system resonant device and preparation method thereof |
| 07/20/2011 | CN101446682B Preparation method of continuous diaphragm type micro deformable mirror based on SOI |
| 07/20/2011 | CN101277897B Method for manufacturing non-volatile microelectromechanical memory unit |
| 07/20/2011 | CN101221911B Packaging micro devices |
| 07/20/2011 | CN101118313B Low temperature fabrication of conductive micro structures |
| 07/19/2011 | US7982296 Methods and devices for fabricating and assembling printable semiconductor elements |
| 07/19/2011 | US7982291 Method for manufacturing a microelectromechanical component, and a microelectromechanical component |
| 07/19/2011 | US7981814 Replication and transfer of microstructures and nanostructures |
| 07/19/2011 | US7981303 Method of manufacturing monocrystalline silicon micromirrors |
| 07/19/2011 | US7981269 Method of electrochemical fabrication |
| 07/14/2011 | WO2011084229A2 Embedded mems sensors and related methods |
| 07/14/2011 | WO2011083160A2 Micro-electromechanical semiconductor component and method for the production thereof |
| 07/14/2011 | DE102010000864A1 Micromechanical component e.g. acceleration sensor, has corrosion protection region for protecting insulation layer regions below strip guard regions against etching during corrosion of sacrificial layer by movement of functional components |
| 07/14/2011 | DE102010000843A1 Glukose-Sensorvorrichtung mit poröser Mikronadelanordnung, entsprechendes Herstellungsverfahren und Glukose-Messverfahren Glucose-sensing device with porous microneedle array, method of manufacture and glucose measurement method |
| 07/14/2011 | DE102005019184B4 Verfahren zum Erzeugen eines Druckkopfs A method for generating a print head |
| 07/13/2011 | EP2343102A1 Method for manufacturing microneedle stamper |
| 07/13/2011 | EP2343101A1 Stamper for microneedle sheet, method for manufacturing the stamper, and method for manufacturing microneedle using the stamper |
| 07/13/2011 | EP2342160A2 Inertial sensor with dual cavity package and method of fabrication |
| 07/13/2011 | EP2010452B1 A method for manufacturing an electronic assembly; an electronic assembly, a cover and a substrate |